Probe card
    44.
    发明专利
    Probe card 审中-公开
    探针卡

    公开(公告)号:JP2009128357A

    公开(公告)日:2009-06-11

    申请号:JP2008180064

    申请日:2008-07-10

    Abstract: PROBLEM TO BE SOLVED: To provide a probe card capable of protecting a probe head during an etching process to reduce defective rate of the probe cards.
    SOLUTION: This probe card which uses a thermoplastic resin includes a printed circuit board; the probe head provided on its one face, with a plurality of terminals; connected electrically to the printed circuit board; a plurality of probe chips electrically connected to the plurality of terminals and arranged on the other face of the probe head. At least the other face of the probe head is formed of the thermoplastic resin.
    COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种能够在蚀刻过程中保护探头的探针卡,以减少探针卡的缺陷率。

    解决方案:使用热塑性树脂的该探针卡包括印刷电路板; 探头在其一个面上设置有多个端子; 与印刷电路板电连接; 多个探针芯片,其电连接到所述多个端子并且布置在所述探针头的另一个面上。 至少探头的另一面由热塑性树脂形成。 版权所有(C)2009,JPO&INPIT

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