Method for forming an ultrasound transducer array
    1.
    发明授权
    Method for forming an ultrasound transducer array 有权
    用于形成超声换能器阵列的方法

    公开(公告)号:US09364863B2

    公开(公告)日:2016-06-14

    申请号:US13748415

    申请日:2013-01-23

    摘要: An ultrasound transducer array is formed with stealth dicing. A laser is used to form defects within the piezoelectric substrate and along the desired kerf locations. The substrate is fractured along the defects. A controlled expansion, such as using thermal expansion, may be used to establish the desired kerf width. Spacers may be used to maintain the desired kerf width. The kerfs are filled to create the ultrasound transducer array.

    摘要翻译: 超声换能器阵列形成有隐形切割。 使用激光器在压电基片内形成缺陷并沿着所需的切口位置。 基板沿缺陷断裂。 可以使用诸如使用热膨胀的受控膨胀来建立所需的切口宽度。 垫片可用于保持所需的切口宽度。 填充切口以创建超声换能器阵列。

    Stealth Dicing for Ultrasound Transducer Array
    2.
    发明申请
    Stealth Dicing for Ultrasound Transducer Array 有权
    超声波传感器阵列隐形切片

    公开(公告)号:US20140203687A1

    公开(公告)日:2014-07-24

    申请号:US13748415

    申请日:2013-01-23

    IPC分类号: H01L41/35 H01L41/08

    摘要: An ultrasound transducer array is formed with stealth dicing. A laser is used to form defects within the piezoelectric substrate and along the desired kerf locations. The substrate is fractured along the defects. A controlled expansion, such as using thermal expansion, may be used to establish the desired kerf width. Spacers may be used to maintain the desired kerf width. The kerfs are filled to create the ultrasound transducer array.

    摘要翻译: 超声换能器阵列形成有隐形切割。 使用激光器在压电基片内形成缺陷并沿着所需的切口位置。 基板沿缺陷断裂。 可以使用诸如使用热膨胀的受控膨胀来建立所需的切口宽度。 垫片可用于保持所需的切口宽度。 填充切口以创建超声换能器阵列。

    Contacting device, testing method and corresponding production method
    3.
    发明授权
    Contacting device, testing method and corresponding production method 有权
    接触装置,试验方法及相应的生产方法

    公开(公告)号:US07274102B2

    公开(公告)日:2007-09-25

    申请号:US11374391

    申请日:2006-03-13

    IPC分类号: H01L23/48 H01L23/52

    摘要: A contacting device comprises a carrier device with a first surface, a plurality of first terminal regions on the first surface, at least one elastic elevation on the first surface, and a plurality of interconnects, each running from a respective of the first terminal regions to an upper side of the elastic elevation. The plurality of first terminal regions is configured so that signals of a tester device can be fed to the plurality of first terminal regions, the interconnects have first contact regions located at the upper side of the elastic elevation configured to be contacted electrically with corresponding second contact regions of an integrated circuit, and the first contact regions comprise first particles for roughening the surface of the first contact regions.

    摘要翻译: 接触装置包括具有第一表面的载体装置,第一表面上的多个第一端子区域,第一表面上的至少一个弹性高度以及多个互连件,每个互连件从相应的第一端子区域延伸到 弹性高度的上侧。 多个第一端子区域被配置为使得测试器装置的信号可以被馈送到多个第一端子区域,互连具有位于弹性高度的上侧的第一接触区域,其被配置为与相应的第二接触件电接触 区域,并且第一接触区域包括用于使第一接触区域的表面粗糙化的第一颗粒。