Semiconductor absolute pressure transducer assembly and method
    14.
    发明授权
    Semiconductor absolute pressure transducer assembly and method 失效
    半导体绝对压力传感器组件及方法

    公开(公告)号:US4291293A

    公开(公告)日:1981-09-22

    申请号:US76813

    申请日:1979-09-19

    CPC分类号: G01L9/0042 G01L9/0054

    摘要: A semiconductor pressure transducer assembly comprising a silicon diaphragm assembly and a glass covering member. The silicon diaphragm assembly has a circular diaphragm portion of thin silicon which is formed using etching, and a thick supporting portion therearound. Piezoresistive elements of a piezoresistive bridge circuit and conducting paths for electrically connection thereof are formed on the silicon diaphragm assembly. On a surface of the silicon diaphragm assembly, a passivating layer of silicon dioxide are formed in uniform thickness, and further on a surface of the passivating layer is formed a layer of polysilicon on the supporting portion of the silicon diaphragm assembly. In the passivating layer, a contacting window is formed, through which the polysilicon layer is electrically connected to the silicon diaphragm assembly. The covering member of borosilicate glass having a circular well is mounted and bonded onto the silicon diaphragm assembly in contact with the polysilicon layer using Anodic Bonding method. And the processed silicon diaphragm assembly has a flat surface thereof, on which the piezoresistive elements and the conducting paths are constructed using Ion Implantation method, or reforming a silicon dioxide layer thereon after removing another silicon dioxide layer used as mask in diffusing process.

    摘要翻译: 一种半导体压力传感器组件,包括硅膜组件和玻璃覆盖件。 硅膜组件具有通过蚀刻形成的薄硅的圆形隔膜部分和其周围的厚的支撑部分。 在硅膜组件上形成压阻电桥电路的压阻元件和用于电连接的导电路径。 在硅膜组件的表面上形成均匀厚度的二氧化硅钝化层,并且在钝化层的表面上进一步在硅膜组件的支撑部分上形成多晶硅层。 在钝化层中,形成接触窗,多晶硅层通过该接触窗电连接到硅膜组件。 使用阳极接合方法将具有圆形孔的硼硅酸盐玻璃的覆盖部件安装并接合到与硅多晶硅层接触的硅膜组件上。 并且经处理的硅膜组件具有平坦的表面,在其上使用离子注入方法构建压阻元件和导电路径,或者在去除扩散过程中用作掩模的另一二氧化硅层之后重新形成二氧化硅层。

    Power semiconductor module and motor drive system
    17.
    发明授权
    Power semiconductor module and motor drive system 有权
    功率半导体模块和电机驱动系统

    公开(公告)号:US06313598B1

    公开(公告)日:2001-11-06

    申请号:US09463591

    申请日:2000-01-28

    IPC分类号: H01L2504

    摘要: A power semiconductor module comprising a power semiconductor element included in a power circuit portion and mounted on a metal base, a first resin molded to the power semiconductor element, a control circuit element disposed on the first resin and included at least in a portion of the control circuit, and a control terminal connected to the power circuit portion and having an exposed portion thereof in the surface of the first resin, in which a portion of the control circuit is connected with the power circuit portion at the exposed portion of the control terminal. Accordingly, a resin mold type power semiconductor module capable of realizing a high performance of the control circuit portion at low cost can be realized.

    摘要翻译: 一种功率半导体模块,包括功率电路部分中的功率半导体元件,其安装在金属基底上,模制到功率半导体元件的第一树脂,设置在第一树脂上的控制电路元件,至少包括 控制电路和连接到电源电路部分的控制端子,并且在第一树脂的表面中具有暴露部分,其中控制电路的一部分与控制端子的暴露部分处的电源电路部分连接 。 因此,可以实现能够以低成本实现控制电路部分的高性能的树脂模具型功率半导体模块。