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42 条记录 (耗时 0.028 秒)

    Actuator for positioning heads in magnetic disc apparatus
    1.
    发明授权
    Actuator for positioning heads in magnetic disc apparatus 失效
    用于将磁头定位在磁盘装置中的致动器

    公开(公告)号：US4855853A

    公开(公告)日：1989-08-08

    申请号：US105018

    申请日：1987-10-06

    申请人： Toshio Matsushita ,  Hideaki Amano ,  Satoru Yamaura ,  Shigeo Nakamura ,  Yasusuke Nakada

    发明人： Toshio Matsushita ,  Hideaki Amano ,  Satoru Yamaura ,  Shigeo Nakamura ,  Yasusuke Nakada

    IPC分类号： G11B21/02 ,  G11B5/55 ,  G11B21/00 ,  G11B21/08 ,  H02K33/18

    CPC分类号： G11B5/5521 ,  G11B21/08

    摘要： An actuator mechanism for positioning magnetic heads includes arms that support a magnetic recording/reproducing head at one end thereof. Each of the arms is mounted about a shaft and supported for rotation. A coil support member is attached to the end of the arms opposite the head, and is made of a molded resin that integrally covers a voice coil motor used for causing the swinging movement of the arms. The molded resin of the coil support member is a synthetic resin mixed with a powered metal having a known specific gravity and thermal expansion coefficient. Thus, the weight of the synthetic resin can be adjusted to balance a portion including the magnetic heads and the arms with the coil support member in relation to the shaft. Additionally, the thermal expansion coefficient of the coil support member is selected to be substantially equal to that of the arms and the coil so that these components expand and contract to the same degree with variations in temperature to prevent deformation or cracks from occurring in the coil support member.

    摘要翻译： 用于定位磁头的致动器机构包括在其一端支撑磁记录/再现头的臂。 每个臂都围绕轴安装并支撑以旋转。 线圈支撑构件附接到与头部相对的臂的端部，并且由模制树脂制成，其一体地覆盖用于使臂的摆动运动的音圈电机。 线圈支撑构件的模制树脂是与具有已知比重和热膨胀系数的动力金属混合的合成树脂。 因此，可以调节合成树脂的重量，以使线圈支撑构件相对于轴平衡包括磁头和臂的部分。 此外，线圈支撑构件的热膨胀系数被选择为与臂和线圈的热膨胀系数基本相等，使得这些部件随着温度变化而膨胀和收缩到相同程度，以防止在线圈中发生变形或裂纹 支持会员

    Magnetic disk unit and manufacturing method of carriage structure thereof
    3.
    发明授权
    Magnetic disk unit and manufacturing method of carriage structure thereof 失效
    磁盘单元及其托架结构的制造方法

    公开(公告)号：US5301078A

    公开(公告)日：1994-04-05

    申请号：US713994

    申请日：1991-06-12

    申请人： Toshiaki Makino ,  Marutomo Goto ,  Hideyuki Kimura ,  Takashi Yamaguchi ,  Hiromu Hirai ,  Takashi Kono ,  Ryoji Okada ,  Toshihiro Yamada ,  Yasuhiro Yoshimura ,  Hideaki Amano ,  Akio Takatsuka ,  Toshio Matsushita ,  Satoru Yamaura ,  Yuichi Koizumi

    发明人： Toshiaki Makino ,  Marutomo Goto ,  Hideyuki Kimura ,  Takashi Yamaguchi ,  Hiromu Hirai ,  Takashi Kono ,  Ryoji Okada ,  Toshihiro Yamada ,  Yasuhiro Yoshimura ,  Hideaki Amano ,  Akio Takatsuka ,  Toshio Matsushita ,  Satoru Yamaura ,  Yuichi Koizumi

    IPC分类号： G11B5/48 ,  G11B21/16

    CPC分类号： G11B5/4813

    摘要： A magnetic disk unit comprising a one-piece carriage structure having a small thermal off-tracking amount, with the carriage structure including a rotary shaft; guide arms integrally supported on a guide-arm retainer at their proximal ends and extending independently and parallely; bearing retainers formed on both ends of the guide-arm retainer; and bearings fixed on the bearing retainers rotatably connecting the guide-arm retainer to the rotary shaft. A center line in a direction of thickness of the outermost guide arm is located outside of that of the bearing in a direction of height thereof, and a concave portion is continuously formed on the bearing retainer. Thermal coefficients of expansion of the guide arms and the guide-arm retainer are substantially equal, with the carriage structure being fashioned of an alloy mainly containing Al and Si, eutectic crystal Si particles in the guide arm and/or the guide-arm retainer. The average value of the longest eutectic crystal Si particles therein is 1.6 .mu.m or less or the number of the eutectic crystal Si particles if 5.0 or more per 100 .mu.m.sup.2. In the carriage of manufacturing the carriage of the carriage structure is heated for five to fifteen hours at a temperature of 300.degree. to 500.degree. C. after die casting.

    摘要翻译： 一种磁盘单元，包括具有小的热跟踪量小的单件托架结构，其中托架结构包括旋转轴; 引导臂在其近端处一体地支撑在引导臂保持器上并且独立且平行地延伸; 形成在引导臂保持器的两端的轴承保持器; 和固定在轴承保持器上的轴承，其将导向臂保持件可旋转地连接到旋转轴。 最外侧引导臂的厚度方向的中心线位于轴承的高度方向的外侧，在轴承保持架上连续地形成有凹部。 引导臂和引导臂保持器的热膨胀系数基本相等，托架结构由主要包含Al和Si的合金，共晶晶体Si颗粒在引导臂和/或引导臂保持器中形成。 其中最长的共晶晶体Si颗粒的平均值为1.6（my）m或更小，如果每100（m 2）m 2为5.0或更多，则共晶晶体Si颗粒的数量。 在制造的托架中，在铸造后，在300度至500度的温度下加热托架结构的托架5至15小时。

    Disk device with auxiliary battery and start method thereof
    4.
    发明授权
    Disk device with auxiliary battery and start method thereof 失效
    带辅助电池的磁盘装置及其启动方法

    公开(公告)号：US5532563A

    公开(公告)日：1996-07-02

    申请号：US258234

    申请日：1994-06-10

    申请人： Kouji Kodama ,  Hiroshi Nishida ,  Hideaki Amano ,  Toshio Matsushita

    发明人： Kouji Kodama ,  Hiroshi Nishida ,  Hideaki Amano ,  Toshio Matsushita

    IPC分类号： G11B19/00 ,  G11B19/20 ,  H02J7/34 ,  H02P1/16 ,  H02P1/00

    CPC分类号： H02J7/34 ,  G11B19/00 ,  G11B19/20 ,  H02P1/16

    摘要： A disk device, such as an optical disk or magnetic disk, for a computer is mounted on the computer or inserted in a slot in the computer. The computer or host device provides a power supply for the disk device that is used to drive the disk in rotation and power the seek operation for read and write. When the disk device is in an idle mode in which the disk media is not spinning, the disk(s) must first be driven to the access speed of rotation during a spin up or start of rotation time period. The current supplied by the external main power source for the computer provides the start current for the spindle motor that drives the disk(s) in rotation. An auxiliary power source provides an additional current that is added to the current provided by the main power source to decrease the time in which the start operation is executed or to ensure start up when only a limited amount of current is available from the main power source. The auxiliary power source is rechargeable from the main power source, and the additional current from the auxiliary power source is not provided unless the charge state of the auxiliary power source is determined to be sufficient.

    摘要翻译： 用于计算机的诸如光盘或磁盘的盘装置安装在计算机上或插入计算机的槽中。 计算机或主机设备为用于驱动盘旋转的磁盘设备提供电源，并为寻找操作供电以供读写。 当磁盘设备处于不旋转磁盘介质的空闲模式时，必须首先将磁盘驱动到旋转时间或旋转时间段开始期间的旋转访问速度。 用于计算机的外部主电源提供的电流为驱动盘旋转的主轴电机提供启动电流。 辅助电源提供附加电流，其被附加到由主电源提供的电流以减少执行开始操作的时间或者当仅从主电源可用的有限量的电流时确保启动 。 辅助电源可从主电源充电，并且除辅助电源的充电状态被确定为足够之外，不提供来自辅助电源的附加电流。

    Magnetic disk device including humidity controller in disk enclosure
    6.
    发明授权
    Magnetic disk device including humidity controller in disk enclosure 失效
    磁盘设备包括磁盘盒中的湿度控制器

    公开(公告)号：US5075807A

    公开(公告)日：1991-12-24

    申请号：US493318

    申请日：1990-03-14

    申请人： Yoichi Inoue ,  Katsuyuki Tanaka ,  Hideaki Amano

    发明人： Yoichi Inoue ,  Katsuyuki Tanaka ,  Hideaki Amano

    IPC分类号： G11B25/04 ,  G11B33/14

    CPC分类号： G11B33/1453 ,  G11B25/043 ,  G11B33/1486

    摘要： There is provided a magnetic recording device including recording mediums and an airtight enclosure containing the recording mediums therein and having a fine breathing hole created therethrough communicating with the outside thereof, wherein at least two types of moisture adsorbents composed of a one way type moisture adsorbent which adsorbs moisture and a reversible type moisture adsorbent which adsorbs moisture in high humidity and conversely discharges the same in low humidity are disposed in the cabinet and used in combination. There is also provided the same device except wherein gas adsorbents and moisture adsorbents are used in combination.

    摘要翻译： 提供了一种磁记录装置，包括记录介质和包含其中的记录介质的气密外壳，并具有与其外部连通的通孔，其中形成有精细的呼吸孔，其中至少两种类型的水分吸附剂由单向型水分吸附剂组成， 吸收水分，并将可吸湿型吸湿剂吸附在高湿度的水分中，并相反地将其在低湿度下放电，并且组合使用。 除了组合使用气体吸附剂和水分吸附剂之外，还提供了相同的装置。

    Electrode, susceptor, plasma processing apparatus and method of making the electrode and the susceptor
    7.
    发明授权
    Electrode, susceptor, plasma processing apparatus and method of making the electrode and the susceptor 失效
    电极，感受体，等离子体处理装置及制作电极和感受体的方法

    公开(公告)号：US07337745B1

    公开(公告)日：2008-03-04

    申请号：US09667777

    申请日：2000-09-22

    申请人： Mitsuaki Komino ,  Hideaki Amano ,  Shosuke Endo ,  Toshiaki Fujisato ,  Yasuharu Sasaki

    发明人： Mitsuaki Komino ,  Hideaki Amano ,  Shosuke Endo ,  Toshiaki Fujisato ,  Yasuharu Sasaki

    IPC分类号： C23C16/509 ,  C23F1/00 ,  H01L21/306 ,  C23C16/46

    CPC分类号： H01L21/6831

    摘要： A susceptor 24 includes a heater 38 disposed in a planar state, upper and lower ceramic-metal composites 40A and 40B disposed so as to sandwich the heater 38 from above and from below, and a ceramic electrostatic chuck 28 for attracting and holding an object to be treated, W. The electrostatic chuck is joined to an upper surface of the upper ceramic-metal composite 40A. The electrostatic chuck 28 has nearly the same coefficient of linear thermal expansion as that of the upper ceramic-metal composite 40A. Thus, peeling or cracking of the electrostatic chuck 28 due to the difference in thermal expansion and contraction between the electrostatic chuck 28 and the upper ceramic-metal composite 40A can be prevented.

    摘要翻译： 基座24包括设置在平面状态的加热器38，设置成从上下夹着加热器38的上下陶瓷金属复合体40A和40B以及用于吸引和保持加热器38的陶瓷静电卡盘28 静电卡盘与上部陶瓷 - 金属复合材料40A的上表面接合。静电卡盘28具有与上部陶瓷 - 金属复合材料40A的线性热膨胀系数几乎相同的线性热膨胀系数 因此，可以防止由于静电卡盘28和上部陶瓷 - 金属复合材料40A之间的热膨胀和收缩的差异导致的静电卡盘28的剥离或破裂。

    Plasma processing method
    8.
    发明授权
    Plasma processing method 失效
    等离子体处理方法

    公开(公告)号：US06392350B1

    公开(公告)日：2002-05-21

    申请号：US09656214

    申请日：2000-09-06

    申请人： Hideaki Amano

    发明人： Hideaki Amano

    IPC分类号： H05H116

    CPC分类号： C23C16/511 ,  C23C16/401 ,  C23C16/402 ,  H01J37/32192 ,  H01J37/3266 ,  H01L21/0212 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/022 ,  H01L21/02211 ,  H01L21/02274 ,  H01L21/31116 ,  H01L21/312 ,  H01L21/3127 ,  H01L21/31629 ,  H01L21/3185 ,  H01L21/32136 ,  H01L21/76804

    摘要： There is provided a method capable of shortening a preheat time when a thin film is deposited after a preheat is carried out. The current values of a main electromagnetic coil and an auxiliary electromagnetic coil during a preheat and during a thin-film deposition are set to be different from each other to change the shape of an obtained magnetic field so that the magnetic field has a small magnetic flux density although it has higher uniformity during the thin-film deposition, whereas the magnetic field has a large magnetic flux density although it has lower uniformity during the preheat. As a result, a substantially uniform plasma is produced in the plane of a wafer during the thin-film deposition, so that it is possible to carry out a uniform thin-film deposition. On the other hand, during the preheat, a plasma having a larger density than that during the thin-film deposition is produced although the uniformity thereof is lower. Therefore, the heat gain into the wafer is greater than that during the thin-film deposition, so that it is possible to shorten the preheat time.

    摘要翻译： 提供了一种能够在预热进行之后沉积薄膜时缩短预热时间的方法。 将预热和薄膜沉积期间的主电磁线圈和辅助电磁线圈的电流值设定为彼此不同，以改变所获得的磁场的形状，使得磁场具有小的磁通量 密度虽然在薄膜沉积期间具有更高的均匀性，而磁场具有大的磁通密度，尽管其在预热期间具有较低的均匀性。 结果，在薄膜沉积期间在晶片的平面中产生基本上均匀的等离子体，使得可以进行均匀的薄膜沉积。 另一方面，在预热期间，尽管其均匀性较低，但是产生具有比薄膜沉积期间更大的密度的等离子体。 因此，进入晶片的热增益大于薄膜沉积期间的热增益，从而可以缩短预热时间。

    Plasma treatment system and method
    10.
    发明授权
    Plasma treatment system and method 失效
    等离子体处理系统及方法

    公开(公告)号：US06333269B2

    公开(公告)日：2001-12-25

    申请号：US09153141

    申请日：1998-09-14

    申请人： Yoko Naito ,  Hideaki Amano

    发明人： Yoko Naito ,  Hideaki Amano

    IPC分类号： H01L213065

    CPC分类号： H01J37/32192 ,  C23C16/511 ,  H01J37/32678 ,  H01L21/02131 ,  H01L21/02164 ,  H01L21/022 ,  H01L21/02211 ,  H01L21/02274 ,  H01L21/31612 ,  H01L21/31629

    摘要： It is an object to enhance the degree of freedom for the shape of an obtained magnetic field to enhance the inplane uniformity of thickness of first and second films when the first and second films are continuously formed on a substrate to be treated. A main electromagnetic coil 5 is provided outside of a plasma chamber 21 so as to be movable vertically by a lifting shaft 52. When plasma is produced in a vacuum vessel 2 by the electron cyclotron resonance between a microwave and a magnetic field to continuously deposit a film of a two-layer structure, which comprises an SiOF film and an SiO2 film, on a wafer W with the produced plasma, a process for forming the SiOF film is carried out while the main electromagnetic coil 5 is arranged so that the lower surface of the coil 5 is positioned at a lower position than the lower surface of a transmission window 23 by 139 mm, and a process for forming the SiO2 film is carried out while the main electromagnetic coil 5 is arranged so that the lower surface of the coil 5 is positioned at a lower position than the lower surface of the transmission 23 by 157 mm.

    摘要翻译： 本发明的目的是提高所获得的磁场的形状的自由度，以在第一和第二膜连续地形成在待处理的基板上时增强第一和第二膜的厚度的面内均匀性。 主电磁线圈5设置在等离子体室21的外部，以便通过提升轴52可垂直移动。当通过微波和磁场之间的电子回旋共振在真空容器2中产生等离子体以连续沉积 在具有所产生的等离子体的晶片W上包括SiOF膜和SiO 2膜的两层结构的膜，进行形成SiOF膜的工艺，同时主电磁线圈5被布置成使得下电极 线圈5位于比透射窗23的下表面低139mm的位置，并且在主电磁线圈5被布置成使得线圈的下表面被布置的同时执行用于形成SiO 2膜的工艺 5位于比变速器23的下表面低157mm的位置。