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公开(公告)号:US09269837B2
公开(公告)日:2016-02-23
申请号:US14682888
申请日:2015-04-09
Applicant: XINTEC INC.
Inventor: Tsang-Yu Liu , Shu-Ming Chang , Po-Han Lee
CPC classification number: H01L31/0203 , H01L23/3128 , H01L23/481 , H01L24/12 , H01L24/13 , H01L31/02005 , H01L31/18 , H01L2224/131 , H01L2224/73253 , Y02P70/521 , H01L2924/014
Abstract: A chip package includes semiconductor chips, inner spacers, cavities, conductive portions and solder balls. The semiconductor chip has at least an electronic component and at least an electrically conductive pad disposed on an upper surface thereof. The conductive pad is arranged abreast to one side of the electronic component and electrically connected thereto. The cavities open to a lower surface of the semiconductor chip and extend toward the upper surface to expose the conductive pad on the upper surface. The conductive portions fill the cavities from the lower surface and electrically connected the to conductive pad. The solder balls are disposed on the lower surface and electrically connected to the conductive portions. A gap is created between an outer wall of the inner spacers and an edge of the semiconductor chip.
Abstract translation: 芯片封装包括半导体芯片,内部间隔件,空腔,导电部分和焊球。 半导体芯片至少具有电子部件,并且至少设置在其上表面上的导电焊盘。 导电焊盘与电子部件的一侧并排设置并与之电连接。 空腔通向半导体芯片的下表面并朝向上表面延伸以暴露上表面上的导电焊盘。 导电部分从下表面填充空腔并电连接到导电垫。 焊球设置在下表面上并电连接到导电部分。 在内隔板的外壁和半导体芯片的边缘之间产生间隙。
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公开(公告)号:US09236320B2
公开(公告)日:2016-01-12
申请号:US14315163
申请日:2014-06-25
Applicant: XINTEC INC.
Inventor: Yi-Ming Chang , Tsang-Yu Liu , Yen-Shih Ho , Ying-Nan Wen
CPC classification number: H01L23/3171 , H01L23/3114 , H01L23/3192 , H01L24/03 , H01L24/05 , H01L24/48 , H01L2224/0231 , H01L2224/0235 , H01L2224/02375 , H01L2224/02379 , H01L2224/0345 , H01L2224/0346 , H01L2224/0361 , H01L2224/04042 , H01L2224/05007 , H01L2224/05026 , H01L2224/05082 , H01L2224/05124 , H01L2224/05147 , H01L2224/05155 , H01L2224/05164 , H01L2224/05184 , H01L2224/05548 , H01L2224/05562 , H01L2224/05567 , H01L2224/05571 , H01L2224/0558 , H01L2224/05624 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/06155 , H01L2224/48145 , H01L2224/48227 , H01L2924/00014 , H01L2924/10157 , H01L2924/00012 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
Abstract: A chip package is provided. The chip package includes a semiconductor chip, an isolation layer, a redistributing metal layer, and at least a bonding pad. The semiconductor chip includes at least one conducting disposed on a surface of the semiconductor chip. The isolation layer is disposed on the surface of the semiconductor chip, wherein the isolation layer has at least one first opening to expose the first conducting pad. The redistributing metal layer is disposed on the isolation layer and has at least a redistributing metal line corresponding to the conducting pad, the redistributing metal line is connected to the first conducting pad through the first opening. The bonding pad is disposed on the isolation layer and one side of the semiconductor chip, wherein the redistributing metal line extends to the bonding pad to electrically connect the conducting pad to the bonding pad.
Abstract translation: 提供芯片封装。 芯片封装包括半导体芯片,隔离层,再分布金属层和至少一个焊盘。 半导体芯片包括设置在半导体芯片的表面上的至少一个导体。 隔离层设置在半导体芯片的表面上,其中隔离层具有至少一个第一开口以暴露第一导电焊盘。 再分配金属层设置在隔离层上,并且至少具有对应于导电焊盘的再分布金属线,再分布金属线通过第一开口连接到第一导电焊盘。 接合焊盘设置在隔离层和半导体芯片的一侧,其中再分布金属线延伸到接合焊盘,以将导电焊盘电连接到接合焊盘。
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公开(公告)号:US08963312B2
公开(公告)日:2015-02-24
申请号:US14339341
申请日:2014-07-23
Applicant: Xintec Inc.
Inventor: Yen-Shih Ho , Tsang-Yu Liu , Shu-Ming Chang , Yu-Lung Huang , Chao-Yen Lin , Wei-Luen Suen , Chien-Hui Chen
CPC classification number: H01L24/49 , G06K9/00053 , H01L21/561 , H01L23/3121 , H01L23/3192 , H01L23/525 , H01L23/5329 , H01L24/05 , H01L24/29 , H01L24/32 , H01L24/43 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/85 , H01L24/92 , H01L25/0657 , H01L29/0657 , H01L2224/02381 , H01L2224/024 , H01L2224/0401 , H01L2224/04042 , H01L2224/05548 , H01L2224/05554 , H01L2224/05558 , H01L2224/05567 , H01L2224/05572 , H01L2224/05611 , H01L2224/05624 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05669 , H01L2224/05687 , H01L2224/0569 , H01L2224/06135 , H01L2224/16225 , H01L2224/16227 , H01L2224/2919 , H01L2224/32145 , H01L2224/32225 , H01L2224/43 , H01L2224/45144 , H01L2224/48091 , H01L2224/48145 , H01L2224/48227 , H01L2224/48599 , H01L2224/48611 , H01L2224/48624 , H01L2224/48644 , H01L2224/48647 , H01L2224/48655 , H01L2224/48669 , H01L2224/48687 , H01L2224/4869 , H01L2224/49113 , H01L2224/73265 , H01L2224/85 , H01L2224/92247 , H01L2224/94 , H01L2225/06506 , H01L2225/0651 , H01L2924/00014 , H01L2924/10155 , H01L2924/10156 , H01L2924/10253 , H01L2924/12041 , H01L2924/14 , H01L2924/146 , H01L2924/1461 , H01L2924/181 , H01L2224/03 , H01L2924/00 , H01L2924/00012 , H01L2224/05552
Abstract: A stacked chip package including a device substrate having an upper surface, a lower surface and a sidewall is provided. The device substrate includes a sensing region or device region, a signal pad region and a shallow recess structure extending from the upper surface toward the lower surface along the sidewall. A redistribution layer is electrically connected to the signal pad region and extends into the shallow recess structure. A wire has a first end disposed in the shallow recess structure and electrically connected to the redistribution layer, and a second end electrically connected to a first substrate and/or a second substrate disposed under the lower surface. A method for forming the stacked chip package is also provided.
Abstract translation: 提供了包括具有上表面,下表面和侧壁的器件衬底的堆叠芯片封装。 器件衬底包括感测区域或器件区域,信号焊盘区域和沿着侧壁从上表面向下表面延伸的浅凹陷结构。 再分配层电连接到信号焊盘区域并延伸到浅凹陷结构中。 电线具有设置在浅凹陷结构中并电连接到再分布层的第一端,以及电连接到设置在下表面下方的第一基板和/或第二基板的第二端。 还提供了一种用于形成堆叠芯片封装的方法。
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公开(公告)号:US08928098B2
公开(公告)日:2015-01-06
申请号:US13714218
申请日:2012-12-13
Applicant: Xintec Inc.
Inventor: Hung-Jen Lee , Shu-Ming Chang , Tsang-Yu Liu , Yen-Shih Ho
CPC classification number: B81B7/007 , B81C1/0023 , B81C1/00301
Abstract: A semiconductor package includes: a chip having a first portion and a second portion disposed on the first portion, wherein the second portion has at least a through hole therein for exposing a portion of the first portion, and the first portion and/or the second portion has a MEMS; and an etch stop layer formed between the first portion and the second portion and partially exposed through the through hole of the second portion. The invention allows an electronic element to be received in the through hole so as for the semiconductor package to have integrated functions of the MEMS and the electronic element. Therefore, the need to dispose the electronic element on a circuit board as in the prior art can be eliminated, thereby saving space on the circuit board.
Abstract translation: 半导体封装包括:具有第一部分和设置在第一部分上的第二部分的芯片,其中第二部分至少在其中具有用于暴露第一部分的一部分的通孔,以及第一部分和/或第二部分 部分具有MEMS; 以及形成在所述第一部分和所述第二部分之间并且部分地暴露于所述第二部分的通孔的蚀刻停止层。 本发明允许电子元件被容纳在通孔中,以便半导体封装具有MEMS和电子元件的集成功能。 因此,可以消除如现有技术那样将电子元件配置在电路板上,从而节省了电路板上的空间。
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公开(公告)号:US12272712B2
公开(公告)日:2025-04-08
申请号:US17744664
申请日:2022-05-14
Applicant: XINTEC INC.
Inventor: Tsang-Yu Liu , Chaung-Lin Lai , Shu-Ming Chang
IPC: H01L21/48 , H01L27/146
Abstract: Chip packages and methods for forming the same are provided. The method includes providing a substrate having a chip region and a scribe-line region surrounding the chip region and forming a dielectric layer on an upper surface of the substrate. A dummy structure is formed in the dielectric layer over the scribe-line region of the substrate and extends along edges of the chip region. The dummy structure includes a first stack of dummy metal layers and a second stack of dummy metal layers arranged concentrically from the inside to the outside. The method also includes performing a sawing process on a portion of the dielectric layer that surrounds the dummy structure, so as to form a saw opening through the dielectric layer. At least the first stack of dummy metal layers remains in the dielectric layer after the sawing process is performed.
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公开(公告)号:US12237354B2
公开(公告)日:2025-02-25
申请号:US17683917
申请日:2022-03-01
Applicant: XINTEC INC.
Inventor: Tsang-Yu Liu , Shu-Ming Chang , Chaung-Lin Lai
IPC: H01L27/146
Abstract: Chip packages and methods for forming the same are provided. The method includes providing a substrate having upper and lower surfaces, and having a chip region and a scribe-line region surrounding the chip region. The substrate has a dielectric layer on its upper surface. A masking layer is formed over the substrate to cover the dielectric layer. The masking layer has a first opening exposing the dielectric layer and extending in the extending direction of the scribe-line region to surround the chip region. An etching process is performed on the dielectric layer directly below the first opening, to form a second opening that is in the dielectric layer directly below the first opening. The masking layer is removed to expose the dielectric layer having the second opening. A dicing process is performed on the substrate through the second opening.
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公开(公告)号:US11942563B1
公开(公告)日:2024-03-26
申请号:US18327875
申请日:2023-06-01
Applicant: XINTEC INC.
Inventor: Chia-Sheng Lin , Hui-Hsien Wu , Jian-Hong Chen , Tsang-Yu Liu , Kuei-Wei Chen
IPC: H01L31/0352 , H01L31/02
CPC classification number: H01L31/03529 , H01L31/02005
Abstract: A manufacturing method of a chip package includes patterning a wafer to form a scribe trench, in which a light-transmissive function layer below the wafer is in the scribe trench, the light-transmissive function layer is between the wafer and a carrier, and a first included angle is formed between an outer wall surface and a surface of the wafer facing the light-transmissive function layer; cutting the light-transmissive function layer and the carrier along the scribe trench to form a chip package that includes a chip, the light-transmissive function layer, and the carrier; and patterning the chip to form an opening, in which the light-transmissive function layer is in the opening, a second included angle is formed between an inner wall surface of the chip and a surface of the chip facing the light-transmissive function layer, and is different from the first included angle.
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公开(公告)号:US11873212B2
公开(公告)日:2024-01-16
申请号:US17184443
申请日:2021-02-24
Applicant: XINTEC INC.
Inventor: Wei-Luen Suen , Jiun-Yen Lai , Hsing-Lung Shen , Tsang-Yu Liu
CPC classification number: B81B7/0067 , B81C1/00317 , B81B2203/0353 , B81C2201/0125 , B81C2201/0132 , B81C2201/0194
Abstract: A chip package includes a semiconductor substrate and a metal layer. The semiconductor substrate has an opening and a sidewall surrounding the opening, in which an upper portion of the sidewall is a concave surface. The semiconductor substrate is made of a material including silicon. The metal layer is located on the semiconductor substrate. The metal layer has plural through holes above the opening to define a MEMS (Microelectromechanical system) structure, in which the metal layer is made of a material including aluminum.
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公开(公告)号:US11476293B2
公开(公告)日:2022-10-18
申请号:US16950810
申请日:2020-11-17
Applicant: XINTEC INC.
Inventor: Yen-Shih Ho , Tsang-Yu Liu , Po-Han Lee
IPC: H01L27/146 , H01L23/00
Abstract: A manufacturing method of a chip package includes forming a temporary bonding layer on a carrier; forming an encapsulation layer on a top surface of a wafer or on the temporary bonding layer; bonding the carrier to the wafer, in which the encapsulation layer covers a sensor and a conductive pad of the wafer; patterning a bottom surface of the wafer to form a through hole, in which the conductive pad is exposed through the through hole; forming an isolation layer on the bottom surface of the wafer and a sidewall of the through hole; forming a redistribution layer on the isolation layer and the conductive pad that is in the through hole; forming a passivation layer on the isolation layer and the redistribution layer; and removing the temporary bonding layer and the carrier.
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公开(公告)号:US20210343591A1
公开(公告)日:2021-11-04
申请号:US17373773
申请日:2021-07-13
Applicant: XINTEC INC.
Inventor: Chia-Sheng Lin , Hui-Hsien Wu , Jian-Hong Chen , Tsang-Yu Liu , Kuei-Wei Chen
IPC: H01L21/768 , H01L23/00 , H01L21/02
Abstract: A manufacturing method of a chip package includes patterning a wafer to form a scribe trench, in which a light-transmissive function layer below the wafer is in the scribe trench, the light-transmissive function layer is between the wafer and a carrier, and a first included angle is formed between an outer wall surface and a surface of the wafer facing the light-transmissive function layer; cutting the light-transmissive function layer and the carrier along the scribe trench to form a chip package that includes a chip, the light-transmissive function layer, and the carrier; and patterning the chip to form an opening, in which the light-transmissive function layer is in the opening, a second included angle is formed between an inner wall surface of the chip and a surface of the chip facing the light-transmissive function layer, and is different from the first included angle.
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