Methods for fabricating and filling conductive vias and conductive vias so formed
    14.
    发明申请
    Methods for fabricating and filling conductive vias and conductive vias so formed 有权
    制造和填充如此形成的导电通孔和导电通孔的方法

    公开(公告)号:US20070184654A1

    公开(公告)日:2007-08-09

    申请号:US11347153

    申请日:2006-02-03

    IPC分类号: H01L21/44

    摘要: Methods for forming conductive vias include forming one or more via holes in a substrate. The via holes may be formed with a single mask, with the protective layers, bond pads, or other features of the substrate acting as hard masks in the event that a photomask is removed during etching processes. The via holes may be configured to facilitate adhesion of a dielectric coating that includes a low-K dielectric material to the surfaces thereof. A barrier layer may be formed over surfaces of each via hole. A base layer, which may comprise a seed material, may be formed to facilitate the subsequent, selective deposition of conductive material over the surfaces of the via hole. The resulting semiconductor devices, intermediate structures, and assemblies and electronic devices that include the semiconductor devices that result from these methods are also disclosed.

    摘要翻译: 用于形成导电通孔的方法包括在衬底中形成一个或多个通孔。 通孔可以用单个掩模形成,在蚀刻过程中去除光掩模的情况下,衬底的保护层,接合焊盘或其他特征用作硬掩模。 通孔可以被配置为便于将包括低K电介质材料的电介质涂层粘附到其表面上。 可以在每个通孔的表面上形成阻挡层。 可以形成可以包括种子材料的基层,以便于导电材料随后的选择性沉积在通孔的表面上。 还公开了包括由这些方法产生的半导体器件的所得半导体器件,中间结构和组件以及电子器件。

    Methods for packaging microelectronic imagers
    15.
    发明申请
    Methods for packaging microelectronic imagers 有权
    包装微电子成像仪的方法

    公开(公告)号:US20060186317A1

    公开(公告)日:2006-08-24

    申请号:US11404831

    申请日:2006-04-17

    IPC分类号: H01L27/00

    摘要: Microelectronic imagers with prefabricated housings and methods of packaging microelectronic imagers are disclosed herein. In one embodiment, a microelectronic imager can include a microelectronic die, an image sensor, and an integrated circuit operatively coupled to the integrated circuit. The microelectronic imager also includes an optic unit having an optic member. The microelectronic imager further includes a prefabricated housing having a first mounting site and a second mounting site. The die is seated within the housing at the first mounting site and the optics unit is seated within the housing at the second mounting site in a fixed, preset position in which the optic member is situated at a desired location relative to the image sensor.

    摘要翻译: 具有预制外壳的微电子成像器和封装微电子成像器的方法在此公开。 在一个实施例中,微电子成像器可以包括微电子管芯,图像传感器和可操作地耦合到集成电路的集成电路。 微电子成像器还包括具有光学构件的光学单元。 微电子成像器还包括具有第一安装位置和第二安装位置的预制外壳。 模具位于第一安装位置的壳体内,并且光学单元在第二安装位置处位于壳体内的固定的预设位置中,光学构件位于相对于图像传感器的期望位置处。