Fabrication processes of a MEMS alloy probe
    5.
    发明申请
    Fabrication processes of a MEMS alloy probe 审中-公开
    MEMS合金探针的制造工艺

    公开(公告)号:US20080124828A1

    公开(公告)日:2008-05-29

    申请号:US11601753

    申请日:2006-11-20

    IPC分类号: H01L21/56

    CPC分类号: G01R1/06744 G01R3/00

    摘要: MEMS processes for fabrication of a MEMS alloy probe are revealed. Multiple layers of the MEMS alloy probe are formed on the substrate in sequences as a first surface layer, a first conductive layer, a core layer, a second conductive layer, and a second surface layer where the width of the first conductive layer is smaller than the one of first surface layer so that all the exposed edges of the first surface layer are not covered by the first conductive layer. The second surface layer is extended from the sidewalls of the core layer to the exposed edges of the first surface layer to encapsulate the core layer, the first conductive layer, and the second conductive layer. The MEMS alloy probe fabricated by the MEMS processes can eliminate the issue of oxidation.

    摘要翻译: 揭示了用于制造MEMS合金探针的MEMS工艺。 多层MEMS合金探针以顺序形成在基板上,作为第一表面层,第一导电层,芯层,第二导电层和第二表面层,其中第一导电层的宽度小于 第一表面层中的一个,使得第一表面层的所有暴露边缘都不被第一导电层覆盖。 第二表面层从芯层的侧壁延伸到第一表面层的暴露边缘,以封装芯层,第一导电层和第二导电层。 通过MEMS工艺制造的MEMS合金探针可以消除氧化问题。

    Modular probe card
    6.
    发明授权
    Modular probe card 有权
    模块式探针卡

    公开(公告)号:US07372286B2

    公开(公告)日:2008-05-13

    申请号:US11322408

    申请日:2006-01-03

    IPC分类号: G01R1/073

    CPC分类号: G01R1/07378

    摘要: A modular probe card comprises a printed circuit board, an interposer, and a probe head where the printed circuit board has a plurality of first contact pads, the probe head has a plurality of second contact pads. The interposer is disposed between the printed circuit board and the probe head where the interposer includes a substrate and a plurality of pogo pins. The substrate has a first surface, a second surface, and a plurality of through holes penetrating from the first surface to the second surface. The pogo pins are secured in the through holes of the substrate. Each of the pogo pins has a first contact point, a second contact point, and a spring therebetween, whereby the first contact points are elastically extruded from the first surface to contact the first contact pad, and the second contact points are elastically extruded from the second surface to contact the second contact pad, so as to overcome the poor electrical connections between the printed circuit board and the probe head through the interposer due to poor coplanarity of the first contact pads of the printed circuit board.

    摘要翻译: 模块化探针卡包括印刷电路板,插入件和探针头,其中印刷电路板具有多个第一接触焊盘,探头具有多个第二接触焊盘。 插入器设置在印刷电路板和探针头之间,其中插入器包括基板和多个弹簧销。 基板具有从第一表面到第二表面的第一表面,第二表面和多个通孔。 弹簧销固定在基板的通孔中。 每个弹簧销具有第一接触点,第二接触点和它们之间的弹簧,由此第一接触点从第一表面弹性挤出以接触第一接触垫,并且第二接触点从 第二表面接触第二接触焊盘,以便克服印刷电路板和探针头之间通过插入器的不良电连接,因为印刷电路板的第一接触焊盘的共面性差。

    Method for fabricating a plurality of elastic probes in a row
    9.
    发明申请
    Method for fabricating a plurality of elastic probes in a row 审中-公开
    一排制造多个弹性探针的方法

    公开(公告)号:US20070069749A1

    公开(公告)日:2007-03-29

    申请号:US11605442

    申请日:2006-11-29

    IPC分类号: G01R31/02

    摘要: A method of forming a plurality of elastic probes in a row is disclosed. Firstly, a substrate is provided, then, a shaping layer is formed on the substrate so as to offer two flat surfaces in parallel. A photoresist layer is formed on the substrate and on the shaping layer. Then, the photoresist layer is patterned to form a plurality of slots crossing an interface between the two flat surfaces where a plurality of elastic probes are formed in the slots. In one embodiment, the interface is an edge slope of the shaping layer so that each of the elastic probes has at least an elastic bending portion. During chip probing, the shifting direction of the elastic probes due to overdrives is perpendicular to the arranging direction of the bonding pads so that the elastic probes are suitable for probing chips with high-density and fine-pitch bonding pads.

    摘要翻译: 公开了一排形成多个弹性探针的方法。 首先,提供基板,然后在基板上形成成形层,以便平行地提供两个平坦表面。 在基板上和形成层上形成光致抗蚀剂层。 然后,对光致抗蚀剂层进行图案化以形成与两个平坦表面之间的界面交叉的多个槽,其中在槽中形成有多个弹性探针。 在一个实施例中,界面是成形层的边缘斜率,使得每个弹性探针具有至少一个弹性弯曲部分。 在芯片探测期间,由于过驱动导致的弹性探针的移动方向垂直于接合焊盘的布置方向,使得弹性探头适用于探测具有高密度和细间距接合焊盘的芯片。