公开(公告)号：US20130009325A1

公开(公告)日：2013-01-10

申请号：US13635621

申请日：2011-01-25

申请人： Kentaro Mori ,  Shintaro Yamamichi ,  Hideya Murai ,  Katsumi Kikuchi ,  Yoshiki Nakashima ,  Daisuke Ohshima

发明人： Kentaro Mori ,  Shintaro Yamamichi ,  Hideya Murai ,  Katsumi Kikuchi ,  Yoshiki Nakashima ,  Daisuke Ohshima

IPC分类号： H01L23/48 ,  H01L21/56 ,  H01L21/768

CPC分类号： H05K1/185 ,  H01L23/49827 ,  H01L23/49838 ,  H01L23/5389 ,  H01L24/19 ,  H01L24/25 ,  H01L24/82 ,  H01L2224/0401 ,  H01L2224/04105 ,  H01L2224/16225 ,  H01L2224/18 ,  H01L2224/2518 ,  H01L2224/32225 ,  H01L2224/73259 ,  H01L2224/73267 ,  H01L2224/92244 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01023 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01042 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/10329 ,  H01L2924/12042 ,  H01L2924/15192 ,  H01L2924/3511 ,  H05K1/187 ,  H05K3/4602 ,  H05K2201/10674 ,  H05K2203/1469 ,  H01L2924/00

摘要： A semiconductor element-embedded substrate includes a semiconductor element; a chip component; a peripheral insulating layer covering at least the outer circumferential side surfaces thereof; an upper surface-side wiring line provided on the upper surface side of the substrate; and a lower surface-side wiring line provided on the lower surface side of the substrate. The built-in semiconductor element includes a terminal on the upper surface side thereof, and this terminal is electrically connected to the upper surface-side wiring line. The built-in chip component includes an upper surface-side terminal electrically connected to the upper surface-side wiring line; a lower surface-side terminal electrically connected to the lower surface-side wiring line;and a through-chip via penetrating through the chip component to connect the upper surface-side terminal and the lower surface-side terminal.

摘要翻译： 半导体元件嵌入式基板包括半导体元件; 芯片组件; 外周绝缘层，至少覆盖其外周侧面; 设置在基板的上表面侧的上表面侧配线; 以及设置在基板的下表面侧的下表面侧配线。 内置半导体元件包括在其上表面侧的端子，该端子与上表面侧布线电连接。 内置的芯片部件包括电连接到上表面侧布线的上表面侧端子; 电连接到下表面侧布线的下表面侧端子; 以及穿过芯片部件的贯通芯片，以连接上表面侧端子和下表面侧端子。

公开(公告)号：US08304915B2

公开(公告)日：2012-11-06

申请号：US13055372

申请日：2009-07-23

申请人： Kentaro Mori ,  Hideya Murai ,  Shintaro Yamamichi ,  Masaya Kawano ,  Koji Soejima

发明人： Kentaro Mori ,  Hideya Murai ,  Shintaro Yamamichi ,  Masaya Kawano ,  Koji Soejima

IPC分类号： H01L23/48 ,  H01L23/52 ,  H01L29/40

CPC分类号： H05K1/185 ,  H01L23/5389 ,  H01L24/19 ,  H01L2224/04105 ,  H01L2224/20 ,  H01L2224/32225 ,  H01L2224/32245 ,  H01L2224/73267 ,  H01L2224/92244 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/0102 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01033 ,  H01L2924/01038 ,  H01L2924/0104 ,  H01L2924/01041 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01056 ,  H01L2924/01057 ,  H01L2924/01058 ,  H01L2924/01073 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01084 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/181 ,  H01L2924/18162 ,  H01L2924/19041 ,  H01L2924/3511 ,  H05K1/115 ,  H05K3/4644 ,  H05K2201/0352 ,  H05K2201/10674 ,  H05K2203/0152 ,  H05K2203/0156 ,  H05K2203/063 ,  H05K2203/1469 ,  H01L2924/00

摘要： A semiconductor device includes a plural number of interconnects and a plural number of vias are stacked. A semiconductor element is enclosed in an insulation layer. At least one of the vias provided in insulation layers and/or at least one of interconnects provided in the interconnect layers are of cross-sectional shapes different from those of the vias formed in another one of the insulation layers and/or interconnects provided in another one of the interconnect layers.

摘要翻译： 半导体器件包括多个互连件，并且堆叠多个通孔。 半导体元件封装在绝缘层中。 提供在绝缘层中的至少一个通孔和/或设置在互连层中的至少一个互连件的横截面形状与在另一个绝缘层中提供的另一个绝缘层和/或互连中形成的通孔的截面形状不同 互连层之一。

公开(公告)号：US08043953B2

公开(公告)日：2011-10-25

申请号：US12521936

申请日：2008-01-15

申请人： Hideya Murai ,  Yuji Kayashima ,  Takehiko Maeda ,  Shintaro Yamamichi ,  Takuo Funaya

发明人： Hideya Murai ,  Yuji Kayashima ,  Takehiko Maeda ,  Shintaro Yamamichi ,  Takuo Funaya

IPC分类号： H01L21/44 ,  H01L21/4763

CPC分类号： H01L24/19 ,  B23K26/389 ,  H01L21/76802 ,  H01L23/5389 ,  H01L24/24 ,  H01L2224/0401 ,  H01L2224/04105 ,  H01L2224/1134 ,  H01L2224/13099 ,  H01L2224/20 ,  H01L2224/211 ,  H01L2224/24227 ,  H01L2224/32225 ,  H01L2224/73267 ,  H01L2224/92244 ,  H01L2924/00013 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/0106 ,  H01L2924/01079 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/1517 ,  H01L2924/3011 ,  H01L2924/00014

摘要： A semiconductor device that can be readily manufactured, can include a large number of pads, and can be thin, and a method for manufacturing the same are provided. The semiconductor device is characterized in that the semiconductor device includes an LSI chip, an insulating layer provided on the LSI chip and made of a nonphotosensitive resin, the insulating layer including a via hole in the position corresponding to an externally connected pad, and a wiring layer extending along the insulating layer through the via hole to the externally connected pad, and at least part of the via hole is formed by irradiating the insulating layer with laser light.

摘要翻译： 可以容易地制造的半导体器件可以包括大量的焊盘，并且可以是薄的，并且提供其制造方法。 半导体器件的特征在于，半导体器件包括LSI芯片，设置在LSI芯片上并由非感光树脂制成的绝缘层，所述绝缘层包括在与外部连接的焊盘相对应的位置中的通孔，以及布线 所述层通过所述通孔延伸到所述外部连接的焊盘，并且所述通孔的至少一部分通过用激光照射所述绝缘层而形成。

公开(公告)号：US20110136298A1

公开(公告)日：2011-06-09

申请号：US13026651

申请日：2011-02-14

申请人： Katsumi KIKUCHI ,  Shintaro YAMAMICHI ,  Hideya MURAI ,  Takuo FUNAYA ,  Kentaro MORI ,  Takehiko MAEDA ,  Hirokazu HONDA ,  Kenta OGAWA ,  Jun TSUKANO

发明人： Katsumi KIKUCHI ,  Shintaro YAMAMICHI ,  Hideya MURAI ,  Takuo FUNAYA ,  Kentaro MORI ,  Takehiko MAEDA ,  Hirokazu HONDA ,  Kenta OGAWA ,  Jun TSUKANO

IPC分类号： H01L21/60 ,  H05K3/46

CPC分类号： H05K3/205 ,  H01L21/4857 ,  H01L21/486 ,  H01L21/563 ,  H01L23/498 ,  H01L23/49822 ,  H01L23/49827 ,  H01L24/45 ,  H01L24/48 ,  H01L24/73 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/16225 ,  H01L2224/32225 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/48228 ,  H01L2224/48472 ,  H01L2224/73203 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2224/92247 ,  H01L2924/00014 ,  H01L2924/01019 ,  H01L2924/01046 ,  H01L2924/01057 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01322 ,  H01L2924/09701 ,  H01L2924/12044 ,  H01L2924/181 ,  H01L2924/19041 ,  H05K3/244 ,  H05K3/423 ,  H05K2201/0338 ,  H05K2201/098 ,  H05K2201/09845 ,  H05K2203/0376 ,  H05K2203/0384 ,  H05K2203/0733 ,  H05K2203/1476 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2224/05599 ,  H01L2224/45015 ,  H01L2924/207

摘要： A wiring board has an insulating layer, a plurality of wiring layers formed in such a way as to be insulated from each other by the insulating layer, and a plurality of vias formed in the insulating layer to connect the wiring layers. Of the wiring layers, a surface wiring layer formed in one surface of the insulating layer include a first metal film exposed from the one surface and a second metal film embedded in the insulating layer and stacked on the first metal film. Edges of the first metal film project from edges of the second metal film in the direction in which the second metal film spreads. By designing the shape of the wiring layers embedded in the insulating layer in this manner, it is possible to obtain a highly reliable wiring board that can be effectively prevented from side etching in the manufacturing process and can adapt to miniaturization and highly dense packaging of wires.

摘要翻译： 布线基板具有绝缘层，多个布线层以通过绝缘层彼此绝缘的方式形成，以及形成在绝缘层中以连接布线层的多个通孔。 在布线层中，形成在绝缘层的一个表面上的表面布线层包括从一个表面露出的第一金属膜和嵌入在绝缘层中并叠放在第一金属膜上的第二金属膜。 第一金属膜的边缘沿着第二金属膜扩展的方向从第二金属膜的边缘突出。 通过以这种方式设计嵌入在绝缘层中的布线层的形状，可以获得在制造过程中可以有效地防止侧蚀刻的高可靠性布线板，并且可以适应电线的小型化和高密度封装 。

公开(公告)号：US07889514B2

公开(公告)日：2011-02-15

申请号：US11544732

申请日：2006-10-10

申请人： Shintaro Yamamichi ,  Katsumi Kikuchi ,  Yoichiro Kurita ,  Koji Soejima

发明人： Shintaro Yamamichi ,  Katsumi Kikuchi ,  Yoichiro Kurita ,  Koji Soejima

IPC分类号： H05K1/11

CPC分类号： H01L23/49816 ,  H01L21/6835 ,  H01L23/5383 ,  H01L23/5386 ,  H01L24/81 ,  H01L24/97 ,  H01L25/0657 ,  H01L2221/68345 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/16 ,  H01L2224/16235 ,  H01L2224/81801 ,  H01L2224/97 ,  H01L2225/06517 ,  H01L2225/06572 ,  H01L2225/06586 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01038 ,  H01L2924/0104 ,  H01L2924/01056 ,  H01L2924/01057 ,  H01L2924/01072 ,  H01L2924/01073 ,  H01L2924/01082 ,  H01L2924/09701 ,  H01L2924/10329 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/15173 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/18161 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  H01L2924/30105 ,  H01L2924/00 ,  H01L2224/05599

摘要： A semiconductor device comprising a flat wiring board, a first LSI disposed on one surface of the wiring board, a sealing resin for covering the one surface and a side face of the first semiconductor element, and a second LSI disposed on another surface of the wiring board. The wiring board has conductive wiring as a wiring layer, an insulation resin as a support layer for the wiring layer, and a conductive through-hole that passes through the wiring layer and the support layer. Connection points between lands disposed in positions in which the external peripheral edges of the semiconductor elements transverse the interior of the lands as viewed vertically from above, which lands are selected from land portions on which the external connection terminals are formed, and the wiring board formed in the same plane as the lands, are unevenly distributed toward one side of the wiring board. Connections for very small wiring are thereby made possible, and a plurality of semiconductor elements can be very densely connected.

摘要翻译： 一种半导体器件，包括平面布线板，布置在所述布线板的一个表面上的第一LSI，用于覆盖所述一个表面的密封树脂和所述第一半导体元件的侧面，以及设置在所述布线的另一个表面上的第二LSI 板。 布线基板具有作为布线层的导电布线，作为布线层的支撑层的绝缘树脂，以及穿过布线层和支撑层的导电性通孔。 半导体元件的外周边缘从上方垂直观察到的焊盘的内部的位置之间的连接点，其中所述焊盘从形成有外部连接端子的焊盘部分选择，并且形成了布线板 在与地面相同的平面中，不均匀地分布在布线板的一侧。 由此，可以实现非常小的布线的连接，并且可以非常密集地连接多个半导体元件。

公开(公告)号：US07674989B2

公开(公告)日：2010-03-09

申请号：US11449673

申请日：2006-06-09

申请人： Katsumi Kikuchi ,  Shintaro Yamamichi ,  Hideya Murai ,  Takuo Funaya ,  Takehiko Maeda ,  Hirokazu Honda ,  Kenta Ogawa ,  Jun Tsukano

发明人： Katsumi Kikuchi ,  Shintaro Yamamichi ,  Hideya Murai ,  Takuo Funaya ,  Takehiko Maeda ,  Hirokazu Honda ,  Kenta Ogawa ,  Jun Tsukano

IPC分类号： H01R12/04

CPC分类号： H05K1/115 ,  H05K3/0035 ,  H05K3/4069 ,  H05K3/421 ,  H05K3/4644 ,  H05K2201/09509 ,  H05K2201/09854 ,  H05K2203/1476 ,  Y10T29/49165

摘要： A wiring board for mounting a semiconductor element or electronic component having a plurality of wiring layers, an insulating layer provided between these wiring layers, and a via which is provided to the insulating layer and which electrically connects the wiring layers. In this wiring board, the cross-sectional shape of the via in the plane parallel to the wiring layers is obtained by the partial overlapping of a plurality of similar shapes (circles). Stable operation can be obtained in a semiconductor element by minimizing obstacles to increased density, effectively increasing the cross-sectional area of the via, and preventing the wiring resistance from increasing by making the cross-sectional shape of the via into a shape obtained by the partial overlapping of a plurality of similar shapes.

摘要翻译： 一种用于安装具有多个布线层的半导体元件或电子元件的布线板，设置在这些布线层之间的绝缘层，以及设置在绝缘层上并将布线层电连接的通孔。 在该布线板中，通过多个相似形状（圆圈）的部分重叠，获得与布线层平行的平面中的通孔的截面形状。 通过最小化增加密度的障碍物，有效地增加通孔的横截面积，并且通过使通孔的横截面形状成为由通孔形成的形状来防止布线电阻增加，可以在半导体元件中获得稳定的操作 多个类似形状的部分重叠。

公开(公告)号：US20090315190A1

公开(公告)日：2009-12-24

申请号：US12306987

申请日：2007-06-29

申请人： Katsumi Kikuchi ,  Shintaro Yamamichi ,  Hideya Murai ,  Takuo Funaya ,  Kentaro Mori ,  Takehiko Maeda ,  Hirokazu Honda ,  Kenta Ogawa ,  Jun Tsukano

发明人： Katsumi Kikuchi ,  Shintaro Yamamichi ,  Hideya Murai ,  Takuo Funaya ,  Kentaro Mori ,  Takehiko Maeda ,  Hirokazu Honda ,  Kenta Ogawa ,  Jun Tsukano

IPC分类号： H01L23/538 ,  H05K1/11 ,  H01L21/60 ,  H01L21/31

CPC分类号： H05K3/205 ,  H01L21/4857 ,  H01L21/486 ,  H01L21/563 ,  H01L23/498 ,  H01L23/49822 ,  H01L23/49827 ,  H01L24/45 ,  H01L24/48 ,  H01L24/73 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/16225 ,  H01L2224/32225 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/48228 ,  H01L2224/48472 ,  H01L2224/73203 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2224/92247 ,  H01L2924/00014 ,  H01L2924/01019 ,  H01L2924/01046 ,  H01L2924/01057 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01322 ,  H01L2924/09701 ,  H01L2924/12044 ,  H01L2924/181 ,  H01L2924/19041 ,  H05K3/244 ,  H05K3/423 ,  H05K2201/0338 ,  H05K2201/098 ,  H05K2201/09845 ,  H05K2203/0376 ,  H05K2203/0384 ,  H05K2203/0733 ,  H05K2203/1476 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2224/05599 ,  H01L2224/45015 ,  H01L2924/207

摘要： A wiring board has an insulating layer, a plurality of wiring layers formed in such a way as to be insulated from each other by the insulating layer, and a plurality of vias formed in the insulating layer to connect the wiring layers. Of the wiring layers, a surface wiring layer formed in one surface of the insulating layer include a first metal film exposed from the one surface and a second metal film embedded in the insulating layer and stacked on the first metal film. Edges of the first metal film project from edges of the second metal film in the direction in which the second metal film spreads. By designing the shape of the wiring layers embedded in the insulating layer in this manner, it is possible to obtain a highly reliable wiring board that can be effectively prevented from side etching in the manufacturing process and can adapt to miniaturization and highly dense packaging of wires.

摘要翻译： 布线基板具有绝缘层，多个布线层以通过绝缘层彼此绝缘的方式形成，以及形成在绝缘层中以连接布线层的多个通孔。 在布线层中，形成在绝缘层的一个表面上的表面布线层包括从一个表面露出的第一金属膜和嵌入在绝缘层中并叠放在第一金属膜上的第二金属膜。 第一金属膜的边缘沿着第二金属膜扩展的方向从第二金属膜的边缘突出。 通过以这种方式设计嵌入在绝缘层中的布线层的形状，可以获得在制造过程中可以有效地防止侧蚀刻的高可靠性布线板，并且可以适应电线的小型化和高密度封装 。

公开(公告)号：US20080303136A1

公开(公告)日：2008-12-11

申请号：US12135355

申请日：2008-06-09

申请人： Kentaro Mori ,  Shintaro Yamamichi ,  Hideya Murai ,  Takuo Funaya ,  Masaya Kawano ,  Takehiko Maeda ,  Kouji Soejima

发明人： Kentaro Mori ,  Shintaro Yamamichi ,  Hideya Murai ,  Takuo Funaya ,  Masaya Kawano ,  Takehiko Maeda ,  Kouji Soejima

IPC分类号： H01L23/15 ,  H01L21/58

CPC分类号： H01L21/6835 ,  H01L23/5389 ,  H01L23/544 ,  H01L24/19 ,  H01L24/24 ,  H01L2221/68345 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54473 ,  H01L2223/54486 ,  H01L2224/04105 ,  H01L2224/24226 ,  H01L2224/32225 ,  H01L2224/73267 ,  H01L2224/82039 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01038 ,  H01L2924/0104 ,  H01L2924/01041 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01056 ,  H01L2924/01057 ,  H01L2924/01073 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/12044 ,  H01L2924/15174 ,  H01L2924/15788 ,  H01L2924/181 ,  H01L2924/18162 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  H01L2924/3011 ,  Y10S438/977 ,  H01L2924/00

摘要： A transparent board is positioned on a support board provided with a positioning mark, and a release material is provided. A semiconductor element is then positioned so that the electrode element faces upward, and the support board is then removed. An insulating resin is then formed on the release material so as to cover the semiconductor element; and a via, a wiring layer, an insulation layer, an external terminal, and a solder resist are then formed. The transparent board is then peeled from the semiconductor device through the use of the release material. A chip can thereby be mounted with high precision, there is no need to provide a positioning mark during mounting of the chip on the substrate in the manufacturing process, and the substrate can easily be removed. As a result, a semiconductor device having high density and a thin profile can be manufactured at low cost.

摘要翻译： 透明板位于设置有定位标记的支撑板上，并且设置有释放材料。 然后将半导体元件定位成使得电极元件面向上，然后移除支撑板。 然后在剥离材料上形成绝缘树脂以覆盖半导体元件; 然后形成通孔，布线层，绝缘层，外部端子和阻焊剂。 然后透明板通过使用释放材料从半导体器件剥离。 因此，可以高精度地安装芯片，在制造过程中不需要在将芯片安装在基板上时提供定位标记，并且可以容易地去除基板。 结果，可以以低成本制造具有高密度和薄型的半导体器件。

公开(公告)号：US20080136020A1

公开(公告)日：2008-06-12

申请号：US11790155

申请日：2007-04-24

申请人： Koji Soejima ,  Yoichiro Kurita ,  Masaya Kawano ,  Shintaro Yamamichi ,  Katsumi Kikuchi

发明人： Koji Soejima ,  Yoichiro Kurita ,  Masaya Kawano ,  Shintaro Yamamichi ,  Katsumi Kikuchi

IPC分类号： H01L23/488 ,  H01L21/44

CPC分类号： H01L21/563 ,  H01L21/6835 ,  H01L24/81 ,  H01L25/0657 ,  H01L2221/68345 ,  H01L2224/0554 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/1147 ,  H01L2224/131 ,  H01L2224/16225 ,  H01L2224/16235 ,  H01L2224/32225 ,  H01L2224/73203 ,  H01L2224/73204 ,  H01L2224/8121 ,  H01L2224/81815 ,  H01L2225/06572 ,  H01L2225/06586 ,  H01L2924/00013 ,  H01L2924/00014 ,  H01L2924/01021 ,  H01L2924/01046 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/15311 ,  H01L2924/014 ,  H01L2224/13099 ,  H01L2924/00 ,  H01L2224/05599 ,  H01L2224/0555 ,  H01L2224/0556

摘要： A first electronic circuit component and a second electronic circuit component are electrically connected to an electro-conductive member via a first solder and a second solder, respectively. The electro-conductive member is formed in a resin film. The electro-conductive member is configured as containing a second diffusion barrier metal film. The second diffusion barrier metal film prevents diffusion of the second solder. Between the electro-conductive member and the first solder, a first diffusion barrier metal film is provided. The first diffusion barrier metal film prevents diffusion of the first solder. On the first surface of the resin film and on the electro-conductive member, an adhesive metal film is formed so as to contact with the resin film and the electro-conductive member. The adhesive metal film has stronger adhesiveness to the resin film than either of those of the first solder and the first diffusion barrier metal film.

摘要翻译： 第一电子电路部件和第二电子电路部件分别经由第一焊料和第二焊料电连接到导电部件。 导电构件形成在树脂膜中。 导电构件被构造成包含第二扩散阻挡金属膜。 第二扩散阻挡金属膜防止第二焊料的扩散。 在导电构件和第一焊料之间设置有第一扩散阻挡金属膜。 第一扩散阻挡金属膜防止第一焊料的扩散。 在树脂膜的第一表面和导电部件上形成粘接金属膜，以与树脂膜和导电部件接触。 粘合金属膜比第一焊料和第一扩散阻挡金属膜中的任一种具有比树脂膜更强的粘附性。

公开(公告)号：US07348673B2

公开(公告)日：2008-03-25

申请号：US11180729

申请日：2005-07-14

申请人： Katsumi Kikuchi ,  Shintaro Yamamichi ,  Hideya Murai ,  Hirokazu Honda ,  Koji Soejima ,  Shinichi Miyazaki

发明人： Katsumi Kikuchi ,  Shintaro Yamamichi ,  Hideya Murai ,  Hirokazu Honda ,  Koji Soejima ,  Shinichi Miyazaki

IPC分类号： H01L23/48

CPC分类号： H01L23/528 ,  H01L23/3114 ,  H01L23/5286 ,  H01L2924/0002 ,  H01L2924/3011 ,  H01L2924/00

摘要： A minute wiring structure portion including first wiring layers and first insulating layers, in which each of first wiring layers and each of first insulating layers are alternately laminated, is formed on a semiconductor substrate. A first huge wiring structure portion is formed on the minute wiring structure portion, and the first huge wiring structure portion is formed by successively forming on the minute wiring structure portion, in the following order, the first huge wiring portion including second wiring layers has a thickness of twice or more of the thickness of the first wiring layers and second insulating layers, in which each of second wiring layers and each of second wiring layers are alternately laminated, and a second huge wiring structure portion including third wiring layers has a thickness of twice or more of the thickness of the first wiring layer and a third insulating layer in which the elastic modulus at 25° C. is not more than that of the second insulating layers, each of the third wiring layers and each of the third insulating layers being alternately laminated.

摘要翻译： 在半导体基板上形成包括第一布线层和第一绝缘层的微小布线结构部分，其中第一布线层和每个第一绝缘层交替层叠。 第一巨型布线结构部分形成在微小布线结构部分上，并且第一巨大的布线结构部分通过在微小的布线结构部分上依次形成，按照以下顺序形成包括第二布线层的第一巨大布线部分具有 其中第二布线层和每个第二布线层交替层叠的第一布线层和第二绝缘层的厚度的两倍或更多的厚度，以及包括第三布线层的第二巨大布线结构部分的厚度为 第一布线层的厚度的2倍以上，25℃下的弹性模量不大于第2绝缘层的弹性模量的第3绝缘层，第3布线层和第3绝缘层 交替层压。