Heat dissipation structure and method thereof
    75.
    发明申请
    Heat dissipation structure and method thereof 审中-公开
    散热结构及其方法

    公开(公告)号:US20050236716A1

    公开(公告)日:2005-10-27

    申请号:US10829583

    申请日:2004-04-22

    摘要: A semiconductor structure and method for dissipating heat away from a semiconductor device having a plurality of power lines is provided. The semiconductor structure includes a semiconductor substrate and a plurality of interconnect structures disposed on the substrate and in contact therewith and extending through the semiconductor device, the interconnect structures for dissipating heat to the substrate. Each of the plurality of interconnect structures comprises at least one via stack.

    摘要翻译: 提供了一种半导体结构和方法,用于从具有多个电源线的半导体器件散发热量。 半导体结构包括半导体衬底和布置在衬底上并与其接触并延伸穿过半导体器件的多个互连结构,用于将热量散发到衬底的互连结构。 多个互连结构中的每一个包括至少一个通孔堆叠。