Liquid phase epitaxial film growth apparatus
    41.
    发明授权
    Liquid phase epitaxial film growth apparatus 失效
    液相外延膜生长装置

    公开(公告)号:US5264190A

    公开(公告)日:1993-11-23

    申请号:US866489

    申请日:1992-04-10

    Abstract: An apparatus for liquid phase epitaxial film growth includes a mother boat for supporting a substrate, a melt boat slidable on the mother boat for containing a melt and selectively bringing the substrate and the melt into contact, and a lid for opening and closing the melt boat. The mother boat is disposed in a quartz tube and push rods extend into the tube for sliding the lid to open and close the melt boat.

    Abstract translation: 一种用于液相外延膜生长的装置包括用于支撑基底的母船,可在母船上滑动以容纳熔体并且选择性地使基底和熔体接触的熔体舟和用于打开和关闭熔体舟的盖 。 母船设置在石英管中,推杆延伸到管中以滑动盖以打开和关闭熔体船。

    HgMnCdTe avalanche photodiode
    43.
    发明授权
    HgMnCdTe avalanche photodiode 失效
    HgMnCdTe雪崩光电二极管

    公开(公告)号:US4862236A

    公开(公告)日:1989-08-29

    申请号:US227585

    申请日:1988-08-02

    Abstract: A semiconducting photodiode for detecting light at a predetermined wavelength includes a first semiconducing region having a first conductivity type which is a quaternary alloy of Hg, Mn, Cd, and Te. A second semiconducting region having a second conductivity type electrically contacts the first semiconducting region, such that a semiconducting junction is formed between the first and second regions. The relative proportions of Hg, Mn, and Cd in the first region are selected so that the bandgap energy of the first region is approximately equal to the spin orbit splitting energy of the first region at the desired wavelength.

    Abstract translation: 用于检测预定波长的光的半导体光电二极管包括具有第一导电类型的第一半导体区域,其是Hg,Mn,Cd和Te的四元合金。 具有第二导电类型的第二半导电区域电接触第一半导体区域,使得在第一和第二区域之间形成半导体结。 选择第一区域中Hg,Mn和Cd的相对比例,使得第一区域的带隙能近似等于所需波长处的第一区域的自旋轨道分裂能。

    Non isothermal method for epitaxially growing HgCdTe
    44.
    发明授权
    Non isothermal method for epitaxially growing HgCdTe 失效
    HgCdTe外延生长的非等温方法

    公开(公告)号:US4648917A

    公开(公告)日:1987-03-10

    申请号:US769909

    申请日:1985-08-26

    Abstract: A layer of HgCdTe (15) is epitaxially grown onto a CdTe substrate (5). A HgTe source (3) is spaced from the CdTe substrate (5) a distance of between 0.1 mm and 10 mm. The substrate (5) and source (3) are heated within a temperature range of between 500.degree. C. and 625.degree. C. for a processing step having a duration of between 5 minutes and 4 hours. During at least 5 minutes of this processing step, the substrate (5) is made to have a greater temperature than the source (3). Preferably the substrate (5) is never at a lower temperature than the source (3). The source (3) and substrate (5) are heated together in a thermally insulating, reusable ampoule (17). The CdTe substrate (5) is preferably a thin film epitaxially grown on a support (10) e.g., of sapphire or GaAs. When support (10) is not used, the CdTe substrate (5) is polished; and sublimation and solid state diffusion growth mechanisms are present in the growth of the HgCdTe (15). Means are disclosed for preventing contamination of the reactants during HgTe (3) synthesis and bulk CdTe wafer (5) polishing.

    Abstract translation: 一层HgCdTe(15)外延生长到CdTe基板(5)上。 HgTe源(3)与CdTe衬底(5)间隔0.1mm至10mm的距离。 将衬底(5)和源(3)在500℃至625℃的温度范围内加热,以进行持续时间为5分钟至4小时的加工步骤。 在该处理步骤的至少5分钟内,使基板(5)具有比源(3)更大的温度。 优选地,衬底(5)从不比源(3)低的温度。 源(3)和衬底(5)在隔热,可重复使用的安瓿(17)中一起加热。 CdTe衬底(5)优选是外延生长在例如蓝宝石或GaAs的载体(10)上的薄膜。 当不使用支撑体(10)时,对CdTe基板(5)进行抛光; 并且HgCdTe(15)的生长中存在升华和固态扩散生长机制。 公开了用于在HgTe(3)合成和体积CdTe晶片(5)抛光期间防止反应物污染的手段。

    CdTe passivation of HgCdTe by electrochemical deposition
    45.
    发明授权
    CdTe passivation of HgCdTe by electrochemical deposition 失效
    通过电化学沉积对HgCdTe的CdTe钝化

    公开(公告)号:US4465565A

    公开(公告)日:1984-08-14

    申请号:US479545

    申请日:1983-03-28

    Inventor: Kenneth R. Zanio

    Abstract: A thin passivating layer (14) of CdTe is formed on a layer of photoconductive HgCdTe (4) by means of electrochemical deposition. The photoconductive layer (4) is used as a cathode. A first anode (26) is fabricated of tellurium and a second anode (28) is fabricated of an inert substance such as graphite. An electrolyte (30) comprises an aqueous solution of CdSO.sub.4 and unsaturated TeO.sub.2. Alternatively, electrolyte (30) can be saturated with TeO.sub.2, in which case a first anode is fabricated of an inert substance, and an optional second anode is fabricated of cadmium. After purifying the cathode (1) and the electrolyte (30), cadmium and tellurium are simultaneously deposited upon cathode (1). Stoichiometric balance is maintained to maximize the resistivity of the passivating CdTe layer (14). This is accomplished by regulating the deposition voltage of cathode (1) with respect to a saturated calomel electrode (22). In a first embodiment, an n-type region (16) is formed in the p-type photoconductive layer (4) subsequent to electrochemical deposition of the passivating CdTe layer (14). In a second embodiment, the n-type region (16) is formed in the p-type layer (4) prior to electrochemical deposition of the CdTe passivating layer (14).

    Abstract translation: 通过电化学沉积在一层光导的HgCdTe(4)上形成一个CdTe薄的钝化层(14)。 光电导层(4)用作阴极。 第一阳极(26)由碲制成,第二阳极(28)由惰性物质如石墨制成。 电解质(30)包含CdSO 4水溶液和不饱和TeO 2。 或者,电解质(30)可以用TeO 2饱和,在这种情况下,第一阳极由惰性物质制成,并且任选的第二阳极由镉制成。 纯化阴极(1)和电解质(30)后,镉和碲同时沉积在阴极(1)上。 维持化学计量平衡以使钝化CdTe层(14)的电阻率最大化。 这通过调节阴极(1)相对于饱和甘汞电极(22)的沉积电压来实现。 在第一实施例中,在钝化CdTe层(14)的电化学沉积之后,在p型光电导层(4)中形成n型区域(16)。 在第二实施例中,在电化学沉积CdTe钝化层(14)之前,在p型层(4)中形成n型区域(16)。

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