公开(公告)号：US20160181099A1

公开(公告)日：2016-06-23

申请号：US14908987

申请日：2013-09-04

Applicant: INTEL CORPORATION

Inventor： Niloy MUKHERJEE ,  Niti GOEL ,  Sanaz K. GARDNER ,  Pragyansri PATHI ,  Matthew V. METZ ,  Sansaptak DASGUPTA ,  Seung Hoon SUNG ,  James M. POWERS ,  Gilbert DEWEY ,  Benjamin CHU-KUNG ,  Jack T. KAVALIEROS ,  Robert S. CHAU

IPC: H01L21/02 ,  H01L27/092 ,  H01L29/08 ,  H01L29/78 ,  H01L29/165 ,  H01L29/04 ,  H01L29/06 ,  H01L21/8238 ,  H01L29/267

CPC classification number: H01L21/02694 ,  H01L21/02381 ,  H01L21/02516 ,  H01L21/02532 ,  H01L21/02538 ,  H01L21/02609 ,  H01L21/02636 ,  H01L21/02639 ,  H01L21/76224 ,  H01L21/823814 ,  H01L21/823821 ,  H01L21/823878 ,  H01L21/8258 ,  H01L27/0924 ,  H01L29/045 ,  H01L29/0653 ,  H01L29/0847 ,  H01L29/165 ,  H01L29/267 ,  H01L29/7848

Abstract: Trenches (and processes for forming the trenches) are provided that reduce or prevent crystaline defects in selective epitaxial growth of type III-V or Germanium (Ge) material (e.g., a “buffer” material) from a top surface of a substrate material. The defects may result from collision of selective epitaxial sidewall growth with oxide trench sidewalls. Such trenches include (I) a trench having sloped sidewalls at an angle of between 40 degrees and 70 degrees (e.g., such as 55 degrees) with respect to a substrate surface; and/or (2) a combined trench having an upper trench over and surrounding the opening of a lower trench (e.g., the lower trench may have the sloped sidewalls, short vertical walls, or tall vertical walls). These trenches reduce or prevent defects in the epitaxial sidewall growth where the growth touches or grows against vertical sidewalls of a trench it is grown in.

Abstract translation: 提供沟槽（以及用于形成沟槽的工艺），其从衬底材料的顶表面减少或防止III-V族或锗（Ge）材料（例如，“缓冲材料”）的选择性外延生长中的晶体缺陷。 缺陷可能由选择性外延侧壁生长与氧化物沟槽侧壁的碰撞引起。 这种沟槽包括（I）相对于衬底表面以40度至70度（例如55度）之间的角度具有倾斜侧壁的沟槽; 和/或（2）具有在下沟槽的开口上方并且围绕下沟槽（例如，下沟槽可以具有倾斜侧壁，短垂直壁或高垂直壁）的上沟槽的组合沟槽。 这些沟槽减少或防止外延侧壁生长中的缺陷，其中生长与其生长的沟槽的垂直侧壁接触或生长。

公开(公告)号：US20250142935A1

公开(公告)日：2025-05-01

申请号：US19004021

申请日：2024-12-27

Applicant: Intel Corporation

Inventor： Seung Hoon SUNG ,  Tristan TRONIC ,  Szuya S. LIAO ,  Jack T. KAVALIEROS

IPC: H10D64/66 ,  H01L21/28 ,  H01L21/768 ,  H01L23/535 ,  H10D64/01 ,  H10D84/01 ,  H10D84/03 ,  H10D84/83 ,  H10D84/85

Abstract: Self-aligned gate endcap (SAGE) architectures with reduced or removed caps, and methods of fabricating self-aligned gate endcap (SAGE) architectures with reduced or removed caps, are described. In an example, an integrated circuit structure includes a first gate electrode over a first semiconductor fin. A second gate electrode is over a second semiconductor fin. A gate endcap isolation structure is between the first gate electrode and the second gate electrode, the gate endcap isolation structure having a higher-k dielectric cap layer on a lower-k dielectric wall. A local interconnect is on the first gate electrode, on the higher-k dielectric cap layer, and on the second gate electrode, the local interconnect having a bottommost surface above an uppermost surface of the higher-k dielectric cap layer.

公开(公告)号：US20240128269A1

公开(公告)日：2024-04-18

申请号：US18396360

申请日：2023-12-26

Applicant: Intel Corporation

Inventor： Abhishek A. SHARMA ,  Van H. LE ,  Seung Hoon SUNG ,  Ravi PILLARISETTY ,  Marko RADOSAVLJEVIC

IPC: H01L27/12 ,  G05F1/56 ,  G06F1/26 ,  H01L21/02 ,  H01L21/383 ,  H01L29/24 ,  H01L29/423 ,  H01L29/49 ,  H01L29/66 ,  H01L29/786

CPC classification number: H01L27/1207 ,  G05F1/56 ,  G06F1/26 ,  H01L21/0214 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/02178 ,  H01L21/02181 ,  H01L21/02183 ,  H01L21/02186 ,  H01L21/02192 ,  H01L21/02565 ,  H01L21/383 ,  H01L27/1225 ,  H01L29/24 ,  H01L29/42384 ,  H01L29/4908 ,  H01L29/66969 ,  H01L29/7869 ,  H01L29/78696 ,  H01L2029/42388

Abstract: Described herein are apparatuses, systems, and methods associated with a voltage regulator circuit that includes one or more thin-film transistors (TFTs). The TFTs may be formed in the back-end of an integrated circuit. Additionally, the TFTs may include one or more unique features, such as a channel layer treated with a gas or plasma, and/or a gate oxide layer that is thicker than in prior TFTs. The one or more TFTs of the voltage regulator circuit may improve the operation of the voltage regulator circuit and free up front-end substrate area for other devices. Other embodiments may be described and claimed.

公开(公告)号：US20230099540A1

公开(公告)日：2023-03-30

申请号：US17485294

申请日：2021-09-24

Applicant: Intel Corporation

Inventor： Sarah ATANASOV ,  Rahul RAMAMURTHY ,  Seung Hoon SUNG

IPC: H01L29/06 ,  H01L29/417 ,  H01L29/423 ,  H01L29/786 ,  H01L29/66

Abstract: Embodiments disclosed herein include semiconductor devices and methods of forming such semiconductor devices. In an embodiment, a semiconductor device comprises a sub-fin. In an embodiment, the sub-fin comprises a semiconductor material. In an embodiment, a channel is above the sub-fin, where the channel is physically detached from the sub-fin. In an embodiment a first layer is over the sub-fin, and a second layer is over the first layer. In an embodiment, the second layer is different than the first layer.

公开(公告)号：US20220109072A1

公开(公告)日：2022-04-07

申请号：US17546002

申请日：2021-12-08

Applicant: Intel Corporation

Inventor： Benjamin CHU-KUNG ,  Jack T. KAVALIEROS ,  Seung Hoon SUNG ,  Siddharth CHOUKSEY ,  Harold W. KENNEL ,  Dipanjan BASU ,  Ashish AGRAWAL ,  Glenn A. GLASS ,  Tahir GHANI ,  Anand S. MURTHY

IPC: H01L29/78 ,  H01L29/66 ,  H01L21/02 ,  H01L29/205 ,  H01L29/08 ,  H01L29/165

Abstract: Integrated circuit transistor structures are disclosed that reduce band-to-band tunneling between the channel region and the source/drain region of the transistor, without adversely increasing the extrinsic resistance of the device. In an example embodiment, the structure includes one or more spacer configured to separate the source and/or drain from the channel region. The spacer(s) regions comprise a semiconductor material that provides a relatively high conduction band offset (CBO) and a relatively low valence band offset (VBO) for PMOS devices, and a relatively high VBO and a relatively low CBO for NMOS devices. In some cases, the spacer includes silicon, germanium, and carbon (e.g., for devices having germanium channel). The proportions may be at least 10% silicon by atomic percentage, at least 85% germanium by atomic percentage, and at least 1% carbon by atomic percentage. Other embodiments are implemented with III-V materials.

公开(公告)号：US20190148533A1

公开(公告)日：2019-05-16

申请号：US16242949

申请日：2019-01-08

Applicant: Intel Corporation

Inventor： Marko RADOSAVLJEVIC ,  Sansaptak DASGUPTA ,  Sanaz K. GARDNER ,  Seung Hoon SUNG ,  Han Wui THEN ,  Robert S. CHAU

IPC: H01L29/778 ,  H01L29/08 ,  H01L29/66 ,  H01L21/02 ,  H01L29/06 ,  H01L29/205 ,  H01L21/8258

CPC classification number: H01L29/7786 ,  H01L21/02381 ,  H01L21/02488 ,  H01L21/02513 ,  H01L21/0254 ,  H01L21/02647 ,  H01L21/823431 ,  H01L21/8252 ,  H01L21/8258 ,  H01L29/0657 ,  H01L29/0847 ,  H01L29/0891 ,  H01L29/2003 ,  H01L29/205 ,  H01L29/66462

Abstract: Semiconductor devices including an elevated or raised doped crystalline structure extending from a device layer are described. In embodiments, III-N transistors include raised crystalline n+ doped source/drain structures on either side of a gate stack. In embodiments, an amorphous material is employed to limit growth of polycrystalline source/drain material, allowing a high quality source/drain doped crystal to grow from an undamaged region and laterally expand to form a low resistance interface with a two-degree electron gas (2DEG) formed within the device layer. In some embodiments, regions of damaged GaN that may spawn competitive polycrystalline overgrowths are covered with the amorphous material prior to commencing raised source/drain growth.

公开(公告)号：US20190140061A1

公开(公告)日：2019-05-09

申请号：US16094151

申请日：2016-06-27

Applicant: Intel Corporation

Inventor： Benjamin CHU-KUNG ,  Van H. LE ,  Jack T. KAVALIEROS ,  Willy RACHMADY ,  Matthew V. METZ ,  Ashish AGRAWAL ,  Seung Hoon SUNG

IPC: H01L29/417 ,  H01L29/78 ,  H01L21/768

Abstract: An interlayer film is deposited on a device layer on a substrate. A contact layer is deposited on the interlayer film. The interlayer film has a broken bandgap alignment to the device layer to reduce a contact resistance of the contact layer to the device layer.

公开(公告)号：US20180315659A1

公开(公告)日：2018-11-01

申请号：US15528031

申请日：2014-12-17

Applicant: Intel Corporation

Inventor： Sansaptak DASGUPTA ,  Han Wui THEN ,  Marko RADOSAVLJEVIC ,  Sanaz K. GARDNER ,  Seung Hoon SUNG ,  Robert S. CHAU ,  Ravi PILLARISETTY

IPC: H01L21/8252 ,  H01L33/00 ,  H01L33/08 ,  H01L33/12 ,  H01L33/24 ,  H01L33/32

CPC classification number: H01L21/8252 ,  H01L21/02458 ,  H01L21/0254 ,  H01L21/0262 ,  H01L21/02639 ,  H01L21/02647 ,  H01L33/007 ,  H01L33/08 ,  H01L33/10 ,  H01L33/12 ,  H01L33/24 ,  H01L33/32 ,  H01L2224/16225 ,  H01L2924/15311

Abstract: Embodiments of the present disclosure are directed toward an integrated circuit (IC) die. In embodiments, an IC die may include a semiconductor substrate and a buffer layer disposed over the semiconductor substrate. The buffer layer may have a plurality of openings formed therein. In embodiments, the IC die may further include a plurality of group III-Nitride structures. Individual group III-Nitride structures of the plurality of group III-Nitride structures may include a lower portion disposed in a respective opening of the plurality of openings and an upper portion disposed over the respective opening. In embodiments, the upper portion may include a base extending radially from sidewalls of the respective opening over a surface of the buffer layer to form a perimeter around the respective opening. Other embodiments may be described and/or claimed.

公开(公告)号：US20170352532A1

公开(公告)日：2017-12-07

申请号：US15527287

申请日：2014-12-17

Applicant: Intel Corporation

Inventor： Sansaptak DASGUPTA ,  Han Wui THEN ,  Marko RADOSAVLJEVIC ,  Robert S. CHAU ,  Sanaz K. GARDNER ,  Seung Hoon SUNG

IPC: H01L21/02 ,  H01L21/027 ,  H01L21/8258 ,  H01L27/06 ,  H01L29/06 ,  H01L29/66 ,  H01L29/32 ,  H01L29/225 ,  H01L29/205 ,  H01L29/20 ,  H01L29/08 ,  H01L29/778 ,  H01L29/22 ,  H01L27/092 ,  H01L23/00

CPC classification number: H01L21/0265 ,  H01L21/02381 ,  H01L21/02458 ,  H01L21/0254 ,  H01L21/02551 ,  H01L21/02554 ,  H01L21/02557 ,  H01L21/0256 ,  H01L21/02562 ,  H01L21/0262 ,  H01L21/02639 ,  H01L21/02642 ,  H01L21/02647 ,  H01L21/0274 ,  H01L21/8258 ,  H01L23/48 ,  H01L24/16 ,  H01L25/065 ,  H01L27/0605 ,  H01L27/092 ,  H01L27/0922 ,  H01L29/0657 ,  H01L29/0688 ,  H01L29/0847 ,  H01L29/2003 ,  H01L29/205 ,  H01L29/2203 ,  H01L29/225 ,  H01L29/267 ,  H01L29/32 ,  H01L29/66462 ,  H01L29/66969 ,  H01L29/7786 ,  H01L2224/16227 ,  H01L2924/15311

Abstract: Embodiments of the present disclosure are directed towards an integrated circuit (IC) die. In embodiments, an IC die may include a semiconductor substrate, a group III-Nitride or II-VI wurtzite layer disposed over the semiconductor substrate, and a plurality of buffer structures at least partially embedded in the group III-Nitride or II-VI wurtzite layer. In some embodiments, each of the plurality of buffer structures may include a central member disposed over the semiconductor substrate, a lower lateral member disposed over the semiconductor substrate and extending laterally away from the central member, and an upper lateral member disposed over the central member and extending laterally from the central member in an opposite direction from the lower lateral member. The plurality of buffer structures may be positioned in a staggered arrangement to terminate defects of the group III-Nitride or II-VI wurtzite layer. Other embodiments may be described and/or claimed.

公开(公告)号：US20170323946A1

公开(公告)日：2017-11-09

申请号：US15656480

申请日：2017-07-21

Applicant: Intel Corporation

Inventor： Han Wui THEN ,  Sansaptak DASGUPTA ,  Marko RADOSAVLJEVIC ,  Benjamin CHU-KUNG ,  Sanaz GARDNER ,  Seung Hoon SUNG ,  Robert S. Chau

IPC: H01L29/20 ,  H01L21/02 ,  H01L29/78 ,  H01L29/778 ,  H01L29/66 ,  H01L29/423 ,  H01L29/201 ,  H01L29/06 ,  H01L27/12 ,  H01L21/84 ,  H01L21/285 ,  H01L21/283 ,  H01L29/80

CPC classification number: H01L29/2003 ,  H01L21/02164 ,  H01L21/02238 ,  H01L21/02255 ,  H01L21/0228 ,  H01L21/0254 ,  H01L21/283 ,  H01L21/28575 ,  H01L21/84 ,  H01L27/1203 ,  H01L29/0649 ,  H01L29/201 ,  H01L29/42356 ,  H01L29/66462 ,  H01L29/66795 ,  H01L29/7787 ,  H01L29/78 ,  H01L29/785 ,  H01L29/7851 ,  H01L29/802

Abstract: A III-N semiconductor channel is formed on a III-N transition layer formed on a (111) or (110) surface of a silicon template structure, such as a fin sidewall. In embodiments, the silicon fin has a width comparable to the III-N epitaxial film thicknesses for a more compliant seeding layer, permitting lower defect density and/or reduced epitaxial film thickness. In embodiments, a transition layer is GaN and the semiconductor channel comprises Indium (In) to increase a conduction band offset from the silicon fin. In other embodiments, the fin is sacrificial and either removed or oxidized, or otherwise converted into a dielectric structure during transistor fabrication. In certain embodiments employing a sacrificial fin, the III-N transition layer and semiconductor channel is substantially pure GaN, permitting a breakdown voltage higher than would be sustainable in the presence of the silicon fin.