Pressure sensor employing semiconductor strain gauge
    23.
    发明授权
    Pressure sensor employing semiconductor strain gauge 失效
    采用半导体应变片的压力传感器

    公开(公告)号:US4480478A

    公开(公告)日:1984-11-06

    申请号:US466027

    申请日:1983-02-14

    CPC分类号: G01L9/065

    摘要: Four semiconductor strain gauges constitute a bridge circuit. This bridge circuit and a sensitivity temperature compensation circuit are connected in series, and a constant voltage is applied to the series circuit. The sensitivity temperature compensation circuit varies a voltage across the bridge circuit, depending upon temperatures. The constant voltage is divided to produce a predetermined voltage. The predetermined voltage is selected to be equal to the voltage of one output side node of the bridge circuit at the time when the semiconductor strain gauges are unstrained and at a predetermined temperature. The point of this voltage and the output side node are connected through a resistor so as to perform zero-point temperature compensation.

    摘要翻译: 四个半导体应变计构成桥接电路。 该桥式电路和灵敏度温度补偿电路串联连接,并向串联电路施加恒定电压。 灵敏度温度补偿电路根据温度改变桥接电路两端的电压。 将恒定电压分压以产生预定电压。 选择预定电压等于当半导体应变计未受限制并处于预定温度时桥接电路的一个输出侧节点的电压。 该电压和输出侧节点通过电阻连接,以进行零点温度补偿。

    Semiconductor strain gauge
    24.
    发明授权
    Semiconductor strain gauge 失效
    半导体应变计

    公开(公告)号:US4404539A

    公开(公告)日:1983-09-13

    申请号:US236934

    申请日:1981-02-23

    CPC分类号: G01L9/0054 G01L9/065

    摘要: A semiconductor strain gauge is arranged as a bridge having four piezoresistive elements which each include a low impurity concentration diffused portion and a heavily-doped diffused portion. The resistance values of the two low impurity concentration diffused portions opposite each other in the bridge are greater than the resistance values of the other two lower impurity concentration portions. The resistances of the heavily-doped diffused portion are selected so that the resistance of the piezoresistive elements are equal. However, by virtue of the fact that the resistance temperature coefficient of the low impurity portions are greater than the resistance temperature coefficients of the high impurity portions, the overall resistance temperature coefficients of the bridge arms will be different. This permits the zero-point voltage of the bridge to always increase with an increase in temperature.

    摘要翻译: 半导体应变仪布置为具有四个压阻元件的桥,每个压阻元件包括低杂质浓度扩散部分和重掺杂扩散部分。 在桥中彼此相对的两个低杂质浓度扩散部分的电阻值大于其它两个较低杂质浓度部分的电阻值。 选择重掺杂扩散部分的电阻,使得压阻元件的电阻相等。 然而,由于低杂质部分的电阻温度系数大于高杂质部分的电阻温度系数,所以桥臂的整体电阻温度系数将不同。 这允许桥接器的零点电压总是随着温度的升高而增加。

    Semiconductor pressure transducer
    25.
    发明授权
    Semiconductor pressure transducer 失效
    半导体压力传感器

    公开(公告)号:US4050313A

    公开(公告)日:1977-09-27

    申请号:US692368

    申请日:1976-06-03

    IPC分类号: G01L9/00 G01L9/06

    CPC分类号: G01L9/0054

    摘要: A semiconductor pressure transducer comprises a circular diaphragm formed of a single crystal semiconductor material, at least a first strain gauge element having a piezoresistance effect and formed by injecting an impurity into the diaphragm in a linear region extending in parallel with a predetermined axis which extends transversely of the surface of the diaphragm, at least a second strain gauge element having the piezoresistance effect and formed by injecting an impurity into the diaphragm in a linear region extending in the direction perpendicular to the axis, and means for securing the diaphragm at the outer peripheral portion thereof. The distance between the second strain gauge element and the center of the diaphragm is differed from the distance between the center of the first strain gauge element and the latter.

    摘要翻译: 半导体压力传感器包括由单晶半导体材料形成的圆形隔膜,至少第一应变计元件,具有压阻效应,并且通过在与横向延伸的预定轴线平行延伸的线性区域中注入杂质形成。 至少一个具有压电效应的第二应变计元件,并且通过在垂直于该轴线的方向上延伸的线性区域中将杂质注入到隔膜中而形成,以及用于将隔膜固定在外周的装置 部分。 第二应变计元件与隔膜的中心之间的距离与第一应变计元件的中心与后者之间的距离不同。