公开(公告)号：US20170248847A1

公开(公告)日：2017-08-31

申请号：US15595030

申请日：2017-05-15

Applicant: JSR CORPORATION

Inventor： Hiroyuki KOMATSU ,  Takehiko NARUOKA ,  Shinya MINEGISHI ,  Kaori SAKAI ,  Tomoki NAGAI

IPC: G03F7/038 ,  H01L21/311 ,  G03F7/039 ,  G03F7/004 ,  C09D153/00 ,  G03F7/20 ,  G03F7/32 ,  G03F7/38 ,  G03F7/11 ,  H01L21/027 ,  G03F7/16

CPC classification number: G03F7/038 ,  B05D3/064 ,  C08L2201/56 ,  C09D125/14 ,  C09D153/00 ,  G03F7/0002 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/0048 ,  G03F7/039 ,  G03F7/11 ,  G03F7/16 ,  G03F7/168 ,  G03F7/2006 ,  G03F7/322 ,  G03F7/38 ,  H01L21/027 ,  H01L21/0271 ,  H01L21/0332 ,  H01L21/3065 ,  H01L21/31138

Abstract: A composition for a base of a directed self-assembling film includes a compound including an oxo acid group, and a solvent. The compound is preferably represented by formula (1). A represents an organic group having 10 or more carbon atoms and having a valency of n. B represents an oxo acid group. n is an integer of 1 to 200. In a case where n is 2 or greater, a plurality of Bs are identical or different. AB)n   (1)

公开(公告)号：US09690192B2

公开(公告)日：2017-06-27

申请号：US14691043

申请日：2015-04-20

Applicant: JSR CORPORATION

Inventor： Hiroyuki Komatsu ,  Takehiko Naruoka ,  Shinya Minegishi ,  Kaori Sakai ,  Tomoki Nagai

IPC: H01L21/302 ,  H01L21/461 ,  C03C15/00 ,  C03C25/68 ,  C23F1/00 ,  G03F7/00 ,  H01L21/3065 ,  B05D3/06 ,  H01L21/027 ,  C09D125/14 ,  H01L21/033

CPC classification number: G03F7/038 ,  B05D3/064 ,  C08L2201/56 ,  C09D125/14 ,  C09D153/00 ,  G03F7/0002 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/0048 ,  G03F7/039 ,  G03F7/11 ,  G03F7/16 ,  G03F7/168 ,  G03F7/2006 ,  G03F7/322 ,  G03F7/38 ,  H01L21/027 ,  H01L21/0271 ,  H01L21/0332 ,  H01L21/3065 ,  H01L21/31138

Abstract: A composition for a base of a directed self-assembling film includes a compound including an oxo acid group, and a solvent. The compound is preferably represented by formula (1). A represents an organic group having 10 or more carbon atoms and having a valency of n. B represents an oxo acid group. n is an integer of 1 to 200. In a case where n is 2 or greater, a plurality of Bs are identical or different. AB)n  (1)

公开(公告)号：US20140357016A1

公开(公告)日：2014-12-04

申请号：US14291164

申请日：2014-05-30

Applicant: Tokyo Electron Limited

Inventor： Takashi Fuse ,  Setsuko Shibuya

IPC: H01L51/00 ,  B05C9/12

CPC classification number: B05C9/12 ,  B05D1/60 ,  B05D3/063 ,  B05D3/064 ,  B05D3/067 ,  B05D7/02 ,  C23C16/45536

Abstract: An organic molecular film forming apparatus 100 of forming an organic molecular film on a processing target object includes a processing chamber 11 that accommodates therein the processing target object; an organic material gas supplying unit 2 that supplies an organic material gas into the processing chamber 11; and an ultraviolet ray irradiating unit 13 that irradiates ultraviolet ray to at least one of the processing target object, the organic material gas supplied to the processing target object, and a film formed on a surface of the processing target object. At least one of the surface of the processing target object and the organic molecular film formed thereon is activated by irradiating the ultraviolet ray from the ultraviolet ray irradiating unit 13 to at least one of the processing target object, the organic material gas supplied to the processing target object, and the film formed on the processing target object.

Abstract translation: 在加工对象物上形成有机分子膜的有机分子膜形成装置100包括容纳处理对象物的处理室11， 有机材料气体供给单元2，其将有机材料气体供给到处理室11中; 以及紫外线照射单元13，其将紫外线照射到处理对象物体中的至少一个，供给到处理对象物体的有机材料气体和形成在处理对象物体的表面上的膜。 通过将紫外线照射单元13的紫外线照射到加工对象物中的至少一个，供给到处理对象物中的有机材料气体中的至少一个来激活加工对象物的表面和形成于其上的有机分子膜中的至少一个 目标对象和形成在处理目标对象上的胶片。

公开(公告)号：US20020050574A1

公开(公告)日：2002-05-02

申请号：US09882974

申请日：2001-06-15

Applicant: Board of Trustrees operating Michigan State University

Inventor： Lawrence T. Drzal ,  Michael J. Rich

IPC: G21K005/10 ,  H01J037/08

CPC classification number: D06M10/001 ,  B01J19/123 ,  B01J2219/0879 ,  B01J2219/0886 ,  B05D3/062 ,  B05D3/063 ,  B05D3/064 ,  B05D3/101 ,  B05D3/102 ,  B05D3/104 ,  B29C59/16 ,  B29C2035/0827 ,  C03C25/6226 ,  C04B41/0045 ,  C04B41/009 ,  D01F11/122 ,  D06M10/06 ,  D06M11/34 ,  G21K5/10 ,  H01B1/04 ,  C04B41/4519 ,  C04B41/4584 ,  C04B14/386

Abstract: A process using ultraviolet light having a wavelength of 160 to 500 nanometers without higher wavelengths and a high intensity between about 1 and 40 watts/cm2 to surface treat a carbon containing fiber is described. The treated fiber contains an enhanced amount of oxygen on the surface which significantly improves the bondability of the fiber in composites.

Abstract translation: 描述了使用波长为160-500纳米而不具有较高波长和约1-40瓦特/平方厘米之间的高强度的紫外光的表面处理含碳纤维的方法。 经处理的纤维在表面上含有增加的氧量，这显着提高了复合材料中纤维的粘合性。

公开(公告)号：US20170113249A1

公开(公告)日：2017-04-27

申请号：US15301528

申请日：2015-04-03

Applicant: Commissariat A L'energie Atomique Et Aux Energies Alternatives

Inventor： Pascal Viel ,  Thomas Berthelot ,  Xavier Lefevre ,  Jérôme Polesel Maris

IPC: B05D7/24 ,  B05D3/12 ,  B05D3/10 ,  B05D3/06

CPC classification number: B05D7/24 ,  B05D1/18 ,  B05D3/0254 ,  B05D3/064 ,  B05D3/067 ,  B05D3/101 ,  B05D3/108 ,  B05D3/12 ,  B05D7/02 ,  B05D2201/00 ,  B05D2203/00 ,  C23C18/1658 ,  C23C18/1831 ,  C23C18/1889 ,  C23C18/1893 ,  C23C18/2066 ,  C23C18/208 ,  C23C18/2086 ,  C23C18/30 ,  C23C18/36 ,  C23C18/38 ,  C23C18/40

Abstract: The invention relates to a method for functionalising a surface of a solid substrate with at least one acrylic acid polymer layer, said method including the steps of: i) placing the surface in contact with a solution having of at least one acrylic acid homopolymer, a solvent and, optionally, metal salts; ii) removing the solvent from the solution in contact with the surface; and iii) binding the polymer to the surface by thermal treatment.

公开(公告)号：US20150064340A1

公开(公告)日：2015-03-05

申请号：US14301643

申请日：2014-06-11

Applicant: Seamus Curran ,  Nigel Alley ,  Kang-Shyang Liao ,  Amrita Haldar

Inventor： Seamus Curran ,  Nigel Alley ,  Kang-Shyang Liao ,  Amrita Haldar

IPC: C23C16/02 ,  C23C16/52 ,  C23C16/458 ,  C23C16/50 ,  C23C16/44 ,  C23C16/452

CPC classification number: C23C16/02 ,  B05D1/60 ,  B05D3/064 ,  B05D3/142 ,  B05D5/08 ,  C03C17/30 ,  C03C2218/31 ,  C23C14/12 ,  C23C16/0227 ,  C23C16/44 ,  C23C16/4412 ,  C23C16/448 ,  C23C16/452 ,  C23C16/45561 ,  C23C16/458 ,  C23C16/482 ,  C23C16/50 ,  C23C16/52 ,  C23C16/545 ,  D06B1/08 ,  D06M10/025 ,  D06M10/04

Abstract: A system and method for depositing a coating may comprise a coating chemical reactor, surface activation component, and a deposition component. A target surface may be prepared for deposition with the surface activation component. The coating chemical reactor may comprise a coating chemical dispenser and a coating chemical verifier that prepares the coating chemical for deposition. The coating chemical verifier may utilize an optical excitation source and at least one optical detector, wherein chemical substances are identified by unique signatures composed of binary code. The coating chemical may be received by the deposition component to depositing the coating chemical on the target surface.

Abstract translation: 用于沉积涂层的系统和方法可以包括涂层化学反应器，表面活化组分和沉积组分。 可以制备目标表面用于与表面活化组分沉积。 涂层化学反应器可以包括涂料化学分配器和涂覆化学验证器，其准备用于沉积的涂料化学品。 涂层化学验证者可以利用光学激发源和至少一个光学检测器，其中通过由二进制代码构成的唯一签名识别化学物质。 涂层化学品可以被沉积组分接收以将涂覆化学品沉积在靶表面上。

公开(公告)号：US07695775B2

公开(公告)日：2010-04-13

申请号：US11295129

申请日：2005-12-05

Applicant: Boris Kobrin ,  Jeffrey D. Chinn ,  Romuald Nowak

Inventor： Boris Kobrin ,  Jeffrey D. Chinn ,  Romuald Nowak

IPC: H05H1/00 ,  B05D3/04 ,  B05D3/10 ,  B05D3/06

CPC classification number: B05D1/60 ,  B05D3/064 ,  B82Y30/00

Abstract: We have developed an improved vapor-phase deposition method and apparatus for the application of layers and coatings on various substrates. The method and apparatus are useful in the fabrication of biofunctional devices, Bio-MEMS devices, and in the fabrication of microfluidic devices for biological applications. In one important embodiment, a siloxane substrate surface is treated using a combination of ozone and UV radiation to render the siloxane surface more hydrophilic, and subsequently a functional coating is applied in-situ over the treated surface of the siloxane substrate.

Abstract translation: 我们已经开发了一种改进的气相沉积方法和装置，用于在各种基底上施加层和涂层。 该方法和装置可用于制造生物功能装置，生物MEMS装置以及制造用于生物应用的微流体装置。 在一个重要的实施方案中，使用臭氧和UV辐射的组合处理硅氧烷底物表面，以使硅氧烷表面更亲水，随后在硅氧烷底物的处理表面上原位施加功能性涂层。

公开(公告)号：US07094451B2

公开(公告)日：2006-08-22

申请号：US10289986

申请日：2002-11-07

Applicant: Lawrence T. Drzal ,  Praveen Tummala

Inventor： Lawrence T. Drzal ,  Praveen Tummala

IPC: B05D3/06 ,  C23C18/14

CPC classification number: B05D3/062 ,  B05D3/063 ,  B05D3/064 ,  B05D3/101 ,  B05D3/102 ,  B05D3/104 ,  B29C59/16 ,  B29C2035/0827 ,  C03C25/6226 ,  C04B41/0045 ,  C08J7/12 ,  D01F11/122 ,  G21K5/10 ,  H01B1/04

Abstract: A method using irradiation with optical light in the presence of a chemical dissolved in a solvent which chemical reacts with the surface in the presence of the irradiation to modify the surface (12A, 104A, 202A, 304A, 402A, 502A) of a substrate (12, 104, 202, 304, 402, 502) is described. The light can be pulsed or continuous. The method is significantly enhanced by the presence of water (14, 124, 204, 308, 410, 508) as the solvent containing the dissolved chemical on the surface. The treated surfaces are more paintable and bondable.

Abstract translation: 在溶解在溶剂中的化学物质存在下使用光照射的方法，该化学反应在存在辐射的情况下与表面发生化学反应以改变表面（12A，104A，202A，304A，402A，502 A）的衬底（12,104,202,304,402,502）。 光可以是脉冲或连续的。 通过存在水（14,124,204,308,410,508）作为含有表面上溶解的化学物质的溶剂，该方法显着增强。 经处理的表面更可涂漆和粘合。

公开(公告)号：US20030194506A1

公开(公告)日：2003-10-16

申请号：US10289986

申请日：2002-11-07

Applicant: Board of Trustees of MICHIGAN STATE UNIVERSITY

Inventor： Lawrence T. Drzal ,  Praveen Tummala

IPC: B05D003/00

CPC classification number: B05D3/062 ,  B05D3/063 ,  B05D3/064 ,  B05D3/101 ,  B05D3/102 ,  B05D3/104 ,  B29C59/16 ,  B29C2035/0827 ,  C03C25/6226 ,  C04B41/0045 ,  C08J7/12 ,  D01F11/122 ,  G21K5/10 ,  H01B1/04

Abstract: A method using irradiation with optical light in the presence of a chemical dissolved in a solvent which chemical reacts with the surface in the presence of the irradiation to modify the surface (12A, 104A, 202A, 304A, 402A, 502A) of a substrate (12, 104, 202, 304, 402, 502) is described. The light can be pulsed or continuous. The method is significantly enhanced by the presence of water (14, 124, 204, 306, 410, 508) as the solvent containing the dissolved chemical on the surface. The treated surfaces are more paintable and bondable.

Abstract translation: 在溶解于溶剂中的化学物质存在下使用光学照射的方法，该化学物质在辐射存在下与表面发生化学反应，从而改变表面（ 衬底（ A，高亮显示> ， > 12,104,202,304,402,502 ）。 光可以是脉冲或连续的。 作为含有表面上溶解的化学物质的溶剂，该方法显着增强了水的存在（ 14,124,204,306,410,508 ）。 经处理的表面更可涂漆和粘合。