公开(公告)号：US5567657A

公开(公告)日：1996-10-22

申请号：US567386

申请日：1995-12-04

申请人： Robert J. Wojnarowski ,  Thomas B. Gorczyca

发明人： Robert J. Wojnarowski ,  Thomas B. Gorczyca

IPC分类号： H01L23/538 ,  H01L25/065 ,  H05K1/18 ,  H01L21/60

CPC分类号： H01L24/76 ,  H01L23/5389 ,  H01L24/18 ,  H01L24/82 ,  H01L25/0652 ,  H05K1/185 ,  H05K1/186 ,  H01L2224/18 ,  H01L2224/92144 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/12042 ,  H01L2924/14 ,  H05K2201/10674 ,  H05K3/4611 ,  Y10S438/928

摘要： First and second flexible interconnect structures are provided and each includes a flexible interconnect layer and a chip with a surface having chip pads attached to the flexible interconnect layer. Molding material is inserted between the flexible interconnect layers for encapsulating the respective chips. Vias in the flexible interconnect layers are formed to extend to selected chip pads, and a pattern of electrical conductors is applied which extends over the flexible interconnect layers and into the vias to couple selected ones of the chip pads.

摘要翻译： 提供了第一和第二柔性互连结构，并且每个包括柔性互连层和具有连接到柔性互连层的具有芯片焊盘的表面的芯片。 将成型材料插入在柔性互连层之间以封装相应的芯片。 柔性互连层中的通孔被形成为延伸到选定的芯片焊盘，并且施加电导体图案，该图案在柔性互连层上延伸并穿过通孔以耦合选定的芯片焊盘。

公开(公告)号：US5546654A

公开(公告)日：1996-08-20

申请号：US297076

申请日：1994-08-29

申请人： Robert J. Wojnarowski ,  Thomas B. Gorczyca

发明人： Robert J. Wojnarowski ,  Thomas B. Gorczyca

IPC分类号： H05K1/18 ,  H05K3/28 ,  H05K3/30 ,  B23P19/04 ,  H05K3/42

CPC分类号： H05K3/284 ,  H01L2224/24137 ,  H01L2224/24227 ,  H01L2224/32225 ,  H01L2224/73267 ,  H01L2924/15153 ,  H05K1/182 ,  Y10S29/044 ,  Y10T279/11 ,  Y10T29/49146 ,  Y10T29/49165 ,  Y10T29/53191

摘要： A method for fabricating an electronic assembly comprises attaching an insulative film to a frame and positioning at least one electronic component having a face with connections pads face down on the insulative film. The insulative film is positioned on a porous sheet supported by a vacuum fixture. The porous sheet and vacuum fixture are adapted so as to be capable of creating vacuum conditions for holding the insulative film with a substantially flat surface on the porous sheet. A vacuum is created within the vacuum chamber for flatly holding the insulative film on the porous sheet. A substrate is applied to the insulative film and the at least one electronic component. In one embodiment the substrate is applied by securing the insulative film in position with a mold form having at least one opening around the electronic component and adding substrate molding material at least partially around the component through the opening. In another embodiment the substrate is applied by providing a substrate having at least one well therein and positioning the insulative film over at least a portion of the substrate and the electronic component into the well.

摘要翻译： 一种用于制造电子组件的方法包括将绝缘膜附接到框架并且将至少一个具有面的电子部件定位在绝缘膜上，连接焊盘面向下。 绝缘膜位于由真空夹具支撑的多孔片上。 多孔片材和真空固定装置适于能够产生用于将绝缘膜保持在多孔片材上具有基本平坦的表面的真空条件。 在真空室内产生真空，以将绝缘膜平坦地保持在多孔片上。 将衬底施加到绝缘膜和至少一个电子部件。 在一个实施例中，通过用绝缘膜将电绝缘薄膜固定在适当的位置上来施加基底，该模具形式具有围绕电子部件的至少一个开口，并且通过该开口至少部分地围绕该部件添加基底模制材料。 在另一个实施例中，通过提供其中具有至少一个阱的衬底并将绝缘膜定位在衬底和电子部件的至少一部分进入阱中来施加衬底。

公开(公告)号：US5161093A

公开(公告)日：1992-11-03

申请号：US546959

申请日：1990-07-02

申请人： Thomas B. Gorczyca ,  Stanton E. Weaver, Jr. ,  Robert J. Wojnarowski

发明人： Thomas B. Gorczyca ,  Stanton E. Weaver, Jr. ,  Robert J. Wojnarowski

IPC分类号： H01L23/12 ,  H01L21/48 ,  H01L23/15 ,  H01L23/498 ,  H01L23/538 ,  H01L25/00 ,  H01L25/04 ,  H01L25/18 ,  H05K3/38 ,  H05K3/46

CPC分类号： H01L24/25 ,  H01L21/4857 ,  H01L23/49894 ,  H01L23/5383 ,  H01L23/5389 ,  H01L24/24 ,  H01L24/82 ,  H01L2224/2402 ,  H01L2224/24227 ,  H01L2224/245 ,  H01L2224/73267 ,  H01L2224/82039 ,  H01L2224/92244 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01082 ,  H01L2924/04953 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15165 ,  H01L2924/15787 ,  H01L2924/3011

摘要： A high density interconnect structure incorporating a plurality of laminated dielectric layers is fabricated using a SPI/epoxy crosslinking copolymer blend adhesive in order to maintain the stability of the already fabricated structure during the addition of the later laminations while also maintaining the repairability of the high density interconnect structure.

公开(公告)号：US5302547A

公开(公告)日：1994-04-12

申请号：US14609

申请日：1993-02-08

申请人： Robert J. Wojnarowski ,  Herbert S. Cole ,  Richard J. Saia ,  Thomas B. Gorczyca ,  Ernest W. Balch

发明人： Robert J. Wojnarowski ,  Herbert S. Cole ,  Richard J. Saia ,  Thomas B. Gorczyca ,  Ernest W. Balch

IPC分类号： H01L23/12 ,  H01L21/268 ,  H01L21/302 ,  H01L21/311 ,  H01L21/48 ,  H01L21/768 ,  H01L23/538 ,  H05K1/03 ,  H05K3/00 ,  H01L21/283 ,  H01L21/306

CPC分类号： H05K3/0041 ,  H01L21/31138 ,  H01L21/486 ,  H01L21/76802 ,  H01L23/5389 ,  H01L24/24 ,  H01L24/82 ,  H01L2224/0401 ,  H01L2224/04105 ,  H01L2224/1147 ,  H01L2224/2402 ,  H01L2224/24227 ,  H01L2224/32225 ,  H01L2224/73267 ,  H01L2224/92244 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01018 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01042 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15165 ,  H01L2924/30105 ,  H01L2924/3011 ,  H05K1/036 ,  H05K2201/0166 ,  H05K2201/0195 ,  H05K3/0032 ,  Y10S438/94 ,  Y10S438/945

摘要： A differentiable ablation approach to patterning dielectrics which are not of the same absorbance uses an absorbant dielectric at a specified laser wavelength over a non-absorbant dielectric at that wavelength. The absorbant dielectric may be laser-patterned and become an integral mask enabling plasma etching of the underlying non-absorbant dielectric. If the patterning of the absorbant dielectric involves vias, polymer ridges formed around via surfaces during laser patterning may be removed at the same time the underlying non-absorbant dielectric is etched using a transparent, oxygen plasma resistant mask. Alternatively, an inert mask may be used instead of the absorbant dielectric to allow plasma etching of the non-absorbant dielectric.

摘要翻译： 对于不相同吸光度的电介质图案的可微分消融方法，在该波长处的非吸收性电介质上使用指定的激光波长的吸收介质。 吸收介质可以是激光图案化的，并且成为能够对下面的非吸收性电介质进行等离子体蚀刻的整体掩模。 如果吸收介质的图案化涉及通孔，则可以在激光图案化期间在通孔表面周围形成的聚合物脊在同时使用透明的耐氧等离子体掩模蚀刻下面的非吸收性电介质。 或者，可以使用惰性掩模来代替吸收介质，以允许对非吸收性介质的等离子体蚀刻。

公开(公告)号：US5422513A

公开(公告)日：1995-06-06

申请号：US329516

申请日：1993-10-04

申请人： Walter M. Marcinkiewicz ,  Raymond A. Fillion ,  Barry S. Whitmore ,  Robert J. Wojnarowski

发明人： Walter M. Marcinkiewicz ,  Raymond A. Fillion ,  Barry S. Whitmore ,  Robert J. Wojnarowski

IPC分类号： H01L23/538 ,  H01L23/485 ,  H01L29/44 ,  H01L29/52 ,  H01L29/60

CPC分类号： H01L23/5389 ,  H01L24/24 ,  H01L24/82 ,  H01L2224/2402 ,  H01L2224/24227 ,  H01L2924/01011 ,  H01L2924/01013 ,  H01L2924/01024 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01079 ,  H01L2924/01322 ,  H01L2924/014 ,  H01L2924/10329 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15165 ,  H01L2924/1517 ,  H01L2924/19041 ,  H01L2924/3011

摘要： A high density interconnect (HDI) structure having a dielectric multi-layer interconnect structure on a substrate is fabricated by forming a chip well, placing a chip in the well, and connecting the chip to the interconnect structure. Additionally, temperature sensitive chips or devices may be located beneath the dielectric multi-layer interconnect structure. A spacer die may be located in the substrate while the interconnect structure is fabricated and removed after a chip well aligned with the spacer die is formed, in order to accommodate a chip thickness which is greater than the dielectric multi-layer interconnect structure thickness.

摘要翻译： 通过形成芯片，将芯片放置在阱中，并将芯片连接到互连结构来制造在衬底上具有电介质多层互连结构的高密度互连（HDI）结构。 此外，温度敏感的芯片或器件可以位于电介质多层互连结构之下。 间隔管芯可以位于衬底中，同时在形成与间隔管芯形成良好对准的芯片之后制造和移除互连结构，以便适应大于电介质多层互连结构厚度的芯片厚度。

公开(公告)号：US5359496A

公开(公告)日：1994-10-25

申请号：US67157

申请日：1993-05-26

申请人： William P. Kornrumpf ,  Robert J. Wojnarowski ,  Charles W. Eichelberger

发明人： William P. Kornrumpf ,  Robert J. Wojnarowski ,  Charles W. Eichelberger

IPC分类号： H01L23/02 ,  H01L21/58 ,  H01L23/04 ,  H01L23/10 ,  H01L23/538 ,  H01L23/552 ,  H01L25/065 ,  H05K1/11

CPC分类号： H01L24/83 ,  H01L23/04 ,  H01L23/10 ,  H01L23/5383 ,  H01L23/5389 ,  H01L23/552 ,  H01L24/24 ,  H01L24/29 ,  H01L24/82 ,  H01L25/0655 ,  H01L2224/24137 ,  H01L2224/24225 ,  H01L2224/24227 ,  H01L2224/2919 ,  H01L2224/32225 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73267 ,  H01L2224/82039 ,  H01L2224/8319 ,  H01L2224/8385 ,  H01L24/48 ,  H01L2924/00014 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01046 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/0665 ,  H01L2924/07802 ,  H01L2924/09701 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15165 ,  H01L2924/15787 ,  H01L2924/16152 ,  H01L2924/3025

摘要： A body is hermetically sealed by electroplating a hermetic layer over the exterior surface of the body. A hermetic high density interconnect structure is provided by forming a continuous metal layer over the outermost dielectric layer of the multilayer interconnect structure and by disposing that continuous metal layer in a hermetically sealing relation to the substrate of the high density interconnect structure. A variety of techniques may be used for providing electrical feedthroughs between the interior and exterior of the hermetic enclosure as may a pseudo-hermetic enclosure in those situations where true hermeticity is not required.

摘要翻译： 通过在身体的外表面上电镀一层密封层，使身体密封。 通过在多层互连结构的最外层电介质层上形成连续的金属层，并通过将该连续金属层与高密度互连结构的衬底密封地设置，来提供密封的高密度互连结构。 可以使用各种技术来在密封外壳的内部和外部之间提供电馈通，如在不需要真实气密的那些情况下的伪密封封壳。

公开(公告)号：US5353498A

公开(公告)日：1994-10-11

申请号：US87434

申请日：1993-07-09

申请人： Raymond A. Fillion ,  Robert J. Wojnarowski ,  Michael Gdula ,  Herbert S. Cole ,  Eric J. Wildi ,  Wolfgang Daum

发明人： Raymond A. Fillion ,  Robert J. Wojnarowski ,  Michael Gdula ,  Herbert S. Cole ,  Eric J. Wildi ,  Wolfgang Daum

IPC分类号： H01L23/52 ,  H01L21/56 ,  H01L21/58 ,  H01L21/68 ,  H01L23/29 ,  H01L23/433 ,  H01L23/538 ,  H01L25/04 ,  H01L25/065 ,  H01L25/18 ,  H05K3/34

CPC分类号： H01L21/568 ,  H01L21/6835 ,  H01L23/293 ,  H01L23/295 ,  H01L23/4334 ,  H01L23/538 ,  H01L23/5389 ,  H01L24/24 ,  H01L24/29 ,  H01L24/82 ,  H01L24/83 ,  H01L24/96 ,  H01L25/0652 ,  H01L25/0657 ,  H01L25/105 ,  H01L2224/04105 ,  H01L2224/2402 ,  H01L2224/24137 ,  H01L2224/24195 ,  H01L2224/2518 ,  H01L2224/2919 ,  H01L2224/82039 ,  H01L2224/83192 ,  H01L2224/8385 ,  H01L2225/06517 ,  H01L2225/0652 ,  H01L2225/06524 ,  H01L2225/06541 ,  H01L2225/06551 ,  H01L2225/06589 ,  H01L2225/1035 ,  H01L2225/1058 ,  H01L2225/1064 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01042 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/0132 ,  H01L2924/014 ,  H01L2924/0665 ,  H01L2924/07802 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/18162 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  Y10T29/49144

摘要： Substrate material is molded directly to semiconductor chips and other electrical components that are positioned for integrated circuit module fabrication. Chips having contact pads are placed face down on a layer of adhesive supported by a base. A mold form is positioned around the chips. Substrate molding material is added within the mold form, and the substrate molding material is then hardened. A dielectric layer having vias aligned with predetermined ones of the contact pads and having an electrical conductor extending through the vias is situated on the hardened substrate molding material and the faces of the chips. A thermal plug may be affixed to the backside of a chip before substrate molding material is added. A connector frame may be placed on the adhesive layer before substrate molding material is added. A dielectric layer may be placed over the backsides of the chips before the substrate molding material is added to enhance repairability. A portion of the chips and substrate molding material may be removed after the substrate molding material is hardened.

摘要翻译： 基板材料直接模制到半导体芯片和其他用于集成电路模块制造的电气部件。 具有接触垫的芯片面朝下放置在由基底支撑的粘合剂层上。 模具周围位于芯片周围。 在模具形式中加入基材成型材料，然后将基材成型材料硬化。 具有与预定接触焊盘对准的通孔并具有延伸通过通孔的电导体的通孔的电介质层位于硬化的基底成型材料和芯片的表面上。 在添加基板模制材料之前，可以将热塞固定到芯片的背面。 在添加基材模塑材料之前，连接器框架可以放置在粘合剂层上。 在添加基底成型材料之前，可以将电介质层放置在芯片的背面上以增强可修复性。 芯片和基材成型材料的一部分可以在基材模塑材料硬化之后被去除。

公开(公告)号：US5353195A

公开(公告)日：1994-10-04

申请号：US87433

申请日：1993-07-09

申请人： Raymond A. Fillion ,  Robert J. Wojnarowski

发明人： Raymond A. Fillion ,  Robert J. Wojnarowski

IPC分类号： H01L23/50 ,  H01L23/538 ,  H05K7/02

CPC分类号： H01L24/82 ,  H01L23/50 ,  H01L23/5389 ,  H01L24/24 ,  H01L2224/24225 ,  H01L2224/24227 ,  H01L2224/32225 ,  H01L2224/73267 ,  H01L2224/82039 ,  H01L2224/82047 ,  H01L2224/92144 ,  H01L2924/01013 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01078 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15165 ,  H01L2924/1517 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043

摘要： A multi-chip module includes a substrate supporting a plurality of chips. A dielectric layer which overlies the chips and the substrate has a connection surface and a substrate surface with metallization planes having plane openings patterned on each surface and vias aligned with predetermined pads on the chips and predetermined portions of the metallization plane of the substrate surface. An adhesive layer is situated between the substrate and the substrate surface of the dielectric layer, and a pattern of electrical conductors extends through the vias to interconnect selected chips and selected portions of the metallization planes. In a related design, the dielectric layer may be a board having chip openings and conductive through-connections aligned with predetermined portions of the metallization plane of the substrate surface. The board can be thick enough that chip wells are not necessary for each chip, in which case, a base dielectric layer having vias aligned with chip pads, through-connections and the connection surface overlies the board and supports a pattern of electrical conductors which interconnect the chips and metallization planes.

摘要翻译： 多芯片模块包括支撑多个芯片的基板。 覆盖芯片和衬底的电介质层具有连接表面和衬底表面，其中金属化平面具有在每个表面上图案化的平面开口，并且与衬底表面的芯片和金属化平面的预定部分上的预定焊盘对准的通孔。 粘合剂层位于基底和介电层的基底表面之间，并且电导体的图形延伸穿过通孔以互连选定的切屑和金属化平面的选定部分。 在相关设计中，电介质层可以是具有芯片开口和与衬底表面的金属化平面的预定部分对准的导电贯穿连接的板。 板可以足够厚，使得每个芯片不需要芯片阱，在这种情况下，具有与芯片焊盘，通孔连接对准的通孔的基底介电层，并且连接表面覆盖在板上并且支撑电连接的图案 芯片和金属化平面。

公开(公告)号：US5348607A

公开(公告)日：1994-09-20

申请号：US20913

申请日：1993-02-22

申请人： Robert J. Wojnarowski ,  Charles W. Eichelberger

发明人： Robert J. Wojnarowski ,  Charles W. Eichelberger

IPC分类号： H01L21/58 ,  H01L23/538 ,  B32B31/00

CPC分类号： H01L24/83 ,  H01L23/5389 ,  H01L24/29 ,  H01L2224/2919 ,  H01L2224/8319 ,  H01L2224/8385 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01014 ,  H01L2924/01027 ,  H01L2924/01039 ,  H01L2924/01042 ,  H01L2924/01047 ,  H01L2924/0665 ,  H01L2924/07802 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/1517 ,  H01L2924/19041 ,  Y10T156/109 ,  Y10T156/1092 ,  Y10T156/1111

摘要： A mixture for affixing dice to a substrate includes a thermoplastic polyimide, a solvent for the polyimide, and a solvent which does not dissolve the polyimide but adds thixotropicity to the mixture. The mixture is applied to the substrate, the dice are placed thereon, and the solvents are evaporated to bond the dice to the substrate. The bond is radiation hard and exhibits high shear pull strength. A poor solvent for the polyimide, sprayed over the dice and exposed portions of die attach material, causes some polyimide to precipitate out of solution in the exposed portions of die attach material to form a grid that extends between the dice and prevents the dice from "swimming together" during high temperature processing. In a solvent die-attachment method, the substrate is first coated with a mixture of die attach material, and the mixture is dried. Spraying a solvent over the die attach material causes the material to soften so that the dice applied thereto may adhere. The die attach material is then dried to form the bond.

摘要翻译： 用于将骰子固定到基底的混合物包括热塑性聚酰亚胺，聚酰亚胺的溶剂和不溶解聚酰亚胺但对混合物具有触变性的溶剂。 将混合物施加到基底上，将骰子放置在其上，并蒸发溶剂以将骰子结合到基底。 该粘合剂是辐射硬的并且表现出高的剪切拉力。 用于聚酰亚胺的不良溶剂喷涂在芯片附着材料的骰子和暴露部分上，导致一些聚酰亚胺从裸片附着材料的暴露部分中沉淀出溶液中以形成在骰子之间延伸的网格，并防止骰子“ 在高温加工过程中一起游泳。 在溶剂模具附着方法中，首先用基片附着材料的混合物涂覆基板，并将混合物干燥。 在模具附着材料上喷涂溶剂导致材料软化，使得施加到其上的骰子可以粘附。 然后将管芯附着材料干燥以形成粘合。

公开(公告)号：US5157589A

公开(公告)日：1992-10-20

申请号：US546963

申请日：1990-07-02

申请人： Herbert S. Cole, Jr. ,  James W. Rose ,  Charles W. Eichelberger ,  Robert J. Wojnarowski

发明人： Herbert S. Cole, Jr. ,  James W. Rose ,  Charles W. Eichelberger ,  Robert J. Wojnarowski

IPC分类号： H01L23/13 ,  H01L23/498 ,  H01L23/538 ,  H01L25/04 ,  H01L25/18 ,  H05K1/18 ,  H05K3/38 ,  H05K3/46

CPC分类号： H01L23/5389 ,  H01L23/13 ,  H01L23/49822 ,  H01L24/24 ,  H01L24/82 ,  H05K3/4635 ,  H05K3/4673 ,  H01L2224/2402 ,  H01L2224/24227 ,  H01L2224/73267 ,  H01L2224/82039 ,  H01L2224/92244 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01029 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01074 ,  H01L2924/01082 ,  H01L2924/04953 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15165 ,  H01L2924/15787 ,  H05K1/185 ,  H05K2201/0129 ,  H05K2201/0154 ,  H05K2201/0195 ,  H05K3/386 ,  H05K3/4644

摘要： A high density interconnect structure incorporating a plurality of laminated dieletric layers is fabricated using thermoplastic adhesive layers of progressively lower glass transition temperature in order to maintain the stability of the already fabricated structure during the addition of the later laminations. This structure also facilitates the removal of only a portion of the high density interconnect structure where a fault in the system can be corrected in one of the upper layers of the high density interconnect structure.