公开(公告)号：US20070285114A1

公开(公告)日：2007-12-13

申请号：US11733562

申请日：2007-04-10

Applicant: David Pedersen ,  Benjamin Eldridge ,  Igor Khandros

Inventor： David Pedersen ,  Benjamin Eldridge ,  Igor Khandros

IPC: G01R31/02

CPC classification number: H01L25/16 ,  B23K1/0016 ,  B23K20/004 ,  B23K2101/40 ,  C25D5/08 ,  C25D5/22 ,  C25D21/02 ,  G01R1/0408 ,  G01R1/0433 ,  G01R1/06711 ,  G01R1/07342 ,  G01R1/07378 ,  G01R31/01 ,  G01R31/2863 ,  G01R31/2886 ,  G01R31/2889 ,  H01L21/4853 ,  H01L21/4889 ,  H01L21/563 ,  H01L22/20 ,  H01L23/04 ,  H01L23/13 ,  H01L23/32 ,  H01L23/49811 ,  H01L23/5385 ,  H01L24/06 ,  H01L24/11 ,  H01L24/12 ,  H01L24/16 ,  H01L24/45 ,  H01L24/49 ,  H01L24/72 ,  H01L24/81 ,  H01L25/0652 ,  H01L2223/54473 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05553 ,  H01L2224/05599 ,  H01L2224/06136 ,  H01L2224/1134 ,  H01L2224/13099 ,  H01L2224/16145 ,  H01L2224/45144 ,  H01L2224/49109 ,  H01L2224/73203 ,  H01L2224/81136 ,  H01L2224/81801 ,  H01L2224/85201 ,  H01L2224/85399 ,  H01L2225/0651 ,  H01L2225/06527 ,  H01L2225/06555 ,  H01L2225/06572 ,  H01L2924/00013 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01028 ,  H01L2924/01033 ,  H01L2924/01051 ,  H01L2924/01061 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/10253 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/1532 ,  H01L2924/15787 ,  H01L2924/16152 ,  H01L2924/19043 ,  H05K1/141 ,  H05K3/20 ,  H05K3/325 ,  H05K3/326 ,  H05K3/3421 ,  H05K3/368 ,  H05K3/4015 ,  H05K2201/09472 ,  H05K2201/1031 ,  H05K2201/10318 ,  H05K2201/10757 ,  H05K2201/10878 ,  H05K2201/10909 ,  H05K2201/10946 ,  Y02P70/611 ,  H01L2924/00 ,  H01L2224/48

Abstract: Products and assemblies are provided for socketably receiving elongate interconnection elements, such as spring contact elements, extending from electronic components, such as semiconductor devices. Socket substrates are provided with capture pads for receiving ends of elongate interconnection elements extending from electronic components. Various capture pad configurations are disclosed. Connections to external devices are provided via conductive traces adjacent the surface of the socket substrate. The socket substrate may be supported by a support substrate. In a particularly preferred embodiment the capture pads are formed directly on a primary substrate such as a printed circuit board.

Abstract translation: 提供产品和组件用于可插拔地接收从电子部件（例如半导体器件）延伸的细长互连元件，例如弹簧接触元件。 插座基板设置有用于接收从电子部件延伸的细长互连元件的端部的捕获垫。 公开了各种捕获垫结构。 通过邻近插座基板表面的导电迹线提供与外部设备的连接。 插座基板可以由支撑基板支撑。 在特别优选的实施例中，捕获垫直接形成在诸如印刷电路板的主要基底上。

公开(公告)号：US20070279151A1

公开(公告)日：2007-12-06

申请号：US11773011

申请日：2007-07-03

Applicant: Charles Miller

Inventor： Charles Miller

IPC: H01P9/00

CPC classification number: H01P9/00 ,  G01R31/2822

Abstract: A transmission line includes a signal conductor and at least one varactor diode capacitively coupled to the signal conductor. The transmission line's signal path delay is a function of its shunt capacitance, and the varactor's capacitance forms a part of the transmission line's shunt capacitance. The transmission line's signal path delay is adjusted by adjusting a control voltage across the varactor diode thereby to adjust the varactor diode's capacitance.

Abstract translation: 传输线包括电容耦合到信号导体的信号导体和至少一个变容二极管。 传输线的信号路径延迟是其分流电容的函数，变容二极管的电容构成传输线分流电容的一部分。 通过调整变容二极管两端的控制电压来调整传输线的信号路径延迟，从而调整变容二极管的电容。

公开(公告)号：US20070267041A1

公开(公告)日：2007-11-22

申请号：US11742960

申请日：2007-05-01

Applicant: Gary Grube

Inventor： Gary Grube

IPC: B08B11/00

CPC classification number: H01L21/67028 ,  B08B7/0028 ,  G01R3/00

Abstract: Apparatuses and methods for cleaning test probes used in a semiconductor testing machine of the type having a plurality of test probes configured to contact the surface of a semiconductor wafer to test one or more dies formed thereon. In one embodiment, the apparatus includes a roller-support arm and a cylindrical roller supported by the roller-support arm. The roller has an outer surface comprising a sticky material. Debris on the probes will adhere to the sticky material as roller is rolled across tips of the probes. The probes are thereby cleaned.

Abstract translation: 用于清洁具有多个测试探针的半导体测试机中使用的测试探针的装置和方法，所述多个测试探针被配置为接触半导体晶片的表面以测试其上形成的一个或多个模具。 在一个实施例中，该装置包括一个辊支撑臂和一个由辊支撑臂支撑的圆柱滚子。 辊具有包括粘性材料的外表面。 探针上的碎屑将粘附到粘性材料上，因为辊在探针的尖端上滚动。 从而清洗探针。

公开(公告)号：US07287322B2

公开(公告)日：2007-10-30

申请号：US10933063

申请日：2004-09-02

Applicant: Gaetan L. Mathieu ,  Benjamin N. Eldridge ,  Gary W. Grube

Inventor： Gaetan L. Mathieu ,  Benjamin N. Eldridge ,  Gary W. Grube

IPC: H01R9/00

CPC classification number: G01R3/00 ,  G01R1/06711 ,  G01R1/06716 ,  G01R1/06727 ,  G01R1/06744 ,  G01R1/06761 ,  H01L21/6835 ,  H01L23/49811 ,  H01L24/16 ,  H01L25/0657 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/11003 ,  H01L2224/11334 ,  H01L2224/1147 ,  H01L2224/11902 ,  H01L2224/13012 ,  H01L2224/13017 ,  H01L2224/13019 ,  H01L2224/1308 ,  H01L2224/13099 ,  H01L2225/06513 ,  H01L2225/06527 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01011 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01042 ,  H01L2924/01045 ,  H01L2924/01046 ,  H01L2924/01055 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/19041 ,  H05K3/326 ,  H05K3/4092 ,  Y10S438/977 ,  Y10T29/49147 ,  Y10T29/49149 ,  Y10T29/49155 ,  Y10T29/49204 ,  Y10T29/49208 ,  Y10T29/49222 ,  Y10T29/49224 ,  H01L2924/00

Abstract: A method of forming an interconnection, including a spring contact element, by lithographic techniques. In one embodiment, the method includes applying a masking material over a first portion of a substrate, the masking material having an opening which will define a first portion of a spring structure, depositing a structure material (e.g., conductive material) in the opening, and overfilling the opening with the structure material, removing a portion of the structure material, and removing a first portion of the masking material. In this embodiment, at least a portion of the first portion of the spring structure is freed of masking material. In one aspect of the invention, the method includes planarizing the masking material layer and structure material to remove a portion of the structure material. In another aspect, the spring structure formed includes one of a post portion, a beam portion, and a tip structure portion.

Abstract translation: 通过光刻技术形成包括弹簧接触元件的互连的方法。 在一个实施例中，该方法包括在衬底的第一部分上施加掩模材料，掩模材料具有将限定弹簧结构的第一部分的开口，在开口中沉积结构材料（例如导电材料） 并用结构材料过度填充开口，去除结构材料的一部分，以及去除掩模材料的第一部分。 在该实施例中，弹簧结构的第一部分的至少一部分没有掩蔽材料。 在本发明的一个方面，该方法包括平坦化掩模材料层和结构材料以去除结构材料的一部分。 另一方面，形成的弹簧结构包括柱部分，梁部分和尖端结构部分中的一个。

公开(公告)号：US07285968B2

公开(公告)日：2007-10-23

申请号：US11306515

申请日：2005-12-30

Applicant: Benjamin N. Eldridge ,  Gary W. Grube ,  Eric D. Hobbs ,  Gaetan L. Mathieu ,  Makarand S. Shinde ,  Alexander H. Slocum ,  A. Nicholas Sporck ,  Thomas N. Watson

Inventor： Benjamin N. Eldridge ,  Gary W. Grube ,  Eric D. Hobbs ,  Gaetan L. Mathieu ,  Makarand S. Shinde ,  Alexander H. Slocum ,  A. Nicholas Sporck ,  Thomas N. Watson

IPC: G01R31/02

CPC classification number: G01R31/2874 ,  G01R31/2863 ,  G01R31/2889 ,  Y10T29/5313

Abstract: A probe card assembly can include a probe head assembly having probes for contacting an electronic device to be tested. The probe head assembly can be electrically connected to a wiring substrate and mechanically attached to a stiffener plate. The wiring substrate can provide electrical connections to a testing apparatus, and the stiffener plate can provide structure for attaching the probe card assembly to the testing apparatus. The stiffener plate can have a greater mechanical strength than the wiring substrate and can be less susceptible to thermally induced movement than the wiring substrate. The wiring substrate may be attached to the stiffener plate at a central location of the wiring substrate. Space may be provided at other locations where the wiring substrate is attached to the stiffener plate so that the wiring substrate can expand and contract with respect to the stiffener plate.

Abstract translation: 探针卡组件可以包括具有用于接触要测试的电子设备的探针的探针头组件。 探针头组件可以电连接到布线基板并且机械地附接到加强板。 布线基板可以提供到测试装置的电连接，并且加强板可以提供用于将探针卡组件附接到测试装置的结构。 加强板可以具有比布线基板更大的机械强度，并且可以比布线基板更不易受热引起的移动。 布线基板可以在布线基板的中心位置处附接到加强板。 可以在将布线基板附接到加强板的其他位置处设置空间，使得布线基板能够相对于加强板膨胀和收缩。

公开(公告)号：US07282933B2

公开(公告)日：2007-10-16

申请号：US11028940

申请日：2005-01-03

Applicant: Roy John Henson ,  John M. Long

Inventor： Roy John Henson ,  John M. Long

IPC: G01R31/02

CPC classification number: G01R1/07357

Abstract: A probe head for testing devices formed on a semiconductor wafer includes a plurality of probe DUT (device under test) arrays. Each device under test includes pads that are urged into pressure contact with probes in a corresponding probe DUT array. The probe arrays patterns have discontinuities such as indentations, protuberances, islands and openings that are opposite at least one device when the probes contact the pads.

Abstract translation: 用于测试形成在半导体晶片上的器件的探针头包括多个探针DUT（待测器件）阵列。 被测器件中的每一个器件都包含被压入与相应探头DUT阵列中的探头压力接触的焊盘。 当探针接触垫时，探针阵列图案具有不连续性，例如凹陷，突起，岛和开口，其与至少一个装置相对。

公开(公告)号：US07251884B2

公开(公告)日：2007-08-07

申请号：US10831870

申请日：2004-04-26

Applicant: Gary W. Grube ,  Gaetan L. Mathieu ,  Benjamin N. Eldridge ,  Chadwick D. Sofield

Inventor： Gary W. Grube ,  Gaetan L. Mathieu ,  Benjamin N. Eldridge ,  Chadwick D. Sofield

IPC: H01R9/00

CPC classification number: G01R3/00 ,  G01R1/06716 ,  G01R1/06744 ,  H01L24/80 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01023 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/14 ,  H01L2924/1461 ,  Y10T29/49117 ,  Y10T29/49147 ,  Y10T156/10 ,  Y10T428/12347 ,  Y10T428/12375 ,  Y10T428/12535 ,  Y10T428/12542 ,  Y10T428/12556 ,  Y10T428/12569 ,  Y10T428/31681 ,  H01L2924/00

Abstract: A robust mechanical structure is provided to prevent small foundation structures formed on a substrate from detaching from the substrate surface. The strengthened structure is formed by plating a foundation metal layer on a seed layer and then embedding the plated foundation structure in an adhesive polymer material, such as epoxy. Components, such as spring probes, can then be constructed on the plated foundation. The adhesive polymer material better assures the adhesion of the metal foundation structure to the substrate surface by counteracting forces applied to an element, such as a spring probe, attached to the plated foundation.

Abstract translation: 提供坚固的机械结构以防止形成在基板上的小基础结构从基板表面分离。 强化结构通过在种子层上电镀基础金属层，然后将镀覆的基础结构嵌入诸如环氧树脂的粘合剂聚合物材料中而形成。 然后可以在镀覆的基础上构造诸如弹簧探针的组件。 粘合剂聚合物材料通过抵抗附着在镀覆基底上的诸如弹簧探针的元件的抵抗力，更好地保证金属基础结构与基底表面的粘附。

公开(公告)号：US07245134B2

公开(公告)日：2007-07-17

申请号：US11048167

申请日：2005-01-31

Applicant: Dane C. Granicher ,  Roy J. Henson ,  Charles A. Miller

Inventor： Dane C. Granicher ,  Roy J. Henson ,  Charles A. Miller

IPC: G01R31/02

CPC classification number: G01R31/31926 ,  G01R1/07385 ,  G01R31/2889

Abstract: A probe card of a wafer test system includes one or more programmable ICs, such as FPGAs, to provide routing from individual test signal channels to one of multiple probes. The programmable ICs can be placed on a base PCB of the probe card, or on a daughtercard attached to the probe card. With programmability, the PCB can be used to switch limited test system channels away from unused probes. Programmability further enables a single probe card to more effectively test devices having the same pad array, but having different pin-outs for different device options. Reprogrammability also allows test engineers to re-program as they are debugging a test program. Because the programmable IC typically includes buffers that introduce an unknown delay, in one embodiment measurement of the delay is accomplished by first programming the programmable IC to provide a loop back path to the test system so that buffer delay can be measured, and then reprogramming the programmable IC now with a known delay to connect to a device being tested.

Abstract translation: 晶片测试系统的探针卡包括一个或多个可编程IC（例如FPGA），以提供从各个测试信号通道到多个探针之一的路由。 可编程IC可以放置在探针卡的基板上，也可以放置在与探针卡相连的子卡上。 具有可编程性，PCB可用于将有限的测试系统通道切换为未使用的探头。 可编程性进一步使单个探针卡能够更有效地测试具有相同焊盘阵列但具有针对不同器件选项的不同引脚的器件。 可重编程序还允许测试工程师在调试测试程序时进行重新编程。 因为可编程IC通常包括引入未知延迟的缓冲器，在一个实施例中，通过首先对可编程IC进行编程以提供到测试系统的回送路径来实现延迟的测量，从而可以测量缓冲器延迟，然后重新编程 可编程IC现在具有已知的延迟以连接到被测试的设备。

公开(公告)号：US07239220B2

公开(公告)日：2007-07-03

申请号：US11422565

申请日：2006-06-06

Applicant: Charles A. Miller

Inventor： Charles A. Miller

IPC: H01P9/00

CPC classification number: H01P9/00 ,  G01R31/2822

Abstract: A transmission line includes a signal conductor and at least one varactor diode capacitively coupled to the signal conductor. The transmission line's signal path delay is a function of its shunt capacitance, and the varactor's capacitance forms a part of the transmission line's shunt capacitance. The transmission line's signal path delay is adjusted by adjusting a control voltage across the varactor diode thereby to adjust the varactor diode's capacitance.

Abstract translation: 传输线包括电容耦合到信号导体的信号导体和至少一个变容二极管。 传输线的信号路径延迟是其分流电容的函数，变容二极管的电容构成传输线分流电容的一部分。 通过调整变容二极管两端的控制电压来调整传输线的信号路径延迟，从而调整变容二极管的电容。

公开(公告)号：US07218094B2

公开(公告)日：2007-05-15

申请号：US10690170

申请日：2003-10-21

Applicant: Igor Y. Khandros ,  Benjamin N. Eldridge ,  A. Nicholas Sporck ,  Charles A. Miller

Inventor： Igor Y. Khandros ,  Benjamin N. Eldridge ,  A. Nicholas Sporck ,  Charles A. Miller

IPC: G01R31/28

CPC classification number: G01R31/3025 ,  G01R31/31907 ,  G01R31/31908

Abstract: One or more testers wirelessly communicate with one or more test stations. The wireless communication may include transmission of test commands and/or test vectors to a test station, resulting in testing of one or more electronic devices at the test station. The wireless communication may also include transmission of test results to a tester. Messages may also be wirelessly exchanged.

Abstract translation: 一个或多个测试人员与一个或多个测试台无线通信。 无线通信可以包括将测试命令和/或测试向量发送到测试站，导致测试台上的一个或多个电子设备的测试。 无线通信还可以包括将测试结果传输给测试者。 消息也可以被无线地交换。