Over-passivation process of forming polymer layer over IC chip
    110.
    发明授权
    Over-passivation process of forming polymer layer over IC chip 有权
    在IC芯片上形成聚合物层的过钝化工艺

    公开(公告)号:US07919412B2

    公开(公告)日:2011-04-05

    申请号:US12273546

    申请日:2008-11-19

    IPC分类号: H01L21/00

    摘要: A method for forming a semiconductor chip or wafer includes following steps. A semiconductor substrate is provided, and then a polymer layer is deposited over the semiconductor substrate, wherein the polymer layer comprises polyimide. The polymer layer with a temperature profile having a peak temperature between 200 and 320 degrees Celsius. Alternatively, the temperature profile may comprises a period of time with a temperature higher than 320 degree Celsius, wherein the period of time is shorter than 45 minutes.

    摘要翻译: 用于形成半导体芯片或晶片的方法包括以下步骤。 提供半导体衬底,然后在半导体衬底上沉积聚合物层,其中聚合物层包括聚酰亚胺。 具有温度分布的聚合物层具有在200和320摄氏度之间的峰值温度。 或者,温度分布可以包括温度高于320摄氏度的时间段,其中时间段短于45分钟。