Semiconductor die singulation method
    2.
    发明授权
    Semiconductor die singulation method 有权
    半导体芯片分离方法

    公开(公告)号:US08871613B2

    公开(公告)日:2014-10-28

    申请号:US13526140

    申请日:2012-06-18

    申请人: Michael J. Seddon

    发明人: Michael J. Seddon

    IPC分类号: H01L21/78 H01L21/822

    CPC分类号: H01L21/78 H01L21/822

    摘要: In one embodiment, semiconductor die are singulated from a semiconductor wafer by forming trenches along singulation lines and initiating a cracks from within the trenches, which propagate through the semiconductor wafer in a more controlled manner.

    摘要翻译: 在一个实施例中,半导体管芯通过沿着分割线形成沟槽并从沟槽内引发裂纹,半导体管芯通过半导体晶片以更受控的方式传播通过半导体晶片,从半导体晶片切割。

    Method of thinning a semiconductor wafer using a film frame
    3.
    发明授权
    Method of thinning a semiconductor wafer using a film frame 有权
    使用薄膜框架来减薄半导体晶片的方法

    公开(公告)号:US08084335B2

    公开(公告)日:2011-12-27

    申请号:US12172075

    申请日:2008-07-11

    IPC分类号: H01L21/30 H01L21/46 H01L21/00

    摘要: A method for manufacturing a thin semiconductor wafer. A semiconductor wafer is thinned from its backside followed by the formation of a cavity in a central region of the backside of the semiconductor wafer. Forming the cavity also forms a ring support structure in a peripheral region of the semiconductor wafer. An electrically conductive layer is formed in at least the cavity. The front side of the semiconductor wafer is mated with a tape that is attached to a film frame. The ring support structure of the semiconductor wafer is thinned to form the thinned semiconductor wafer. A backside tape is coupled to semiconductor wafer and to the film frame and the tape coupled to the front side of the semiconductor wafer is removed. The thinned semiconductor wafer is singulated.

    摘要翻译: 一种薄半导体晶片的制造方法。 半导体晶片从其背面变薄,随后在半导体晶片的背面的中心区域中形成空腔。 形成空腔也在半导体晶片的周边区域中形成环状支撑结构。 至少在空腔中形成导电层。 半导体晶片的前侧与安装在胶片框架上的胶带配合。 半导体晶片的环支撑结构被薄化以形成变薄的半导体晶片。 背面带耦合到半导体晶片和薄膜框架,并且去除耦合到半导体晶片的前侧的磁带。 单薄化半导体晶片。