Oxide thin film transistor, array substrate and display device

    公开(公告)号:US10141449B2

    公开(公告)日:2018-11-27

    申请号:US15037610

    申请日:2015-09-15

    摘要: The embodiments of the present invention provides an oxide TFT, an array substrate and a display device, an oxide channel layer of the oxide TFT comprises a front channel oxide layer and a back channel oxide layer, a conduction band bottom of the back channel oxide layer being higher than a conduction band bottom of the front channel oxide layer, and a band gap of the back channel oxide layer being larger than a band gap of the front channel oxide layer. In the oxide TFT, the array substrate and the display device provided in the present invention, it is possible to accumulate a large number of electrons through the potential difference formed between oxide channel layers of a multilayer structure so as to increase the carrier concentration in the oxide channel layers to achieve the purpose of improving TFT mobility without damaging TFT stability.

    Rotated channel semiconductor field effect transistor
    38.
    发明授权
    Rotated channel semiconductor field effect transistor 有权
    旋转通道半导体场效应晶体管

    公开(公告)号:US08927984B2

    公开(公告)日:2015-01-06

    申请号:US13743062

    申请日:2013-01-16

    申请人: RamGoss, Inc.

    摘要: A transistor device, such as a rotated channel metal oxide/insulator field effect transistor (RC-MO(I)SFET), includes a substrate including a non-polar or semi-polar wide band gap substrate material such as an Al2O3 or a ZnO or a Group-III Nitride-based material, and a first structure disposed on a first side of the substrate comprising of AlInGaN-based and/or ZnMgO based semiconducting materials. The first structure further includes an intentional current-conducting sidewall channel or facet whereupon additional semiconductor layers, dielectric layers and electrode layers are disposed and upon which the field effect of the dielectric and electrode layers occurs thus allowing for a high density monolithic integration of a multiplicity of discrete devices on a common substrate thereby enabling a higher power density than in conventional lateral power MOSFET devices.

    摘要翻译: 诸如旋转的沟道金属氧化物/绝缘体场效应晶体管(RC-MO(I)SFET)的晶体管器件包括包括非极性或半极性宽带隙衬底材料如Al 2 O 3或ZnO的衬底 或基于III族氮化物的材料,以及设置在包括AlInGaN基和/或ZnMgO基半导体材料的衬底的第一侧上的第一结构。 第一结构还包括有意导电的侧壁通道或小面,因此设置了附加的半导体层,电介质层和电极层,并且在其上发生电介质层和电极层的场效应,从而允许多密度的高密度单片集成 的公共衬底上的分立器件,从而实现比常规横向功率MOSFET器件更高的功率密度。

    A1InGaP LED having reduced temperature dependence
    39.
    发明授权
    A1InGaP LED having reduced temperature dependence 有权
    AlInGaP LED具有降低的温度依赖性

    公开(公告)号:US07863631B2

    公开(公告)日:2011-01-04

    申请号:US12433106

    申请日:2009-04-30

    摘要: To increase the lattice constant of AlInGaP LED layers to greater than the lattice constant of GaAs for reduced temperature sensitivity, an engineered growth layer is formed over a substrate, where the growth layer has a lattice constant equal to or approximately equal to that of the desired AlInGaP layers. In one embodiment, a graded InGaAs or InGaP layer is grown over a GaAs substrate. The amount of indium is increased during growth of the layer such that the final lattice constant is equal to that of the desired AlInGaP active layer. In another embodiment, a very thin InGaP, InGaAs, or AlInGaP layer is grown on a GaAs substrate, where the InGaP, InGaAs, or AlInGaP layer is strained (compressed). The InGaP, InGaAs, or AlInGaP thin layer is then delaminated from the GaAs and relaxed, causing the lattice constant of the thin layer to increase to the lattice constant of the desired overlying AlInGaP LED layers. The LED layers are then grown over the thin InGaP, InGaAs, or AlInGaP layer.

    摘要翻译: 为了将AlInGaP LED层的晶格常数提高到大于GaAs的晶格常数以降低温度敏感性,在衬底上形成工程化生长层,其中生长层具有等于或近似等于所需的晶格常数的晶格常数 AlInGaP层。 在一个实施例中,在GaAs衬底上生长渐变的InGaAs或InGaP层。 在层的生长期间铟的量增加,使得最终晶格常数等于所需的AlInGaP活性层的量。 在另一实施例中,在GaAs衬底上生长非常薄的InGaP,InGaAs或AlInGaP层,其中InGaP,InGaAs或AlInGaP层被应变(压缩)。 然后,InGaP,InGaAs或AlInGaP薄层从GaAs分层并且弛豫,导致薄层的晶格常数增加到期望的上覆AlInGaP LED层的晶格常数。 然后在薄的InGaP,InGaAs或AlInGaP层上生长LED层。

    Method for selective epitaxial growth of source/drain areas
    40.
    发明授权
    Method for selective epitaxial growth of source/drain areas 有权
    源极/漏极区域选择性外延生长的方法

    公开(公告)号:US07799664B2

    公开(公告)日:2010-09-21

    申请号:US11645149

    申请日:2006-12-22

    IPC分类号: H01L29/225

    摘要: One inventive aspect relates to a method of selective epitaxial growth of source/drain (S/D) areas. The method includes providing a substrate having a first and a second substrate area, the first area including at least one gate stack. The method includes applying a poly-Si or poly-SiGe top layer on the substrate, the top layer being etchable with the same etch chemistry as the substrate. The method includes removing the poly-Si or poly-SiGe top layer from the first area selectively towards the poly-Si or poly-SiGe top layer in the second area. The method includes removing simultaneously the poly-Si or poly-SiGe top layer on the second area and at least a part of the substrate in the S/D areas of the first area selectively to the gate stack. The method includes performing a selective epitaxial growth of S/D areas in the first area.

    摘要翻译: 本发明的一个方面涉及源极/漏极(S / D)区域的选择性外延生长的方法。 该方法包括提供具有第一和第二衬底区域的衬底,第一区域包括至少一个栅极叠层。 该方法包括在衬底上施加多晶硅或多晶硅顶层,顶层可用与衬底相同的蚀刻化学性进行蚀刻。 该方法包括从第一区域中选择性地朝向第二区域中的多晶硅或多晶硅顶层移除多晶硅或多晶硅顶层。 该方法包括同时去除第二区域上的多晶硅或多晶硅顶层,以及在第一区域的S / D区域中的至少一部分衬底选择性地去除栅叠层。 该方法包括在第一区域中执行S / D区域的选择性外延生长。