Thin-film capacitor device, mounting module for the same, and method for fabricating the same
    13.
    发明授权
    Thin-film capacitor device, mounting module for the same, and method for fabricating the same 失效
    薄膜电容器装置,用于其的安装模块及其制造方法

    公开(公告)号:US07282419B2

    公开(公告)日:2007-10-16

    申请号:US11103449

    申请日:2005-04-12

    IPC分类号: H01L21/20

    摘要: The invention is directed to a thin-film capacitor device that is adapted to be mounted on a printed wiring board together with an LSI device. After forming a plurality of grooves in a core substrate, a first conductive film is formed, and a first conductor is filled into each groove. After forming a metal film on the first conductive film, a dielectric film is generated by selective anodic oxidation of the metal film. A second conductive film is formed on the dielectric film, and an electrode connected to the second conductive film is formed. After removing the back surface of the core substrate until the grooves are exposed therein, an electrode for connection to the first conductor in each groove is formed. A capacitor is formed by the first conductive film and second conductive film sandwiching the dielectric film therebetween.

    摘要翻译: 本发明涉及一种适用于与LSI器件一起安装在印刷线路板上的薄膜电容器器件。 在芯基板中形成多个槽之后,形成第一导电膜,并且将第一导体填充到每个槽中。 在第一导电膜上形成金属膜之后,通过金属膜的选择性阳极氧化产生电介质膜。 在电介质膜上形成第二导电膜,形成与第二导电膜连接的电极。 在去除芯基板的背表面直到凹槽暴露在其中之后,形成用于连接到每个凹槽中的第一导体的电极。 电容器由第一导电膜和夹在其间的电介质膜的第二导电膜形成。