公开(公告)号：US09412559B2

公开(公告)日：2016-08-09

申请号：US14311614

申请日：2014-06-23

Applicant: FEI Company

Inventor： Ryan Tanner

IPC: H01J37/304 ,  H01J37/30 ,  H01J37/28 ,  H01J37/305 ,  H01J37/26 ,  G01N1/28

CPC classification number: H01J37/3005 ,  G01N1/286 ,  H01J37/26 ,  H01J37/265 ,  H01J37/28 ,  H01J37/30 ,  H01J37/3045 ,  H01J37/3056 ,  H01J2237/2611 ,  H01J2237/28 ,  H01J2237/2803 ,  H01J2237/2814 ,  H01J2237/30472 ,  H01J2237/3174 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A method and apparatus for performing a slice and view technique with a dual beam system. The feature of interest in an image of a sample is located by machine vision, and the area to be milled and imaged in a subsequent slice and view iteration is determined through analysis of data gathered by the machine vision at least in part. A determined milling area may be represented as a bounding box around a feature, which dimensions can be changed in accordance with the analysis step. The FIB is then adjusted accordingly to slice and mill a new face in the subsequent slice and view iteration, and the SEM images the new face. Because the present invention accurately locates the feature and determines an appropriate size of area to mill and image, efficiency is increased by preventing the unnecessary milling of substrate that does not contain the feature of interest.

公开(公告)号：US09396907B2

公开(公告)日：2016-07-19

申请号：US14795704

申请日：2015-07-09

Applicant: FEI Company

Inventor： Maximus Theodorus Otten ,  Abigaël Adriana Maria Kok ,  Martin Verheijen

IPC: H01J37/28 ,  H01J37/20 ,  H01J37/244

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/28 ,  H01J2237/2802 ,  H01J2237/2817 ,  H01J2237/2826

Abstract: A method of calibrating a Scanning Transmission Charged-Particle Microscope, operable in a non-scanning mode, whereby said beam is relatively broad, and a scanning mode, whereby said beam is relatively narrow and an image is formed as a function of scan position of said beam, the method comprising: providing a calibration specimen on said specimen holder; in non-scanning mode, using said detector to form a calibration image of the calibration specimen, using a given configuration of said imaging system; utilizing a known dimension of said calibration specimen and comparing it to a corresponding dimension in said calibration image to calibrate a characteristic dimension of a field of view of said detector; and, in scanning mode, recording a beam pattern of said beam in the calibrated field of view of said detector, and examining the recorded beam pattern to derive a geometric aspect thereof.

Abstract translation: 一种校准扫描透射带电粒子显微镜的方法，其可在非扫描模式下操作，由此所述光束相对较宽，并且扫描模式，由此所述光束相对较窄并且形成图像作为扫描位置的函数 所述光束，所述方法包括：在所述样本保持器上提供校准样本; 在非扫描模式中，使用所述检测器，使用所述成像系统的给定配置来形成所述校准样本的校准图像; 利用所述校准样本的已知尺寸并将其与所述校准图像中的对应尺寸进行比较，以校准所述检测器的视野的特征尺寸; 并且在扫描模式中，在所述检测器的校准视场中记录所述光束的光束图案，并且检查记录的光束图案以导出其几何方面。

公开(公告)号：US20160203944A1

公开(公告)日：2016-07-14

申请号：US14912521

申请日：2014-03-10

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yusuke OMINAMI ,  Masako NISHIMURA ,  Shinsuke KAWANISHI ,  Hiroyuki SUZUKI

IPC: H01J37/28 ,  H01J37/26 ,  H01J37/18

CPC classification number: H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/202 ,  H01J2237/28

Abstract: Disclosed is a charged particle beam apparatus wherein a partitioning film capable of transmitting a charged particle beam is provided between a charged particle optical system and a sample, said charged particle beam apparatus eliminating a contact between the sample and the partitioning film even in the cases where the sample has recesses and protrusions. On the basis of detection signals or an image generated on the basis of the detection signals, a distance between a sample and a partitioning film is monitored, said detection signals being outputted from a detector that detects secondary charged particles discharged from the sample due to irradiation of a primary charged particle beam.

Abstract translation: 公开了一种带电粒子束装置，其中在带电粒子光学系统和样品之间提供能够传输带电粒子束的分隔膜，所述带电粒子束装置消除了样品与分隔膜之间的接触，即使在 样品具有凹凸。 基于检测信号或基于检测信号生成的图像，监测样品和分隔膜之间的距离，所述检测信号从检测器输出，该检测器检测由于照射而从样品排出的二次带电粒子 的初级带电粒子束。

公开(公告)号：US20160155606A1

公开(公告)日：2016-06-02

申请号：US15014516

申请日：2016-02-03

Applicant: B-NANO LTD.

Inventor： Dov SHACHAL

IPC: H01J37/285 ,  H01J37/28

CPC classification number: H01J37/28 ,  H01J37/06 ,  H01J37/20 ,  H01J37/285 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

公开(公告)号：US20160126059A1

公开(公告)日：2016-05-05

申请号：US14991507

申请日：2016-01-08

Applicant: FEI Company

Inventor： Marcus Straw ,  Mark Emerson

IPC: H01J37/304 ,  H01J37/305

CPC classification number: H01J37/3045 ,  G21K5/00 ,  G21K5/08 ,  H01J37/226 ,  H01J37/228 ,  H01J37/3056 ,  H01J2237/1501 ,  H01J2237/28

Abstract: A method and apparatus for aligning a laser beam coincident with a charged particle beam. The invention described provides a method for aligning the laser beam through the center of an objective lens and ultimately targeting the eucentric point of a multi-beam system. The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber of the charged particle system.

公开(公告)号：US20160064182A1

公开(公告)日：2016-03-03

申请号：US14803304

申请日：2015-07-20

Applicant: Hitachi High-Technologies Corporation

Inventor： Kazuki Ikeda ,  Wen Li ,  Ryo Kadoi ,  Hisaaki Kanai ,  Hajime Kawano ,  Hiroyuki Takahashi ,  Makoto Suzuki

IPC: H01J37/22 ,  H01J37/06 ,  H01J37/29

CPC classification number: H01J37/222 ,  H01J37/06 ,  H01J37/244 ,  H01J37/28 ,  H01J37/292 ,  H01J2237/221 ,  H01J2237/24495 ,  H01J2237/24592 ,  H01J2237/28

Abstract: There is provided a charged particle beam apparatus radiating a charged particle beam to a specimen so as to acquire an image of the specimen, the charged particle beam apparatus including: a charged particle gun that generates the charged particle beam; an electron optical system that radiates the charged particle beam emitted from the charged particle gun onto a surface of the specimen so as to scan the surface of the specimen; a detecting unit that detects secondary electrons or reflection electrons emitted from the specimen, and converts the electrons into pulse signals; a pulse signal detecting circuit that detects time detecting information regarding time of the pulse signals converted by the detecting unit, and peak value detecting information regarding each peak value of the pulse signals; and an image processing unit that generates luminance gradation of the acquired image based on a time detecting signal and a peak value detecting signal of the pulse signals detected by the pulse signal detecting circuit.

Abstract translation: 提供了一种带电粒子束装置，其将样品的带电粒子束照射以获取样本的图像，所述带电粒子束装置包括：产生带电粒子束的带电粒子枪; 电子光学系统，将从带电粒子枪发射的带电粒子辐射到样品的表面上，以扫描样品的表面; 检测单元，其检测从样本发射的二次电子或反射电子，并将电子转换为脉冲信号; 脉冲信号检测电路，检测关于由检测单元转换的脉冲信号的时间的时间检测信息，以及关于脉冲信号的每个峰值的峰值检测信息; 以及图像处理单元，其基于由脉冲信号检测电路检测的脉冲信号的时间检测信号和峰值检测信号，生成所获取的图像的亮度等级。

公开(公告)号：US09245710B2

公开(公告)日：2016-01-26

申请号：US14379694

申请日：2013-02-20

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Kazuhiro Gunji ,  Yasushi Ebizuka ,  Yuta Asaga

IPC: H01J37/18 ,  H01J37/16 ,  H01J37/20 ,  H01J37/28

CPC classification number: H01J37/18 ,  H01J37/185 ,  H01J37/28 ,  H01J2237/18 ,  H01J2237/204 ,  H01J2237/28 ,  H01J2237/2801

Abstract: A charged particle beam device that appropriately maintains a throughput of the device for each of specimens different in a gas emission volume from each other is provided. A scanning electron microscope includes an electron source, a specimen stage, a specimen chamber, and an exchange chamber, and further includes a vacuum gauge that measures an internal pressure of the exchange chamber, a time counting unit that counts time taken when a measurement result by the vacuum gauge has reached a predetermined degree of vacuum, and an integral control unit that performs comparative calculation and determination based on a measurement result by the time counting unit and integral control based on a process flow. And, the integral control unit controls changing of a content of a subsequent process based on a shift of the degree of vacuum of the exchange chamber.

Abstract translation: 提供了一种带电粒子束装置，其适当地保持每个气体排放量彼此不同的样本的装置的生产量。 扫描电子显微镜包括电子源，试样台，试样室和交换室，还包括测量交换室的内部压力的真空计，计时单元，其计算测量结果所用的时间 通过真空计已经达到预定的真空度，以及积分控制单元，其基于通过时间计数单元的测量结果和基于处理流程的积分控制进行比较计算和确定。 并且，积分控制单元基于交换室的真空度的变化来控制后续处理的内容的变化。

公开(公告)号：US20150371815A1

公开(公告)日：2015-12-24

申请号：US14743780

申请日：2015-06-18

Applicant: FEI Company

Inventor： Pavel Potocek ,  Cornelis Sander Kooijman ,  Hendrik Nicolaas Slingerland ,  Gerard Anne Nikolaas van Veen ,  Faysal Boughorbel

IPC: H01J37/22 ,  G02B21/00 ,  H01J37/28

CPC classification number: H01J37/222 ,  G02B21/0024 ,  G02B21/0048 ,  G02B21/008 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/226 ,  H01J2237/28 ,  H01J2237/2811

Abstract: A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps: Providing a beam of radiation that is directed from a source through an illuminator so as to irradiate the specimen; Providing a detector for detecting a flux of radiation emanating from the specimen in response to said irradiation; Causing said beam to undergo scanning motion relative to a surface of the specimen, and recording an output of the detector as a function of scan position, which method additionally comprises the following steps: In a first sampling session S1gathering detector data from a first collection P1 of sampling points distributed sparsely across the specimen; Repeating this procedure so as to accumulate a set {Pn} of such collections, gathered during an associated set {Sn} of sampling sessions, each set with a cardinality N>1; Assembling an image of the specimen by using the set {Pn} as input to an integrative mathematical reconstruction procedure, wherein, as part of said assembly process, a mathematical registration correction is made to compensate for drift mismatches between different members of the set {Pn}.

Abstract translation: 使用扫描式显微镜对样本的图像进行累积的方法，包括以下步骤：从源极通过照射器提供辐射束，以照射样本; 提供检测器，用于响应于所述照射来检测从样本发出的辐射通量; 使所述光束相对于样本的表面进行扫描运动，并且根据扫描位置记录检测器的输出，该方法另外包括以下步骤：在第一采样会话中，从第一采集器P1聚集检测器数据 抽样点分布稀疏地遍布样本; 重复此过程，以便累积在相关集合{Sn}采样会话期间收集的集合{Pn}，每个集合具有基数N> 1; 通过使用集合{Pn}作为整合数学重建过程的输入来组装样本的图像，其中，作为所述组装过程的一部分，进行数学登记校正以补偿组{Pn的不同成员之间的漂移错配 }。

公开(公告)号：US09159527B2

公开(公告)日：2015-10-13

申请号：US12100570

申请日：2008-04-10

Applicant: Billy W. Ward ,  Lou Farkas ,  John A. Notte ,  Randall Percival

Inventor： Billy W. Ward ,  Lou Farkas ,  John A. Notte ,  Randall Percival

IPC: H01J27/00 ,  H01J37/08 ,  H01J27/26

CPC classification number: H01J37/08 ,  H01J27/26 ,  H01J2237/06341 ,  H01J2237/065 ,  H01J2237/0807 ,  H01J2237/28

Abstract: In one aspect the invention provides a gas field ion source assembly that includes an ion source in connection with an optical column such that an ion beam generated at the ion source travels through the optical column. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the methods provide for manufacturing, maintaining and enhancing the performance of a gas field ion source including sharpening the tip of the ion source in situ.

Abstract translation: 在一个方面，本发明提供了一种气体离子源组件，其包括与光学柱连接的离子源，使得在离子源处产生的离子束穿过光学柱。 离子源包括具有与包含少量原子的尖端逐渐变细的宽度的发射体。 在其它方面，该方法提供制造，维持和提高气体离子源的性能，包括原位锐化离子源的尖端。

公开(公告)号：US20150262857A1

公开(公告)日：2015-09-17

申请号：US14626116

申请日：2015-02-19

Applicant: Hitachi High-Technologies Corporation

Inventor： Yasushi EBIZUKA ,  Seiichiro KANNO ,  Masaya YASUKOCHI ,  Masakazu TAKAHASHI ,  Naoya ISHIGAKI ,  Go MIYA

IPC: H01L21/683 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01L21/6833 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/004 ,  H01J2237/2007 ,  H01J2237/28

Abstract: Proposed are an electrostatic chuck mechanism and a charged particle beam apparatus including a first plane that is a plane of a side in which a sample is adsorbed, a first electrode to which a voltage for generating an adsorptive power between the first plane and the sample is applied, and a second electrode that is arranged in a position relatively separated from the sample toward the first plane and through which a virtual line that is perpendicular to the first plane and contacts an edge of the sample passes, wherein the first plane is formed so that a size in a plane direction of the first plane is smaller than that of the sample.

Abstract translation: 提出了一种静电卡盘机构和带电粒子束装置，其包括作为吸附样品的一侧的平面的第一平面，在第一平面和样品之间产生吸附力的电压为第一电极 以及第二电极，其布置在与所述样品相对分离的位置朝向所述第一平面，并且通过所述第二电极垂直于所述第一平面并接触所述样品的边缘的虚拟线通过，其中所述第一平面形成为 第一平面的平面方向的尺寸小于样品的尺寸。