公开(公告)号：US08389953B2

公开(公告)日：2013-03-05

申请号：US12931993

申请日：2011-02-15

Applicant: Takashi Ogawa ,  Kenichi Nishinaka ,  Yoshihiro Koyama

Inventor： Takashi Ogawa ,  Kenichi Nishinaka ,  Yoshihiro Koyama

IPC: H01J49/10 ,  H01J37/08 ,  H01J27/02 ,  H01J3/14

CPC classification number: H01J37/08 ,  H01J2237/0451 ,  H01J2237/0458 ,  H01J2237/0807 ,  H01J2237/083 ,  H01J2237/24535 ,  H01J2237/28 ,  H01J2237/31749

Abstract: A focused ion beam apparatus includes an ion gun unit having an emitter tip, a gas supply unit that supplies gas to the tip, and an ion source gas supply source. An extracting electrode ionizes the gas adsorbed onto the surface of the tip and extracts ions by applying a voltage between the extracting electrode and the tip. A cathode electrode accelerates the ions toward a sample. An aperture member has an opening that passes therethrough a part of the ion beam ejected from the ion gun unit, and a lens system focuses the ion beam onto the sample.

Abstract translation: 聚焦离子束装置包括具有发射极尖端的离子枪单元，向尖端供应气体的气体供应单元和离子源气体供应源。 提取电极通过在提取电极和尖端之间施加电压使吸附在尖端表面上的气体电离并提取离子。 阴极将离子加速到样品。 孔部件具有从离子枪单元喷出的离子束的一部分通过的开口，透镜系统将离子束聚焦到样品上。

公开(公告)号：US08362442B2

公开(公告)日：2013-01-29

申请号：US12973984

申请日：2010-12-21

Applicant: Joachim Zach ,  Stephan Uhlemann

Inventor： Joachim Zach ,  Stephan Uhlemann

IPC: H01J37/141

CPC classification number: H01J37/153 ,  H01J2237/1534 ,  H01J2237/28 ,  H01J2237/2802

Abstract: A corrector (10) for an electron microscope is proposed which is less sensitive to fluctuations of the electrical power supply if a stigmatic intermediate image (9) of the axial fundamental rays (xα, yβ) is produced in the quadrupole field (1′) of a first quadrupole element (1) and this quadrupole field (1′) is set such that astigmatic intermediate images (12, 13) of the off-axial fundamental rays (xγ, yδ) are produced in the region of the center of the quadrupole fields (3′, 4′) of a third (3) and fourth multipole element (4) and there also, due to the setting of the quadrupole field (2′) of a second quadrupole element (2), the axial fundamental rays (xα, yβ) of the same section (x, y) as that, in which the intermediate images (12, 13) of the off-axial fundamental rays (xγ, yδ) are located, each exhibit a maximum.

Abstract translation: 提出了一种用于电子显微镜的校正器（10），如果在四极场（1'）中产生轴向基本射线（xα，y＆bgr）的眩目中间图像（9），对于电源的波动较不敏感， ），并且该四极场（1'）被设置为使得在轴向中心的区域中产生离轴基波（xγ，yδ）的像散中间图像（12,13） 第三（3）和第四多极元件（4）的四极场（3'，4'），并且由于第二四极元件（2）的四极场（2'）的设定， 与偏轴基波（xγ，yδ）的中间图像（12,13）相同的部分（x，y）的基波（xα，y＆bgr）各自呈现最大值。

公开(公告)号：US20120241608A1

公开(公告)日：2012-09-27

申请号：US13449392

申请日：2012-04-18

Applicant: Dov Shachal

Inventor： Dov Shachal

IPC: H01J37/28

CPC classification number: H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受真空环境和非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。

公开(公告)号：US08263943B2

公开(公告)日：2012-09-11

申请号：US13144620

申请日：2010-01-08

Applicant: Hiroyasu Shichi ,  Shinichi Matsubara ,  Norihide Saho ,  Noriaki Arai ,  Tohru Ishitani

Inventor： Hiroyasu Shichi ,  Shinichi Matsubara ,  Norihide Saho ,  Noriaki Arai ,  Tohru Ishitani

IPC: H01J49/10 ,  H01J37/28

CPC classification number: H01J37/08 ,  H01J27/26 ,  H01J37/15 ,  H01J2237/0216 ,  H01J2237/0807 ,  H01J2237/28

Abstract: Provided is an ion beam device provided with a gas electric field ionization ion source which can prevent an emitter tip from vibrating in a non-contact manner. The gas electric field ionization ion source is comprised of an emitter tip (21) for generating ions; an emitter base mount (64) for supporting the emitter tip; an ionizing chamber which has an extraction electrode (24) opposed to the emitter tip and which is configured so as to surround the emitter tip (21); and a gas supply tube (25) for supplying gas to the vicinity of the emitter tip. The emitter base mount and a vacuum container magnetically interact with each other.

Abstract translation: 提供了一种具有气体电离电离离子源的离子束装置，其能够防止发射极尖端以非接触的方式振动。 气体电场离子源由用于产生离子的发射极尖端（21）组成; 发射极底座（64），用于支撑发射器尖端; 电离室具有与发射极尖端相对的引出电极（24），其构造为围绕发射极尖端（21）; 以及用于将气体供给到发射极尖端附近的气体供给管（25）。 发射极基座和真空容器彼此磁性相互作用。

公开(公告)号：US08247782B2

公开(公告)日：2012-08-21

申请号：US12745059

申请日：2010-05-27

Applicant: Klaus Edinger ,  Rainer Becker ,  Michael Budach ,  Thorsten Hofmann

Inventor： Klaus Edinger ,  Rainer Becker ,  Michael Budach ,  Thorsten Hofmann

IPC: H01J49/22 ,  G21K5/02

CPC classification number: C23F4/00 ,  H01J37/3056 ,  H01J2237/28 ,  H01J2237/3174 ,  H01L21/76894 ,  H01L22/22 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An apparatus and a method for investigating and/or modifying a sample is disclosed. The apparatus comprises a charged particle source, at least one particle optical element forming a charged particle beam of charged particles emitted by said charged particle source. The apparatus further comprises an objective lens which generates a charged particle probe from said charged particle beam. The objective lens defines a particle optical axis. A first electrostatic deflection element is arranged—in a direction of propagation of charged particles emitted by said charged particle source—downstream of the objective lens. The electrostatic deflection element deflecting the charged particle beam in a direction perpendicular to said charged particle optical axis and has a deflection bandwidth of at least 10 MHz.

Abstract translation: 公开了一种用于调查和/或修改样品的装置和方法。 所述装置包括带电粒子源，至少一个粒子光学元件，形成由所述带电粒子源发射的带电粒子的带电粒子束。 该装置还包括从所述带电粒子束产生带电粒子探针的物镜。 物镜定义了粒子光轴。 第一静电偏转元件布置在由物镜的下游的所述带电粒子源发射的带电粒子的传播方向上。 静电偏转元件使垂直于所述带电粒子光轴的方向偏转带电粒子束并具有至少10MHz的偏转带宽。

公开(公告)号：US20120126697A1

公开(公告)日：2012-05-24

申请号：US13332732

申请日：2011-12-21

Applicant: Artush A. ABGARYAN ,  Eli LEVI

Inventor： Artush A. ABGARYAN ,  Eli LEVI

IPC: H01J29/56

CPC classification number: H01J29/62 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/18 ,  H01J35/14 ,  H01J37/063 ,  H01J37/065 ,  H01J37/3174 ,  H01J2237/0492 ,  H01J2237/0656 ,  H01J2237/28

Abstract: System that focuses electron beams in an electro-static area to a laminar flow of electrons with uniform distribution of current density and extraordinary demagnification includes a housing having a first interior portion and a second interior portion electrically insulated from the first interior portion. The second interior portion has an electric field-free space. An electrode system is disposed in the first interior portion and includes a cathode assembly and at least one anode assembly. The cathode assembly generates an electron beam that passes through each anode assembly and then into the electric field-free space in the second interior portion. A position of a crossover point on a longitudinal axis maybe regulated by varying dimensions of a substantially cylindrical portion of the anode assembly and a substantially cylindrical portion of a near-cathode electrode assembly.

Abstract translation: 将静电区域中的电子束聚焦到具有均匀分布的电流密度和非常缩小的电子层流的系统包括具有与第一内部部分电绝缘的第一内部部分和第二内部部分的壳体。 第二内部部分具有无电场的空间。 电极系统设置在第一内部部分中并且包括阴极组件和至少一个阳极组件。 阴极组件产生通过每个阳极组件然后进入第二内部部分中的无电场空间的电子束。 横轴上的交叉点的位置可以通过阳极组件的基本圆柱形部分的大小和近阴极电极组件的基本上圆柱形的部分来调节。

公开(公告)号：US08084929B2

公开(公告)日：2011-12-27

申请号：US12769393

申请日：2010-04-28

Applicant: Artush A. Abgaryan ,  Eli Levi

Inventor： Artush A. Abgaryan ,  Eli Levi

IPC: H01J29/46

CPC classification number: H01J29/62 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/18 ,  H01J35/14 ,  H01J37/063 ,  H01J37/065 ,  H01J37/3174 ,  H01J2237/0492 ,  H01J2237/0656 ,  H01J2237/28

Abstract: System that focuses electron beams in an electro-static area to a laminar flow of electrons with uniform distribution of current density and extraordinary demagnification includes a body that defines a boundary for an electric field, a field-forming cathode electrode system, a focusing electrode system, and at least one anode electrode system in the electro-static section and a second electric field-free section including an adjustable screen system arranged in an interior of the body. The field-forming near-cathode electrode system includes a cathode electrically connected to a flat part and a curvilinear part electrically connected to a cylindrical part. The anode electrode system includes an opening part, an anode electrically connected to a flat part and a curvilinear part electrically connected to a cylindrical part which is similar or identical to and symmetrical with the cathode electrode system. The system parameters are calculated and created due to the CGMR conceptual method.

Abstract translation: 将静电区域中的电子束聚焦到具有均匀分布的电流密度和非常缩小的电子层流的系统包括限定电场边界的体，场形成阴极电极系统，聚焦电极系统 以及电静电部分中的至少一个阳极电极系统和包括布置在主体内部的可调节屏幕系统的第二无电场部分。 场形成阴极电极系统包括电连接到平坦部分的阴极和与圆筒部分电连接的曲线部分。 阳极电极系统包括开口部分，电连接到平坦部分的阳极和电连接到与阴极电极系统相似或相似的圆柱形部分的曲线部分。 由于CGMR的概念方法，系统参数被计算和创建。

公开(公告)号：US20110278454A1

公开(公告)日：2011-11-17

申请号：US13190153

申请日：2011-07-25

Applicant: Akira IKEGAMI ,  Minoru YAMAZAKI ,  Hideyuki KAZUMI ,  Koichiro TAKEUCHI ,  HIsaya Murakoshi

Inventor： Akira IKEGAMI ,  Minoru YAMAZAKI ,  Hideyuki KAZUMI ,  Koichiro TAKEUCHI ,  HIsaya Murakoshi

IPC: H01J37/28

CPC classification number: H01J37/244 ,  H01J37/21 ,  H01J37/28 ,  H01J37/3045 ,  H01J2237/24564 ,  H01J2237/2594 ,  H01J2237/28 ,  H01J2237/2816 ,  H01J2237/30461

Abstract: A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not reach the sample. The scanning electron microscope also detects information on a potential of a sample using a signal obtained, and a device for automatically adjusting conditions based on the result of measuring.

Abstract translation: 具有带电粒子束的扫描电子显微镜，当在向样品照射的状态下，向样品施加电压，使得带电粒子束不到达样品。 扫描电子显微镜还使用所获得的信号检测样品的电位信息，以及根据测定结果自动调整条件的装置。

公开(公告)号：US08059271B2

公开(公告)日：2011-11-15

申请号：US12365698

申请日：2009-02-04

Applicant: Charles P. Marsh ,  Eric Olson ,  Todor I. Donchev ,  Ivan Petrov ,  Jianguo Wen ,  Ryan Franks ,  Dongxiang Liao

Inventor： Charles P. Marsh ,  Eric Olson ,  Todor I. Donchev ,  Ivan Petrov ,  Jianguo Wen ,  Ryan Franks ,  Dongxiang Liao

IPC: G01N1/10

CPC classification number: H01J37/26 ,  G02B21/34 ,  H01J37/20 ,  H01J2237/2004 ,  H01J2237/2005 ,  H01J2237/28 ,  Y10T29/49826

Abstract: A reusable sample-holding device for readily loading very small wet samples for observation of the samples by microscopic equipment, in particular in a vacuum environment. Embodiments may be used with a scanning electron microscope (SEM), a transmission electron microscope (TEM), an X-ray microscope, optical microscope, and the like. For observation of the sample, embodiments provide a thin-membrane window etched in the center of each of two silicon wafers abutting to contain the sample in a small uniform gap formed between the windows. This gap may be adjusted by employing spacers. Alternatively, the thickness of a film established by the fluid in which the sample is incorporated determines the gap without need of a spacer. To optimize resolution each window may have a thickness on the order of 50 nm and the gap may be on the order of 50 nm.

Abstract translation: 一种可重复使用的样品保持装置，用于容易地加载非常小的湿样品，以通过显微设备，特别是在真空环境中观察样品。 实施例可以用扫描电子显微镜（SEM），透射电子显微镜（TEM），X射线显微镜，光学显微镜等来使用。 为了观察样品，实施方案提供了在两个硅晶片的每一个的中心蚀刻的薄膜窗口，其邻接以将样品容纳在窗口之间形成的小的均匀间隙中。 该间隙可以通过使用间隔物来调节。 或者，通过其中包含样品的流体建立的膜的厚度确定了间隙而不需要间隔物。 为了优化分辨率，每个窗口可以具有大约50nm的厚度，并且间隙可以在50nm量级。

公开(公告)号：US20110260558A1

公开(公告)日：2011-10-27

申请号：US13123199

申请日：2009-10-06

Applicant: Masashi Shibahara ,  Mikio Tokuyama ,  Koichiro Takeuchi ,  Shigeru Haneda ,  Osamu Yamada ,  Naoki Sakamoto ,  Eiichi Hazaki ,  Akito Tanokuchi

Inventor： Masashi Shibahara ,  Mikio Tokuyama ,  Koichiro Takeuchi ,  Shigeru Haneda ,  Osamu Yamada ,  Naoki Sakamoto ,  Eiichi Hazaki ,  Akito Tanokuchi

IPC: H02K41/02 ,  B23P11/00

CPC classification number: H01J37/20 ,  H01J2237/20221 ,  H01J2237/20264 ,  H01J2237/28

Abstract: A stage comprises a linear guide rail (2) for guiding a movable table (4), a driven bar (12), a linear drive actuator in contact with the driven bar (12) to transmit driving force to the driven bar (12), and parallel plate springs (30) for holding opposite ends of the driven bar (12). A drive transmitting surface of the linear drive actuator is provided so as to be separated from the movable table (4), and this prevents the accuracy of positioning from being reduced. Also, the parallel springs (30) reduce deforming forces applied to sections supporting the driven bar (12), and this prevents the driven bar from being damaged. The configuration makes the stage highly accurate and highly reliable.

Abstract translation: 平台包括用于引导可动台（4）的直线导轨（2），从动杆（12），与从动杆（12）接触的线性驱动致动器，以将驱动力传递到从动杆（12） 和用于保持从动杆（12）的相对端的平行板簧（30）。 线性驱动致动器的驱动传递表面设置成与可移动台（4）分离，这防止定位精度降低。 此外，平行弹簧（30）减小施加到支撑从动杆（12）的部分的变形力，并且这防止被驱动杆被损坏。 该配置使舞台高度准确和高度可靠。