Integrated heat spreader/stiffener assembly and method of assembly for
semiconductor package
    2.
    发明授权
    Integrated heat spreader/stiffener assembly and method of assembly for semiconductor package 失效
    集成散热器/加强件组件及半导体封装的组装方法

    公开(公告)号:US6002171A

    公开(公告)日:1999-12-14

    申请号:US935834

    申请日:1997-09-22

    摘要: Provided is a multi-piece integrated heat spreader/stiffener assembly which is bonded to the substrate and die in a semiconductor package following electrical bonding of the die to the substrate, a packaging method using the integrated heat spreader/stiffener, and a semiconductor package incorporating the integrated heat spreader/stiffener. In a preferred embodiment, the integrated heat spreader/stiffener assembly has two pieces, both composed of a high modulus, high thermal conductivity material shaped to attach to each other and a die on the surface of a packaging substrate. A first piece of this assembly is bonded to the substrate surface adjacent to an electrically connected die and to the top surface of the die prior to the dispensation and curing of underfill material which provides the mechanical connection between the die and the substrate. With the first piece of the assembly in place, access may still be had to at least one edge of the die to dispense and cure the underfill epoxy. Once the underfill material is cured by heating, the second piece of the assembly is placed and bonded on the substrate either abutting or overlapping with the first piece. A ball grid array (BGA) process may then be used to apply solder balls to the underside of the substrate for subsequent bonding of the package to a circuit board for use.

    摘要翻译: 提供了一种多件式集成散热器/加强件组件,其在将模具电连接到基板上之后,将半导体封装中的基板和芯片接合,使用集成散热器/加强件的封装方法以及包含 集成散热器/加强筋。 在一个优选实施例中,集成的散热器/加强件组件具有两个部件,两部分由高模量,高热导率的材料构成,彼此相互连接并在封装基板的表面上形成一个模具。 该组件的第一部分在与电​​连接的模具相邻的基板表面上粘合到模具的顶部表面,在分配和固化底部填充材料之前,其提供了管芯和基板之间的机械连接。 随着组装的第一块到位,仍然可以进入模具的至少一个边缘以分配和固化底部填充环氧树脂。 一旦底部填充材料通过加热固化,则组件的第二块被放置并结合到基板上,与第一块邻接或重叠。 然后可以使用球栅阵列(BGA)工艺将焊球施加到衬底的下侧,用于随后将封装结合到电路板以供使用。

    Interposer for semiconductor package assembly
    3.
    发明授权
    Interposer for semiconductor package assembly 有权
    用于半导体封装组装的插入器

    公开(公告)号:US06335491B1

    公开(公告)日:2002-01-01

    申请号:US09499801

    申请日:2000-02-08

    IPC分类号: H05K116

    摘要: The present invention describes an interposer which improves the thermal performance of a semiconductor device. The interposer may be situated between a substrate and a board. The interposer is attached to two layers of solder balls. The first layer of solder balls electrically and mechanically connects the interposer to the substrate. The second layer of solder balls electrically and mechanically connects the interposer to the board. In one aspect, the coefficient of thermal expansion (CTE) of the interposer may be flexibly selected to reduce thermal strain-induced stress for either or both layers of solder balls resulting from thermal performance differences between the substrate and the interposer or the interposer and the board. In another aspect, the CTE of the interposer may be reduced to allow a lower CTE for the substrate, which in turn may reduce thermal strain-induced stress for solder balls between the substrate and a die attached to the substrate. Advantageously, the improved thermal performance of the present invention may allow larger substrates, larger dies, larger solder ball arrays, reduced solder ball pitches and pin counts well above conventional levels without compromising semiconductor device reliability.

    摘要翻译: 本发明描述了一种提高半导体器件的热性能的插入器。 插入器可以位于基板和板之间。 插入件连接到两层焊球。 第一层焊球将电介质和机械连接到衬底。 第二层焊球电连接和机械连接插入器到板。 在一个方面,可以灵活地选择中介层的热膨胀系数(CTE),以减小由于衬底与插入件或插入件之间的热性能差异导致的两个或两个焊球层的热应变诱发应力, 板。 在另一方面,可以减小中介层的CTE以允许衬底的较低CTE,这反过来可以降低衬底和附接到衬底的管芯之间的焊球的热应变诱发应力。 有利地,本发明的改进的热性能可以允许更大的基板,更大的管芯,较大的焊球阵列,减少的焊球间距和引脚数远远高于传统的等级,而不会影响半导体器件的可靠性。

    Apparatus and method for improving ball joints in semiconductor packages
    4.
    发明授权
    Apparatus and method for improving ball joints in semiconductor packages 有权
    用于改善半导体封装中的球接头的装置和方法

    公开(公告)号:US06306751B1

    公开(公告)日:2001-10-23

    申请号:US09406308

    申请日:1999-09-27

    IPC分类号: H01L2144

    摘要: Provided is an apparatus and method for modifying the manufacture of chip carrier bond pads to increase the quality and reliability of semiconductor packages and ball joints in particular. This is accomplished by minimizing the corrosion of the barrier metal layer on the functional bond pads during gold deposition with the use of sacrificial pads electrically connected with the functional bond pads. According to one embodiment of the invention, a semiconductor package has copper conductive pads on a substrate that are exposed through a dielectric. Both functional and sacrificial (nonfunctional) copper conductive pads are provided. A barrier metal layer composed of nickel is electrolessly plated onto these conductive pads, and a bond metal layer of gold is deposited onto the nickel using electroless, generally immersion, gold plating. The surface area of the nickel on the sacrificial pads is less than that on the functional pads, and the nickel on the sacrificial pads corrodes first during electroless gold deposition. Without nickel corrosion on the functional bond pad, gold can more uniformly be deposited on the surface of the nickel layer. A eutectic solderable material placed on the gold can form a uniform bond with the nickel because the nickel on the functional bond pad is largely corrosion free.

    摘要翻译: 提供了一种用于修改芯片载体接合焊盘的制造以提高半导体封装和球接头的质量和可靠性的装置和方法。 这是通过使用与功能接合焊盘电连接的牺牲垫来最小化金沉积期间功能性接合焊盘上的阻挡金属层的腐蚀。 根据本发明的一个实施例,半导体封装在衬底上具有通过电介质暴露的铜导电焊盘。 提供功能和牺牲(非功能)铜导电焊盘。 由镍构成的阻挡金属层被无电镀在这些导电焊盘上,并且使用化学镀,通常浸入镀金将金的粘结金属层沉积到镍上。 牺牲焊盘上的镍的表面积小于功能焊盘上的镍的表面积,并且在无电镀金沉积期间,牺牲焊盘上的镍首先被腐蚀。 在功能性接合焊盘上没有镍腐蚀,金可以更均匀地沉积在镍层的表面上。 放置在金上的共晶可焊材料可以与镍形成均匀的结合,因为功能性接合焊盘上的镍很大程度上是无腐蚀的。

    Test fixture for flip chip ball grid array circuits
    6.
    发明授权
    Test fixture for flip chip ball grid array circuits 有权
    用于倒装芯片球栅阵列电路的测试夹具

    公开(公告)号:US06433565B1

    公开(公告)日:2002-08-13

    申请号:US09846435

    申请日:2001-05-01

    IPC分类号: G01R3102

    CPC分类号: G01R1/07371 G01R1/07357

    摘要: A test fixture for a ball grid array package is disclosed that includes a test ball grid array package having a plurality of coarse pitch contacts formed on a coarse pitch surface of the test ball grid array package and a plurality of wafer bumps formed on a fine pitch surface of the test ball grid array package and an interposer coupled to the plurality of wafer bumps formed on the fine pitch surface of the test ball grid array package for coupling to a plurality of wafer bumps formed on a fine pitch surface of a subject ball grid array package.

    摘要翻译: 公开了一种用于球栅阵列封装的测试夹具,其包括测试球栅阵列封装,其具有形成在测试球栅阵列封装的粗节距表面上的多个粗节距触点和形成在细间距上的多个晶片凸块 测试球栅阵列封装的表面和耦合到形成在测试球栅阵列封装的细间距表面上的多个晶片凸块的插入件,用于耦合到形成在主体球栅格的细间距表面上的多个晶片凸块 阵列包。

    Manufacture of devices including solder bumps
    9.
    发明授权
    Manufacture of devices including solder bumps 有权
    制造包括焊料凸点的器件

    公开(公告)号:US07727781B2

    公开(公告)日:2010-06-01

    申请号:US12220182

    申请日:2008-07-22

    IPC分类号: G01L31/26 H01L21/66

    摘要: Typical testing of solder joints, (e.g. joints at printed circuit board pads) has not proven totally predictive of the ultimate performance of such joints. It has been found that this lack of reliability is, at least in part, due to the tendency during testing for these pads to lose adhesion to, or delaminate from, the underlying substrate. In contrast, such occurrence is not typical of phenomena induced during typical device usage. To remove this source of unreliability, a test structure is made together with the manufacturing device lot. The same pad processing is used and the pad size is substantially enlarged in the test structure. The test structure is employed to predict performance of devices in the lot and then the lot is processed accordingly.

    摘要翻译: 焊接接头(例如印刷电路板焊盘处的接头)的典型测试尚未被证明完全可以预测这种接头的最终性能。 已经发现,这种缺乏可靠性至少部分地是由于这些焊盘在测试期间失去与下面的衬底的粘附或分层的倾向。 相比之下,这种情况并不是典型的设备使用期间引起的现象。 为了消除这种不可靠性的原因,测试结构与制造设备批次一起进行。 使用相同的焊盘处理,并且焊盘尺寸在测试结构中大大扩大。 测试结构用于预测批次中的设备的性能,然后相应地处理批次。