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    Manufacturing method for glass substrate and glass substrate
    2.
    发明授权
    Manufacturing method for glass substrate and glass substrate 有权

    公开(公告)号：US12068181B2

    公开(公告)日：2024-08-20

    申请号：US18479872

    申请日：2023-10-03

    申请人： AGC Inc.

    发明人： Yuha Kobayashi ,  Yuichi Yoshida ,  Keisuke Hanashima

    IPC分类号： B32B3/00 ,  C03C15/02 ,  H01L21/304 ,  H01L21/66 ,  H01L21/67 ,  H01L23/15

    CPC分类号： H01L21/67288 ,  C03C15/02 ,  H01L21/304 ,  H01L21/67253 ,  H01L22/12 ,  H01L23/15

    摘要： To suppress lowering of dimensional accuracy. A manufacturing method for a glass substrate is a manufacturing method for the glass substrate that supports a semiconductor device, the manufacturing method including: generating a glass base plate; measuring a thickness, a thickness deviation, and a warpage amount of the glass base plate; screening the glass base plate based on the thickness of the glass base plate; generating a plurality of glass blanks by cutting the screened glass base plate; setting a first polishing condition for the glass blank based on the thickness, the thickness deviation, and the warpage amount of the glass base plate; generating a glass plate by polishing a surface of the glass blank based on the first polishing condition; measuring a thickness, a thickness deviation, and a warpage amount of the glass plate; screening the glass plate based on the thickness of the glass plate; setting a second polishing condition for the glass plate based on the thickness, the thickness deviation, and the warpage amount of the glass plate; and polishing a surface of the screened glass plate based on the second polishing condition to generate a rectangular glass substrate in which a length of a side is equal to or larger than 300 mm and a thickness is equal to or larger than 0.5 mm.

    Silicon carbide wafer and method of manufacturing same
    3.
    发明授权
    Silicon carbide wafer and method of manufacturing same 有权

    公开(公告)号：US12037704B2

    公开(公告)日：2024-07-16

    申请号：US17980731

    申请日：2022-11-04

    申请人： Senic Inc.

    发明人： Myung Ok Kyun ,  Kap Ryeol Ku ,  Jung Gyu Kim ,  Jung Woo Choi ,  Jung Doo Seo ,  Jong Hwi Park

    IPC分类号： B32B3/00 ,  C30B23/02 ,  C30B29/36

    CPC分类号： C30B29/36 ,  C30B23/02

    摘要： Disclosed are a silicon carbide wafer and a method of manufacturing the same. The silicon carbide wafer includes an upper surface and a lower surface, the upper surface includes a first target region, the first target region being within 85% of a radius of the upper surface based on a center of the upper surface, a first peak omega angle measured at intervals of 15 mm in a first direction in the first target region is within −1° to +1° based on a peak omega angle measured at the center of the upper surface, and the first direction is a [1-100] direction and a direction passing through the center of the upper surface.

    Reinforced removable thermal insulation (ASTI)
    10.
    发明授权
    Reinforced removable thermal insulation (ASTI) 有权

    公开(公告)号：US11708934B2

    公开(公告)日：2023-07-25

    申请号：US16603542

    申请日：2018-04-06

    申请人： PUBLIC JOINT-STOCK COMPANY MACHINE-BUILDING PLANT “ZIO-PODOLSK”

    发明人： Boris Vladimirovich Krainov

    IPC分类号： B32B3/00 ,  F16L59/02 ,  F16L59/04 ,  F16L59/08 ,  F16L59/14

    CPC分类号： F16L59/028 ,  F16L59/04 ,  F16L59/08 ,  F16L59/14

    摘要： The reinforced removable thermal insulation (PARTS) contains the heat-insulating blocks joined among themselves placed on an external surface of the heat-isolated equipment. The Asti block is filled with heat-insulating material and consists of a reinforcing frame lattice sheathed on all sides with facing stainless sheets. For mutual detachable connection of heat-insulating blocks between themselves the lock latch is used. When using the proposed lock-latch, a guaranteed tightness is provided, the disclosure of thermal gaps between the side faces of thermal insulation blocks from the inaccessible internal bases of thermal insulation at temperature fluctuations is excluded, fitting works and welding of tension locks on the surface of their blocks in place during installation and Assembly work on the equipment are excluded. Asti blocks are able to save the weight of stainless steel, increase the strength of thermal insulation blocks by 2.56 times, significantly reduce the cost of their manufacture.