公开(公告)号：US10354995B2

公开(公告)日：2019-07-16

申请号：US15922913

申请日：2018-03-16

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist ,  Israel Beinglass ,  Zeev Wurman

IPC: H01L29/45 ,  G06F9/00 ,  B82Y10/00 ,  H01L21/84 ,  H01L23/00 ,  H01L23/48 ,  H01L27/02 ,  H01L27/06 ,  H01L27/11 ,  H01L27/12 ,  H01L27/24 ,  H01L29/06 ,  H01L29/66 ,  H01L21/268 ,  H01L21/762 ,  H01L21/822 ,  H01L23/367 ,  H01L23/522 ,  H01L23/528 ,  H01L23/532 ,  H01L29/786 ,  H01L29/423 ,  H01L27/088 ,  H01L27/118 ,  H01L27/11578 ,  H01L27/11551 ,  H01L27/112 ,  H01L27/108 ,  H01L27/105 ,  H01L23/544 ,  G03F9/00 ,  H01L27/1157 ,  H01L29/775 ,  H01L21/8234

Abstract: A semiconductor device including: a first layer including a first memory cell, the first memory cell including a first transistor; a second layer including a second memory cell, the second memory cell including a second transistor; a periphery layer including a memory peripherals transistor, the periphery layer is disposed underneath the first layer; a memory including at least the first memory cell and the second memory cell, where the second memory cell overlays the first memory cell, where the first memory cell and the second memory cell have both been processed following a lithography step and accordingly are precisely aligned, and where a peripherals circuit includes the memory peripherals transistor and controls the memory; a first external connections underlying the periphery layer, the first external connections includes connections from the device to a first external device; and a second external connections overlying the second layer, the second external connections includes connections from the device to a second external device.

公开(公告)号：US20180350689A1

公开(公告)日：2018-12-06

申请号：US16101478

申请日：2018-08-12

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/822 ,  H03K19/177 ,  H03K19/0948 ,  H03K17/687 ,  H01L29/786 ,  H01L29/78 ,  H01L27/118 ,  H01L27/112 ,  H01L27/11 ,  H01L27/108 ,  H01L27/105 ,  H01L27/092 ,  H01L27/06 ,  H01L27/02 ,  H01L25/18 ,  H01L25/065 ,  H01L23/544 ,  H01L23/525 ,  H01L23/36 ,  H01L21/84 ,  H01L21/8238 ,  H01L21/762 ,  H01L21/683 ,  G11C29/00 ,  G11C17/14 ,  G11C17/06 ,  G11C16/04 ,  H01L23/48 ,  H01L23/00

CPC classification number: H01L21/8221 ,  G11C5/025 ,  G11C5/063 ,  G11C16/0483 ,  G11C29/82 ,  H01L21/6835 ,  H01L21/76254 ,  H01L21/8238 ,  H01L21/84 ,  H01L21/845 ,  H01L23/481 ,  H01L23/5252 ,  H01L23/544 ,  H01L24/16 ,  H01L24/32 ,  H01L24/48 ,  H01L25/0655 ,  H01L25/0657 ,  H01L25/18 ,  H01L27/0688 ,  H01L27/0694 ,  H01L27/092 ,  H01L27/1157 ,  H01L27/11578 ,  H01L27/2436 ,  H01L27/249 ,  H01L29/785 ,  H01L29/78696 ,  H01L45/04 ,  H01L45/1226 ,  H01L45/146 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45015 ,  H01L2224/45099 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06527 ,  H01L2225/06541 ,  H01L2225/06589 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2924/00014 ,  H01L2924/01019 ,  H01L2924/01066 ,  H01L2924/01322 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/12042 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/1436 ,  H01L2924/1437 ,  H01L2924/1461 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/19107 ,  H01L2924/207 ,  H01L2924/3011 ,  H01L2924/3025 ,  H03K19/0948 ,  H03K19/17704 ,  H03K19/17756 ,  H03K19/17764 ,  H03K19/17796

Abstract: A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors; at least one metal layer interconnecting the first transistors and forming a plurality of logic gates; a first intermediate metal layer overlaying the at least one metal layer; a second intermediate metal layer overlaying the first intermediate metal layer; where the first intermediate metal layer has a first current carrying capacity, where the second intermediate metal layer has a second current carrying capacity, and where the first current carrying capacity is significantly greater than the second current carrying capacity; a plurality of second transistors overlaying the second intermediate metal layer; and a top metal layer overlaying the second transistors; and a memory cell, where at least one of the second transistors includes a polysilicon transistor channel, where the second transistors are precisely aligned to the first transistors.

公开(公告)号：US20180294343A1

公开(公告)日：2018-10-11

申请号：US16004404

申请日：2018-06-10

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L29/66 ,  H01L23/50 ,  H01L23/48 ,  H01L23/34 ,  H01L27/088

Abstract: A 3D semiconductor device, the device including: a first level including a plurality of first single crystal transistors, contacts, and a first metal layer, where a portion of the first single crystal transistors are interconnected, where the interconnected includes the first metal layer and the contacts, and where the portion of the first single crystal transistors are interconnected forms memory control circuits; a second level overlaying the first level, the second level including a plurality of second transistors; a third level overlaying the second level, the third level including a plurality of third transistors; a fourth level overlaying the third level, the fourth level including a plurality of fourth transistors; and a second metal layer overlaying the fourth level, where the plurality of second transistors are aligned to the plurality of first transistors with a less than 40 nm alignment error.

公开(公告)号：US20180204835A1

公开(公告)日：2018-07-19

申请号：US15922913

申请日：2018-03-16

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist ,  Israel Beinglass ,  Zeev Wurman

IPC: H01L27/06 ,  H01L29/786 ,  H01L29/66 ,  H01L29/45 ,  H01L29/423 ,  H01L27/12 ,  H01L27/118 ,  H01L27/11578 ,  H01L27/11551 ,  H01L27/112 ,  H01L27/11 ,  H01L27/108 ,  H01L27/105 ,  H01L27/088 ,  H01L27/02 ,  H01L23/544 ,  H01L23/532 ,  H01L23/528 ,  H01L23/522 ,  H01L23/367 ,  H01L21/84 ,  H01L21/822 ,  H01L21/762 ,  G03F9/00 ,  H01L21/268 ,  H01L23/00 ,  H01L23/48

CPC classification number: H01L27/0688 ,  B82Y10/00 ,  G03F9/7076 ,  G03F9/7084 ,  H01L21/268 ,  H01L21/76254 ,  H01L21/8221 ,  H01L21/823431 ,  H01L21/84 ,  H01L23/367 ,  H01L23/481 ,  H01L23/5226 ,  H01L23/528 ,  H01L23/53214 ,  H01L23/53228 ,  H01L23/544 ,  H01L24/73 ,  H01L27/0207 ,  H01L27/088 ,  H01L27/0886 ,  H01L27/105 ,  H01L27/10876 ,  H01L27/10894 ,  H01L27/10897 ,  H01L27/11 ,  H01L27/1108 ,  H01L27/112 ,  H01L27/11551 ,  H01L27/1157 ,  H01L27/11578 ,  H01L27/11807 ,  H01L27/11898 ,  H01L27/1203 ,  H01L27/2436 ,  H01L27/249 ,  H01L29/0649 ,  H01L29/0673 ,  H01L29/42372 ,  H01L29/4238 ,  H01L29/42392 ,  H01L29/458 ,  H01L29/66272 ,  H01L29/66439 ,  H01L29/66545 ,  H01L29/66621 ,  H01L29/66901 ,  H01L29/775 ,  H01L29/78639 ,  H01L29/78642 ,  H01L29/78645 ,  H01L29/78696 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45124 ,  H01L2224/45147 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73253 ,  H01L2224/73265 ,  H01L2224/80001 ,  H01L2924/00 ,  H01L2924/00011 ,  H01L2924/00012 ,  H01L2924/00014 ,  H01L2924/01015 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/1301 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/3011 ,  H01L2924/3025

Abstract: A semiconductor device including: a first layer including a first memory cell, the first memory cell including a first transistor; a second layer including a second memory cell, the second memory cell including a second transistor; a periphery layer including a memory peripherals transistor, the periphery layer is disposed underneath the first layer; a memory including at least the first memory cell and the second memory cell, where the second memory cell overlays the first memory cell, where the first memory cell and the second memory cell have both been processed following a lithography step and accordingly are precisely aligned, and where a peripherals circuit includes the memory peripherals transistor and controls the memory; a first external connections underlying the periphery layer, the first external connections includes connections from the device to a first external device; and a second external connections overlying the second layer, the second external connections includes connections from the device to a second external device.

公开(公告)号：US09941332B2

公开(公告)日：2018-04-10

申请号：US15409740

申请日：2017-01-19

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist ,  Israel Beinglass ,  Zeev Wurman

IPC: H01L27/10 ,  G11C13/00 ,  H01L27/24 ,  H01L45/00 ,  H01L29/04 ,  H01L29/167 ,  H01L29/78 ,  H01L29/66 ,  H01L27/105 ,  H01L21/02 ,  H01L21/324 ,  H01L21/223 ,  H01L21/311

CPC classification number: H01L27/2436 ,  G11C13/0021 ,  H01L21/02532 ,  H01L21/0262 ,  H01L21/02667 ,  H01L21/2236 ,  H01L21/31116 ,  H01L21/324 ,  H01L21/76254 ,  H01L21/8221 ,  H01L21/84 ,  H01L23/481 ,  H01L23/544 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/105 ,  H01L27/1052 ,  H01L27/10876 ,  H01L27/10894 ,  H01L27/10897 ,  H01L27/11 ,  H01L27/1108 ,  H01L27/112 ,  H01L27/11551 ,  H01L27/11578 ,  H01L27/11807 ,  H01L27/11898 ,  H01L27/1203 ,  H01L27/249 ,  H01L29/04 ,  H01L29/167 ,  H01L29/66568 ,  H01L29/78 ,  H01L29/78696 ,  H01L45/04 ,  H01L45/1226 ,  H01L45/146 ,  H01L45/1616 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2924/00011 ,  H01L2224/80001

Abstract: A semiconductor memory, including: a first memory cell including a first transistor; a second memory cell including a second transistor; and a memory peripherals transistor overlaying the second transistor or underneath the first transistor, where the second memory cell overlays the first memory cell, and where the first memory cell and the second memory cell have both been processed following a lithography step and accordingly are precisely aligned, and where the memory peripherals transistor is part of a peripherals circuit controlling the memory.

公开(公告)号：US09853089B2

公开(公告)日：2017-12-26

申请号：US15224929

申请日：2016-08-01

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist ,  Israel Beinglass ,  Zeev Wurman

IPC: H01L27/24 ,  G11C13/00 ,  G03F9/00 ,  H01L21/822 ,  H01L21/84 ,  H01L23/544 ,  H01L21/762 ,  H01L27/02 ,  H01L27/06 ,  H01L27/088 ,  H01L27/105 ,  H01L27/108 ,  H01L27/11 ,  H01L27/112 ,  H01L27/11551 ,  H01L27/11578 ,  H01L27/118 ,  H01L27/12 ,  H01L45/00 ,  H01L23/48

CPC classification number: H01L27/2436 ,  G03F9/7076 ,  G03F9/7084 ,  H01L21/76254 ,  H01L21/8221 ,  H01L21/84 ,  H01L23/481 ,  H01L23/544 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/088 ,  H01L27/092 ,  H01L27/105 ,  H01L27/10876 ,  H01L27/10894 ,  H01L27/10897 ,  H01L27/11 ,  H01L27/1108 ,  H01L27/112 ,  H01L27/11551 ,  H01L27/11578 ,  H01L27/11807 ,  H01L27/11898 ,  H01L27/1203 ,  H01L27/249 ,  H01L45/04 ,  H01L45/1226 ,  H01L45/146 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2924/00011 ,  H01L2224/80001

Abstract: A semiconductor device, including: a first memory cell including a first transistor; a second memory cell including a second transistor, where the second transistor overlays the first transistor and the second transistor self-aligned to the first transistor; and a plurality of junctionless transistors, where at least one of the junctionless transistors controls access to at least one of the memory cells.

公开(公告)号：US20170221761A1

公开(公告)日：2017-08-03

申请号：US15488514

申请日：2017-04-16

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist ,  Zeev Wurman

IPC: H01L21/77 ,  H01L27/10 ,  H01L27/02 ,  H01L23/00 ,  H01L23/31 ,  H01L29/66 ,  H01L23/40

CPC classification number: H01L21/77 ,  B82Y10/00 ,  G11C16/0408 ,  G11C16/0483 ,  H01L21/6835 ,  H01L21/76254 ,  H01L21/84 ,  H01L23/3114 ,  H01L23/36 ,  H01L23/3677 ,  H01L23/4012 ,  H01L23/5286 ,  H01L24/01 ,  H01L24/13 ,  H01L24/16 ,  H01L24/32 ,  H01L24/48 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/0694 ,  H01L27/088 ,  H01L27/092 ,  H01L27/10 ,  H01L27/1052 ,  H01L27/10802 ,  H01L27/10894 ,  H01L27/10897 ,  H01L27/1104 ,  H01L27/1108 ,  H01L27/1116 ,  H01L27/11524 ,  H01L27/11526 ,  H01L27/11529 ,  H01L27/11551 ,  H01L27/1157 ,  H01L27/11573 ,  H01L27/11578 ,  H01L27/11807 ,  H01L27/1203 ,  H01L27/2436 ,  H01L27/249 ,  H01L28/00 ,  H01L29/1033 ,  H01L29/66257 ,  H01L29/6659 ,  H01L29/66795 ,  H01L29/66825 ,  H01L29/66833 ,  H01L29/7841 ,  H01L29/785 ,  H01L29/78696 ,  H01L29/7881 ,  H01L29/792 ,  H01L45/04 ,  H01L45/1226 ,  H01L45/146 ,  H01L2221/6835 ,  H01L2221/68381 ,  H01L2224/131 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2224/81001 ,  H01L2924/00014 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/12042 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/1461 ,  H01L2924/15311 ,  H01L2924/3011 ,  H01L2924/3025 ,  H01L2924/00012 ,  H01L2924/00015 ,  H01L2924/014 ,  H01L2924/3512 ,  H01L2924/00 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

Abstract: A 3D integrated circuit device, including: a first transistor; a second transistor; and a third transistor, where the third transistor is overlaying the second transistor and the third transistor is controlled by a third control line, where the second transistor is overlaying the first transistor and the second transistor is controlled by a second control line, where the first transistor is part of a control circuit controlling the second control line and the third control line, and where the second transistor and the third transistor are self-aligned.

公开(公告)号：US09406670B1

公开(公告)日：2016-08-02

申请号：US14514386

申请日：2014-10-15

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Israel Beinglass ,  Jan Lodewijk de Jong ,  Deepak C. Sekar ,  Zeev Wurman

IPC: H01L27/02 ,  H01L27/06 ,  H01L27/088 ,  H01L23/522 ,  H01L23/532 ,  H01L23/367 ,  H01L23/528

CPC classification number: H01L27/0688 ,  G03F9/7076 ,  G03F9/7084 ,  H01L21/268 ,  H01L21/76254 ,  H01L21/76898 ,  H01L21/8221 ,  H01L21/823871 ,  H01L21/84 ,  H01L23/367 ,  H01L23/481 ,  H01L23/5226 ,  H01L23/528 ,  H01L23/53214 ,  H01L23/53228 ,  H01L23/544 ,  H01L24/73 ,  H01L27/0207 ,  H01L27/088 ,  H01L27/092 ,  H01L27/105 ,  H01L27/10876 ,  H01L27/10894 ,  H01L27/10897 ,  H01L27/11 ,  H01L27/1108 ,  H01L27/112 ,  H01L27/11551 ,  H01L27/11578 ,  H01L27/11807 ,  H01L27/11898 ,  H01L27/1203 ,  H01L29/42392 ,  H01L29/458 ,  H01L29/66272 ,  H01L29/66545 ,  H01L29/66621 ,  H01L29/66848 ,  H01L29/66901 ,  H01L29/732 ,  H01L29/78639 ,  H01L29/78642 ,  H01L29/78645 ,  H01L29/808 ,  H01L29/812 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45124 ,  H01L2224/45147 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73253 ,  H01L2224/73265 ,  H01L2924/00011 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/1301 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/3011 ,  H01L2924/3025 ,  H01L2924/00014 ,  H01L2924/00 ,  H01L2224/80001 ,  H01L2924/00012 ,  H01L2924/01015

Abstract: A semiconductor device, including: a first layer including first transistors, the first transistors are interconnected by at least one metal layer including copper or aluminum; a second layer including second transistors, the first layer is overlaid by the second layer, where the second layer includes a plurality of through layer vias having a diameter of less than 200 nm, where the second transistors include a source contact, the source contact including a silicide, and where the silicide has a sheet resistance of less than 15 ohm/sq.

Abstract translation: 一种半导体器件，包括：包括第一晶体管的第一层，所述第一晶体管通过包括铜或铝的至少一个金属层互连; 第二层包括第二晶体管，第一层由第二层覆盖，其中第二层包括直径小于200nm的多个通孔通孔，其中第二晶体管包括源极接触，源极接触包括 硅化物，其中硅化物的薄层电阻小于15欧姆/平方。

公开(公告)号：US09305867B1

公开(公告)日：2016-04-05

申请号：US14472108

申请日：2014-08-28

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/44 ,  H01L21/48 ,  H01L21/50 ,  H01L23/48 ,  H01L23/50 ,  H01L23/34 ,  H01L27/088

CPC classification number: H01L23/481 ,  H01L21/743 ,  H01L23/34 ,  H01L23/50 ,  H01L23/544 ,  H01L27/0207 ,  H01L27/0623 ,  H01L27/0688 ,  H01L27/088 ,  H01L27/0886 ,  H01L27/10802 ,  H01L27/10894 ,  H01L27/10897 ,  H01L27/11526 ,  H01L27/11551 ,  H01L27/11573 ,  H01L27/11578 ,  H01L27/11807 ,  H01L27/2436 ,  H01L27/249 ,  H01L29/1066 ,  H01L29/66272 ,  H01L29/66704 ,  H01L29/66825 ,  H01L29/66901 ,  H01L29/732 ,  H01L29/7841 ,  H01L29/808 ,  H01L2224/16225 ,  H01L2224/73253 ,  H01L2924/12032 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/1461 ,  H01L2924/16152 ,  H01L2924/00

Abstract: An Integrated Circuit device including: a first layer including first transistors; a first metal layer overlaying the first transistors and providing at least one connection to the first transistors; a second metal layer overlaying the first metal layer; and a second layer including second transistors overlaying the second metal layer, where the second metal layer is connected to provide power to at least one of the second transistors and a connection path between the second transistors and the second metal layer, where the connection path includes at least one through-layer via, and where the through-layer via has a diameter less than 150 nm.

Abstract translation: 一种集成电路装置，包括：包括第一晶体管的第一层; 覆盖所述第一晶体管并且提供至少一个到所述第一晶体管的连接的第一金属层; 覆盖所述第一金属层的第二金属层; 以及第二层，包括覆盖所述第二金属层的第二晶体管，其中所述第二金属层被连接以向所述第二晶体管中的至少一个提供功率，以及所述第二晶体管和所述第二金属层之间的连接路径，其中所述连接路径包括 至少一个贯通层通孔，并且其中贯通层通孔具有小于150nm的直径。

公开(公告)号：US20160035722A1

公开(公告)日：2016-02-04

申请号：US14880276

申请日：2015-10-11

Applicant: MONOLITHIC 3D INC.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L27/088 ,  H01L29/45

CPC classification number: H01L29/456 ,  H01L21/76898 ,  H01L21/823475 ,  H01L23/481 ,  H01L23/544 ,  H01L27/0688 ,  H01L27/088 ,  H01L27/0886 ,  H01L27/092 ,  H01L27/1203 ,  H01L29/42384 ,  H01L29/66704 ,  H01L29/66772 ,  H01L29/78654 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An Integrated Circuit device, including: a first layer including first transistors; and a second layer including second transistors overlaying the first layer, where the first transistors are facing down and the second transistors are facing up, and where the second layer includes a through layer via of less than 300 nm diameter.

Abstract translation: 一种集成电路器件，包括：包括第一晶体管的第一层; 以及第二层，包括覆盖第一层的第二晶体管，其中第一晶体管面向下并且第二晶体管面向上，并且其中第二层包括直径小于300nm的贯穿层通孔。