Curved Grating Structure Manufacturing Method, Curved Grating Structure, Grating Unit, And X-Ray Imaging Device
    89.
    发明申请
    Curved Grating Structure Manufacturing Method, Curved Grating Structure, Grating Unit, And X-Ray Imaging Device 有权
    曲线光栅结构制造方法,曲线光栅结构,光栅单元和X射线成像装置

    公开(公告)号:US20160265125A1

    公开(公告)日:2016-09-15

    申请号:US15031598

    申请日:2014-10-02

    发明人: Mitsuru YOKOYAMA

    IPC分类号: C25D1/00 G21K1/06 A61B6/00

    摘要: In one aspect, the present invention provides a curved grating structure manufacturing method which comprises: a grating forming step of forming, in one surface of a grating-forming workpiece, a grating region in which a plurality of members mutually having the same shape are periodically provided; a stress layer forming step of forming a stress layer capable of generating stress, on a grating plane-defining surface of the grating region; a boding step of bonding a support substrate to the stress layer; a polishing step of polishing the other surface of the grating-forming workpiece on a side opposite to the one surface having the support substrate bonded thereto; and a peeling step of peeling off the support substrate from the stress layer, wherein the polishing step includes performing the polishing to allow the grating-forming workpiece to be curved by a stress arising from the stress layer, after the peeling step.

    摘要翻译: 一方面,本发明提供了一种弯曲光栅结构的制造方法,其特征在于,包括:光栅形成工序,在光栅形成工件的一个面上形成光栅区域,在该光栅区域中,相互具有相同形状的多个部件周期性地形成 提供; 在光栅区域的光栅平面限定表面上形成能够产生应力的应力层的应力层形成步骤; 将支撑基板接合到应力层的焊接步骤; 抛光步骤,在与形成有所述支撑基板的所述一个表面相对的一侧上研磨所述光栅形成工件的另一表面; 以及从所述应力层剥离所述支撑基板的剥离步骤,其中,所述研磨步骤包括进行所述抛光,以在所述剥离步骤之后,通过由所述应力层产生的应力使所述光栅形成工件弯曲。

    Two mask process for electroplating metal employing a negative electrophoretic photoresist

    公开(公告)号:US09410261B2

    公开(公告)日:2016-08-09

    申请号:US14528028

    申请日:2014-10-30

    摘要: A negative electrophoretic photoresist is applied over a plurality of protruding disposable template portions on a substrate. A silo structure is placed on planar portions of the negative electrophoretic photoresist that laterally surround the plurality of protruding disposable template portions. The negative electrophoretic photoresist is lithographically exposed employing the silo structure and a first lithographic mask, which includes a transparent substrate with isolated opaque patterns thereupon. After removal of the silo structure, the negative electrophoretic photoresist is lithographically exposed employing a second lithographic mask, which includes a pattern of transparent areas overlying the planar portions of the negative electrophoretic photoresist less the areas for bases of metal structure to be subsequently formed by electroplating. The negative electrophoretic photoresist is developed to form cavities therein, and metal structures are formed by electroplating within the cavities. The negative electrophoretic photoresist and the plurality of protruding disposable template portions can be subsequently removed.