Compliant monopolar micro device transfer head with silicon electrode
    72.
    发明授权
    Compliant monopolar micro device transfer head with silicon electrode 有权
    具有硅电极的单极微器件转移头

    公开(公告)号:US08686542B2

    公开(公告)日:2014-04-01

    申请号:US13828117

    申请日:2013-03-14

    Abstract: A compliant monopolar micro device transfer head array and method of forming a compliant monopolar micro device transfer array from an SOI substrate are described. In an embodiment, the micro device transfer head array including a base substrate and a patterned silicon layer over the base substrate. The patterned silicon layer may include a silicon interconnect and an array of silicon electrodes electrically connected with the silicon interconnect. Each silicon electrode includes a mesa structure protruding above the silicon interconnect, and each silicon electrode is deflectable into a cavity between the base substrate and the silicon electrode. A dielectric layer covers a top surface of each mesa structure.

    Abstract translation: 描述了一种兼容的单极微器件传输头阵列和从SOI衬底形成兼容单极微器件传输阵列的方法。 在一个实施例中,微器件转移头阵列包括基底衬底和在基底衬底上的图案化硅层。 图案化硅层可以包括硅互连和与硅互连电连接的硅电极阵列。 每个硅电极包括在硅互连上方突出的台面结构,并且每个硅电极可偏转到基底基板和硅电极之间的空腔中。 介电层覆盖每个台面结构的顶面。

    MASS TRANSFER TOOL
    80.
    发明申请
    MASS TRANSFER TOOL 有权
    大转移工具

    公开(公告)号:US20160001450A1

    公开(公告)日:2016-01-07

    申请号:US14852366

    申请日:2015-09-11

    Abstract: Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool includes an articulating transfer head assembly, a carrier substrate holder, and an actuator assembly to adjust a spatial relationship between the articulating transfer head assembly and the carrier substrate holder. The articulating transfer head assembly may include an electrostatic voltage source connection and a substrate supporting an array of electrostatic transfer heads.

    Abstract translation: 公开了用于从载体衬底传送微器件的系统和方法。 在一个实施例中,传质工具包括铰接传送头组件,载体衬底保持器和致动器组件,以调节关节式传送头组件和载体衬底保持器之间的空间关系。 铰接传送头组件可以包括静电电压源连接和支撑静电转印头阵列的基片。

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