Low-voltage MEMS shutter assemblies
    94.
    发明授权
    Low-voltage MEMS shutter assemblies 有权
    低压MEMS快门组件

    公开(公告)号:US09235046B2

    公开(公告)日:2016-01-12

    申请号:US13754548

    申请日:2013-01-30

    申请人: Pixtronix, Inc.

    摘要: This disclosure provides systems, methods and apparatus for providing relatively thinner and less stiff compliant beams for a shutter assembly. A protective coating is deposited and patterned over the shutter assembly before it is released from a sacrificial mold over which the shutter assembly is formed. Because some primary surfaces of the compliant beams are in contact with the sacrificial mold, these primary surfaces are not coated with the protective coating. Therefore, when the shutter assembly is finally released, the resulting compliant beams are relatively thinner and less stiff providing a reduction in an actuation voltage used to operate the shutter assembly. In some instances, the protective coating is patterned into discontinuous segments before release.

    摘要翻译: 本公开提供了用于为快门组件提供相对较薄且较不硬的柔性梁的系统,方法和装置。 在从快门组件形成的牺牲模具释放之前,将保护涂层沉积并在其上形成图案。 由于柔性梁的一些主表面与牺牲模具接触,所以这些主表面没有涂覆保护涂层。 因此,当快门组件最终被释放时,所产生的柔性梁相对较薄并且较不硬,从而降低用于操作闸板组件的致动电压。 在一些情况下,保护性涂层在释放之前被图案化成不连续段。

    Display device
    97.
    发明授权
    Display device 有权
    显示设备

    公开(公告)号:US09041995B2

    公开(公告)日:2015-05-26

    申请号:US13609329

    申请日:2012-09-11

    申请人: Shigeki Nishizawa

    发明人: Shigeki Nishizawa

    摘要: A fixed aperture includes a first fixed slit and a second fixed slit which are arranged respectively in regions positioned on both sides with a moving line sandwiched therebetween. A drive aperture includes a first drive slit and a second drive slit which are arranged on both sides with the moving line sandwiched therebetween. The first fixed slit and the first drive slit are formed in an extending manner along a first line, and are arranged such that these slits communicate with each other when a shutter is at a position where the transmission of light is allowed. The second fixed slit and the second drive slit are formed in an extending manner along a second line which intersects with the first line, and are arranged such that these slits communicate with each other when the shutter is at a position where the transmission of light is allowed.

    摘要翻译: 固定孔包括第一固定狭缝和第二固定狭缝,它们分别布置在两侧的区域中,夹着移动线。 驱动孔包括布置在两侧的第一驱动狭缝和第二驱动狭缝,移动线夹在其间。 第一固定狭缝和第一驱动狭缝沿着第一线以延伸方式形成,并且被布置成当快门处于允许透射光的位置时这些狭缝彼此连通。 第二固定狭缝和第二驱动狭缝沿着与第一线相交的第二线延伸地形成,并且被布置成使得当快门处于光的透射的位置时这些狭缝彼此连通 允许

    MICROPATTERNED COMPONENT AND METHOD FOR MANUFACTURING A MICROPATTERNED COMPONENT
    98.
    发明申请
    MICROPATTERNED COMPONENT AND METHOD FOR MANUFACTURING A MICROPATTERNED COMPONENT 有权
    用于制造微波组件的微波组件和方法

    公开(公告)号:US20140339654A1

    公开(公告)日:2014-11-20

    申请号:US14120386

    申请日:2014-05-14

    申请人: Johannes Classen

    发明人: Johannes Classen

    IPC分类号: G01P1/00 G01P15/08

    摘要: A micropatterned component, for measuring accelerations and/or yaw rates, including a substrate having a principal plane of extension of the substrate, an electrode, and a further electrode; the electrode having a principal plane of extension of the electrode, and the further electrode having a principal plane of extension of the further electrode; the principal plane of extension of the electrode being set parallelly to a normal direction perpendicular to the principal plane of extension of the substrate; the principal plane of extension of the further electrode being set parallelly to the normal direction; the electrode having an electrode height extending in the normal direction; the electrode having a flow channel extending completely through the electrode in a direction parallel to the principal plane of extension of the substrate; the flow channel having a channel depth extending parallelly to the normal direction; the channel depth being less than the electrode height.

    摘要翻译: 用于测量加速度和/或偏转速率的微图案化部件,包括具有基底的主平面延伸的基底,电极和另外的电极; 所述电极具有所述电极的延伸的主平面,并且所述另一电极具有所述另一电极的延伸的主平面; 电极的延伸主平面平行于垂直于衬底延伸主平面的法线方向设置; 另一电极的延伸主平面平行于法线方向设置; 该电极具有沿法线方向延伸的电极高度; 所述电极具有在平行于所述基板的延伸主平面的方向上完全穿过所述电极的流动通道; 所述流路具有平行于所述法线方向延伸的通道深度; 通道深度小于电极高度。

    Display Apparatus with Narrow Gap Electrostatic Actuators
    99.
    发明申请
    Display Apparatus with Narrow Gap Electrostatic Actuators 有权
    具有窄间隙静电执行机构的显示装置

    公开(公告)号:US20140268293A1

    公开(公告)日:2014-09-18

    申请号:US13800151

    申请日:2013-03-13

    申请人: PIXTRONIX, INC.

    IPC分类号: G02F1/01

    摘要: This disclosure provides systems, methods and apparatus for incorporating tip-gap adjustment features (TGAF) in actuators of shutter assemblies. The TGAF are incorporated into a drive beam of the actuator during the formation of the shutter assembly over a mold. The TGAF are configured such that they develop a mechanical stress or stress gradient. When the shutter assembly is released from the mold, the stress or stress gradient in the TGAF bend the drive beam such that a tip-gap between the drive beam and a load beam of the actuator is reduced. The reduced tip-gap, in turn, reduces an actuation voltage needed to actuate the shutter assembly.

    摘要翻译: 本公开提供了用于在尖端组件的致动器中引入尖端间隙调节特征(TGAF)的系统,方法和装置。 在通过模具形成闸门组件期间,TGAF被结合到致动器的驱动梁中。 TGAF被配置成使得它们产生机械应力或应力梯度。 当闸门组件从模具中释放时,TGAF中的应力或应力梯度使驱动梁弯曲,使得致动器的驱动梁和负载梁之间的尖端间隙减小。 减小的尖端间隙又减小了致动闸门组件所需的致动电压。

    LOW-VOLTAGE MEMS SHUTTER ASSEMBLIES
    100.
    发明申请
    LOW-VOLTAGE MEMS SHUTTER ASSEMBLIES 有权
    低压MEMS快门总成

    公开(公告)号:US20140210864A1

    公开(公告)日:2014-07-31

    申请号:US13754548

    申请日:2013-01-30

    申请人: PIXTRONIX, INC.

    IPC分类号: G02B26/02 G09G3/22

    摘要: This disclosure provides systems, methods and apparatus for providing relatively thinner and less stiff compliant beams for a shutter assembly. A protective coating is deposited and patterned over the shutter assembly before it is released from a sacrificial mold over which the shutter assembly is formed. Because some primary surfaces of the compliant beams are in contact with the sacrificial mold, these primary surfaces are not coated with the protective coating. Therefore, when the shutter assembly is finally released, the resulting compliant beams are relatively thinner and less stiff providing a reduction in an actuation voltage used to operate the shutter assembly. In some instances, the protective coating is patterned into discontinuous segments before release.

    摘要翻译: 本公开提供了用于为快门组件提供相对较薄且较不硬的柔性梁的系统,方法和装置。 在从快门组件形成的牺牲模具释放之前,将保护涂层沉积并在其上形成图案。 由于柔性梁的一些主表面与牺牲模具接触,所以这些主表面没有涂覆保护涂层。 因此,当快门组件最终被释放时,所产生的柔性梁相对较薄并且较不硬,从而降低用于操作闸板组件的致动电压。 在一些情况下,保护性涂层在释放之前被图案化成不连续段。