公开(公告)号：US08492902B2

公开(公告)日：2013-07-23

申请号：US13049661

申请日：2011-03-16

申请人： Ho-Jin Lee ,  SeYoung Jeong ,  Jae-hyun Phee ,  Jung-Hwan Kim ,  Tae Hong Min

发明人： Ho-Jin Lee ,  SeYoung Jeong ,  Jae-hyun Phee ,  Jung-Hwan Kim ,  Tae Hong Min

IPC分类号： H01L23/48 ,  H01L23/52

CPC分类号： H01L21/76898 ,  H01L21/76831 ,  H01L23/481 ,  H01L25/105 ,  H01L2224/0557 ,  H01L2224/13025 ,  H01L2224/14181 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06541 ,  H01L2225/1023 ,  H01L2225/1058 ,  H01L2924/12044 ,  H01L2924/15311 ,  H01L2924/00014

摘要： Provided is a semiconductor device. The semiconductor device may include a substrate and a stacked insulation layer on a sidewall of an opening which penetrates the substrate. The stacked insulation layer can include at least one first insulation layer and at least one second insulation layer whose dielectric constant is different than that of the first insulation layer. One insulation layer may be a polymer and one insulation layer may be a silicon based insulation layer. The insulation layers may be uniform in thickness or may vary as a distance from the substrate changes.

摘要翻译： 提供一种半导体器件。 半导体器件可以包括衬底和在穿透衬底的开口的侧壁上的层叠绝缘层。 层叠绝缘层可以包括至少一个第一绝缘层和至少一个第二绝缘层，其介电常数不同于第一绝缘层的介电常数。 一个绝缘层可以是聚合物，一个绝缘层可以是硅基绝缘层。 绝缘层的厚度可以是均匀的，或者可以随着离开衬底的距离而改变。

公开(公告)号：US20120074584A1

公开(公告)日：2012-03-29

申请号：US13049661

申请日：2011-03-16

申请人： Ho-Jin LEE ,  SeYoung Jeong ,  Jae-hyun Phee ,  Jung-Hwan Kim ,  Tae Hong Min

发明人： Ho-Jin LEE ,  SeYoung Jeong ,  Jae-hyun Phee ,  Jung-Hwan Kim ,  Tae Hong Min

IPC分类号： H01L23/48 ,  H01L21/768

CPC分类号： H01L21/76898 ,  H01L21/76831 ,  H01L23/481 ,  H01L25/105 ,  H01L2224/0557 ,  H01L2224/13025 ,  H01L2224/14181 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06541 ,  H01L2225/1023 ,  H01L2225/1058 ,  H01L2924/12044 ,  H01L2924/15311 ,  H01L2924/00014

摘要： Provided is a semiconductor device. The semiconductor device may include a substrate and a stacked insulation layer on a sidewall of an opening which penetrates the substrate. The stacked insulation layer can include at least one first insulation layer and at least one second insulation layer whose dielectric constant is different than that of the first insulation layer. One insulation layer may be a polymer and one insulation layer may be a silicon based insulation layer. The insulation layers may be uniform in thickness or may vary as a distance from the substrate changes.

摘要翻译： 提供一种半导体器件。 半导体器件可以包括衬底和在穿透衬底的开口的侧壁上的层叠绝缘层。 层叠绝缘层可以包括至少一个第一绝缘层和至少一个第二绝缘层，其介电常数不同于第一绝缘层的介电常数。 一个绝缘层可以是聚合物，一个绝缘层可以是硅基绝缘层。 绝缘层的厚度可以是均匀的，或者可以随着离开衬底的距离而改变。

公开(公告)号：US08778776B2

公开(公告)日：2014-07-15

申请号：US13187760

申请日：2011-07-21

申请人： Ju-il Choi ,  Kyu-Ha Lee ,  Jae-hyun Phee ,  Jung-Hwan Kim ,  Tae Hong Min

发明人： Ju-il Choi ,  Kyu-Ha Lee ,  Jae-hyun Phee ,  Jung-Hwan Kim ,  Tae Hong Min

IPC分类号： H01L21/78

CPC分类号： H01L21/78 ,  H01L21/486 ,  H01L21/6836 ,  H01L21/76898 ,  H01L23/49827 ,  H01L24/13 ,  H01L24/16 ,  H01L24/32 ,  H01L24/81 ,  H01L24/83 ,  H01L24/92 ,  H01L24/94 ,  H01L2221/68331 ,  H01L2221/68345 ,  H01L2224/02372 ,  H01L2224/1146 ,  H01L2224/116 ,  H01L2224/13023 ,  H01L2224/13082 ,  H01L2224/13124 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/16235 ,  H01L2224/2919 ,  H01L2224/73204 ,  H01L2224/81191 ,  H01L2224/81903 ,  H01L2224/83192 ,  H01L2224/8385 ,  H01L2224/9202 ,  H01L2224/9211 ,  H01L2224/94 ,  H01L2924/00013 ,  H01L2224/81 ,  H01L2224/05124 ,  H01L2924/00014 ,  H01L2224/83 ,  H01L2224/13099 ,  H01L2224/05099 ,  H01L2224/05599

摘要： Provided is a method of forming a semiconductor package including providing a substrate having a first side and an opposite second side and providing a wafer having a plurality of semiconductor chips, each of the semiconductor chips having a conductive pad, wherein at least one of the substrate and the wafer includes a seed pattern. The first side of the substrate is bonded to the wafer with the conductive pad positioned adjacent to the first side of the substrate and the seed pattern positioned between the conductive pad and the first side of the substrate. A through hole is then formed penetrating the substrate from the second side of the substrate to expose the seed pattern. A through electrode is formed in the through hole using the seed pattern as a seed. Corresponding devices are also provided.

摘要翻译： 提供一种形成半导体封装的方法，包括提供具有第一侧和相对的第二侧的衬底，并提供具有多个半导体芯片的晶片，每个半导体芯片具有导电焊盘，其中至少一个衬底 并且晶片包括种子图案。 衬底的第一面被接合到晶片，其中导电焊盘定位成与衬底的第一侧相邻，并且种子图案位于导电焊盘和衬底的第一侧之间。 然后从衬底的第二侧穿透衬底以形成通孔以暴露种子图案。 使用种子图案作为种子在通孔中形成贯通电极。 还提供了相应的设备。

公开(公告)号：US20120083097A1

公开(公告)日：2012-04-05

申请号：US13187760

申请日：2011-07-21

申请人： Ju-il Choi ,  Kyu-Ha Lee ,  Jae-Hyun Phee ,  Jung-Hwan Kim ,  Tae Hong Min

发明人： Ju-il Choi ,  Kyu-Ha Lee ,  Jae-Hyun Phee ,  Jung-Hwan Kim ,  Tae Hong Min

IPC分类号： H01L21/78

CPC分类号： H01L21/78 ,  H01L21/486 ,  H01L21/6836 ,  H01L21/76898 ,  H01L23/49827 ,  H01L24/13 ,  H01L24/16 ,  H01L24/32 ,  H01L24/81 ,  H01L24/83 ,  H01L24/92 ,  H01L24/94 ,  H01L2221/68331 ,  H01L2221/68345 ,  H01L2224/02372 ,  H01L2224/1146 ,  H01L2224/116 ,  H01L2224/13023 ,  H01L2224/13082 ,  H01L2224/13124 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/16235 ,  H01L2224/2919 ,  H01L2224/73204 ,  H01L2224/81191 ,  H01L2224/81903 ,  H01L2224/83192 ,  H01L2224/8385 ,  H01L2224/9202 ,  H01L2224/9211 ,  H01L2224/94 ,  H01L2924/00013 ,  H01L2224/81 ,  H01L2224/05124 ,  H01L2924/00014 ,  H01L2224/83 ,  H01L2224/13099 ,  H01L2224/05099 ,  H01L2224/05599

摘要： Provided is a method of forming a semiconductor package including providing a substrate having a first side and an opposite second side and providing a wafer having a plurality of semiconductor chips, each of the semiconductor chips having a conductive pad, wherein at least one of the substrate and the wafer includes a seed pattern. The first side of the substrate is bonded to the wafer with the conductive pad positioned adjacent to the first side of the substrate and the seed pattern positioned between the conductive pad and the first side of the substrate. A through hole is then formed penetrating the substrate from the second side of the substrate to expose the seed pattern. A through electrode is formed in the through hole using the seed pattern as a seed. Corresponding devices are also provided.

摘要翻译： 提供一种形成半导体封装的方法，包括提供具有第一侧和相对的第二侧的衬底，并提供具有多个半导体芯片的晶片，每个半导体芯片具有导电焊盘，其中至少一个衬底 并且晶片包括种子图案。 衬底的第一面被接合到晶片，其中导电焊盘定位成与衬底的第一侧相邻，并且种子图案位于导电焊盘和衬底的第一侧之间。 然后从衬底的第二侧穿透衬底以形成通孔以暴露种子图案。 使用种子图案作为种子在通孔中形成贯通电极。 还提供了相应的设备。

公开(公告)号：US08759147B2

公开(公告)日：2014-06-24

申请号：US13235372

申请日：2011-09-17

申请人： Eun-Kyoung Choi ,  SeYoung Jeong ,  Kwang-chul Choi ,  Tae Hong Min ,  Chungsun Lee ,  Jung-Hwan Kim

发明人： Eun-Kyoung Choi ,  SeYoung Jeong ,  Kwang-chul Choi ,  Tae Hong Min ,  Chungsun Lee ,  Jung-Hwan Kim

IPC分类号： H01L21/00

CPC分类号： H01L24/97 ,  H01L21/561 ,  H01L21/6835 ,  H01L23/3128 ,  H01L23/36 ,  H01L23/3672 ,  H01L23/3677 ,  H01L24/16 ,  H01L24/32 ,  H01L24/48 ,  H01L24/73 ,  H01L25/0657 ,  H01L25/18 ,  H01L25/50 ,  H01L2221/68327 ,  H01L2221/6834 ,  H01L2224/13025 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/451 ,  H01L2224/48091 ,  H01L2224/48145 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73215 ,  H01L2224/73253 ,  H01L2224/73257 ,  H01L2224/73265 ,  H01L2224/97 ,  H01L2225/06506 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06541 ,  H01L2225/06568 ,  H01L2225/06589 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01068 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/1815 ,  H01L2924/18161 ,  H01L2224/81 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

摘要： Provided are a semiconductor package and a method of fabricating the same. In one embodiment, to fabricate a semiconductor package, a wafer having semiconductor chips fabricated therein is provided. A heat sink layer is formed over the wafer. The heat sink layer contacts top surfaces of the semiconductor chips. Thereafter, the plurality of semiconductor chips are singulated from the wafer.

摘要翻译： 提供半导体封装及其制造方法。 在一个实施例中，为了制造半导体封装，提供其中制造有半导体芯片的晶片。 在晶片上形成散热层。 散热层接触半导体芯片的顶表面。 此后，从晶片上分离多个半导体芯片。

公开(公告)号：US09059072B2

公开(公告)日：2015-06-16

申请号：US14294052

申请日：2014-06-02

申请人： Eun-Kyoung Choi ,  SeYoung Jeong ,  Kwang-chul Choi ,  Tae Hong Min ,  Chungsun Lee ,  Jung-Hwan Kim

发明人： Eun-Kyoung Choi ,  SeYoung Jeong ,  Kwang-chul Choi ,  Tae Hong Min ,  Chungsun Lee ,  Jung-Hwan Kim

IPC分类号： H01L23/02 ,  H01L23/00 ,  H01L21/56 ,  H01L23/31 ,  H01L25/065 ,  H01L25/00 ,  H01L23/367 ,  H01L21/683 ,  H01L23/36 ,  H01L23/522 ,  H01L25/18

CPC分类号： H01L24/97 ,  H01L21/561 ,  H01L21/6835 ,  H01L23/3128 ,  H01L23/36 ,  H01L23/3672 ,  H01L23/3677 ,  H01L24/16 ,  H01L24/32 ,  H01L24/48 ,  H01L24/73 ,  H01L25/0657 ,  H01L25/18 ,  H01L25/50 ,  H01L2221/68327 ,  H01L2221/6834 ,  H01L2224/13025 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/451 ,  H01L2224/48091 ,  H01L2224/48145 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73215 ,  H01L2224/73253 ,  H01L2224/73257 ,  H01L2224/73265 ,  H01L2224/97 ,  H01L2225/06506 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06541 ,  H01L2225/06568 ,  H01L2225/06589 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01068 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/1815 ,  H01L2924/18161 ,  H01L2224/81 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

摘要： Provided are a semiconductor package and a method of fabricating the same. In one embodiment, to fabricate a semiconductor package, a wafer having semiconductor chips fabricated therein is provided. A heat sink layer is formed over the wafer. The heat sink layer contacts top surfaces of the semiconductor chips. Thereafter, the plurality of semiconductor chips are singulated from the wafer.

摘要翻译： 提供半导体封装及其制造方法。 在一个实施例中，为了制造半导体封装，提供其中制造有半导体芯片的晶片。 在晶片上形成散热层。 散热层接触半导体芯片的顶表面。 此后，从晶片上分离多个半导体芯片。

公开(公告)号：US08575760B2

公开(公告)日：2013-11-05

申请号：US13303255

申请日：2011-11-23

申请人： Jae-hyun Phee ,  Uihyouong Lee ,  Ju-il Choi ,  Jung-Hwan Kim

发明人： Jae-hyun Phee ,  Uihyouong Lee ,  Ju-il Choi ,  Jung-Hwan Kim

IPC分类号： H01L23/498

CPC分类号： H01L29/0657 ,  H01L21/76898 ,  H01L23/481 ,  H01L23/49827 ,  H01L24/11 ,  H01L24/13 ,  H01L24/48 ,  H01L24/97 ,  H01L25/0657 ,  H01L2224/02372 ,  H01L2224/05571 ,  H01L2224/13006 ,  H01L2224/13017 ,  H01L2224/13024 ,  H01L2224/13025 ,  H01L2224/13076 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2224/97 ,  H01L2225/0651 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06544 ,  H01L2924/00014 ,  H01L2924/01006 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01075 ,  H01L2924/01322 ,  H01L2924/014 ,  H01L2924/07802 ,  H01L2924/10253 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2224/81 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

摘要： A semiconductor device includes a substrate having a first surface and an opposite second surface. An electrode extends within the substrate towards the first surface and has a protruding portion extending from the first surface. A supporting portion extends from the first surface of the substrate to a sidewall of the protruding portion and supports the protruding portion.

摘要翻译： 半导体器件包括具有第一表面和相对的第二表面的衬底。 电极在衬底内朝向第一表面延伸并且具有从第一表面延伸的突出部分。 支撑部分从基板的第一表面延伸到突出部分的侧壁并支撑突出部分。

公开(公告)号：US20120133041A1

公开(公告)日：2012-05-31

申请号：US13303255

申请日：2011-11-23

申请人： Jae-hyun Phee ,  Uihyouong Lee ,  Ju-il Choi ,  Jung-Hwan Kim

发明人： Jae-hyun Phee ,  Uihyouong Lee ,  Ju-il Choi ,  Jung-Hwan Kim

IPC分类号： H01L23/498

CPC分类号： H01L29/0657 ,  H01L21/76898 ,  H01L23/481 ,  H01L23/49827 ,  H01L24/11 ,  H01L24/13 ,  H01L24/48 ,  H01L24/97 ,  H01L25/0657 ,  H01L2224/02372 ,  H01L2224/05571 ,  H01L2224/13006 ,  H01L2224/13017 ,  H01L2224/13024 ,  H01L2224/13025 ,  H01L2224/13076 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2224/97 ,  H01L2225/0651 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06544 ,  H01L2924/00014 ,  H01L2924/01006 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01075 ,  H01L2924/01322 ,  H01L2924/014 ,  H01L2924/07802 ,  H01L2924/10253 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2224/81 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

摘要： Some embodiments provide a semiconductor device including a substrate having a first surface and an opposite second surface. An electrode extends within the substrate towards the first surface and has a protruding portion extending from the first surface. A supporting portion extends from the first surface of the substrate to a sidewall of the protruding portion that supports the protruding portion. Methods of fabricating the same are also provided.

摘要翻译： 一些实施例提供包括具有第一表面和相对的第二表面的基板的半导体器件。 电极在衬底内朝向第一表面延伸并且具有从第一表面延伸的突出部分。 支撑部分从基板的第一表面延伸到支撑突出部分的突出部分的侧壁。 还提供了制造方法。

公开(公告)号：US08890325B2

公开(公告)日：2014-11-18

申请号：US13244544

申请日：2011-09-25

申请人： Un-Byoung Kang ,  Kwang-chul Choi ,  Jung-Hwan Kim ,  Tae Hong Min

发明人： Un-Byoung Kang ,  Kwang-chul Choi ,  Jung-Hwan Kim ,  Tae Hong Min

IPC分类号： H01L23/48 ,  H01L33/48 ,  H01L33/62 ,  H01L33/00

CPC分类号： H01L33/486 ,  H01L33/0079 ,  H01L33/62 ,  H01L2224/16 ,  H01L2933/0066

摘要： In one embodiment, a heterojunction structure includes a first substrate; a second substrate comprising an electrode pad, the second substrate joined to the first substrate by an adhesive layer interposed between the first and second substrates, the first substrate and the adhesive layer having a via hole penetrating therethrough to expose a region of the electrode pad; a connection electrode disposed in the via hole and contacting the electrode pad; and an insulation layer electrically insulating the connection electrode from the first substrate. One of the first and second substrates has a thermal expansion coefficient different than a thermal expansion coefficient of the other of the first and second substrates, and at least one of the adhesive layer or the insulation layer comprises an organic material.

摘要翻译： 在一个实施例中，异质结结构包括第一衬底; 第二基板，其包括电极焊盘，所述第二基板通过插入在所述第一和第二基板之间的粘合剂层连接到所述第一基板，所述第一基板和所述粘合剂层具有贯穿其中的通孔，以暴露所述电极焊盘的区域; 连接电极，设置在所述通孔中并与所述电极焊盘接触; 以及将连接电极与第一基板电绝缘的绝缘层。 第一和第二基板中的一个具有不同于第一和第二基板中的另一个的热膨胀系数的热膨胀系数，并且粘合剂层或绝缘层中的至少一个包括有机材料。

公开(公告)号：US08450856B2

公开(公告)日：2013-05-28

申请号：US13240533

申请日：2011-09-22

申请人： Un-Byoung Kang ,  Kwang-chul Choi ,  Jung-Hwan Kim ,  Tae Hong Min ,  Hojin Lee ,  Minseung Yoon

发明人： Un-Byoung Kang ,  Kwang-chul Choi ,  Jung-Hwan Kim ,  Tae Hong Min ,  Hojin Lee ,  Minseung Yoon

IPC分类号： H01L23/48

CPC分类号： H01L21/4835 ,  H01L21/6836 ,  H01L21/76898 ,  H01L23/3114 ,  H01L23/3192 ,  H01L23/49827 ,  H01L24/06 ,  H01L24/45 ,  H01L24/48 ,  H01L25/0657 ,  H01L27/14618 ,  H01L2221/68327 ,  H01L2221/6834 ,  H01L2224/02166 ,  H01L2224/02313 ,  H01L2224/02372 ,  H01L2224/02375 ,  H01L2224/02381 ,  H01L2224/024 ,  H01L2224/03462 ,  H01L2224/03466 ,  H01L2224/03602 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05008 ,  H01L2224/05022 ,  H01L2224/05026 ,  H01L2224/05147 ,  H01L2224/05548 ,  H01L2224/05567 ,  H01L2224/05571 ,  H01L2224/05647 ,  H01L2224/06131 ,  H01L2224/06135 ,  H01L2224/06138 ,  H01L2224/06181 ,  H01L2224/13007 ,  H01L2224/13022 ,  H01L2224/13024 ,  H01L2224/13025 ,  H01L2224/16147 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/29011 ,  H01L2224/32225 ,  H01L2224/45139 ,  H01L2224/48105 ,  H01L2224/48227 ,  H01L2224/48228 ,  H01L2224/73253 ,  H01L2224/73265 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06541 ,  H01L2225/06565 ,  H01L2924/00014 ,  H01L2924/01006 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01073 ,  H01L2924/014 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/15183 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/00 ,  H01L2224/05552 ,  H01L2224/45099 ,  H01L2224/05599 ,  H01L2924/00012

摘要： In a semiconductor device, an organic insulation pattern is disposed between first and second rerouting patterns. The organic insulation pattern may absorb the physical stress that occurs when the first and second rerouting patterns expand under heat. Since the organic insulation pattern is disposed between the first and second rerouting patterns, insulating properties can be increased relative to a semiconductor device in which a semiconductor pattern is disposed between rerouting patterns. Also, since a seed layer pattern is disposed between the first and second rerouting patterns and the organic insulation pattern and between the substrate and the organic insulation pattern, the adhesive strength of the first and second rerouting patterns is enhanced. This also reduces any issues with delamination. Also, the seed layer pattern prevents the metal that forms the rerouting pattern from being diffused to the organic insulation pattern. Therefore, a semiconductor device with enhanced reliability may be implemented.