Semiconductor Device and Method for Manufacturing the Same
    22.
    发明申请
    Semiconductor Device and Method for Manufacturing the Same 有权
    半导体装置及其制造方法

    公开(公告)号:US20090134399A1

    公开(公告)日:2009-05-28

    申请号:US12331679

    申请日:2008-12-10

    IPC分类号: H01L33/00 H01J1/62

    摘要: A manufacturing method of an active matrix light emitting device in which the active matrix light emitting device can be manufactured in a shorter time with high yield at low cost compared with conventional ones will be provided. It is a feature of the present invention that a layered structure is employed for a metal electrode which is formed in contact with or is electrically connected to a semiconductor layer of each TFT arranged in a pixel area of an active matrix light emitting device. Further, the metal electrode is partially etched and used as a first electrode of a light emitting element. A buffer layer, a layer containing an organic compound, and a second electrode layer are stacked over the first electrode.

    摘要翻译: 将提供一种有源矩阵发光器件的制造方法,其中有源矩阵发光器件可以在较短的时间内以较低的成本与常规的低成本制造。 本发明的特征在于,与配置在有源矩阵型发光元件的像素区域中的每个TFT的半导体层接触或电连接的金属电极采用分层结构。 此外,金属电极被部分蚀刻并用作发光元件的第一电极。 缓冲层,含有有机化合物的层和第二电极层层叠在第一电极上。

    Light-emitting device
    24.
    发明申请
    Light-emitting device 有权
    发光装置

    公开(公告)号:US20090001375A1

    公开(公告)日:2009-01-01

    申请号:US12213733

    申请日:2008-06-24

    IPC分类号: H01L29/04

    摘要: In a light-emitting device having an inverted staggered thin film transistor, the inverted staggered thin film transistor is formed as follows: a gate insulating film is formed over a gate electrode; a microcrystalline semiconductor film which functions as a channel formation region is formed over the gate insulating film; a buffer layer is formed over the microcrystalline semiconductor film; a pair of source and drain regions are formed over the buffer layer; and a pair of source and drain electrodes are formed in contact with the source and drain regions so as to expose a part of the source and drain regions.

    摘要翻译: 在具有反交错薄膜晶体管的发光器件中,反交错薄膜晶体管形成如下:在栅电极上形成栅极绝缘膜; 在栅绝缘膜上形成用作沟道形成区的微晶半导体膜; 在微晶半导体膜上形成缓冲层; 在缓冲层上形成一对源区和漏区; 并且形成与源区和漏区接触的一对源电极和漏电极,以便露出源区和漏区的一部分。

    Electro-Optical Device and Method of Manufacturing the Same
    25.
    发明申请
    Electro-Optical Device and Method of Manufacturing the Same 有权
    电光器件及其制造方法

    公开(公告)号:US20080106656A1

    公开(公告)日:2008-05-08

    申请号:US11958774

    申请日:2007-12-18

    IPC分类号: G02F1/133

    摘要: In a liquid crystal display device, gate lines and common lines are first concurrently formed, and after an interlayer film is formed, a pixel electrode, common electrodes, and source lines are formed at the same time. By this, a electrode pattern can be made simple and manufacturing steps are simplified. Further, wiring lines and electrode disposed in the layer closest to a liquid crystal layer are made the pixel electrode, common electrodes and source lines, and the shapes thereof are made simple.

    摘要翻译: 在液晶显示装置中,首先同时形成栅极线和公共线,并且在形成层间膜之后,同时形成像素电极,公共电极和源极线。 由此,可以使电极图案简单,并且简化制造步骤。 此外,布置在最靠近液晶层的层中的布线和电极被制成像素电极,公共电极和源极线,并且其形状变得简单。

    Light emitting device and method of manufacturing a semiconductor device
    26.
    发明授权
    Light emitting device and method of manufacturing a semiconductor device 有权
    发光元件及其制造方法

    公开(公告)号:US07317205B2

    公开(公告)日:2008-01-08

    申请号:US10238050

    申请日:2002-09-10

    IPC分类号: H01L29/94

    摘要: Semiconductor layers for serving as active layers of a plurality of thin film transistors in a pixel are arranged in the same direction and irradiated with laser light with the scanning direction matched to the channel length direction of the semiconductor layers. It is possible to coincide the crystal growth direction with the carrier moving direction, and high field effect mobility can be obtained. Also, semiconductor layers for serving as active layers of a plurality of thin film transistors in a driving circuit and in a CPU are arranged in the same direction, and are irradiated with laser light with the scanning direction matched to the channel length direction of the semiconductor layers.

    摘要翻译: 用于像素中的多个薄膜晶体管的有源层的半导体层以相同的方向布置,并且以与半导体层的沟道长度方向匹配的扫描方向的激光照射。 可以使晶体生长方向与载流子移动方向一致,可以获得高场效应迁移率。 此外,用于驱动电路和CPU中的多个薄膜晶体管的有源层的半导体层被布置在相同的方向上,并且以与半导体的沟道长度方向匹配的扫描方向的激光照射 层。

    Light emitting device and method of manufacturing the same
    28.
    发明授权
    Light emitting device and method of manufacturing the same 有权
    发光元件及其制造方法

    公开(公告)号:US07265391B2

    公开(公告)日:2007-09-04

    申请号:US10918419

    申请日:2004-08-16

    IPC分类号: H01L33/00

    摘要: To provide a light emitting device high in reliability with a pixel portion having high definition with a large screen. According to a light emitting device of the present invention, on an insulator (24) provided between pixel electrodes, an auxiliary electrode (21) made of a metal film is formed, whereby a conductive layer (20) made of a transparent conductive film in contact with the auxiliary electrode can be made low in resistance and thin. Also, the auxiliary electrode (21) is used to achieve connection with an electrode on a lower layer, whereby the electrode can be led out with the transparent conductive film formed on an EL layer. Further, a protective film (32) made of a film containing hydrogen and a silicon nitride film which are laminated is formed, whereby high reliability can be achieved.

    摘要翻译: 通过大屏幕提供具有高清晰度的像素部分的可靠性高的发光装置。 根据本发明的发光器件,在设置在像素电极之间的绝缘体(24)上形成由金属膜构成的辅助电极(21),由此形成由透明导电膜形成的导电层(20) 与辅助电极接触可以使电阻较小,薄。 此外,辅助电极(21)用于实现与下层电极的连接,由此可以用形成在EL层上的透明导电膜将电极引出。 此外,形成由层压的含有氢的膜和氮化硅膜构成的保护膜(32),由此可以实现高可靠性。

    Manufacturing method for wiring
    29.
    发明申请
    Manufacturing method for wiring 有权
    接线方法

    公开(公告)号:US20070167023A1

    公开(公告)日:2007-07-19

    申请号:US11715468

    申请日:2007-03-08

    摘要: In the case in which a film for a resist is formed by spin coating, there is a resist material to be wasted, and the process of edge cleaning is added as required. Further, when a thin film is formed on a substrate using a vacuum apparatus, a special apparatus or equipment to evacuate the inside of a chamber vacuum is necessary, which increases manufacturing cost. The invention is characterized by including: a step of forming conductive layers on a substrate having a dielectric surface in a selective manner with a CVD method, an evaporation method, or a sputtering method; a step of discharging a compound to form resist masks so as to come into contact with the conductive layer; a step of etching the conductive layers with plasma generating means using the resist masks under the atmospheric pressure or a pressure close to the atmospheric pressure; and a step of ashing the resist masks with the plasma generating means under the atmospheric pressure or a pressure close to the atmospheric pressure. With the above-mentioned characteristics, efficiency in use of a material is improved, and a reduction in manufacturing cost is realized.

    摘要翻译: 在通过旋涂形成抗蚀剂用膜的情况下,存在要浪费的抗蚀剂材料,根据需要添加边缘清洁处理。 此外,当使用真空装置在基板上形成薄膜时,需要用于抽真空室内的专用装置或设备,这增加了制造成本。 本发明的特征在于包括:通过CVD法,蒸发法或溅射法以选择性方式在具有电介质表面的基板上形成导电层的步骤; 将化合物排出以形成抗蚀剂掩模以与导电层接触的步骤; 在大气压或接近大气压的压力下使用抗蚀剂掩模的等离子体发生装置蚀刻导电层的步骤; 以及在大气压或接近大气压的压力下用等离子体产生装置对抗蚀剂掩模进行灰化的步骤。 利用上述特征,提高了材料的使用效率,实现了制造成本的降低。

    Light Emitting Device and Method of Manufacturing the Same
    30.
    发明申请
    Light Emitting Device and Method of Manufacturing the Same 有权
    发光装置及其制造方法

    公开(公告)号:US20070114921A1

    公开(公告)日:2007-05-24

    申请号:US11623618

    申请日:2007-01-16

    IPC分类号: H01J61/52 H01J1/62 H01J7/24

    摘要: To provide a light emitting device high in reliability with a pixel portion having high definition with a large screen. According to a light emitting device of the present invention, on an insulator (24) provided between pixel electrodes, an auxiliary electrode (21) made of a metal film is formed, whereby a conductive layer (20) made of a transparent conductive film in contact with the auxiliary electrode can be made low in resistance and thin. Also, the auxiliary electrode (21) is used to achieve connection with an electrode on a lower layer, whereby the electrode can be led out with the transparent conductive film formed on an EL layer. Further, a protective film (32) made of a film containing hydrogen and a silicon nitride film which are laminated is formed, whereby high reliability can be achieved.

    摘要翻译: 通过大屏幕提供具有高清晰度的像素部分的可靠性高的发光装置。 根据本发明的发光器件,在设置在像素电极之间的绝缘体(24)上形成由金属膜构成的辅助电极(21),由此形成由透明导电膜形成的导电层(20) 与辅助电极接触可以使电阻较小,薄。 此外,辅助电极(21)用于实现与下层电极的连接,由此可以用形成在EL层上的透明导电膜将电极引出。 此外,形成由层压的含有氢的膜和氮化硅膜构成的保护膜(32),由此可以实现高可靠性。