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公开(公告)号:US20160111369A1
公开(公告)日:2016-04-21
申请号:US14975830
申请日:2015-12-20
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Deepak C. Sekar , Brian Cronquist , Zeev Wurman
IPC: H01L23/528 , H01L23/544 , H01L23/373 , H01L27/06
CPC classification number: H01L23/5286 , B82Y10/00 , G11C11/41 , G11C16/0408 , G11C16/0483 , G11C16/10 , G11C17/18 , G11C29/32 , G11C29/44 , H01L21/6835 , H01L21/76254 , H01L21/84 , H01L23/36 , H01L23/544 , H01L24/13 , H01L24/16 , H01L24/32 , H01L24/48 , H01L27/0207 , H01L27/0688 , H01L27/0694 , H01L27/088 , H01L27/092 , H01L27/1052 , H01L27/10802 , H01L27/10894 , H01L27/10897 , H01L27/1104 , H01L27/1108 , H01L27/1116 , H01L27/11524 , H01L27/11526 , H01L27/11529 , H01L27/11551 , H01L27/1157 , H01L27/11573 , H01L27/11578 , H01L27/11807 , H01L27/1203 , H01L29/1033 , H01L29/66795 , H01L29/66825 , H01L29/66833 , H01L29/7841 , H01L29/785 , H01L29/78696 , H01L29/7881 , H01L29/792 , H01L2221/6835 , H01L2221/68381 , H01L2224/131 , H01L2224/16145 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/48227 , H01L2224/73204 , H01L2224/73265 , H01L2224/81001 , H01L2924/00014 , H01L2924/10253 , H01L2924/12032 , H01L2924/12042 , H01L2924/1305 , H01L2924/13062 , H01L2924/13091 , H01L2924/1461 , H01L2924/15311 , H01L2924/3011 , H01L2924/3025 , H01L2924/00012 , H01L2924/00015 , H01L2924/014 , H01L2924/3512 , H01L2924/00 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
Abstract: A 3D IC device including: a first semiconductor layer including first mono-crystallized transistors, where the first mono-crystallized transistors are interconnected by at least one metal layer including aluminum or copper; a second layer including second mono-crystallized transistors and overlaying the at least one metal layer, where the at least one metal layer is in-between the first semiconductor layer and the second layer; a global power grid to distribute power to the device overlaying the second layer; and a local power grid to distribute power to the first mono-crystallized transistors, where the global power grid is connected to the local power grid by a plurality of through second layer vias, and where the vias have a radius of less than 150 nm.
Abstract translation: 一种3D IC器件,包括:包括第一单结晶晶体管的第一半导体层,其中所述第一单结晶晶体管通过至少一个包括铝或铜的金属层互连; 第二层,包括第二单结晶晶体管并且覆盖所述至少一个金属层,其中所述至少一个金属层在所述第一半导体层和所述第二层之间; 全球电力网,用于向覆盖第二层的设备分配电力; 以及局部电网以将功率分配给第一单结晶晶体管,其中全局电网通过多个通过第二层通孔连接到本地电网,并且其中通孔具有小于150nm的半径。
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公开(公告)号:US09219005B2
公开(公告)日:2015-12-22
申请号:US13623756
申请日:2012-09-20
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Deepak Sekar , Brian Cronquist , Ze'ev Wurman
IPC: H01L23/48 , H01L21/762 , H01L23/544 , H01L21/683 , H01L27/06 , H01L27/092 , B82Y10/00 , H01L21/84 , H01L29/66 , H01L27/02 , H01L29/78 , H01L27/105 , H01L27/108 , H01L29/788 , H01L29/792 , H01L27/11 , H01L27/115 , H01L27/118 , H01L27/12 , G11C16/04 , G11C16/10 , H01L29/786 , H01L29/10 , H01L23/00 , H01L25/065 , H01L27/088 , G11C11/41 , G11C17/18 , G11C29/32 , G11C29/44
CPC classification number: B82Y10/00 , G11C11/41 , G11C16/0408 , G11C16/0483 , G11C16/10 , G11C17/18 , G11C29/32 , G11C29/44 , H01L21/6835 , H01L21/76254 , H01L21/84 , H01L23/544 , H01L24/13 , H01L24/16 , H01L24/32 , H01L24/48 , H01L25/0655 , H01L27/0207 , H01L27/0688 , H01L27/0694 , H01L27/088 , H01L27/092 , H01L27/1052 , H01L27/10802 , H01L27/10894 , H01L27/10897 , H01L27/1104 , H01L27/1108 , H01L27/1116 , H01L27/11524 , H01L27/11526 , H01L27/11529 , H01L27/11551 , H01L27/1157 , H01L27/11573 , H01L27/11578 , H01L27/11807 , H01L27/1203 , H01L29/1033 , H01L29/66545 , H01L29/66795 , H01L29/66825 , H01L29/66833 , H01L29/7841 , H01L29/785 , H01L29/78696 , H01L29/7881 , H01L29/792 , H01L2221/6835 , H01L2221/68381 , H01L2223/5442 , H01L2223/54426 , H01L2223/54453 , H01L2224/131 , H01L2224/16145 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/48227 , H01L2224/73204 , H01L2224/73265 , H01L2224/81001 , H01L2924/00014 , H01L2924/10253 , H01L2924/12032 , H01L2924/12042 , H01L2924/1305 , H01L2924/13062 , H01L2924/13091 , H01L2924/1461 , H01L2924/15311 , H01L2924/181 , H01L2924/3011 , H01L2924/3025 , H01L2924/00012 , H01L2924/00015 , H01L2924/014 , H01L2924/3512 , H01L2924/00 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
Abstract: A 3D IC based mobile system including: a first semiconductor layer including first mono-crystallized transistors, where the first mono-crystallized transistors are interconnected by at least one metal layer including aluminum or copper; a second layer including second mono-crystallized transistors and overlaying the at least one metal layer, where the at least one metal layer is in-between the first semiconductor layer and the second layer; a plurality of thermal paths between the second mono-crystallized transistors and a heat removal apparatus, where at least one of the plurality of thermal paths includes a thermal contact adapted to conduct heat and not conduct electricity; and a heat spreader layer between the second layer and the at least one metal layer.
Abstract translation: 一种基于3D IC的移动系统,包括:包括第一单结晶晶体管的第一半导体层,其中第一单结晶晶体管通过包括铝或铜的至少一个金属层互连; 第二层,包括第二单结晶晶体管并且覆盖所述至少一个金属层,其中所述至少一个金属层在所述第一半导体层和所述第二层之间; 所述第二单结晶晶体管和散热装置之间的多个热路径,其中所述多个热路径中的至少一个包括适于传导热量而不导电的热接触; 以及在所述第二层和所述至少一个金属层之间的散热层。
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373.
公开(公告)号:US09099424B1
公开(公告)日:2015-08-04
申请号:US13869115
申请日:2013-04-24
Applicant: Monolithic 3D Inc.
Inventor: Deepak Sekar , Zvi Or-Bach , Brian Cronquist
IPC: H01L29/72 , H01L23/373
CPC classification number: H01L23/5225 , H01L23/3677 , H01L27/0688 , H01L27/088 , H01L27/092 , H01L2924/0002 , H01L2924/00
Abstract: A mobile system, including: a 3D device, the 3D device including: a first layer of first transistors, overlaid by at least one interconnection layer, where the interconnection layer comprises copper or aluminum; a second layer including second transistors, the second layer overlaying the interconnection layer, the second layer including: a plurality of electrical connections connecting the second transistors with the interconnection layer; and at least one thermally conductive and electrically non-conductive contact, the at least one thermally conductive and electrically non-conductive contact thermally connects the second layer to the top or bottom surface of the 3D device.
Abstract translation: 一种移动系统,包括:3D设备,所述3D设备包括:由至少一个互连层覆盖的第一层第一晶体管,所述互连层包括铜或铝; 包括第二晶体管的第二层,覆盖所述互连层的所述第二层,所述第二层包括:将所述第二晶体管与所述互连层连接的多个电连接; 以及至少一个导热和非导电接触,所述至少一个导热和非导电接触将所述第二层热连接到所述3D器件的顶表面或底表面。
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公开(公告)号:US20150171079A1
公开(公告)日:2015-06-18
申请号:US14628231
申请日:2015-02-21
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Zeev Wurman
CPC classification number: H01L27/0688 , H01L23/34 , H01L23/481 , H01L23/50 , H01L23/5252 , H01L2224/16145 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/48091 , H01L2224/48227 , H01L2224/73204 , H01L2224/73265 , H01L2924/0002 , H01L2924/15311 , H03K19/096 , H01L2924/00014 , H01L2924/00
Abstract: A 3D device, including: a first layer including first transistors, the first transistors interconnected by a first layer of interconnection; a second layer including second transistors, the second transistors overlaying the first layer of interconnection, where the first layer includes a first clock distribution structure, where the second layer includes a second clock distribution structure and a second clock origin, where the second clock origin is connected to the first clock distribution structure with a plurality of through layer vias, and where the second layer thickness is less than 1 micrometer.
Abstract translation: 一种3D设备,包括:第一层,包括第一晶体管,所述第一晶体管通过第一互连层相互连接; 包括第二晶体管的第二层,覆盖第一层互连层的第二晶体管,其中第一层包括第一时钟分布结构,其中第二层包括第二时钟分布结构和第二时钟源,其中第二时钟源为 连接到具有多个通过层通孔的第一时钟分配结构,并且其中第二层厚度小于1微米。
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公开(公告)号:US09023688B1
公开(公告)日:2015-05-05
申请号:US14298917
申请日:2014-06-07
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist , Albert Karl Henning
IPC: H01L21/00 , H01L21/8238 , H01L21/20 , H01L21/44 , H01L21/768
CPC classification number: H01L27/0688 , H01L21/67109 , H01L23/3677 , H01L23/3736 , H01L23/481 , H01L23/5329 , H01L2924/0002 , H01L2924/00
Abstract: A method for processing a semiconductor device, the method including; providing a first semiconductor layer including first transistors; forming interconnection layers overlying the transistors, where the interconnection layers include copper or aluminum; forming a shielding heat conducting layer overlaying the interconnection layers; forming an isolation layer overlaying the shielding heat conducting layer; forming a second semiconductor layer overlying the isolation layer, and processing the second semiconductor layer at a temperature greater than about 400° C., where the interconnection layers are kept at a temperature below about 400° C.
Abstract translation: 一种半导体器件的处理方法,该方法包括: 提供包括第一晶体管的第一半导体层; 形成覆盖晶体管的互连层,其中互连层包括铜或铝; 形成覆盖所述互连层的屏蔽导热层; 形成覆盖所述屏蔽导热层的隔离层; 形成覆盖隔离层的第二半导体层,以及在大于约400℃的温度下处理第二半导体层,其中互连层保持在低于约400℃的温度。
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公开(公告)号:US08987079B2
公开(公告)日:2015-03-24
申请号:US13683344
申请日:2012-11-21
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach
IPC: H01L21/8234 , H01L21/4763 , H01L21/822 , H01L21/683 , H01L21/762 , H01L21/8238 , H01L21/84 , H01L23/525 , H01L23/00 , H01L25/065 , H01L25/00 , H01L27/02 , H01L27/06 , H01L27/092 , H01L27/10 , H01L27/105 , H01L27/108 , H01L27/11 , H01L27/112 , H01L27/115 , H01L27/118 , H01L27/12 , H01L29/423 , H01L29/66 , H01L29/78 , H01L29/788 , H01L29/792 , H01L23/367 , H01L23/48
CPC classification number: H01L21/8221 , H01L21/6835 , H01L21/76254 , H01L21/823828 , H01L21/84 , H01L23/3677 , H01L23/481 , H01L23/5252 , H01L24/05 , H01L24/13 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/83 , H01L25/0655 , H01L25/0657 , H01L25/50 , H01L27/0207 , H01L27/0688 , H01L27/092 , H01L27/10 , H01L27/105 , H01L27/10802 , H01L27/10873 , H01L27/10876 , H01L27/10894 , H01L27/10897 , H01L27/11 , H01L27/1108 , H01L27/1116 , H01L27/112 , H01L27/11206 , H01L27/11526 , H01L27/11529 , H01L27/11551 , H01L27/11573 , H01L27/11578 , H01L27/11807 , H01L27/11898 , H01L27/1203 , H01L27/1214 , H01L27/1266 , H01L29/4236 , H01L29/66272 , H01L29/66621 , H01L29/66825 , H01L29/66833 , H01L29/66901 , H01L29/78 , H01L29/7841 , H01L29/7881 , H01L29/792 , H01L2221/68368 , H01L2223/5442 , H01L2223/54426 , H01L2224/0401 , H01L2224/16145 , H01L2224/16235 , H01L2224/32145 , H01L2224/32225 , H01L2224/45124 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/73204 , H01L2224/73253 , H01L2224/73265 , H01L2224/83894 , H01L2225/06513 , H01L2225/06541 , H01L2924/00011 , H01L2924/00014 , H01L2924/01002 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01018 , H01L2924/01019 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/0105 , H01L2924/01051 , H01L2924/01066 , H01L2924/01068 , H01L2924/01072 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01076 , H01L2924/01077 , H01L2924/01078 , H01L2924/01082 , H01L2924/0132 , H01L2924/01322 , H01L2924/014 , H01L2924/10253 , H01L2924/10329 , H01L2924/12032 , H01L2924/12036 , H01L2924/12042 , H01L2924/1301 , H01L2924/1305 , H01L2924/1306 , H01L2924/13062 , H01L2924/13091 , H01L2924/14 , H01L2924/15311 , H01L2924/15788 , H01L2924/1579 , H01L2924/16152 , H01L2924/181 , H01L2924/19041 , H01L2924/30105 , H01L2924/3011 , H01L2924/3025 , H01L2924/00015 , H01L2924/01031 , H01L2924/3512 , H01L2924/00 , H01L2224/80001 , H01L2224/05599 , H01L2924/00012
Abstract: A method for developing a custom device, the method including: programming a programmable device, where the programmable device includes a layer of monocrystalline first transistors and alignment marks, the first layer of monocrystalline first transistors is overlaid by interconnection layers, the interconnection layers are overlaid by a second layer of monocrystalline second transistors, where the interconnection layers include copper or aluminum, where the programming includes use of the second transistors, where the programming includes use of N type transistors and P type transistors, and where the programmable device includes at least one programmable connection; and then a step of producing a volume device according to a specific programmed design of the programmable device, where the volume device includes the at least one programmable connection replaced with a lithography defined connection, and where the volume device does not have the second layer.
Abstract translation: 一种用于开发定制设备的方法,所述方法包括:编程可编程设备,其中所述可编程设备包括单晶第一晶体管层和对准标记,所述第一层单晶第一晶体管由互连层覆盖,所述互连层被覆盖 通过第二层单晶第二晶体管,其中互连层包括铜或铝,其中编程包括使用第二晶体管,其中编程包括使用N型晶体管和P型晶体管,并且其中可编程器件至少包括 一个可编程连接; 然后根据可编程设备的特定编程设计产生音量设备的步骤,其中音量设备包括用光刻定义的连接替换的至少一个可编程连接,以及音量设备不具有第二层。
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公开(公告)号:US20150061036A1
公开(公告)日:2015-03-05
申请号:US14509288
申请日:2014-10-08
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Deepak C. Sekar , Brian Cronquist , Israel Beinglass , Jan Lodewijk de Jong
IPC: H01L27/088 , H01L23/48 , H01L23/00 , H01L23/528 , H01L23/532 , H01L27/06 , H01L23/544
CPC classification number: H01L27/088 , G11C17/14 , H01L21/76254 , H01L21/8221 , H01L21/8226 , H01L21/84 , H01L23/481 , H01L23/5252 , H01L23/528 , H01L23/53214 , H01L23/53228 , H01L23/544 , H01L24/14 , H01L24/45 , H01L24/48 , H01L25/0657 , H01L25/18 , H01L27/0207 , H01L27/0688 , H01L27/0694 , H01L27/092 , H01L27/105 , H01L27/10873 , H01L27/10876 , H01L27/10897 , H01L27/11 , H01L27/1108 , H01L27/112 , H01L27/11206 , H01L27/11803 , H01L2223/5442 , H01L2223/54426 , H01L2223/54453 , H01L2224/32145 , H01L2224/45124 , H01L2224/45147 , H01L2224/48091 , H01L2224/73265 , H01L2225/06513 , H01L2225/06517 , H01L2225/06527 , H01L2225/06541 , H01L2225/06589 , H01L2924/00011 , H01L2924/00014 , H01L2924/01019 , H01L2924/01066 , H01L2924/01322 , H01L2924/10253 , H01L2924/12032 , H01L2924/12036 , H01L2924/12042 , H01L2924/1301 , H01L2924/1305 , H01L2924/13062 , H01L2924/13091 , H01L2924/14 , H01L2924/15788 , H01L2924/181 , H01L2924/3011 , H01L2924/3025 , H03K17/687 , H03K19/0948 , H03K19/177 , H01L2924/00 , H01L2224/80001 , H01L2224/05599 , H01L2924/00012
Abstract: A semiconductor device, including: a first layer including monocrystalline material and first transistors, the first transistors overlaid by a first isolation layer; a second layer including second transistors and overlaying the first isolation layer, the second transistors including a monocrystalline material; at least one contact to the second transistors, where the at least one contact has a diameter of less than 200 nm; a first set of external connections underlying the first layer to connect the device to external devices; a second set of external connections overlying the second layer to connect the device to external devices; and an interconnection layer in-between the first layer and the second layer, where the interconnection layer includes copper or aluminum.
Abstract translation: 一种半导体器件,包括:第一层,包括单晶材料和第一晶体管,所述第一晶体管由第一隔离层覆盖; 包括第二晶体管并覆盖第一隔离层的第二层,第二晶体管包括单晶材料; 至少一个接触到所述第二晶体管,其中所述至少一个触点具有小于200nm的直径; 第一层的第一组外部连接,用于将设备连接到外部设备; 第二组外部连接,覆盖第二层以将设备连接到外部设备; 以及位于第一层和第二层之间的互连层,其中互连层包括铜或铝。
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378.
公开(公告)号:US20250133749A1
公开(公告)日:2025-04-24
申请号:US18973101
申请日:2024-12-08
Applicant: Monolithic 3D Inc.
Inventor: Deepak C. Sekar , Zvi Or-Bach
IPC: H10B63/00 , H01L21/268 , H01L21/683 , H01L21/762 , H10B10/00 , H10B12/00 , H10B41/20 , H10B41/40 , H10B41/41 , H10B43/20 , H10B43/40 , H10B61/00 , H10D30/62 , H10D30/67 , H10D30/69 , H10D84/03 , H10D84/80 , H10D86/00 , H10D86/01 , H10D88/00 , H10N70/00 , H10N70/20
Abstract: A method for producing a 3D semiconductor device including: providing a first level, including a single crystal layer; forming memory control circuits in and/or on the first level which include first single crystal transistors and at least two interconnection metal layers; forming at least one second level; performing a first etch step into the second level; forming at least one third level on top of the second level; performing additional processing steps to form first memory cells within the second level and second memory cells within the third level, where each of the first memory cells include at least one second transistor including a metal gate, where each of the second memory cells include at least one third transistor; and performing bonding of the first level to the second level, where the first level includes control of power delivery to the at least one third transistor.
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公开(公告)号:US20250126794A1
公开(公告)日:2025-04-17
申请号:US18991631
申请日:2024-12-22
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han
IPC: H10B43/27 , H01L23/528 , H10B41/10 , H10B41/20 , H10B43/10 , H10B43/20 , H10B53/20 , H10D30/63 , H10D30/69 , H10D62/834 , H10D64/64 , H10D89/10
Abstract: A 3D semiconductor device including: a first level including a single crystal layer and a memory control circuit including first transistors and a redundancy control circuit; a first metal layer overlaying the single crystal layer; a second metal layer overlaying the first metal layer; a third metal layer overlaying the second metal layer; second transistors disposed atop the third metal layer with at least one including a metal gate; third transistors disposed atop the second transistors; a fourth metal layer atop the third transistors; a memory array including word-lines and at least four memory mini arrays, each including at least four rows by four columns of memory cells, each of the memory cells includes at least one of the second transistors or at least one of the third transistors; a connection path from the fourth metal to the third metal including a via disposed through the memory array.
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公开(公告)号:US20250098182A1
公开(公告)日:2025-03-20
申请号:US18963630
申请日:2024-11-28
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han , Brian Cronquist
IPC: H10B80/00 , H01L23/00 , H01L25/065 , H01L25/18
Abstract: A semiconductor device including: a first level including at least four independently controlled first memory arrays, where the first level includes first transistors; a second level disposed on top of the first level, where the second level includes second memory arrays; and a third level disposed on top of the second level, where the third level includes third transistors, at least one metal layer, and third memory arrays; a fourth level disposed on top of the third level, where the fourth level includes fourth transistors, another at least one metal layer, and is bonded to the third level, where the bonded includes metal-to-metal bonding regions, where the first level includes first filled holes, where the second level includes second filled holes; and a via connection through the second level and the third level, and where the fourth level includes at least one SRAM memory array.
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