Differential Pressure Sensor Assembly
    3.
    发明申请
    Differential Pressure Sensor Assembly 有权
    差压传感器组件

    公开(公告)号:US20160084722A1

    公开(公告)日:2016-03-24

    申请号:US14495095

    申请日:2014-09-24

    IPC分类号: G01L9/00

    摘要: A differential pressure sensor assembly includes a transducer having a first sensing surface and a second sensing surface. The second sensing surface is contained in a cavity. An Integrated Circuit (IC) is hermetically coupled to the transducer. The IC has a first aperture aligned to the cavity. A lead frame is coupled to the IC. The lead frame has a second aperture aligned to the first aperture of the IC. A package encapsulates the transducer, the IC and the lead frame. The package has a third aperture exposed to the first sensing surface. The package includes a molding compound providing a hermetic seal between the third aperture of the package and the first aperture of the IC. The molding compound is separated from the transducer by an encroachment distance.

    摘要翻译: 差压传感器组件包括具有第一感测表面和第二感测表面的换能器。 第二感测表面包含在腔中。 集成电路(IC)与传感器气密耦合。 IC具有与空腔对准的第一孔。 引线框架耦合到IC。 引线框具有与IC的第一孔对准的第二孔。 封装封装了传感器,IC和引线框架。 该封装具有暴露于第一感测表面的第三孔。 该包装包括在封装的第三孔和IC的第一孔之间提供密封的模塑料。 模塑料通过侵入距离与换能器分离。

    Microstructure control of Al-Cu films for improved electromigration
resistance
    5.
    发明授权
    Microstructure control of Al-Cu films for improved electromigration resistance 失效
    Al-Cu膜的微结构控制,提高了电迁移率

    公开(公告)号:US5300307A

    公开(公告)日:1994-04-05

    申请号:US944865

    申请日:1992-09-14

    摘要: A process for the forming of Al-Cu conductive thin films with reduced electromigration failures is useful, for example, in the metallization of integrated circuits. An improved formation process includes the heat treatment or annealing of the thin film conductor at a temperature within the range of from 200.degree. C. to 300.degree. C. for a time period between 10 minutes and 24 hours under a reducing atmosphere such as 15% H.sub.2 in N.sub.2 by volume. Al-Cu thin films annealed in the single phase region of a phase diagram, to temperatures between 200.degree. C. and 300.degree. C. have .theta.-phase Al.sub.2 Cu precipitates at the grain boundaries continuously become enriched in copper, due, it is theorized, to the formation of a thin coating of .theta.-phase precipitate at the grain boundary. Electromigration behavior of the aluminum is, thus, improved because the .theta.-phase precipitates with copper hinder aluminum diffusion along the grain boundaries. Electromigration, then, occurs mainly within the aluminum grains, a much slower process.

    摘要翻译: 用于形成具有降低的电迁移故障的Al-Cu导电薄膜的方法在例如集成电路的金属化中是有用的。 改进的形成方法包括在200℃至300℃的温度范围内的薄膜导体的热处理或退火在10分钟至24小时之间的时间内在还原气氛下进行,例如15% H2在N2中的体积。 在相图的单相区域退火的Al-Cu薄膜在200摄氏度到300摄氏度之间的温度下,在晶界处具有(θ)相Al2Cu沉淀物连续地富集铜,因为它是 理论上,在晶界处形成(θ)相沉淀物的薄涂层。 因此,铝的电迁移行为被改善,因为(θ)相在铜上沉淀阻碍了沿着晶界的铝扩散。 那么电迁移主要发生在铝粒内,这是一个很慢的过程。

    Electronic component and method of manufacture
    6.
    发明授权
    Electronic component and method of manufacture 有权
    电子元件及制造方法

    公开(公告)号:US06630725B1

    公开(公告)日:2003-10-07

    申请号:US09684576

    申请日:2000-10-06

    IPC分类号: H01L23552

    摘要: An electronic component includes a substrate (210, 1510), a device (221, 222) supported by the substrate and including a first bond pad (223, 224, 225, 226), and a cap (231, 232, 631, 731, 732, 1531, 1532) overlying the substrate. The cap includes a second bond pad (241, 242, 243, 244) at an outside surface of the cap, a third bond pad (245, 246, 247, 248) at an inside surface of the cap and electrically coupled to the first bond pad, and an electrically conductive via (251, 252, 254, 751, 752, 753, 754) extending through the cap and electrically coupling together the second and third bond pads.

    摘要翻译: 电子部件包括基板(210,1510),由基板支撑并包括第一接合焊盘(223,224,225,226)的盖子(231,232,631,731) ,732,1531,1532)。 所述盖包括在所述盖的外表面处的第二接合焊盘(241,242,243,244),在所述盖的内表面处的第三接合焊盘(245,246,247,248),并且电耦合到所述第一接合焊盘 接合焊盘和延伸穿过盖并电连接在一起的第二和第三接合焊盘的导电通孔(251,252,254,751,752,753,754)。

    Method and apparatus for jetting, manufacturing and attaching uniform
solder balls
    7.
    发明授权
    Method and apparatus for jetting, manufacturing and attaching uniform solder balls 失效
    用于喷射,制造和附着均匀焊球的方法和装置

    公开(公告)号:US5855323A

    公开(公告)日:1999-01-05

    申请号:US746602

    申请日:1996-11-13

    摘要: An apparatus and process for jetting molten solder in the form of balls directly onto all the metallized interconnects lands for a ball grid array package in one step with no solder paste required. Molten solder is jetted out of a grid of holes using a piston attached to a piezoelectric crystal. When voltage is applied to the crystal it expands forcing the piston to extrude a desired volume of solder through holes in the aperture plate. When the voltage is decreased the piston reverses motion creating an instability in the molten solder at the aperture plate surface and thereby forming spherical solder balls that fall onto a metallized substrate. The molten solder balls land on the substrate and form a metallurgical bond with the metallized lands. The size of the solder balls is determined by a combination of the size of the holes in the aperture plate, the duration of the piston pulse, and the displacement of the piston. The layout of the balls is dictated by the location of the hooks in the grid. Changes in ball size and layout can be easily accomplished by changing the grid plate. This invention also allows simple preparation of uniform balls for subsequent supply to BGA users.

    摘要翻译: 一种将滚珠形式的熔融焊料直接喷射到所有金属化互连区域上的设备和方法,用于一个步骤中的球栅阵列封装,不需要焊膏。 使用连接到压电晶体的活塞将熔融的焊料从孔网喷射出来。 当电压施加到晶体时,其膨胀迫使活塞通过孔板中的孔挤出所需体积的焊料。 当电压降低时,活塞反转运动,在孔板表面处产生熔融焊料中的不稳定性,从而形成落入金属化基板上的球形焊球。 熔融焊球落在基板上并与金属化焊盘形成冶金结合。 焊球的尺寸由孔板中的孔的尺寸,活塞脉冲的持续时间和活塞的位移的组合决定。 球的布局由网格中的钩子的位置决定。 通过更换网格板可以轻松实现球体尺寸和布局的变化。 本发明还允许简单地制备用于随后供给BGA用户的均匀球。