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47 条记录 (耗时 0.063 秒)

    Electric discharge laser with acoustic chirp correction
    13.
    发明授权
    Electric discharge laser with acoustic chirp correction 有权
    具有声啁啾校正的放电激光器

    公开(公告)号：US06317447B1

    公开(公告)日：2001-11-13

    申请号：US09490835

    申请日：2000-01-25

    申请人： William N. Partlo ,  Igor V. Fomenkov ,  Jean-Marc Hueber ,  Zsolt Bor ,  Eckehard D. Onkels ,  Michael C. Cates ,  Richard C. Ujazdowski ,  Vladimir B. Fleurov ,  Dmitri V. Gaidarenko

    发明人： William N. Partlo ,  Igor V. Fomenkov ,  Jean-Marc Hueber ,  Zsolt Bor ,  Eckehard D. Onkels ,  Michael C. Cates ,  Richard C. Ujazdowski ,  Vladimir B. Fleurov ,  Dmitri V. Gaidarenko

    IPC分类号： H01S322

    CPC分类号： G03F7/70025 ,  G03F7/70575 ,  G03F7/708 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0381 ,  H01S3/0382

    摘要： Methods and structural changes in gas discharge lasers for minimizing wavelength chirp at high pulse rates. Applicants have identified the major cause of wavelength chirp in high pulse rate gas discharge lithography lasers as pressure waves from a discharge reflecting back to the discharge region coincident with a subsequent discharge. The timing of the arrival of the pressure wave is determined by the temperature of the laser gas through which the wave is traveling. During burst mode operation, the laser gas temperature in prior art lasers changes by several degrees over periods of a few milliseconds. These changing temperatures change the location of the coincident pressure waves from pulse to pulse within the discharge region causing a variation in the pressure of the laser gas which in turn affects the index of refraction of the discharge region causing the laser beam exiting the rear of the laser to slightly change direction. This change in beam direction causes the grating in the LNP to reflect back to the discharge region light at a slightly different wavelength causing the wavelength chirp. Solution to the problem is to include in the laser chamber structural elements to moderate or disperse the pressure waves and to maintain the laser gas temperature as close as feasible to constant values.

    摘要翻译： 气体放电激光器的方法和结构变化，以最大限度地减少高脉冲波长啁啾。 申请人已经确定了在高脉冲气体放电光刻激光器中的波长啁啾的主要原因，因为从反射回到放电区域的放电的压力波与随后的放电一致。 压力波的到达时间由波浪行进的激光气体的温度决定。 在突发模式操作期间，现有技术的激光器中的激光气体温度在几毫秒的时间内改变了几度。 这些变化的温度改变了放电区域内重合压力波从脉冲到脉冲的位置，导致激光气体的压力变化，这反过来影响放电区域的折射率，导致激光束离开 激光稍微改变方向。 光束方向的这种变化导致LNP中的光栅以稍微不同的波长反射回到放电区域，导致波长啁啾。 解决问题的方法是在激光室结构元件中包括中压或分散压力波，并将激光气体温度保持在尽可能接近的恒定值。

    Laser chamber with minimized acoustic and shock wave disturbances
    17.
    发明授权
    Laser chamber with minimized acoustic and shock wave disturbances 失效
    激光室具有最小化的声波和冲击波干扰

    公开(公告)号：US5978405A

    公开(公告)日：1999-11-02

    申请号：US36158

    申请日：1998-03-06

    申请人： Tibor Juhasz ,  Richard C. Ujazdowski ,  Herve A. Besaucele ,  Robert G. Ozarski ,  James H. Azzola

    发明人： Tibor Juhasz ,  Richard C. Ujazdowski ,  Herve A. Besaucele ,  Robert G. Ozarski ,  James H. Azzola

    IPC分类号： H01S3/038 ,  H01S3/032 ,  H01S3/036 ,  H01S3/225 ,  H01S3/22

    CPC分类号： H01S3/036

    摘要： A laser chamber has angled reflectors that reflect acoustic and shock waves away from the laser discharge area to minimize acoustic and shock wave disturbances. The angled reflector may have different configurations to assist in the dissipation of the acoustic and shock waves. For example, the angled reflector may have a modulated reflective surface, such as having grooves or holes defined within the surface. Further, the angled reflector may have a reflective surface with acoustic and shock wave absorbing properties. The reflective surface with absorbent properties may be a felt metal or have multiple layered porous surfaces. In addition, the walls of the laser chamber may be modulated to assist in the dissipation of the acoustic waves and shock waves through absorption, scattering, and by generating interference within the reflected waves. Multiple layered porous surfaces may be used along the walls to absorb and scatter incident waves. The walls of the laser chamber may also be covered with an acoustic and shock wave absorbing material, such as felt metal. In other embodiments, the walls of the laser chamber are modulated with grooves, such as triangular or rectangular horizontal grooves, which scatter incident waves and generate interference within reflected waves.

    摘要翻译： 激光室具有倾斜的反射器，其将声波和冲击波反射离开激光放电区域，以最小化声波和冲击波干扰。 成角度的反射器可以具有不同的构造以辅助声波和冲击波的消散。 例如，成角度的反射器可以具有调制的反射表面，例如在表面内限定有凹槽或孔。 此外，成角度的反射器可以具有具有声波和冲击波吸收特性的反射表面。 具有吸收性能的反射表面可以是毡状金属或具有多层多孔表面。 此外，可以调制激光室的壁，以通过吸收，散射和在反射波内产生干涉来帮助消除声波和冲击波。 沿着壁可以使用多层多孔表面来吸收和散射入射波。 激光室的壁也可以用诸如毛毡金属的声波和冲击波吸收材料覆盖。 在其他实施例中，激光室的壁由诸如三角形或矩形水平凹槽的凹槽调制，这些凹槽散射入射波并在反射波内产生干涉。

    High pulse repetition rate gas discharge laser
    19.
    发明授权
    High pulse repetition rate gas discharge laser 有权

    公开(公告)号：US09620920B2

    公开(公告)日：2017-04-11

    申请号：US12590307

    申请日：2009-11-05

    申请人： Walter D. Gillespie ,  Thomas D. Steiger ,  Richard C. Ujazdowski ,  William N. Partlo

    发明人： Walter D. Gillespie ,  Thomas D. Steiger ,  Richard C. Ujazdowski ,  William N. Partlo

    IPC分类号： H01S3/22 ,  H01S3/036 ,  H01S3/038

    CPC分类号： H01S3/036 ,  H01S3/0384

    摘要： A pulsed gas discharge laser operating at an output laser pulse repetition rate of greater than 4 kHz and a method of operating same is disclosed which may comprise a high voltage electrode having a longitudinal extent; a main insulator electrically insulating the high voltage electrode from a grounded gas discharge chamber; a preionizer longitudinally extending along at least a portion of the longitudinal extent of the high voltage electrode; a preionization shim integral with the electrode extending toward the preionizer. The preionizer may be formed integrally with the main insulator. The preionization shim may substantially cover the gap between the electrode and the preionizer. The apparatus and method may comprise an aerodynamic fairing attached to the high voltage electrode to present an aerodynamically smooth surface to the gas flow.

    High pulse repetition rate gas discharge laser
    20.
    发明授权
    High pulse repetition rate gas discharge laser 有权
    高脉冲重复率气体放电激光器

    公开(公告)号：US07633989B2

    公开(公告)日：2009-12-15

    申请号：US11169203

    申请日：2005-06-27

    申请人： Walter D. Gillespie ,  Thomas D. Steiger ,  Richard C. Ujazdowski ,  William N. Partlo

    发明人： Walter D. Gillespie ,  Thomas D. Steiger ,  Richard C. Ujazdowski ,  William N. Partlo

    IPC分类号： H01S3/22

    CPC分类号： H01S3/036 ,  H01S3/0384

    摘要： A pulsed gas discharge laser operating at an output laser pulse repetition rate of greater than 4 kHz and a method of operating same is disclosed which may comprise a high voltage electrode having a longitudinal extent; a main insulator electrically insulating the high voltage electrode from a grounded gas discharge chamber; a preionizer longitudinally extending along at least a portion of the longitudinal extent of the high voltage electrode; a preionization shim integral with the electrode extending toward the preionizer. The preionizer may be formed integrally with the main insulator. The preionization shim may substantially cover the gap between the electrode and the preionizer. The apparatus and method may comprise the high voltage electrode being disposed in an electrode receiving pocket in the main insulator and formed to present an elongated discharge receiving area facing another electrode within the gas discharge chamber, an aerodynamic fairing attached to the high voltage electrode and substantially closing the gas flow disturbance pocket and presenting an aerodynamically smooth surface to the gas flow.

    摘要翻译： 公开了以大于4kHz的输出激光脉冲重复率操作的脉冲气体放电激光器及其操作方法，其可以包括具有纵向范围的高压电极; 将高电压电极与接地气体放电室电绝缘的主绝缘体; 前置电离器，其沿所述高压电极的所述纵向延伸部分的至少一部分纵向延伸; 与电极一体的预电离垫片朝向前置电离器延伸。 前置电离器可以与主绝缘体一体地形成。 预电离垫片可以基本上覆盖电极和前置离子机之间的间隙。 所述装置和方法可以包括高压电极设置在主绝缘体中的电极接收凹槽中并且形成为呈现面对气体放电室内的另一电极的细长放电接收区域，附接到高压电极的空气动力学整流罩，并且基本上 关闭气体流动扰动袋并向气体流动呈空气动力学平滑的表面。