MEMS actuation device with sparse pulses

    公开(公告)号:US11802042B2

    公开(公告)日:2023-10-31

    申请号:US17117469

    申请日:2020-12-10

    Inventor: Davide Terzi

    CPC classification number: B81B7/008 G02B7/182 B81B2201/042 G02B26/08

    Abstract: A method of operating a MEMS device includes generating a MEMS drive signal, and generating and modifying the MEMS drive signal based upon a control signal to produce a modified drive signal. The method further includes generating the control signal by determining when a feedback signal from the MEMS device is at its peak value, comparing the peak value to a desired value when the feedback signal is as its peak, and generating the control signal depending upon whether the peak value is at least equal to a desired value. The modification of the MEMS drive signal based upon the control signal to produce the modified drive signal includes skipping generation of a next pulse of the modified drive signal when the control signal indicates the peak value is at least equal to the desired value.

    NON-VOLATILE MEMORY CELL
    145.
    发明公开

    公开(公告)号:US20230328979A1

    公开(公告)日:2023-10-12

    申请号:US18185575

    申请日:2023-03-17

    CPC classification number: H10B41/70 G11C16/045 G11C16/10 G11C16/14 H10B41/35

    Abstract: A non-volatile memory cell includes a first well of a first conductivity type and a second well of a second conductivity type in a body adjacent to each other; a first conduction region, a second conduction region and a third conduction region in the first well, the first, second and third conduction regions being of the second conductivity type; a control gate region, of the first or second conductivity type, in the second well; a selection gate over the first well forming, together with the first and second conduction regions, a selection transistor; and a floating gate region. The floating gate region has a programming portion overlying the first well and a capacitive portion overlying the second well. The floating gate region forms, together with the second and third conduction regions, a storage transistor and, together with the control gate region, a capacitive element.

    MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION HAVING IMPROVED STRESS RESISTANCE

    公开(公告)号:US20230324674A1

    公开(公告)日:2023-10-12

    申请号:US18131085

    申请日:2023-04-05

    CPC classification number: G02B26/0858 B81B3/007 B81C1/00658 B81B2201/042

    Abstract: A microelectromechanical mirror device has, in a die of semiconductor material: a fixed structure defining a cavity; a tiltable structure carrying a reflecting region, elastically suspended above the cavity and having a main extension in a horizontal plane; at least one first pair of driving arms, carrying respective piezoelectric structures which can be biased to generate a driving force that causes rotation of the tiltable structure about a rotation axis parallel to a first horizontal axis of the horizontal plane; elastic suspension elements, which elastically couple the tiltable structure to the fixed structure at the rotation axis and are rigid to movements out of the horizontal plane and compliant to torsion about the rotation axis. In particular, the driving arms of the first pair are magnetically coupled to the tiltable structure to cause its rotation about the rotation axis by magnetic interaction, following biasing of the respective piezoelectric structures.

    CAPACITOR MEASUREMENT
    148.
    发明公开

    公开(公告)号:US20230324475A1

    公开(公告)日:2023-10-12

    申请号:US18335511

    申请日:2023-06-15

    CPC classification number: G01R31/64 G01R27/2605 G01R31/006

    Abstract: A system and method for measuring a capacitance value of a capacitor are provided. In embodiments, a resistor is coupled to a terminal of the capacitor. A difference in voltage at the terminal between a first time and a second time during a discharge routine of the capacitor is measured. The discharge routine includes sinking a current through a discharge circuit coupled to the resistor from first to second. Integration of a difference in voltage at terminals of the resistor during the discharge routine between the first and second times is also measured. The capacitance value is computed based on the measured difference in voltage, the measured integration, and the resistance value of the resistor. The health of the capacitor is determined based on a difference between the computed capacitance value and a threshold value.

    THERMOGRAPHIC SENSOR WITH THERMO-COUPLES ON A SUSPENDED GRID AND PROCESSING CIRCUITS IN FRAMES THEREOF

    公开(公告)号:US20230324229A1

    公开(公告)日:2023-10-12

    申请号:US18335003

    申请日:2023-06-14

    Abstract: A thermographic sensor is proposed. The thermographic sensor includes a plurality of sensing elements each comprising at least one thermo-couple. The thermographic sensor is integrated on a semiconductor on insulator body that is patterned to define a grid suspended from a substrate; for each sensing element, the grid has a frame with the cold joint of the thermo-couple, a plate with the hot joint of the thermo-couple and one or more arms sustaining the plate from the frame. The frames include one or more conductive layers of thermally conductive material for thermally equalizing the cold joints with the substrate. Moreover, each sensing element may also include a processing circuit for the thermo-couple that is integrated on the corresponding frame. A thermographic device including the thermographic sensor and a corresponding signal processing circuit, and a system including one or more thermographic devices are also proposed.

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