公开(公告)号：US20190189390A1

公开(公告)日：2019-06-20

申请号：US15842544

申请日：2017-12-14

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Larry G. Nelson, SR. ,  Klaus Petry

IPC: H01J37/24 ,  G21K5/04 ,  G01R19/165 ,  H01J37/248

Abstract: A system and method for monitoring glitch frequency and energy is disclosed. The system includes a glitch capture module that monitors the voltage of a biased component and captures any glitches that occur. The glitch capture module also extends the duration of that glitch so that the controller is guaranteed to observe this glitch. In certain embodiments, the glitch capture module captures the maximum energy of the glitch by storing the minimum voltage, in terms of magnitude, of the glitch.

公开(公告)号：US20180158648A1

公开(公告)日：2018-06-07

申请号：US15570803

申请日：2015-05-01

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Masazumi TONE ,  Hiroshi TOUDA ,  Fujio ONISHI

IPC: H01J37/24 ,  H01J37/244 ,  H01J37/22 ,  H01J37/08 ,  H01J37/248 ,  H01J37/26

CPC classification number: H01J37/241 ,  H01J37/08 ,  H01J37/18 ,  H01J37/222 ,  H01J37/244 ,  H01J37/248 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/2448

Abstract: In a charged particle apparatus with an ion pump, which is a charged particle beam apparatus with an ion pump including a charged particle beam irradiation detecting unit for irradiating a sample with a charged particle beam in a chamber and detecting a secondary charged particle, an image processing unit for forming a secondary charged particle image from a detection signal of the detected secondary charged particle, an output unit for processing at the image processing unit and outputting an image, an ion pump for maintaining the interior of the processing chamber in a vacuum state, a driving power supply unit of the ion pump, and a high voltage cable for connecting the ion pump and the driving power supply unit, the driving power supply unit of the ion pump is structured to include a high voltage power supply circuit unit for operating the ion pump, a load current detection circuit unit for detecting a load current applied to the ion pump, and a canceller circuit unit for reducing low frequency noise applied to the load current detection circuit unit in order to sufficiently reduce low frequency noise of the power supply of the ion and to measure the degree of vacuum with a high accuracy.

公开(公告)号：US09734985B2

公开(公告)日：2017-08-15

申请号：US15045624

申请日：2016-02-17

Applicant: Kabushiki Kaisha Toshiba

Inventor： Haruko Akutsu ,  Makiko Katano ,  Akira Kuramoto

IPC: G21K5/08 ,  H01J37/28 ,  H01J37/248 ,  H01J37/22 ,  H01J37/244

CPC classification number: H01J37/248 ,  G01N23/2251 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/2007 ,  H01J2237/2801

Abstract: In accordance with an embodiment, an analytical apparatus includes a member, a voltage source connected to the member and a detecting section. The member has an inserting portion into which a sample holder supporting a sample is insertable and whose shape corresponds to a shape of the sample holder. The detecting section is configured to detect a substance to be emitted from the sample by field evaporation. The shape of the inserting portion in a cross section of a direction perpendicular to an inserting direction of the sample holder is a shape excluding a perfect circle.

公开(公告)号：US20170169988A1

公开(公告)日：2017-06-15

申请号：US15318455

申请日：2016-03-04

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Shuhei YABU ,  Naoto KOGA ,  Mitsuo AKATSU ,  Isao TAKAHIRA ,  Shinichi TOMITA ,  Hiroyuki NODA ,  Ai MASUDA

IPC: H01J37/16 ,  H01J37/248

CPC classification number: H01J37/16 ,  H01J37/248 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/2813

Abstract: Provided is a charged particle beam device that is small, high performance, and easy to transport. A charged particle beam device (100) is provided with a detachable body unit (15) and an auxiliary unit (14), the body unit (15) housing a functional unit related to charged particle beams, and the auxiliary unit (14) housing a power source unit (9).

公开(公告)号：US09548182B2

公开(公告)日：2017-01-17

申请号：US14406909

申请日：2013-05-08

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Takashi Onishi ,  Shunichi Watanabe ,  Minoru Kaneda

IPC: H01J37/04 ,  H01J37/073 ,  H01J37/02 ,  H01J37/067 ,  H01J37/248 ,  H01J37/24 ,  H01J27/02 ,  H01J29/48 ,  H01J37/16

CPC classification number: H01J37/04 ,  H01J27/024 ,  H01J29/485 ,  H01J37/026 ,  H01J37/067 ,  H01J37/073 ,  H01J37/16 ,  H01J37/241 ,  H01J37/248 ,  H01J2237/16

Abstract: An instrument producing a charged particle beam according to the present invention is provided with: a charged particle source; a plurality of first electrodes disposed along a direction of irradiation of charged particles from the charged particle source; a plurality of insulation members disposed between the first electrodes; and a housing mounted around the plurality of first electrodes. The housing is formed from an insulating solid material, and includes a plurality of second electrodes disposed at positions in proximity to the plurality of first electrodes. At least one of the plurality of second electrodes is electrically connected to at least one of the plurality of first electrodes, each of the plurality of second electrodes having the same potential as the potential of the proximate one of the first electrodes.

Abstract translation: 根据本发明的产生带电粒子束的仪器具有：带电粒子源; 多个第一电极，其沿带电粒子源的带电粒子的照射方向设置; 设置在所述第一电极之间的多个绝缘构件; 以及围绕所述多个第一电极安装的壳体。 壳体由绝缘固体材料形成，并且包括设置在靠近多个第一电极的位置处的多个第二电极。 所述多个第二电极中的至少一个电连接到所述多个第一电极中的至少一个，所述多个第二电极中的每一个具有与所述第一电极中的所述第一电极的电位相同的电位。

公开(公告)号：US20160181063A1

公开(公告)日：2016-06-23

申请号：US15056330

申请日：2016-02-29

Applicant: MKS Instruments, Inc.

Inventor： Ken Tran ,  Feng Tian ,  Xing Chen ,  Franklin Lee

IPC: H01J37/248 ,  C01B13/11

CPC classification number: H01J37/248 ,  C01B13/115 ,  C01B2201/90

Abstract: Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.

公开(公告)号：US20160175852A1

公开(公告)日：2016-06-23

申请号：US14971050

申请日：2015-12-16

Applicant: Charles Houston Waddell

Inventor： Charles Houston Waddell

IPC: B03C3/74 ,  B08B1/04 ,  B08B1/00 ,  H01J37/248 ,  H01J37/04

CPC classification number: B08B1/04 ,  B01D53/32 ,  B01D2259/4508 ,  B01D2259/818 ,  B03C3/743 ,  H01T23/00

Abstract: The present invention provides methods and systems for a self-cleaning ion generator that includes a self-cleaning ion generator device that includes a bottom portion, a top portion, at least one electrode extending from the top portion, and a cleaning apparatus for cleaning the at least one electrode.

Abstract translation: 本发明提供了一种用于自清洁离子发生器的方法和系统，其包括自清洁离子发生器装置，该自清洁离子发生器装置包括底部，顶部，至少一个从顶部延伸的电极以及用于清洁 至少一个电极。

公开(公告)号：US09087672B2

公开(公告)日：2015-07-21

申请号：US14565051

申请日：2014-12-09

Applicant: FEI Company

Inventor： Mostafa Maazouz

IPC: H01J3/07 ,  H01J37/08 ,  H01J49/10 ,  H01J49/26 ,  H01J37/147 ,  H01J37/06 ,  H01J37/248

CPC classification number: H01J37/07 ,  H01J3/026 ,  H01J37/04 ,  H01J37/06 ,  H01J37/10 ,  H01J37/1477 ,  H01J37/21 ,  H01J37/248 ,  H01J37/3056 ,  H01J37/3178 ,  H01J2237/0473 ,  H01J2237/04735 ,  H01J2237/04756 ,  H01J2237/1518 ,  H01J2237/1534 ,  H01J2237/28 ,  H01J2237/31749

Abstract: The invention provides a charged particle beam system wherein the middle section of the focused ion beam column is biased to a high negative voltage allowing the beam to move at higher potential than the final beam energy inside that section of the column. At low kV potential, the aberrations and coulomb interactions are reduced, which results in significant improvements in spot size.

公开(公告)号：US20150200079A1

公开(公告)日：2015-07-16

申请号：US14669568

申请日：2015-03-26

Applicant: Reno Technologies, Inc.

Inventor： Imran Ahmed Bhutta

IPC: H01J37/32 ,  H01L21/67 ,  H01J37/244 ,  H01J37/248 ,  H01J37/24

CPC classification number: H01J37/32183 ,  H01J37/241 ,  H01J37/244 ,  H01J37/248 ,  H01L21/67253 ,  H03H7/40 ,  H03H11/30

Abstract: An RF impedance matching network includes an RF input; an RF output configured to operably couple to a plasma chamber; a series electronically variable capacitor (“series EVC”), the series EVC electrically coupled in series between the RF input and the RF output; and a shunt electronically variable capacitor (“shunt EVC”), the shunt EVC electrically coupled in parallel between a ground and one of the RF input and the RF output; a control circuit to control the series variable capacitance and the shunt variable capacitance, wherein the control circuit is configured to determine the variable plasma impedance of the plasma chamber, determine a series capacitance value and a shunt capacitance value, and generate a control signal to alter at least one of the series variable capacitance and the shunt variable capacitance; wherein the alteration is caused by at least one of a plurality of switching circuits.

Abstract translation: RF阻抗匹配网络包括RF输入; 被配置为可操作地耦合到等离子体室的RF输出; 串联电可变电容器（“EVC”系列），串联EVC串联在RF输入和RF输出之间; 和分流电可变电容器（“并联EVC”），并联电气并联在地与RF输入和RF输出中的一个之间的并联EVC; 用于控制串联可变电容和分流可变电容的控制电路，其中控制电路被配置为确定等离子体室的可变等离子体阻抗，确定串联电容值和并联电容值，并产生控制信号以改变 串联可变电容和分流可变电容中的至少一个; 其中所述改变由多个开关电路中的至少一个引起。

公开(公告)号：US6066849A

公开(公告)日：2000-05-23

申请号：US149767

申请日：1998-09-08

Applicant: Douglas K. Masnaghetti ,  Stefano E. Concina ,  Stanley S. Sun ,  Waiman Ng ,  David L. Adler

Inventor： Douglas K. Masnaghetti ,  Stefano E. Concina ,  Stanley S. Sun ,  Waiman Ng ,  David L. Adler

IPC: H01L21/66 ,  H01J37/20 ,  H01J37/22 ,  H01J37/248 ,  H01J37/28 ,  H01J37/244

CPC classification number: H01J37/28 ,  H01J2237/004 ,  H01J2237/2817

Abstract: A method and apparatus for generating an image of a specimen with a scanning electron microscope (SEM) is disclosed. The SEM has a source unit for directing an electron beam substantially towards a portion of the specimen, a detector for detecting particles that are emitted from the specimen, and an image generator for generating the image of the specimen from the emitted particles. The image features are controlled by conditions under which the image is generated. The specimen is scanned under a first set of conditions to generate a first image during a first image phase. The specimen is then scanned under a second set of conditions during a setup phase. The second set of conditions are selected to control charge on the specimen. The specimen is then scanned under the first set of conditions to generate a second image during a second image phase. The features of the second image are controlled by the first and second sets of conditions.

Abstract translation: 公开了一种用扫描电子显微镜（SEM）产生样本图像的方法和装置。 SEM具有用于将电子束基本上朝向样本的一部分引导的源单元，用于检测从样本发射的颗粒的检测器，以及用于从所发射的颗粒产生样本的图像的图像发生器。 图像特征由生成图像的条件控制。 在第一组条件下扫描样本以在第一图像阶段期间产生第一图像。 然后在设置阶段，在第二组条件下扫描样品。 选择第二组条件来控制样品上的电荷。 然后在第一组条件下扫描样品，以在第二图像阶段期间产生第二图像。 第二图像的特征由第一和第二组条件控制。