摘要:
An interposer 2 including a base 10 formed of a plurality of resin layers 26, 34, 42, 52, 56; a thin-film capacitor 12 buried in the base 10, including a lower electrode 20, a capacitor dielectric film 22 and an upper electrode 24; a first through-electrode 14b formed through the base 10 and electrically connected to the upper electrode 24 of the thin-film capacitor 12; and a second through-electrode 14a formed through the base 10 and electrically connected to the lower electrode 20 of the thin-film capacitor 12, further including: an interconnection 48 buried in the base 10 and electrically connected to the respective upper electrodes 24 of a plurality of the thin-film capacitors 12, a plurality of the first through-electrodes 14b being electrically connected to the upper electrodes 24 of said plurality of the thin-film capacitors 12 via the interconnection 48, and said plurality of the first through-electrodes 14b being electrically interconnected by the interconnections 48.
摘要:
The interposer comprises a base 8 formed of a plurality of resin layers 68, 20, 32, 48; thin-film capacitors 18a, 18b buried between a first resin layer 68 of said plurality of resin layers and a second resin layer 20 of said plurality of resin layers, which include first capacitor electrodes 12a, 12b, second capacitor electrodes 16 opposed to the first capacitor electrode 12a, 12b and the second capacitor electrode 16, and a capacitor dielectric film 14 of a relative dielectric constant of 200 or above formed between the first capacitor electrode 12a, 12b and the second capacitor electrode 16; a first through-electrode 77a formed through the base 8 and electrically connected to the first capacitor electrode 12a, 12b; and a second through-electrode 77b formed through the base 8 and electrically connected to the second capacitor electrode 16.
摘要:
The capacitor according to the present invention comprises a lower electrode 18 formed on a base substrate 14, a dielectric film 20 formed on the lower electrode 18, and an upper electrode 28 formed on the dielectric film 20 and including a polycrystalline conduction film 22, and a amorphous conduction film 24 formed on the polycrystalline conduction film 22. Because of the amorphous conduction film 24 included in the upper electrode 28, which can shut off hydrogen and water, hydrogen and water can be prohibited from arriving at the dielectric film 20. Accordingly, the dielectric film 20 of an oxide is prevented from being reduced with hydrogen, and the capacitor can have good electric characteristics.
摘要:
A probe card includes probes, a build-up interconnection layer having a multilayer interconnection structure therein and carrying the probes on a top surface in electrical connection with the multilayer interconnection structure, and a capacitor provided on the build-up interconnection layer in electrical connection with one of the probes via the multilayer interconnection structure, wherein the multilayer interconnection structure includes an inner via-contact in the vicinity of the probe and the capacitor is embedded in a resin insulation layer constituting the build-up layer.
摘要:
A semiconductor device comprises a carrier substrate, an integrated circuit chip mounted on the carrier substrate via bumps, and a capacitor provided to stabilize operation of the integrated circuit chip at high frequencies. In the semiconductor device, the capacitor is electrically connected to pads on bottom of the integrated circuit chip, and the capacitor is provided to have a height on the carrier substrate that is smaller than or equal to a height of the bumps on the carrier substrate.
摘要:
P-type semiconductor sheets and n-type semiconductor sheets formed by mixing a powder of semiconductor material, a binder resin, a plasticizer, and a surfactant are prepared. In addition, separator sheets formed by mixing a resin such as PMMA and a plasticizer are prepared. Through holes are formed in each of the separator sheets and then filled with a conductive material. Thereafter, the p-type semiconductor sheet, the separator sheet, the n-type semiconductor sheet and the separator sheet are stacked. The resultant laminated body is cut into a predetermined size and then subjected to a baking process.
摘要:
A power generating system includes: a plurality of cells forming a fuel cell battery for generating power; a cell temperature measuring unit provided for each cell; a thermoelectric converter provided for each cell; a heating unit which heats the plurality of cells; a first control unit which controls the heating unit; and a second control unit, provided for each thermoelectric converter, for controlling the thermoelectric converter, wherein the first control unit controls the heating unit so as to bring the temperature of the heating unit to within a predetermined control temperature range, and the second control unit performs control so that if the temperature of the cell lies outside a predetermined operating temperature range, the thermoelectric converter is switched to the thermal transfer mode and is controlled so as to bring the temperature of the cell to within the predetermined operating temperature range, and if the temperature of the cell lies within the predetermined operating temperature range, the thermoelectric converter is switched to the power generation mode.
摘要:
An electric power generation device equipped with an apparatus which vibrates and generates heat includes a thermoelectric power generation module and a piezoelectric power generation module which are formed integrally. The thermoelectric power generation module has a first surface combining thermally and mechanically with the apparatus's outer surface and a second surface opposite to the first surface, and generates electric power from temperature differences between the first surface and the second surface caused by the apparatus's generating heat. The piezoelectric power generation module has a fixed end combining mechanically with the apparatus's outer surface and a movable end opposite to the fixed end, and generates electric power from displacement of the movable end to the fixed end caused by the apparatus's vibrating.
摘要:
A power generating system includes: a plurality of cells forming a fuel cell battery for generating power; a cell temperature measuring unit provided for each cell; a thermoelectric converter provided for each cell; a heating unit which heats the plurality of cells; a first control unit which controls the heating unit; and a second control unit, provided for each thermoelectric converter, for controlling the thermoelectric converter, wherein the first control unit controls the heating unit so as to bring the temperature of the heating unit to within a predetermined control temperature range, and the second control unit performs control so that if the temperature of the cell lies outside a predetermined operating temperature range, the thermoelectric converter is switched to the thermal transfer mode and is controlled so as to bring the temperature of the cell to within the predetermined operating temperature range, and if the temperature of the cell lies within the predetermined operating temperature range, the thermoelectric converter is switched to the power generation mode.
摘要:
P-type semiconductor sheets and n-type semiconductor sheets formed by mixing a powder of semiconductor material, a binder resin, a plasticizer, and a surfactant are prepared. In addition, separator sheets formed by mixing a resin such as PMMA and a plasticizer are prepared. Through holes are formed in each of the separator sheets and then filled with a conductive material. Thereafter, the p-type semiconductor sheet, the separator sheet, the n-type semiconductor sheet and the separator sheet are stacked. The resultant laminated body is cut into a predetermined size and then subjected to a baking process.