Thin film capacitor on ceramic
    10.
    发明授权
    Thin film capacitor on ceramic 失效
    陶瓷薄膜电容器

    公开(公告)号:US06339527B1

    公开(公告)日:2002-01-15

    申请号:US09470456

    申请日:1999-12-22

    IPC分类号: H01G4008

    CPC分类号: H01L28/40 H01L21/31683

    摘要: The capacitor on a ceramic substrate one by unique film metallization including in one embodiment an in situ oxidation of titanium to create a metal oxide capacitor. The combination of metals when used with the appropriate optimized oxidation conditions and parameters ensures a high yielding capacitor with high capacitance in absence of noble metals and with ease of manufacture providing a low cost, high yield capacitor on ceramic.

    摘要翻译: 陶瓷衬底上的电容器通过独特的膜金属化,包括在一个实施方案中,原位氧化钛以产生金属氧化物电容器。 当与适当的优化氧化条件和参数一起使用时,金属的组合确保了在不存在贵金属的情况下具有高电容的高产电容器,并且易于制造,在陶瓷上提供低成本,高产率的电容器。