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    WAFER EDGE CONDITIONING FOR THINNED WAFERS
    23.
    发明申请
    WAFER EDGE CONDITIONING FOR THINNED WAFERS 有权
    用于薄膜波纹的边缘调节

    公开(公告)号：US20120241916A1

    公开(公告)日：2012-09-27

    申请号：US13053803

    申请日：2011-03-22

    申请人： Timothy Harrison Daubenspeck ,  Jeffrey P. Gambino ,  Christopher David Muzzy ,  Wolfgang Sauter ,  Timothy Dooling Sullivan

    发明人： Timothy Harrison Daubenspeck ,  Jeffrey P. Gambino ,  Christopher David Muzzy ,  Wolfgang Sauter ,  Timothy Dooling Sullivan

    IPC分类号： H01L29/02 ,  H01L21/302

    CPC分类号： H01L21/02021

    摘要： The present invention relates to a method for minimizing breakage of wafers during or after a wafer thinning process. A method of forming a rounded edge to the portion of a wafer remaining after surface grinding process is provided. The method comprises providing a semiconductor wafer having an edge and forming a recess in the edge of the wafer using any suitable mechanical or chemical process. The method further comprises forming a substantially continuous curved shape for at least the edge of the wafer located above the recess. Advantageously, the shape of the wafer is formed prior to the backside grind process to prevent problems caused by the otherwise presence of a sharp edge during the backside grind process.

    摘要翻译： 本发明涉及一种在晶圆薄化过程中或之后使晶片断裂最小化的方法。 提供了在表面研磨处理之后残留的晶片部分形成圆形边缘的方法。 该方法包括提供具有边缘的半导体晶片，并且使用任何合适的机械或化学过程在晶片的边缘中形成凹陷。 该方法还包括形成至少位于凹部上方的晶片的边缘的基本连续的弯曲形状。 有利地，在背面研磨处理之前形成晶片的形状，以防止在背面研磨过程期间另外存在锋利边缘引起的问题。

    METHOD OF FABRICATING DAMASCENE STRUCTURES
    26.
    发明申请
    METHOD OF FABRICATING DAMASCENE STRUCTURES 有权
    制备大分子结构的方法

    公开(公告)号：US20120115303A1

    公开(公告)日：2012-05-10

    申请号：US13354371

    申请日：2012-01-20

    申请人： Jeffrey P. Gambino ,  Peter J. Lindgren ,  Anthony K. Stamper

    发明人： Jeffrey P. Gambino ,  Peter J. Lindgren ,  Anthony K. Stamper

    IPC分类号： H01L21/4763 ,  H01L21/02

    CPC分类号： H01L21/76802 ,  H01L21/76807 ,  H01L23/5223 ,  H01L28/40 ,  H01L2221/1021 ,  H01L2221/1063

    摘要： Method of forming wires in integrated circuits. The methods include forming a wire in a first dielectric layer on a substrate; forming a dielectric barrier layer over the wire and the first dielectric layer; forming a second dielectric layer over the barrier layer; forming one or more patterned photoresist layers over the second dielectric layer; performing a reactive ion etch to etch a trench through the second dielectric layer and not through the barrier layer; performing a second reactive ion etch to extend the trench through the barrier layer; and after performing the second reaction ion etch, removing the one or more patterned photoresist layers, a last formed patterned photoresist layer removed using a reducing plasma or a non-oxidizing plasma. The methods include forming wires by similar methods to a metal-insulator-metal capacitor.

    摘要翻译： 在集成电路中形成导线的方法。 所述方法包括在基板上的第一电介质层中形成导线; 在所述导线和所述第一介电层上形成介电阻挡层; 在阻挡层上形成第二电介质层; 在所述第二介电层上形成一个或多个图案化的光致抗蚀剂层; 执行反应离子蚀刻以蚀刻通过第二介电层而不穿过阻挡层的沟槽; 执行第二反应离子蚀刻以将沟槽延伸穿过阻挡层; 并且在执行第二反应离子蚀刻之后，去除一个或多个图案化的光致抗蚀剂层，使用还原等离子体或非氧化等离子体去除最后形成的图案化光致抗蚀剂层。 所述方法包括通过与金属 - 绝缘体 - 金属电容器类似的方法形成导线。

    Method and structure to prevent circuit network charging during fabrication of integrated circuits
    28.
    发明授权
    Method and structure to prevent circuit network charging during fabrication of integrated circuits 失效
    在集成电路制造过程中防止电路网络充电的方法和结构

    公开(公告)号：US08120141B2

    公开(公告)日：2012-02-21

    申请号：US11687711

    申请日：2007-03-19

    申请人： Jeffrey P. Gambino ,  Kirk D. Peterson

    发明人： Jeffrey P. Gambino ,  Kirk D. Peterson

    IPC分类号： H01L21/00 ,  H01L21/82

    CPC分类号： H01L27/1203 ,  H01L23/5256 ,  H01L27/0251 ,  H01L2924/0002 ,  H01L2924/00

    摘要： An integrated circuit and method of fabricating the integrated circuit. The integrated circuit, including: one or more power distribution networks; one or more ground distribution networks; one or more data networks; and fuses temporarily and electrically connecting power, ground or data wires of the same or different networks together, the same or different networks selected from the group consisting of the one or more power distribution networks, the one or more ground distribution networks, the one or more data networks, and combinations thereof.

    摘要翻译： 集成电路及其制造方法。 该集成电路包括：一个或多个配电网络; 一个或多个地面分配网络; 一个或多个数据网络; 并且将相同或不同网络的电力，地线或数据线临时并电连接在一起，从由一个或多个配电网络，一个或多个配电网络，一个或多个配电网络组成的组中选择的相同或不同的网络， 更多数据网络及其组合。