LASER-ASSISTED METHOD FOR PARTING CRYSTALLINE MATERIAL

    公开(公告)号:US20200316724A1

    公开(公告)日:2020-10-08

    申请号:US16909299

    申请日:2020-06-23

    Applicant: Cree, Inc.

    Abstract: A method for processing a crystalline substrate to form multiple patterns of subsurface laser damage facilitates subsequent fracture of the substrate to yield first and second substrate portions of reduced thickness. Multiple (e.g., two, three, or more) groups of parallel lines of multiple subsurface laser damage patterns may be sequentially interspersed with one another, with at least some lines of different groups not crossing one another. Certain implementations include formation of multiple subsurface laser damage patterns including groups of parallel lines that are non-parallel to one another, but with each line remaining within ±5 degrees of perpendicular to the direction of a hexagonal crystal structure of a material of the substrate. Further methods involve formation of initial and subsequent subsurface laser damage patterns that are centered at different depths within an interior of a substrate, with the subsurface laser damage patterns being registered with one another and having vertical extents that are overlapping.

    CARRIER-ASSISTED METHOD FOR PARTING CRYSTALLINE MATERIAL ALONG LASER DAMAGE REGION

    公开(公告)号:US20200211850A1

    公开(公告)日:2020-07-02

    申请号:US16274045

    申请日:2019-02-12

    Applicant: Cree, Inc.

    Abstract: A method for removing a portion of a crystalline material (e.g., SiC) substrate includes joining a surface of the substrate to a rigid carrier (e.g., >800 μm thick), with a subsurface laser damage region provided within the substrate at a depth relative to the surface. Adhesive material having a glass transition temperature above 25° C. may bond the substrate to the carrier. The crystalline material is fractured along the subsurface laser damage region to produce a bonded assembly including the carrier and a portion of the crystalline material. Fracturing of the crystalline material may be promoted by (i) application of a mechanical force proximate to at least one carrier edge to impart a bending moment in the carrier; (ii) cooling the carrier when the carrier has a greater coefficient of thermal expansion than the crystalline material; and/or (iii) applying ultrasonic energy to the crystalline material.

    Laser-assisted method for parting crystalline material

    公开(公告)号:US10576585B1

    公开(公告)日:2020-03-03

    申请号:US16274064

    申请日:2019-02-12

    Applicant: Cree, Inc.

    Abstract: A method for processing a crystalline substrate to form multiple patterns of subsurface laser damage facilitates subsequent fracture of the substrate to yield first and second substrate portions of reduced thickness. Multiple (e.g., two, three, or more) groups of parallel lines of multiple subsurface laser damage patterns may be sequentially interspersed with one another, with at least some lines of different groups not crossing one another. Certain implementations include formation of multiple subsurface laser damage patterns including groups of parallel lines that are non-parallel to one another, but with each line remaining within ±5 degrees of perpendicular to the direction of a hexagonal crystal structure of a material of the substrate. Further methods involve formation of initial and subsequent subsurface laser damage patterns that are centered at different depths within an interior of a substrate, with the subsurface laser damage patterns being registered with one another and having vertical extents that are overlapping.

    Phosphor-converted light emitting device

    公开(公告)号:US10283681B2

    公开(公告)日:2019-05-07

    申请号:US14120297

    申请日:2014-05-14

    Applicant: Cree, Inc.

    Abstract: A phosphor-converted light emitting device includes a light emitting diode (LED) on a substrate, where the LED comprises a stack of epitaxial layers comprising a p-n junction. A wavelength conversion material is in optical communication with the LED. According to one embodiment of the phosphor-converted light emitting device, a selective filter is adjacent to the wavelength conversion material, and the selective filter comprises a plurality of nanoparticles for absorbing light from the LED not down-converted by the wavelength conversion material. According to another embodiment of the phosphor-converted light emitting device, a perpendicular distance between a perimeter of the LED on the substrate and an edge of the substrate is at least about 24 microns. According to another embodiment of the phosphor-converted light emitting device, the LED comprises a mirror layer on one or more sidewalls thereof for reducing light leakage through the sidewalls.

    METHODS OF FABRICATING LIGHT EMITTING DIODES BY MASKING AND WET CHEMICAL ETCHING
    37.
    发明申请
    METHODS OF FABRICATING LIGHT EMITTING DIODES BY MASKING AND WET CHEMICAL ETCHING 审中-公开
    通过掩蔽和湿化学蚀刻来制造发光二极管的方法

    公开(公告)号:US20150037918A1

    公开(公告)日:2015-02-05

    申请号:US14519746

    申请日:2014-10-21

    Applicant: Cree, Inc.

    Inventor: Matthew Donofrio

    Abstract: An LED includes a mesa having a Group III Nitride mesa face and a mesa sidewall, on an underlying LED structure. The mesa face includes Group III Nitride surface features having tops that are defined by mask features, having bottoms, and having sides that extend along crystal planes of the Group III Nitride. The mask features may include a two-dimensional array of dots that are spaced apart from one another. Related fabrication methods are also disclosed.

    Abstract translation: LED包括在下面的LED结构上具有III族氮化物台面和台面侧壁的台面。 台面包括III型氮化物表面特征,其具有由掩模特征限定的顶部,具有底部,并且具有沿III族氮化物的晶面延伸的侧面。 掩模特征可以包括彼此间隔开的二维点阵列。 还公开了相关的制造方法。

    Light emitting diodes having group III nitride surface features defined by a mask and crystal planes
    38.
    发明授权
    Light emitting diodes having group III nitride surface features defined by a mask and crystal planes 有权
    具有由掩模和晶体平面限定的III族氮化物表面特征的发光二极管

    公开(公告)号:US08896008B2

    公开(公告)日:2014-11-25

    申请号:US13868361

    申请日:2013-04-23

    Applicant: Cree, Inc.

    Inventor: Matthew Donofrio

    Abstract: An LED includes a mesa having a Group III Nitride mesa face and a mesa sidewall, on an underlying LED structure. The mesa face includes Group III Nitride surface features having tops that are defined by mask features, having bottoms, and having sides that extend along crystal planes of the Group III Nitride. The mask features may include a two-dimensional array of dots that are spaced apart from one another. Related fabrication methods are also disclosed.

    Abstract translation: LED包括在下面的LED结构上具有III族氮化物台面和台面侧壁的台面。 台面包括III型氮化物表面特征,其具有由掩模特征限定的顶部,具有底部,并且具有沿III族氮化物的晶面延伸的侧面。 掩模特征可以包括彼此间隔开的二维点阵列。 还公开了相关的制造方法。

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