PACKAGE STRUCTURE HAVING MICRO-ELECTROMECHANICAL ELEMENT
    73.
    发明申请
    PACKAGE STRUCTURE HAVING MICRO-ELECTROMECHANICAL ELEMENT 有权
    具有微电子元件的包装结构

    公开(公告)号:US20120241937A1

    公开(公告)日:2012-09-27

    申请号:US13492220

    申请日:2012-06-08

    IPC分类号: H01L23/498

    摘要: Proposed is a package structure having a micro-electromechanical (MEMS) element, including a chip having a plurality of electrical connecting pads and a MEMS element formed thereon; a lid disposed on the chip for covering the MEMS element; a stud bump disposed on each of the electrical connecting pads; an encapsulant formed on the chip with part of the stud bumps being exposed from the encapsulant; and a metal conductive layer formed on the encapsulant and connected to the stud bumps. The invention is characterized by completing the packaging process on the wafer directly to enable thinner and cheaper package structures to be fabricated within less time. This invention further provides a method for fabricating the package structure as described above.

    摘要翻译: 提出具有微机电(MEMS)元件的封装结构,其包括具有多个电连接焊盘和形成在其上的MEMS元件的芯片; 设置在所述芯片上用于覆盖所述MEMS元件的盖; 设置在每个电连接焊盘上的螺柱凸块; 形成在芯片上的密封剂,其中一部分柱状凸块从密封剂暴露出来; 以及金属导电层,形成在密封剂上并连接到凸块上。 本发明的特征在于直接完成晶片上的封装工艺,以便在更短的时间内制造更薄和更便宜的封装结构。 本发明还提供如上所述的用于制造封装结构的方法。

    SENSOR SEMICONDUCTOR PACKAGE AND METHOD FOR FABRICATING THE SAME
    75.
    发明申请
    SENSOR SEMICONDUCTOR PACKAGE AND METHOD FOR FABRICATING THE SAME 审中-公开
    传感器半导体封装及其制造方法

    公开(公告)号:US20090166831A1

    公开(公告)日:2009-07-02

    申请号:US12344988

    申请日:2008-12-29

    IPC分类号: H01L23/04 H01L21/50

    摘要: This invention provides a sensor semiconductor package and a method for fabricating the same. The method includes: mounting on a substrate a sensor chip having a sensor area; electrically connecting the sensor chip and the substrate by means of bonding wires; forming on a transparent member an adhesive layer with an opening corresponding in position to the sensor area; and mounting the transparent member on the substrate via the adhesive layer while heating the substrate, such that the adhesive layer melts, to thereby encapsulate the periphery of the sensor chip and the bonding wires while exposing the sensor area from the adhesive layer. Thus, the sensor area is sealed by the transparent member cooperative with the adhesive layer, making the sensor semiconductor package thus-obtained dam-free, light, thin, and compact, and incurs low process costs. Also, the product reliability is enhanced since the bonding wires are encapsulated by the adhesive layer without severing concern.

    摘要翻译: 本发明提供一种传感器半导体封装及其制造方法。 该方法包括:在基板上安装具有传感器区域的传感器芯片; 通过接合线电连接传感器芯片和基板; 在透明构件上形成具有对应于传感器区域的位置的开口的粘合剂层; 并且通过粘合剂层将透明构件安装在基板上,同时加热基板,使得粘合剂层熔化,从而在将传感器区域从粘合剂层暴露出来的同时封装传感器芯片和接合线的周边。 因此,传感器区域与透明构件密封,与粘合剂层协作,使得传感器半导体封装得到无阻尼,轻薄,紧凑,并且导致低的工艺成本。 而且,由于接合线被粘合剂层封装而不会被切断,所以产品的可靠性得到提高。

    Sensor package and method for fabricating the same
    76.
    发明申请
    Sensor package and method for fabricating the same 审中-公开
    传感器封装及其制造方法

    公开(公告)号:US20080303111A1

    公开(公告)日:2008-12-11

    申请号:US12156901

    申请日:2008-06-05

    IPC分类号: H01L31/0203 H01L31/18

    摘要: The invention discloses a sensor package and a method for fabricating the same. The sensor package includes: a substrate with an opening; a sensor chip disposed in the opening and electrically connected to the substrate; an encapsulant filling spacing between the sensor chip and the opening so as to secure the sensor chip to the substrate; and a transparent cover attached to the substrate via an adhesive layer, wherein the adhesive layer covers the sensor chip and bonding wires and is formed with an opening for exposing sensor region of the sensor chip. Securing the sensor chip in the opening of the substrate reduces the height of the sensor package, and meanwhile the process cost is reduced by eliminating the need of formation of conductive bumps on the sensor chip or the transparent cover and eliminating the need of specially designed substrate.

    摘要翻译: 本发明公开了一种传感器封装及其制造方法。 传感器封装包括:具有开口的基板; 传感器芯片,其布置在所述开口中并电连接到所述基板; 传感器芯片和开口之间的密封剂填充间隔,以将传感器芯片固定到基板上; 以及通过粘合剂层附着到基板的透明盖,其中粘合剂层覆盖传感器芯片和接合线,并且形成有用于暴露传感器芯片的传感器区域的开口。 将传感器芯片固定在基板的开口中,降低传感器封装的高度,同时通过消除在传感器芯片或透明盖上形成导电凸块的需要降低工艺成本,并且不需要特别设计的基板 。

    Stackable semiconductor device and manufacturing method thereof
    79.
    发明申请
    Stackable semiconductor device and manufacturing method thereof 审中-公开
    可堆叠半导体器件及其制造方法

    公开(公告)号:US20080251937A1

    公开(公告)日:2008-10-16

    申请号:US12082724

    申请日:2008-04-11

    IPC分类号: H01L23/52 H01L21/00

    摘要: A stackable semiconductor device and a manufacturing method thereof are disclosed. The method includes providing a wafer comprised of a plurality of chips, wherein a plurality of solder pads are formed on the active surface of each chip, and a plurality of grooves are formed between the solder pads of any two adjacent ones of the chips; forming a dielectric layer on regions between the solder pads of any two adjacent ones of the chips ; forming a metal layer on the dielectric layer electrically connected to the solder pads and forming a connective layer on the metal layer, wherein the width of the connective layer is smaller than that of the metal layer; cutting along the grooves to break off the electrical connection between adjacent chips; thinning the non-active surface of the wafer to the extent that the metal layer is exposed from the wafer; and separating the chips to form a plurality of stackable semiconductor devices. Accordingly, a multi-chip stack structure can be obtained by stacking and electrically connecting a plurality of semiconductor devices through the electrical connection between the connective layer of a semiconductor device and the metal layer of another semiconductor device, thereby effectively integrating more chips without having to increase the stacking area, and further the problems of poor electrical connection, complicated manufacturing processes and high costs known in the prior art can be avoided.

    摘要翻译: 公开了一种可堆叠半导体器件及其制造方法。 该方法包括提供由多个芯片组成的晶片,其中在每个芯片的有源表面上形成多个焊盘,并且在任何两个相邻芯片的焊盘之间形成多个沟槽; 在任何两个相邻芯片的焊盘之间的区域上形成电介质层; 在与所述焊料焊盘电连接的所述电介质层上形成金属层,并在所述金属层上形成连接层,其中所述连接层的宽度小于所述金属层的宽度; 沿着凹槽切割以破坏相邻芯片之间的电连接; 使晶片的非活性表面变薄至金属层从晶片露出的程度; 并分离所述芯片以形成多个可堆叠半导体器件。 因此,通过半导体器件的连接层与另一半导体器件的金属层之间的电连接层叠并电连接多个半导体器件,可以获得多芯片堆叠结构,从而有效地集成更多的芯片,而不必 增加堆积面积,进一步避免了现有技术中已知的电连接不良,制造工艺复杂,成本高的问题。