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公开(公告)号:US08426961B2
公开(公告)日:2013-04-23
申请号:US12823851
申请日:2010-06-25
申请人: Ying-Ching Shih , Jing-Cheng Lin , Wen-Chih Chiou , Shin-Puu Jeng , Chen-Hua Yu
发明人: Ying-Ching Shih , Jing-Cheng Lin , Wen-Chih Chiou , Shin-Puu Jeng , Chen-Hua Yu
IPC分类号: H01L23/14 , H01L23/498 , H01L23/538 , H01L25/065 , H01L21/48
CPC分类号: H01L21/76885 , H01L21/486 , H01L21/56 , H01L23/13 , H01L23/147 , H01L23/3128 , H01L23/49816 , H01L23/49827 , H01L23/5389 , H01L24/94 , H01L24/97 , H01L25/0657 , H01L2224/04105 , H01L2224/11002 , H01L2224/12105 , H01L2224/13025 , H01L2224/14181 , H01L2224/16148 , H01L2224/16238 , H01L2224/2518 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/73267 , H01L2224/92244 , H01L2224/94 , H01L2224/97 , H01L2225/06513 , H01L2225/06517 , H01L2225/06524 , H01L2225/06548 , H01L2924/01322 , H01L2924/14 , H01L2924/15153 , H01L2924/181 , H05K1/0306 , H05K1/185 , H05K3/4007 , H05K2203/016 , H05K2203/025 , H01L2224/83 , H01L2224/82 , H01L2224/16225 , H01L2924/00 , H01L2224/16145 , H01L2924/00012
摘要: A device includes an interposer, which includes a substrate; and at least one dielectric layer over the substrate. A plurality of through-substrate vias (TSVs) penetrate through the substrate. A first metal bump is in the at least one dielectric layer and electrically coupled to the plurality of TSVs. A second metal bump is over the at least one dielectric layer. A die is embedded in the at least one dielectric layer and bonded to the first metal bump.
摘要翻译: 一种装置包括:插入件,其包括基板; 以及衬底上的至少一个电介质层。 多个穿通基板通孔(TSV)穿透基板。 第一金属凸块在至少一个电介质层中并电耦合到多个TSV。 第二金属凸块在至少一个电介质层的上方。 模具嵌入在至少一个电介质层中并结合到第一金属凸块。
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公开(公告)号:US08405225B2
公开(公告)日:2013-03-26
申请号:US13437533
申请日:2012-04-02
申请人: Chen-Hua Yu , Wen-Chih Chiou , Weng-Jin Wu , Hung-Jung Tu , Ku-Feng Yang
发明人: Chen-Hua Yu , Wen-Chih Chiou , Weng-Jin Wu , Hung-Jung Tu , Ku-Feng Yang
CPC分类号: H01L21/8221 , H01L21/76898 , H01L24/16 , H01L25/0652 , H01L25/0657 , H01L25/50 , H01L27/0688 , H01L2224/05001 , H01L2224/05009 , H01L2224/05124 , H01L2224/05139 , H01L2224/05147 , H01L2224/05157 , H01L2224/05166 , H01L2224/05181 , H01L2224/05184 , H01L2224/05186 , H01L2224/05568 , H01L2224/05573 , H01L2224/05609 , H01L2224/05616 , H01L2224/05624 , H01L2224/05644 , H01L2224/05647 , H01L2224/05684 , H01L2224/13099 , H01L2225/06513 , H01L2225/06541 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01022 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/01073 , H01L2924/01074 , H01L2924/01078 , H01L2924/01327 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/14 , H01L2924/19041 , Y10S148/164 , H01L2924/00014 , H01L2924/0105 , H01L2924/01079 , H01L2924/013
摘要: A semiconductor structure includes a first die comprising a first substrate and a first bonding pad over the first substrate, a second die having a first surface and a second surface opposite the first surface, wherein the second die is stacked on the first die and a protection layer having a vertical portion on a sidewall of the second die, and a horizontal portion extending over the first die.
摘要翻译: 半导体结构包括第一裸片,其包括第一衬底和第一衬底上的第一焊盘,第二裸片,具有与第一表面相对的第一表面和第二表面,其中第二裸片堆叠在第一裸片上, 层,其具有在第二管芯的侧壁上的垂直部分,以及在第一管芯上延伸的水平部分。
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公开(公告)号:US08387674B2
公开(公告)日:2013-03-05
申请号:US12054097
申请日:2008-03-24
申请人: Chen-Hua Yu , Jui-Pin Hung , Weng-Jin Wu , Jean Wang , Wen-Chih Chiou
发明人: Chen-Hua Yu , Jui-Pin Hung , Weng-Jin Wu , Jean Wang , Wen-Chih Chiou
IPC分类号: B29C65/00
CPC分类号: H01L25/50 , H01L21/67051 , H01L24/28 , H01L24/75 , H01L24/83 , H01L24/94 , H01L2224/8301 , H01L2224/83191 , H01L2224/83192 , H01L2224/8385 , H01L2924/01005 , H01L2924/01006 , H01L2924/01029 , H01L2924/01033 , H01L2924/0105 , H01L2924/01094 , H01L2924/07802 , H01L2924/14 , H01L2924/1461 , H01L2924/15788 , H01L2924/19042 , Y10T156/14 , H01L2924/00
摘要: The present disclosure provides a bonding apparatus. The bonding apparatus includes a cleaning module designed for cleaning chips; and a chip-to-wafer bonding chamber configured to receive the chips from the cleaning module and designed for bonding the chips to a wafer.
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74.
公开(公告)号:US08377796B2
公开(公告)日:2013-02-19
申请号:US12539374
申请日:2009-08-11
申请人: Chia-Lin Yu , Chen-Hua Yu , Ding-Yuan Chen , Wen-Chih Chiou
发明人: Chia-Lin Yu , Chen-Hua Yu , Ding-Yuan Chen , Wen-Chih Chiou
IPC分类号: H01L21/768
CPC分类号: H01L21/02365 , H01L21/02104 , H01L21/0237 , H01L21/02381 , H01L21/02458 , H01L21/02491 , H01L21/02502 , H01L21/02538 , H01L21/02639 , H01L21/02642 , H01L21/02645 , H01L29/12
摘要: A method of forming a circuit structure includes providing a substrate; forming recesses in the substrate; forming a mask layer over the substrate, wherein the mask layer covers non-recessed portions of the substrate, with the recesses exposed through openings in the mask layer; forming a buffer/nucleation layer on exposed portions of the substrate in the recesses; and growing a group-III group-V (III-V) compound semiconductor material from the recesses until portions of the III-V compound semiconductor material grown from the recesses join each other to form a continuous III-V compound semiconductor layer.
摘要翻译: 形成电路结构的方法包括提供基板; 在基板上形成凹部; 在所述基板上形成掩模层,其中所述掩模层覆盖所述基板的非凹部,所述凹部通过所述掩模层中的开口暴露; 在所述凹部中的所述基板的暴露部分上形成缓冲/成核层; 以及从所述凹部生长第III族V族化合物半导体材料,直到从所述凹部生长的所述III-V族化合物半导体材料的部分相互连接形成连续的III-V族化合物半导体层。
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公开(公告)号:US08278679B2
公开(公告)日:2012-10-02
申请号:US12235269
申请日:2008-09-22
申请人: Chen-Hua Yu , Ding-Yuan Chen , Wen-Chih Chiou
发明人: Chen-Hua Yu , Ding-Yuan Chen , Wen-Chih Chiou
IPC分类号: H01L33/00
CPC分类号: H01L33/42 , H01L33/005 , H01L33/20 , H01L33/382 , H01L33/405
摘要: An LED device and a method of manufacturing, including an embedded top electrode, are presented. The LED device includes an LED structure and a top electrode. The LED structure includes layers disposed on a substrate, including an active light-emitting region. A top layer of the LED structure is a top contact layer. The top electrode is embedded into the top contact layer, wherein the top electrode electrically contacts the top contact layer.
摘要翻译: 提出了一种LED器件及其制造方法,包括嵌入式顶部电极。 LED装置包括LED结构和顶部电极。 LED结构包括设置在基板上的层,包括有源发光区域。 LED结构的顶层是顶部接触层。 顶部电极嵌入到顶部接触层中,其中顶部电极电接触顶部接触层。
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公开(公告)号:US08148826B2
公开(公告)日:2012-04-03
申请号:US13273845
申请日:2011-10-14
申请人: Chen-Hua Yu , Wen-Chih Chiou , Weng-Jin Wu , Hung-Jung Tu , Ku-Feng Yang
发明人: Chen-Hua Yu , Wen-Chih Chiou , Weng-Jin Wu , Hung-Jung Tu , Ku-Feng Yang
CPC分类号: H01L21/8221 , H01L21/76898 , H01L24/16 , H01L25/0652 , H01L25/0657 , H01L25/50 , H01L27/0688 , H01L2224/05001 , H01L2224/05009 , H01L2224/05124 , H01L2224/05139 , H01L2224/05147 , H01L2224/05157 , H01L2224/05166 , H01L2224/05181 , H01L2224/05184 , H01L2224/05186 , H01L2224/05568 , H01L2224/05573 , H01L2224/05609 , H01L2224/05616 , H01L2224/05624 , H01L2224/05644 , H01L2224/05647 , H01L2224/05684 , H01L2224/13099 , H01L2225/06513 , H01L2225/06541 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01022 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/01073 , H01L2924/01074 , H01L2924/01078 , H01L2924/01327 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/14 , H01L2924/19041 , Y10S148/164 , H01L2924/00014 , H01L2924/0105 , H01L2924/01079 , H01L2924/013
摘要: A semiconductor structure includes a first die comprising a first substrate and a first bonding pad over the first substrate, a second die having a first surface and a second surface opposite the first surface, wherein the second die is stacked on the first die and a protection layer having a vertical portion on a sidewall of the second die, and a horizontal portion extending over the first die.
摘要翻译: 半导体结构包括第一裸片,其包括第一衬底和第一衬底上的第一焊盘,第二裸片,具有与第一表面相对的第一表面和第二表面,其中第二裸片堆叠在第一裸片上, 层,其具有在第二管芯的侧壁上的垂直部分,以及在第一管芯上延伸的水平部分。
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公开(公告)号:US08148732B2
公开(公告)日:2012-04-03
申请号:US12509339
申请日:2009-07-24
申请人: Chen-Hua Yu , Chia-Lin Yu , Ding-Yuan Chen , Wen-Chih Chiou , Hung-Ta Lin
发明人: Chen-Hua Yu , Chia-Lin Yu , Ding-Yuan Chen , Wen-Chih Chiou , Hung-Ta Lin
IPC分类号: H01L33/00
CPC分类号: H01L33/007 , H01L21/02381 , H01L21/02447 , H01L21/02458 , H01L21/02491 , H01L21/02505 , H01L21/0254 , H01L21/223 , H01L21/26506 , H01L33/025
摘要: A light-emitting diode (LED) device is provided. The LED device is formed on a substrate having a carbon-containing layer. Carbon atoms are introduced into the substrate to prevent or reduce atoms from an overlying metal/metal alloy transition layer from inter-mixing with atoms of the substrate. In this manner, a crystalline structure is maintained upon which the LED structure may be formed.
摘要翻译: 提供了一种发光二极管(LED)装置。 LED装置形成在具有含碳层的基板上。 将碳原子引入衬底中以防止或减少来自上层金属/金属合金过渡层的原子与衬底的原子的混合。 以这种方式,保持可以形成LED结构的晶体结构。
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公开(公告)号:US08134163B2
公开(公告)日:2012-03-13
申请号:US12247895
申请日:2008-10-08
申请人: Chen-Hua Yu , Hung-Ta Lin , Wen-Chih Chiou , Ding-Yuan Chen , Chia-Lin Yu
发明人: Chen-Hua Yu , Hung-Ta Lin , Wen-Chih Chiou , Ding-Yuan Chen , Chia-Lin Yu
IPC分类号: H01L33/08
摘要: A semiconductor device having light-emitting diodes (LEDs) formed on a concave textured substrate is provided. A substrate is patterned and etched to form recesses. A separation layer is formed along the bottom of the recesses. An LED structure is formed along the sidewalls and, optionally, along the surface of the substrate between adjacent recesses. In these embodiments, the surface area of the LED structure is increased as compared to a planar surface. In another embodiment, the LED structure is formed within the recesses such that the bottom contact layer is non-conformal to the topology of the recesses. In these embodiments, the recesses in a silicon substrate result in a cubic structure in the bottom contact layer, such as an n-GaN layer, which has a non-polar characteristic and exhibits higher external quantum efficiency.
摘要翻译: 提供了一种形成在凹面纹理基板上的发光二极管(LED)的半导体器件。 对衬底进行图案化和蚀刻以形成凹陷。 沿着凹部的底部形成分离层。 沿着侧壁和任选地沿着相邻凹部之间的基板的表面形成LED结构。 在这些实施例中,与平面表面相比,LED结构的表面积增加。 在另一个实施例中,LED结构形成在凹部内,使得底部接触层与凹部的拓扑不一致。 在这些实施例中,硅衬底中的凹陷导致底接触层中的立方结构,例如具有非极性特性并且表现出更高外部量子效率的n-GaN层。
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公开(公告)号:US08053277B2
公开(公告)日:2011-11-08
申请号:US12878112
申请日:2010-09-09
申请人: Chen-Hua Yu , Wen-Chih Chiou , Weng-Jin Wu , Hung-Jung Tu , Ku-Feng Yang
发明人: Chen-Hua Yu , Wen-Chih Chiou , Weng-Jin Wu , Hung-Jung Tu , Ku-Feng Yang
IPC分类号: H01L21/50
CPC分类号: H01L21/8221 , H01L21/76898 , H01L24/16 , H01L25/0652 , H01L25/0657 , H01L25/50 , H01L27/0688 , H01L2224/05001 , H01L2224/05009 , H01L2224/05124 , H01L2224/05139 , H01L2224/05147 , H01L2224/05157 , H01L2224/05166 , H01L2224/05181 , H01L2224/05184 , H01L2224/05186 , H01L2224/05568 , H01L2224/05573 , H01L2224/05609 , H01L2224/05616 , H01L2224/05624 , H01L2224/05644 , H01L2224/05647 , H01L2224/05684 , H01L2224/13099 , H01L2225/06513 , H01L2225/06541 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01022 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/01073 , H01L2924/01074 , H01L2924/01078 , H01L2924/01327 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/14 , H01L2924/19041 , Y10S148/164 , H01L2924/00014 , H01L2924/0105 , H01L2924/01079 , H01L2924/013
摘要: A semiconductor structure includes a first die comprising a first substrate and a first bonding pad over the first substrate, a second die having a first surface and a second surface opposite the first surface, wherein the second die is stacked on the first die and a protection layer having a vertical portion on a sidewall of the second die, and a horizontal portion extending over the first die.
摘要翻译: 半导体结构包括第一裸片,其包括第一衬底和第一衬底上的第一焊盘,第二裸片,具有与第一表面相对的第一表面和第二表面,其中第二裸片堆叠在第一裸片上, 层,其具有在第二管芯的侧壁上的垂直部分,以及在第一管芯上延伸的水平部分。
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公开(公告)号:US20100171197A1
公开(公告)日:2010-07-08
申请号:US12348622
申请日:2009-01-05
申请人: Hung-Pin Chang , Kuo-Ching Hsu , Chen-Shien Chen , Wen-Chih Chiou , Chen-Hua Yu
发明人: Hung-Pin Chang , Kuo-Ching Hsu , Chen-Shien Chen , Wen-Chih Chiou , Chen-Hua Yu
CPC分类号: H01L23/481 , H01L21/6835 , H01L24/11 , H01L24/13 , H01L24/14 , H01L2221/6834 , H01L2224/03912 , H01L2224/0401 , H01L2224/05009 , H01L2224/05558 , H01L2224/1147 , H01L2224/13009 , H01L2224/13025 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/01022 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01327 , H01L2924/014 , H01L2924/04953 , H01L2924/12042 , H01L2924/14 , H01L2924/15788 , H01L2924/19041 , H01L2924/19043 , H01L2224/13099 , H01L2924/00
摘要: An isolation structure for stacked dies is provided. A through-silicon via is formed in a semiconductor substrate. A backside of the semiconductor substrate is thinned to expose the through-silicon via. An isolation film is formed over the backside of the semiconductor substrate and the exposed portion of the through-silicon via. The isolation film is thinned to re-expose the through-silicon via, and conductive elements are formed on the through-silicon via. The conductive element may be, for example, a solder ball or a conductive pad. The conductive pad may be formed by depositing a seed layer and an overlying mask layer. The conductive pad is formed on the exposed seed layer. Thereafter, the mask layer and the unused seed layer may be removed.
摘要翻译: 提供了一种用于堆叠模具的隔离结构。 在半导体衬底中形成贯通硅通孔。 半导体衬底的背面变薄以暴露通硅通孔。 在半导体衬底的背面和透硅通孔的暴露部分之后形成隔离膜。 隔离膜被稀薄以重新暴露通硅通孔,并且导电元件形成在穿硅通孔上。 导电元件可以是例如焊球或导电垫。 可以通过沉积种子层和覆盖掩模层来形成导电焊盘。 导电焊盘形成在暴露的种子层上。 此后,可以去除掩模层和未使用的种子层。
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