MICRO ELECTRO MECHANICAL SYSTEMS PACKAGE AND MANUFACTURING METHOD THEREOF
    64.
    发明申请
    MICRO ELECTRO MECHANICAL SYSTEMS PACKAGE AND MANUFACTURING METHOD THEREOF 审中-公开
    微电子机械系统包装及其制造方法

    公开(公告)号:US20150232325A1

    公开(公告)日:2015-08-20

    申请号:US14593352

    申请日:2015-01-09

    发明人: Shih-Wen CHOU

    IPC分类号: B81B7/00 B81C1/00

    摘要: An MEMS package and the manufacturing method thereof are disclosed. The MEMS package includes a package substrate, a block ring, an MEMS chip and an encapsulating material. The package substrate has an inner surface, a corresponding outer surface and a signal opening that penetrates the inner surface and outer surface. The package substrate further has at least one inner contact pad and at least one outer contact pad wherein the outer contact pad is disposed on the outer surface. The inner contact pad is electrically coupled to the outer contact pad. The block ring is disposed on the inner surface and surrounds the signal opening. The MEMS chip has an active surface, at least one sensor device and at least one chip contact pad, wherein the sensor device and the chip contact pad are disposed on the active surface. The active surface is attached to the block ring so that the sensor device is surrounded by the block ring. The chip contact pad is electrically coupled to the inner contact pad. The encapsulating material covers the MEMS chip, the outer side of the block ring and the inner contact pad.

    摘要翻译: 公开了一种MEMS封装及其制造方法。 MEMS封装包括封装衬底,块环,MEMS芯片和封装材料。 封装基板具有内表面,相应的外表面和穿透内表面和外表面的信号开口。 封装衬底还具有至少一个内部接触焊盘和至少一个外部接触焊盘,其中外部接触焊盘设置在外部表面上。 内接触垫电耦合到外接触垫。 块环设置在内表面上并围绕信号开口。 MEMS芯片具有活性表面,至少一个传感器装置和至少一个芯片接触垫,其中传感器装置和芯片接触垫设置在活性表面上。 活动表面附接到块环,使得传感器装置被块环包围。 芯片接触焊盘电耦合到内部接触焊盘。 封装材料覆盖MEMS芯片,块环的外侧和内部接触垫。

    Chip packaging substrate and chip packaging structure
    66.
    发明授权
    Chip packaging substrate and chip packaging structure 有权
    芯片封装基板和芯片封装结构

    公开(公告)号:US09082710B2

    公开(公告)日:2015-07-14

    申请号:US13849294

    申请日:2013-03-22

    发明人: Ying-Tai Tang

    摘要: A chip packaging substrate includes a flexible substrate, a plurality of test pads, and a plurality of leads, wherein the flexible substrate has a first surface and a second surface, and the first surface has a user area and a test pad area configured thereon. The test pads are arranged in at least three rows within the test pad area. The lead connected to the test pad in the middle row includes a first section extending from the chip to the test pad area and a second section disposed on the second surface, wherein one end of the second section penetrates the flexible substrate to connect with the first section and the other end penetrates the flexible substrate to connect with the test pad, so as to increase the dimensions of the test pads.

    摘要翻译: 芯片封装基板包括柔性基板,多个测试焊盘和多个引线,其中柔性基板具有第一表面和第二表面,并且第一表面具有配置在其上的用户区域和测试焊盘区域。 测试垫被布置在测试垫区域内至少三排。 连接到中间行的测试垫的引线包括从芯片延伸到测试焊盘区域的第一部分和设置在第二表面上的第二部分,其中第二部分的一端穿透柔性基板以与第一部分连接 并且另一端穿透柔性基板以与测试垫连接,以便增加测试垫的尺寸。