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公开(公告)号:US06864168B2
公开(公告)日:2005-03-08
申请号:US10604792
申请日:2003-08-18
申请人: William Tze-You Chen , Ho-Ming Tong , Chun-Chi Lee , Su Tao , Chih-Huang Chang , Jeng-Da Wu , Wen-Pin Huang , Po-Jen Cheng
发明人: William Tze-You Chen , Ho-Ming Tong , Chun-Chi Lee , Su Tao , Chih-Huang Chang , Jeng-Da Wu , Wen-Pin Huang , Po-Jen Cheng
IPC分类号: H01L21/60 , H01L23/485 , H01L21/447
CPC分类号: H01L24/05 , H01L24/03 , H01L24/11 , H01L24/13 , H01L2224/0401 , H01L2224/05624 , H01L2224/05666 , H01L2224/1134 , H01L2224/13099 , H01L2224/13109 , H01L2224/13111 , H01L2224/13164 , H01L2224/78301 , H01L2924/01005 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01022 , H01L2924/01023 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/01043 , H01L2924/01047 , H01L2924/01049 , H01L2924/0105 , H01L2924/01051 , H01L2924/01074 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/10253 , H01L2924/12044 , H01L2924/14 , H01L2924/00014 , H01L2924/00
摘要: A bump structure on a contact pad and a fabricating process thereof. The bump comprises an under-ball-metallurgy layer, a bonding mass and a welding lump. The under-ball-metallurgy layer is formed over the contact pad and the bonding mass is formed over the under-ball-metallurgy layer by conducting a pressure bonding process. The bonding mass having a thickness between 4 to 10 μm is made from a material such as copper. The welding lump is formed over the bonding mass such that a sidewall of the bonding mass is also enclosed.
摘要翻译: 接触垫上的凸块结构及其制造方法。 凸块包括球下冶金层,粘结块和焊接块。 在接触焊盘之上形成球下冶金层,通过压接工艺在焊球下方形成粘结物质。 厚度为4〜10μm的接合体由铜等材料制成。 焊接块形成在接合块上,使得接合块的侧壁也被封闭。
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公开(公告)号:US06819002B2
公开(公告)日:2004-11-16
申请号:US10604795
申请日:2003-08-18
申请人: William Tze-You Chen , Ho-Ming Tong , Chun-Chi Lee , Su Tao , Jeng-Da Wu , Chih-Huang Chang , Po-Jen Cheng
发明人: William Tze-You Chen , Ho-Ming Tong , Chun-Chi Lee , Su Tao , Jeng-Da Wu , Chih-Huang Chang , Po-Jen Cheng
IPC分类号: H01L2348
CPC分类号: H01L24/11 , H01L24/02 , H01L24/13 , H01L2224/0401 , H01L2224/13099 , H01L2224/131 , H01L2224/13109 , H01L2224/13111 , H01L2224/13116 , H01L2224/13147 , H01L2924/0001 , H01L2924/00013 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01022 , H01L2924/01023 , H01L2924/01024 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/0103 , H01L2924/01032 , H01L2924/01033 , H01L2924/01043 , H01L2924/01047 , H01L2924/01049 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01082 , H01L2924/01327 , H01L2924/014 , H01L2924/05042 , H01L2224/29099 , H01L2924/00014 , H01L2924/01083
摘要: An under-ball-metallurgy layer between a bonding pad on a chip and a solder bump made with tin-based material is provided. The under-ball-metallurgy layer at least includes an adhesion layer over the bonding pad, a nickel-vanadium layer over the adhesion layer, a wettable layer over the nickel-vanadium layer and a barrier layer over the wettable layer. The barrier layer prevents the penetration of nickel atoms from the nickel-vanadium layer and reacts with tin within the solder bump to form inter-metallic compound. This invention also provides an alternative under-ball-metallurgy layer that at least includes an adhesion layer over the bonding pad, a wettable layer over the adhesion layer and a nickel-vanadium layer over the wettable layer. The nickel within the nickel-vanadium layer may react with tin within the solder bump to form an inter-metallic compound.
摘要翻译: 提供了一种在芯片上的焊盘与由锡基材料制成的焊料凸块之间的球下冶金层。 所述球下冶金层至少包括粘合层上的粘合层,粘附层上的镍钒层,镍 - 钒层上的可润湿层和可湿性层上的阻挡层。 阻挡层防止镍原子从镍钒层渗透,并与焊锡凸块内的锡反应形成金属间化合物。 本发明还提供了替代的球内冶金层,其至少包括粘合层上方的粘合层,粘合层上方的可润湿层和可润湿层上的镍钒层。 镍钒层内的镍可能与焊锡凸块内的锡反应形成金属间化合物。
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公开(公告)号:US06891274B2
公开(公告)日:2005-05-10
申请号:US10604794
申请日:2003-08-18
申请人: William Tze-You Chen , Ho-Ming Tong , Chun-Chi Lee , Su Tao , Jeng-Da Wu , Chih-Huang Chang , Po-Jen Cheng
发明人: William Tze-You Chen , Ho-Ming Tong , Chun-Chi Lee , Su Tao , Jeng-Da Wu , Chih-Huang Chang , Po-Jen Cheng
IPC分类号: H01L21/60 , H01L23/485 , H01L23/48 , H01L23/52 , H01L29/40
CPC分类号: H01L24/05 , H01L24/12 , H01L2224/0401 , H01L2224/05027 , H01L2224/05572 , H01L2224/13109 , H01L2924/0002 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01022 , H01L2924/01023 , H01L2924/01024 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/01043 , H01L2924/01047 , H01L2924/01049 , H01L2924/0105 , H01L2924/01051 , H01L2924/01074 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/05042 , H01L2924/10253 , H01L2924/12044 , H01L2924/14 , H01L2924/00014 , H01L2924/00 , H01L2224/05552
摘要: An under-bump-metallurgy layer is provided. The under-bump-metallurgy layer is formed over the contact pad of a chip and a welding lump is formed over the under-ball-metallurgy layer. The under-bump-metallurgy layer comprises an adhesion layer, a barrier layer and a wettable layer. The adhesion layer is directly formed over the contact pad. The barrier layer made from a material such as nickel-vanadium alloy is formed over the adhesion layer. The wettable layer made from a material such as copper is formed over the barrier layer. The wettable layer has an overall thickness that ranges from about 3 μm to about 8 μm.
摘要翻译: 提供了凸块下的冶金层。 凸块下金属层形成在芯片的接触焊盘上,并且焊接块形成在球下冶金层之上。 凸块下冶金层包括粘合层,阻挡层和可润湿层。 粘合层直接形成在接触垫上。 在粘合层上形成由诸如镍 - 钒合金的材料制成的阻挡层。 由诸如铜的材料制成的可湿性层形成在阻挡层上。 可湿性层的总厚度范围为约3μm至约8μm。
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公开(公告)号:US07199438B2
公开(公告)日:2007-04-03
申请号:US10667605
申请日:2003-09-23
IPC分类号: H01L31/0203 , H01L23/02 , H01L23/29
CPC分类号: H01L23/4334 , H01L24/48 , H01L31/0203 , H01L31/02325 , H01L2224/48227 , H01L2924/00014 , H01L2924/181 , H01L2924/1815 , H01L2924/00012 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
摘要: An optical semiconductor package includes a substrate, a chip, a plurality of bonding wires, a window, a supporter, and an encapsulant. The chip is disposed on the substrate and has an optical element. The bonding wires are used for electrically connecting the chip to the substrate. The window is supported on the supporter and positioned over the optical element of the chip. The encapsulant is overmolded on the substrate for fixing the window and encapsulating the chip and the bonding wires.
摘要翻译: 光学半导体封装包括基板,芯片,多个接合线,窗口,支撑件和密封剂。 芯片设置在基板上并具有光学元件。 接合线用于将芯片电连接到基板。 窗户支撑在支架上并定位在芯片的光学元件上。 密封剂在基板上被包覆成型,用于固定窗户并封装芯片和接合线。
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公开(公告)号:US06403882B1
公开(公告)日:2002-06-11
申请号:US08884796
申请日:1997-06-30
IPC分类号: H01L2302
CPC分类号: H01L23/49816 , H01L23/16 , H01L23/36 , H01L2224/16 , H01L2224/73253 , H01L2924/00014 , H01L2924/15311 , H01L2224/0401
摘要: A chip package includes a die having an active surface and an inactive surface. An adhesive is formed on the inactive surface where the adhesive has a low Young's modulus of elasticity. The low Young's modulus of elasticity may be 10,000 psi or less; 1,000 psi or less; or, preferably, about 1,000 psi. Further, the adhesive may include a thermal conducting material. A protective plate is coupled to the inactive surface using the adhesive and a chip carrier is coupled to the active surface of the die.
摘要翻译: 芯片封装包括具有活性表面和非活性表面的模具。 在非活性表面上形成粘合剂,其中粘合剂具有低的杨氏弹性模量。 低杨氏弹性模量可以是10,000psi或更小; 1,000 psi以下; 或优选约1,000psi。 此外,粘合剂可以包括导热材料。 使用粘合剂将保护板耦合到非活性表面,并且芯片载体耦合到模具的有效表面。
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公开(公告)号:US6013355A
公开(公告)日:2000-01-11
申请号:US774731
申请日:1996-12-30
申请人: William Tze-You Chen , Douglas Howard Strope , Natalie Barbara Feilchenfeld , Yifan Guo , George Dean Ogden
发明人: William Tze-You Chen , Douglas Howard Strope , Natalie Barbara Feilchenfeld , Yifan Guo , George Dean Ogden
CPC分类号: H05K3/4638 , B32B7/02 , H01L22/12 , H05K3/0008 , Y10T428/24917 , Y10T428/24926
摘要: Registration of the layers in a multilayer electronic device is tested and measured by X-ray moire interferometry.
摘要翻译: 通过X射线莫尔干涉法测试和测量多层电子器件中的层的配准。
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7.
公开(公告)号:US5709336A
公开(公告)日:1998-01-20
申请号:US656628
申请日:1996-05-31
CPC分类号: H01L22/20 , G01R31/2886 , H01L23/49816 , H01L24/81 , H01L2224/0401 , H01L2224/05571 , H01L2224/13019 , H01L2224/13144 , H01L2224/45144 , H01L2224/81801 , H01L2924/01013 , H01L2924/01046 , H01L2924/01047 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H05K3/325 , H05K3/4007 , Y10T29/4913
摘要: A dendrite surface is provided on each of the electrical contacts of a substrate, such as a test board, chip carrier, or printed wiring board. The electrical contacts on the substrate are arranged in a mirror image of the input/output pads on a wirebond chip from which the wire leads have been removed from, or not initially provided on, each of the input/output pads. The wirebond chip is aligned with the substrate, and the respective contact brought into electrical communication with each other. The wirebond chip may be removed after testing or other temporary attachment purpose, or permanently encapsulated with at least a portion of the substrate in a permanent assembly. The present invention permits wirebond chips to be selectively attached temporarily or permanently, i.e., have a pluggable capability, as well as the ability to allow a full array of I/O pad design.
摘要翻译: 在诸如测试板,芯片载体或印刷线路板之类的基板的每个电触头上设置有枝晶表面。 衬底上的电接触被布置在引线键合上的输入/输出焊盘的镜像中,引线已经从该引线引出已从每个输入/输出焊盘移除,或者不是最初设置在其上。 引线键合芯片与衬底对准,并且相应的触点彼此电连通。 引线键芯可以在测试或其它临时附接目的之后移除,或者在永久组件中与基底的至少一部分永久封装。 本发明允许引线键盘临时或永久地选择性地附接,即具有可插拔能力,以及允许完整阵列的I / O焊盘设计的能力。
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公开(公告)号:US06838806B2
公开(公告)日:2005-01-04
申请号:US10038530
申请日:2002-01-02
IPC分类号: G01C19/5726 , G01C19/574 , H02N1/00
CPC分类号: G01C19/574 , G01C19/5726
摘要: A gyroscope comprising: a proof mass; a frame supporting the proof mass; a connection arrangement connecting the proof mass and the frame, the connection arrangement having a first stiffness in a first direction and a second stiffness in a second direction substantially perpendicular to the first direction, one of the stiffness being significantly greater than the other stiffness; and a pair of elements adapted to sense relatively motion therebetween in either the first or the second direction. Also disclosed is a gyroscope comprising: a proof mass; a frame supporting the proof mass and connected to only one edge thereof by a connection arrangement extending between the proof mass and the frame in a first direction, the connection arrangement having a first stiffness in the first direction and a second stiffness in a second direction substantially perpendicular to the first direction, the first stiffness being significantly greater than the second stiffness; and a pair of elements adapted to sense relative motion therebetween in the first direction.
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公开(公告)号:US06429530B1
公开(公告)日:2002-08-06
申请号:US09184839
申请日:1998-11-02
申请人: William Tze-You Chen
发明人: William Tze-You Chen
IPC分类号: H01L2348
CPC分类号: H01L24/73 , H01L23/3114 , H01L23/3157 , H01L24/48 , H01L24/97 , H01L2224/05599 , H01L2224/48091 , H01L2224/4824 , H01L2224/73204 , H01L2224/73215 , H01L2224/73265 , H01L2224/85399 , H01L2224/97 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01015 , H01L2924/01016 , H01L2924/01033 , H01L2924/01078 , H01L2924/01082 , H01L2924/14 , H01L2924/15787 , H01L2924/181 , H01L2224/81 , H01L2924/00 , H01L2924/00012 , H01L2224/45015 , H01L2924/207 , H01L2224/45099
摘要: A semiconductor package arrangement and, more particularly, a light weight and miniaturized electronic package or module, wherein the dimensions between an integrated circuit comprising a semiconductor chip and those of a chip carrier have been optimized in order to provide for minimum weight and size relationships. Furthermore, disclosed is a method of forming the semiconductor package arrangement so as to produce a small, lightweight and essentially miniaturized chip-sized chip carrier package module. The chip carrier, which may be an organic laminate, multi-layer ceramic substrate or flexible substrate, as required by specific applications, is basically designed to possess overall smaller peripheral dimensions than those of the integrated circuit or semiconductor chip which is adapted to be mounted thereon. In essence, the chip carrier or substrate is electrically connected to the semiconductor chip through the intermediary of either solder bumps or a conductive adhesive, or other suitable flip chip connection methods. The utilization of an electronic package arrangement which comprises the mounting of a chip on a chip carrier or substrate, wherein the latter is of smaller peripheral dimensions than the semiconductor chip, and thereby eliminates in particular the edge stresses generated by the differentials in thermal expansion between the chip and chip carrier substrate, and in effect, reducing the previously generally encountered high mechanical stresses and extensive heat-induced warpage leading to potential failure of the electrical interconnects or solder joints.
摘要翻译: 一种半导体封装装置,更具体地说,是一种重量轻且小型化的电子封装或模块,其中包括半导体芯片的集成电路与芯片载体的集成电路之间的尺寸已被优化,以便提供最小的重量和尺寸关系。 此外,公开了一种形成半导体封装布置的方法,以便产生小型,重量轻且基本上小型化的芯片尺寸的芯片载体封装模块。 根据具体应用,可以是有机层压体,多层陶瓷基板或柔性基板的芯片载体基本上被设计为具有比适于安装的集成电路或半导体芯片的整体尺寸更小的外围尺寸 上。 本质上,芯片载体或衬底通过焊料凸块或导电粘合剂或其它合适的倒装芯片连接方法电连接到半导体芯片。 利用包括在芯片载体或衬底上安装芯片的电子封装装置,其中后者的尺寸小于半导体芯片的外围尺寸,从而特别消除了由半导体芯片之间的热膨胀差异产生的边缘应力 芯片和芯片载体衬底,并且实际上减少了先前通常遇到的高机械应力和广泛的热引起的翘曲,导致电互连或焊点的潜在故障。
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