SEMICONDUCTOR DICE TRANSFER-ENABLING APPARATUS AND METHOD FOR MANUFACTURING TRANSFER-ENABLING APPARATUS
    2.
    发明申请
    SEMICONDUCTOR DICE TRANSFER-ENABLING APPARATUS AND METHOD FOR MANUFACTURING TRANSFER-ENABLING APPARATUS 审中-公开
    半导体切片转印装置和制造转印装置的方法

    公开(公告)号:US20110136324A1

    公开(公告)日:2011-06-09

    申请号:US12963609

    申请日:2010-12-08

    IPC分类号: H01L21/78 B26F3/00

    摘要: A transfer-enabling apparatus, produced by a method of manufacturing, includes a substrate patterned with islands separated by trenches and an epitaxial layer, grown at least on the islands, providing semiconductor dice in such a configuration partially released from said substrate and suspended over the substrate, and interconnected, by anchors of epitaxial or other material that are attached to the substrate. The anchors are of width less than or equal to than the semiconductor dice and define fracture zones at connections of the anchors with the semiconductor dice.

    摘要翻译: 通过制造方法制造的转印使能装置包括由沟槽分隔的岛和至少在岛上生长的外延层图案化的衬底,提供半导体晶片,其部分从所述衬底释放并悬浮在该衬底上 衬底和互连的,通过连接到衬底的外延或其它材料的锚。 锚固件的宽度小于或等于半导体晶片,并且在锚定件与半导体晶片的连接处限定断裂区域。