Scribe line metal structure
    51.
    发明授权
    Scribe line metal structure 有权
    划线金属结构

    公开(公告)号:US08368180B2

    公开(公告)日:2013-02-05

    申请号:US12619464

    申请日:2009-11-16

    IPC分类号: H01L23/544

    CPC分类号: H01L21/78

    摘要: A system and method for preventing defaults during singulation is presented. An embodiment comprises a dummy metal structure located in the scribe region. The dummy metal structure comprises a series of alternating dummy lines that are connected through dummy vias. The dummy lines are offset from dummy lines in adjacent metal layers. Additionally, the dummy lines and dummy vias in the upper layers of the scribe line may be formed with larger dimensions than the dummy lines and dummy vias located in the lower layers.

    摘要翻译: 提出了一种在分割过程中防止违约的系统和方法。 一个实施例包括位于划线区域中的虚拟金属结构。 虚拟金属结构包括通过虚拟通孔连接的一系列交替虚拟线。 伪线与相邻金属层中的虚拟线偏移。 此外,划线的上层中的虚拟线和虚拟通路可以形成为具有比位于下层中的虚拟线和虚拟通孔更大的尺寸。

    Seal ring structure with improved cracking protection
    54.
    发明授权
    Seal ring structure with improved cracking protection 有权
    密封环结构具有改进的开裂保护

    公开(公告)号:US08125052B2

    公开(公告)日:2012-02-28

    申请号:US11842821

    申请日:2007-08-21

    IPC分类号: H01L23/00

    摘要: An integrated circuit structure includes a semiconductor chip comprising a plurality of dielectric layers, wherein the plurality of dielectric layers includes a top dielectric layer; and a first seal ring adjacent edges of the semiconductor chip. The integrated circuit structure further includes a first passivation layer over a top dielectric layer; and a trench extending from a top surface of the first passivation layer into the first passivation layer, wherein the trench substantially forms a ring. Each side of the ring is adjacent to a respective edge of the semiconductor chip. At least one of the plurality of vias has a width greater than about 70 percent of a width of a respective overlying metal line in the plurality of metal lines.

    摘要翻译: 集成电路结构包括包括多个电介质层的半导体芯片,其中所述多个电介质层包括顶部电介质层; 以及与所述半导体芯片的边缘相邻的第一密封环。 集成电路结构还包括在顶部介电层上的第一钝化层; 以及从所述第一钝化层的顶表面延伸到所述第一钝化层中的沟槽,其中所述沟槽基本上形成环。 环的每一侧与半导体芯片的相应边缘相邻。 所述多个通孔中的至少一个具有大于所述多个金属线中相应的上覆金属线的宽度的约70%的宽度。

    Metal electrical fuse structure
    57.
    发明授权
    Metal electrical fuse structure 有权
    金属电熔丝结构

    公开(公告)号:US07651893B2

    公开(公告)日:2010-01-26

    申请号:US11320233

    申请日:2005-12-27

    IPC分类号: H01L21/82

    摘要: An electrical fuse and a method for forming the same are provided. The electrical fuse includes a dielectric layer over a shallow trench isolation region and a contact plug extending from a top surface of the dielectric layer to the shallow trench isolation region, wherein the contact plug comprises a middle portion substantially narrower than the two end portions. The contact plug forms a fuse element. The electrical fuse further includes two metal lines in a metallization layer on the dielectric layer, wherein each of the two metal lines is connected to different ones of the end portions of the contact plug.

    摘要翻译: 提供电熔丝及其形成方法。 电熔丝包括在浅沟槽隔离区域上的电介质层和从电介质层的顶表面延伸到浅沟槽隔离区域的接触插塞,其中接触插塞包括基本上比两个端部部分窄的中间部分。 接触插头形成熔丝元件。 电熔丝还包括在电介质层上的金属化层中的两条金属线,其中两条金属线中的每一条连接到接触插塞的不同端部。

    Seal Ring in Semiconductor Device
    58.
    发明申请
    Seal Ring in Semiconductor Device 有权
    半导体器件中的密封环

    公开(公告)号:US20090140391A1

    公开(公告)日:2009-06-04

    申请号:US12042573

    申请日:2008-03-05

    IPC分类号: H01L23/02

    摘要: A semiconductor device includes a first circuit, a first seal ring and at least one first notch. The first seal ring surrounds the first circuit. The first notch cuts the first seal ring. Specifically, the first notch includes an inner opening, an outer opening and a connecting groove. The inner opening is located on the inner side of the first seal ring. The outer opening is located on the outer side of the first seal ring. The outer opening and the inner opening are not aligned. The connecting groove connects the inner opening and the outer opening.

    摘要翻译: 半导体器件包括第一电路,第一密封环和至少一个第一凹口。 第一密封环围绕第一回路。 第一个切口切割第一个密封圈。 具体而言,第一凹口包括内部开口,外部开口和连接凹槽。 内部开口位于第一密封环的内侧。 外部开口位于第一密封环的外侧。 外部开口和内部开口未对齐。 连接槽连接内部开口和外部开口。

    Metal electrical fuse structure
    60.
    发明申请
    Metal electrical fuse structure 有权
    金属电熔丝结构

    公开(公告)号:US20070145515A1

    公开(公告)日:2007-06-28

    申请号:US11320233

    申请日:2005-12-27

    IPC分类号: H01L29/00

    摘要: An electrical fuse and a method for forming the same are provided. The electrical fuse includes a dielectric layer over a shallow trench isolation region and a contact plug extending from a top surface of the dielectric layer to the shallow trench isolation region, wherein the contact plug comprises a middle portion substantially narrower than the two end portions. The contact plug forms a fuse element. The electrical fuse further includes two metal lines in a metallization layer on the dielectric layer, wherein each of the two metal lines is connected to different ones of the end portions of the contact plug.

    摘要翻译: 提供电熔丝及其形成方法。 电熔丝包括在浅沟槽隔离区域上的电介质层和从电介质层的顶表面延伸到浅沟槽隔离区域的接触插塞,其中接触插塞包括基本上比两个端部部分窄的中间部分。 接触插头形成熔丝元件。 电熔丝还包括在电介质层上的金属化层中的两条金属线,其中两条金属线中的每一条连接到接触插塞的不同端部。