Semiconductor devices having a glass substrate, and method for manufacturing thereof
    8.
    发明授权
    Semiconductor devices having a glass substrate, and method for manufacturing thereof 有权
    具有玻璃基板的半导体装置及其制造方法

    公开(公告)号:US09117801B2

    公开(公告)日:2015-08-25

    申请号:US13894682

    申请日:2013-05-15

    摘要: A method for manufacturing semiconductor devices includes providing a stack having a semiconductor wafer and a glass substrate with openings and at least one trench attached to the semiconductor wafer. The semiconductor wafer includes a plurality of semiconductor devices. The openings of the glass substrate leave respective areas of the semiconductor devices uncovered by the glass substrate and the trench connects the openings. A metal layer is formed at least on exposed walls of the trench and the openings and on the uncovered areas of the semiconductor devices of the semiconductor wafer. A metal region is formed by electroplating metal in the openings and the trench and by subsequently grinding the glass substrate to remove the trenches. The stack of the semiconductor wafer and the attached glass substrate is cut to separate the semiconductor devices.

    摘要翻译: 一种制造半导体器件的方法包括:提供具有半导体晶片的叠层和具有开口的玻璃基板和至少一个连接到半导体晶片的沟槽。 半导体晶片包括多个半导体器件。 玻璃基板的开口离开由玻璃基板未覆盖的半导体器件的各个区域,沟槽连接开口。 至少在沟槽和开口的暴露的壁和半导体晶片的半导体器件的未覆盖区域上形成金属层。 通过在开口和沟槽中电镀金属并随后研磨玻璃基底以去除沟槽而形成金属区域。 切割半导体晶片和附着的玻璃基板的叠层以分离半导体器件。