Spatial light modulator
    11.
    发明授权
    Spatial light modulator 失效
    空间光调制器

    公开(公告)号:US5784189A

    公开(公告)日:1998-07-21

    申请号:US569158

    申请日:1995-12-21

    摘要: A spatial light modulator formed of a moveable electrode which is disposed opposite a fixed electrode and is biased to roll in a preferred direction upon application of an electric field across the electrodes to produce a light valve or light shutter. In one embodiment, the moveable electrode is restrained at one end and coils about the fixed end in a preferential roll direction. The bias is achieved by inducing anisotropic stress or anisotropic stiffness.

    摘要翻译: PCT No.PCT / US93 / 06342 Sec。 371 1995年12月21日第 102(e)日期1995年12月21日PCT提交1993年7月2日PCT公布。 出版物WO95 / 0162400 日期1995年1月12日一种由可移动电极形成的空间光调制器,该可移动电极与固定电极相对设置,并且在施加电极两端的电场之后被偏置成在优选方向上滚动以产生光阀或光闸。 在一个实施例中,可移动电极被限制在一端并以优先的滚动方向围绕固定端盘绕。 通过诱发各向异性压力或各向异性刚度来实现偏置。

    Semiconductor embedded layer technology including permeable base
transistor, fabrication method
    15.
    发明授权
    Semiconductor embedded layer technology including permeable base transistor, fabrication method 失效
    半导体嵌入层技术包括可渗透晶体管,制造方法

    公开(公告)号:US4378629A

    公开(公告)日:1983-04-05

    申请号:US65514

    申请日:1979-08-10

    摘要: A layer of material such as the metal base of a transistor is embedded in single crystal. A layer of the material with small, uniformly dimensioned and uniformly spaced openings is formed on a single crystal substrate, and the single crystal is grown from the exposed portions of the substrate over the layer of material. For best results, the layer of material to be embedded is deposited relative to the crystal orientation to provide a much greater rate of crystal growth laterally across the layer than away from the crystal substrate. The method is particularly useful in fabricating a permeable base transistor having slits formed in the metal base layer. An integrated circuit can be fabricated by forming a pattern of conductive material on a single crystal, that pattern having continuous regions which inhibit further crystal growth and narrow regions or regions having openings therein which permit lateral crystal growth across those regions. In that way, the conductive pattern is selectively embedded with the continuous regions left exposed after crystal growth. Connections can be made between the exposed regions and a pattern on the new crystal layer. This method has particular usefulness in fabricating multi-level integrated circuits.

    摘要翻译: 诸如晶体管的金属基底的材料层被嵌入在单晶中。 在单晶衬底上形成具有小的,均匀尺寸和均匀间隔的开口的材料层,并且单晶从衬底层的暴露部分生长在材料层上。 为了获得最佳结果,相对于晶体取向沉积要嵌入的材料层,以提供横跨层的晶体生长比离开晶体衬底的更大的晶体生长速率。 该方法在制造具有形成在金属基底层中的狭缝的可渗透的基极晶体管中特别有用。 可以通过在单晶上形成导电材料图案来制造集成电路,该图案具有抑制进一步晶体生长的连续区域,并且具有允许在这些区域上横向晶体生长的窄区域或其中具有开口的区域。 以这种方式,导电图案被选择性地嵌入在晶体生长后留下的连续区域。 可以在曝光区域和新晶体层上的图案之间进行连接。 该方法在制造多电平集成电路中具有特别的用途。

    Solar cells having ultrathin active layers
    16.
    发明授权
    Solar cells having ultrathin active layers 失效
    具有超薄活性层的太阳能电池

    公开(公告)号:US4376228A

    公开(公告)日:1983-03-08

    申请号:US57874

    申请日:1979-07-16

    摘要: Improvements in solar cells based upon low cost semiconductors, such as amorphous silicon, are disclosed. The improved solar cells of this invention have ultrathin active semiconductor layers having a thickness between 0.1 t.sub..alpha. and L.sub.m wherein t.sub..alpha. is the solar spectrum absorption length and L.sub.m is the diffusion length for photogenerated minority charge carriers in the active layer. The back surface reflector has a solar spectrum reflectivity of 70% or greater, so that incident energy not absorbed in a direct pass through the active layer is reflected for another pass. The most preferred embodiment of the cells described herein are shaped to have a light-trapping structure so that light makes multiple passes through the thin semiconductor layers.

    摘要翻译: 公开了基于低成本半导体(例如非晶硅)的太阳能电池的改进。 本发明的改进的太阳能电池具有厚度在0.1tα和Lm之间的超薄有源半导体层,其中tα是太阳光谱吸收长度,Lm是有源层中的光生少数电荷载流子的扩散长度。 后表面反射器具有70%或更大的太阳光谱反射率,使得不被直接通过有源层吸收的入射能量被反射另一遍。 本文所述的电池的最优选实施例被成形为具有光捕获结构,使得光使多次穿过薄的半导体层。

    Wide band and radio frequency waveguide and hybrid integration in a silicon package
    17.
    发明授权
    Wide band and radio frequency waveguide and hybrid integration in a silicon package 有权
    宽带和射频波导以及混合集成在硅封装中

    公开(公告)号:US08587106B2

    公开(公告)日:2013-11-19

    申请号:US11761108

    申请日:2007-06-11

    IPC分类号: H01L23/02

    摘要: A device includes a device wafer having a circuit component formed thereon and having vias formed therein and a cap wafer bonded to the device wafer. The cap wafer has a cavity therein. The cavity has a post formed therein, and the post is positioned to mechanically support the vias formed in the device wafer. The cavity has a volume, the volume substantially enclosing the circuit component formed on the device wafer. The cavity has a width and height such that an impedance of a transmission line is dependent upon the width and height of the cavity, or the impedance of a transmission line is dependent upon the width of a center conductor within the cavity.

    摘要翻译: 一种器件包括具有形成在其上的电路部件并且具有形成在其中的通孔的器件晶片和结合到器件晶片的帽晶片。 盖晶片在其中具有空腔。 空腔具有形成在其中的柱,并且柱被定位成机械地支撑形成在器件晶片中的通孔。 空腔具有体积,该体积基本上包围形成在器件晶片上的电路部件。 空腔具有宽度和高度,使得传输线的阻抗取决于空腔的宽度和高度,或者传输线的阻抗取决于腔内的中心导体的宽度。

    WIDE BAND AND RADIO FREQUENCY WAVEGUIDE AND HYBRID INTEGRATION IN A SILICON PACKAGE
    18.
    发明申请
    WIDE BAND AND RADIO FREQUENCY WAVEGUIDE AND HYBRID INTEGRATION IN A SILICON PACKAGE 有权
    宽带和无线电频率波形和硅包装中的混合集成

    公开(公告)号:US20100019872A1

    公开(公告)日:2010-01-28

    申请号:US11761108

    申请日:2007-06-11

    IPC分类号: H01P1/00 H05K5/00

    摘要: A device includes a device wafer having a circuit component formed thereon and having vias formed therein and a cap wafer bonded to the device wafer. The cap wafer has a cavity therein. The cavity has a post formed therein, and the post is positioned to mechanically support the vias formed in the device wafer. The cavity has a volume, the volume substantially enclosing the circuit component formed on the device wafer. The cavity has a width and height such that an impedance of a transmission line is dependent upon the width and height of the cavity, or the impedance of a transmission line is dependent upon the width of a center conductor within the cavity.

    摘要翻译: 一种器件包括具有形成在其上的电路部件并且具有形成在其中的通孔的器件晶片和结合到器件晶片的帽晶片。 盖晶片在其中具有空腔。 空腔具有形成在其中的柱,并且柱被定位成机械地支撑形成在器件晶片中的通孔。 空腔具有体积,该体积基本上包围形成在器件晶片上的电路部件。 空腔具有宽度和高度,使得传输线的阻抗取决于空腔的宽度和高度,或者传输线的阻抗取决于腔内的中心导体的宽度。

    Rolling shutter optical switch device with dimples on shutter, annular rim at optical port and shortened shutter attachment edge
    19.
    发明授权
    Rolling shutter optical switch device with dimples on shutter, annular rim at optical port and shortened shutter attachment edge 失效
    卷帘快门光开关装置带有快门上的凹坑,光口处的环形边缘和缩短的快门附件边缘

    公开(公告)号:US06829399B2

    公开(公告)日:2004-12-07

    申请号:US09799826

    申请日:2001-03-05

    IPC分类号: G02B626

    摘要: An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.

    摘要翻译: 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下,膜在端口上展开到基板上,使得指向端口的光照射在快门上。 在第二打开状态下,膜从端口卷起,使得指向端口的光照射在端口上。 在一个实施例中,在膜上形成反射镜,使得当膜在衬底上处于关闭状态时,指向端口的光被反射镜反射。 在一个配置中,光学端口包括孔或孔,这样的光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极,使得当其被推出时,其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝,以通过减轻膜中的应变来保持反射镜平坦,并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积,以减少两者粘在一起的可能性。 膜的附着边缘可以比其宽度短,以减少膜中的变形,以保持镜子平坦。 可以围绕端口设置凸起的环形边缘,使得当快门被按压在端口上时,其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。