公开(公告)号：US09659734B2

公开(公告)日：2017-05-23

申请号：US14613459

申请日：2015-02-04

Applicant: ELWHA LLC

Inventor： William David Duncan ,  Roderick A. Hyde ,  Jordin T. Kare ,  Max N. Mankin ,  Tony S. Pan ,  Lowell L. Wood, Jr.

IPC: H01J1/48 ,  H01J3/02

CPC classification number: H01J1/48 ,  H01J3/021 ,  H01J2203/0232 ,  Y10T29/49204

Abstract: A vacuum electronic device includes a multi-layer graphene grid that includes at least two layers of graphene, where the transmission of electrons through the multi-layer graphene grid can be tuned by varying the parameters of the vacuum electronic device such as the number of graphene layers, relative positions of the electrodes, voltage biases applied to the electrodes, and other device parameters.

公开(公告)号：US09502202B2

公开(公告)日：2016-11-22

申请号：US13338925

申请日：2011-12-28

Applicant: Moe J. Arman ,  Charles Chase

Inventor： Moe J. Arman ,  Charles Chase

IPC: H01J3/02 ,  G21K1/08

CPC classification number: H01J3/02 ,  G21K1/08

Abstract: Systems and methods for generating a coherent matterwave beam are provided. In some aspects, a system includes a plurality of beam generating units. Each of the plurality of beam generating units is configured to generate a stream of charged particles. The system also includes a magnetic field generator configured to expose the plurality of streams to a magnetic field such that (i) the charged particles of the plurality of streams undergo phase synchronization with one another in response to a vector potential associated with the magnetic field and (ii) the plurality of streams is directed along one or more channels to combine with one another and produce a coherent matterwave beam.

Abstract translation: 提供了用于产生一致的物质波束的系统和方法。 在一些方面，系统包括多个光束产生单元。 多个光束产生单元中的每一个被配置为产生带电粒子流。 该系统还包括磁场发生器，其被配置为将多个流暴露于磁场，使得（i）响应于与磁场相关联的向量电位，多个流中的带电粒子彼此相位同步，以及 （ii）多个流沿着一个或多个通道引导以彼此结合并产生一个相干物质波束。

公开(公告)号：US09455112B2

公开(公告)日：2016-09-27

申请号：US14578525

申请日：2014-12-22

Applicant: MAPPER LITHOGRAPHY IP B.V

Inventor： Laura Dinu-Gürtler ,  Eric Petrus Hogervorst

IPC: H01J29/04 ,  H01J1/15 ,  G03F7/20 ,  H01J37/075 ,  H01J37/317 ,  H01J1/28 ,  H01J3/02

CPC classification number: H01J37/3174 ,  G03F7/70058 ,  H01J1/15 ,  H01J1/28 ,  H01J3/027 ,  H01J3/029 ,  H01J37/075 ,  H01J37/3177 ,  H01J2229/481 ,  H01J2237/061

Abstract: The invention relates to a cathode arrangement comprising: a thermionic cathode comprising an emission portion provided with an emission surface for emitting electrons, and a reservoir for holding a material, wherein the material, when heated, releases work function lowering particles that diffuse towards the emission portion and emanate at the emission surface at a first evaporation rate; a focusing electrode comprising a focusing surface for focusing the electrons emitted from the emission surface of the cathode; and an adjustable heat source configured for keeping the focusing surface at a temperature at which accumulation of work function lowering particles on the focusing surface is prevented.

公开(公告)号：US09443692B2

公开(公告)日：2016-09-13

申请号：US14803964

申请日：2015-07-20

Applicant: FEI Company

Inventor： Mostafa Maazouz

IPC: H01J3/14 ,  H01J37/07 ,  H01J37/21 ,  H01J37/10 ,  H01J37/04 ,  H01J37/305 ,  H01J3/02 ,  H01J37/06 ,  H01J37/147 ,  H01J37/248

CPC classification number: H01J37/07 ,  H01J3/026 ,  H01J37/04 ,  H01J37/06 ,  H01J37/10 ,  H01J37/1477 ,  H01J37/21 ,  H01J37/248 ,  H01J37/3056 ,  H01J37/3178 ,  H01J2237/0473 ,  H01J2237/04735 ,  H01J2237/04756 ,  H01J2237/1518 ,  H01J2237/1534 ,  H01J2237/28 ,  H01J2237/31749

Abstract: The invention provides a charged particle beam system wherein the middle section of the focused ion beam column is biased to a high negative voltage allowing the beam to move at higher potential than the final beam energy inside that section of the column. At low kV potential, the aberrations and coulomb interactions are reduced, which results in significant improvements in spot size.

公开(公告)号：US09184016B2

公开(公告)日：2015-11-10

申请号：US13868242

申请日：2013-04-23

Applicant: Tsinghua University ,  HON HAI PRECISION INDUSTRY CO., LTD.

Inventor： Peng Liu ,  Chun-Hai Zhang ,  Duan-Liang Zhou ,  Bing-Chu Du ,  Cai-Lin Guo ,  Pi-Jin Chen ,  Shou-Shan Fan

IPC: H01J1/304 ,  H01J3/02 ,  H01J31/12

CPC classification number: H01J1/304 ,  H01J3/021 ,  H01J31/127 ,  H01J2203/0236

Abstract: A field emission cathode device includes a cathode electrode. An electron emitter is electrically connected to the cathode electrode, wherein the electron emitter includes a number of sub-electron emitters. An electron extracting electrode is spaced from the cathode electrode by a dielectric layer, wherein the electron extracting electrode defines a through-hole. The distances between an end of each of the sub-electron emitters away from the cathode electrode and a sidewall of the through-hole are substantially equal.

Abstract translation: 场发射阴极器件包括阴极电极。 电子发射体与阴极电连接，其中电子发射体包括多个亚电子发射体。 电子提取电极通过电介质层与阴极隔开，其中电子提取电极限定通孔。 离开阴极电极的每个子电子发射体的端部与通孔的侧壁之间的距离基本相等。

公开(公告)号：US09024544B2

公开(公告)日：2015-05-05

申请号：US13509537

申请日：2010-11-10

Applicant: Masayoshi Nagao ,  Tomoya Yoshida ,  Yoichiro Neo

Inventor： Masayoshi Nagao ,  Tomoya Yoshida ,  Yoichiro Neo

IPC: H01J3/02 ,  H01J31/12

CPC classification number: H01J3/022 ,  H01J31/127 ,  H01J2203/0208 ,  H01J2203/0228 ,  H01J2329/4604 ,  H01J2329/4626

Abstract: In a field emission device, the fundamental cause of spherical aberration in an emitted electron beam trajectory is eliminated or mitigated. An aberration suppressor electrode 31 is provided at a lower vertical position than an extraction gate electrode 13 so its opening inner peripheral edge 31e faces a position near an emitter tip 11tp. The vertical position of the opening inner peripheral edge 31e of the aberration suppressor electrode 31 is made lower than the vertical position of the emitter tip 11tp. An aberration suppressing voltage Vsp is applied to the aberration suppressor electrode 31 that is a lower voltage than the potential of the emitter 11 and controls equipotential lines near the emitter tip 11tp to make them parallel.

Abstract translation: 在场发射器件中，消除或减轻发射的电子束轨迹中球面像差的根本原因。 在比提取栅电极13低的垂直位置处设置像差抑制电极31，使得其开口内周边缘31e面向发射极尖端11tp附近的位置。 使像差抑制电极31的开口内周缘31e的垂直位置比发射极尖端11tp的垂直位置低。 像差抑制电压Vsp被施加到比发射极11的电位低的电压的像差抑制电极31，并且控制发射极尖端11tp附近的等电位线使其平行。

公开(公告)号：US09018596B2

公开(公告)日：2015-04-28

申请号：US14366564

申请日：2012-12-19

Applicant: Universiteit Antwerpen

Inventor： Johan Verbeeck ,  Gustaaf Van Tendeloo

IPC: H01J37/04 ,  H01J37/26 ,  H01J3/02 ,  H01J37/06 ,  H01J37/08 ,  H01J37/256

CPC classification number: H01J37/04 ,  H01J3/02 ,  H01J3/021 ,  H01J37/06 ,  H01J37/08 ,  H01J37/256 ,  H01J37/261 ,  H01J2237/06383 ,  H01J2237/2614

Abstract: A device for imparting an orbital angular momentum to a charged particle wave propagating along a beam axis in a charged particle beam generating apparatus is described. The device comprises a support element having a target region adapted for transmitting a charged particle wave propagating along a beam axis and an induction means for inducing a magnetic flux along an elongated profile having a free end portion located in the target region and the induction means is adapted for providing a magnetic flux in the elongated profile in order to induce an angular gradient, relative to the beam axis, of the phase of the charged particle wave when transmitted through the target region. A corresponding method is also disclosed, as well as the use thereof in electron microscopy.

Abstract translation: 描述了一种用于对带电粒子束产生装置中沿着光束轴传播的带电粒子波进行轨道角动量的装置。 该装置包括支撑元件，该支撑元件具有适于传输沿着光束轴传播的带电粒子波的目标区域和用于沿着具有位于目标区域中的自由端部分的细长轮廓感应磁通量的感应装置，并且感应装置是 适于在细长轮廓中提供磁通量，以便当透射通过目标区域时引起带电粒子波相位相对于光束轴的角度梯度。 还公开了相应的方法，以及其在电子显微镜中的应用。

公开(公告)号：US08803411B2

公开(公告)日：2014-08-12

申请号：US13812700

申请日：2011-06-15

Applicant: Shunichi Watanabe ,  Takashi Onishi ,  Minoru Kaneda ,  Hisaya Murakoshi

Inventor： Shunichi Watanabe ,  Takashi Onishi ,  Minoru Kaneda ,  Hisaya Murakoshi

IPC: H01J29/84 ,  H01J29/48 ,  H01J3/40 ,  H01J3/02 ,  H01J37/02

CPC classification number: H01J29/484 ,  H01J3/02 ,  H01J3/027 ,  H01J3/40 ,  H01J29/488 ,  H01J37/026 ,  H01J37/073 ,  H01J37/248 ,  H01J2237/038 ,  H01J2237/06341 ,  H01J2237/0802

Abstract: In an accelerating tube which uses a conductive insulator, there is a possibility that the dopant concentration on a surface of the conductive insulator becomes non-uniform so that the surface resistance of the conductive insulator becomes non-uniform. Accordingly, a circumferential groove is formed on the inner surface of the conductive insulator accelerating tube in plural stages, and metal is metalized along inner portions of the grooves. When the resistance of a specific portion on the surface of the accelerating tube differs from the resistance of an area around the specific portion, the potential of the metalized region on the inner surface of the accelerating tube becomes a fixed value and hence, the potential distribution on the inner surface of the accelerating tube in the vertical direction can be maintained substantially equal without regard to the circumferential direction.

Abstract translation: 在使用导电绝缘体的加速管中，导电绝缘体的表面上的掺杂剂浓度有可能变得不均匀，使得导电绝缘体的表面电阻变得不均匀。 因此，在导电绝缘体加速管的内表面上形成有多个周向槽，并且金属沿着槽的内部被金属化。 当加速管表面上的特定部分的电阻与特定部分周围的区域的电阻不同时，加速管内表面上的金属化区域的电位变为固定值，因此电位分布 在加速管的内表面上，在垂直方向上可以保持基本上相等于圆周方向。

公开(公告)号：US20080111464A1

公开(公告)日：2008-05-15

申请号：US11798612

申请日：2007-05-15

Applicant: Deuk-seok Chung ,  Yong-chul Kim ,  Yong-wan Jin ,  Sun-il Kim ,  Ho-suk Kang ,  Chan-wook Baik

Inventor： Deuk-seok Chung ,  Yong-chul Kim ,  Yong-wan Jin ,  Sun-il Kim ,  Ho-suk Kang ,  Chan-wook Baik

IPC: H01J3/02 ,  H01J9/00

CPC classification number: H01J29/04 ,  H01J31/127 ,  H01J2201/30469

Abstract: A field emission device and its method of manufacture includes: a substrate; a plurality of cathode electrodes formed on the substrate and having slot shaped cathode holes to expose the substrate; emitters formed on the substrate exposed through each of the cathode holes and separated from both side surfaces of the cathode holes, the emitters being formed along a lengthwise direction of the cathode holes; an insulating layer formed on the substrate to cover the cathode electrodes and having insulating layer holes communicating with the cathode holes; and a plurality of gate electrodes formed on the insulating layer and having gate holes communicating with the insulating layer holes.

Abstract translation: 场致发射器件及其制造方法包括：衬底; 多个阴极电极，形成在基板上，并具有用于露出基板的狭槽形阴极孔; 所述发光体形成在所述基板上，通过所述阴极孔露出并从所述阴极孔的两侧面分离，所述发射体沿着所述阴极孔的长度方向形成; 绝缘层，形成在所述基板上以覆盖所述阴极并具有与所述阴极孔连通的绝缘层孔; 以及形成在绝缘层上并具有与绝缘层孔连通的栅极孔的多个栅电极。

公开(公告)号：US06976897B2

公开(公告)日：2005-12-20

申请号：US10658526

申请日：2003-09-10

Applicant: Won-bong Choi ,  Min-jae Yun ,  Yong-wan Jin

Inventor： Won-bong Choi ,  Min-jae Yun ,  Yong-wan Jin

IPC: H01J9/24 ,  H01J1/304 ,  H01J3/02 ,  H01J5/03 ,  H01J9/02 ,  H01J29/04 ,  H01J29/87 ,  H01J31/12 ,  H01J9/20 ,  H01J1/02

CPC classification number: B82Y10/00 ,  H01J3/022 ,  H01J9/025 ,  H01J2201/30469 ,  H01J2329/00 ,  Y10S977/952

Abstract: A field emission array adopting carbon nanotubes as an electron emitter source, wherein the array includes a rear substrate assembly including cathodes formed as stripes over a rear substrate and carbon nanotubes; a front substrate assembly including anodes formed as stripes over a front substrate with phosphors being deposited on the anodes, a plurality of openings separated by a distance corresponding to the distance between the anodes in a nonconductive plate, and gates formed as stripes perpendicular to the stripes of anodes on the nonconductive plate with a plurality of emitter openings corresponding to the plurality of openings. The nonconductive plate is supported and separated from the front substrate using spacers. The rear substrate assembly is combined with the front substrate assembly such that the carbon nanotubes on the cathodes project through the emitter openings.

Abstract translation: 一种采用碳纳米管作为电子发射源的场致发射阵列，其中阵列包括后衬底组件，其包括在后衬底上形成为条纹的阴极和碳纳米管; 前面基板组件，其包括在正面基板上形成的带状荧光体的阳极，该荧光体沉积在阳极上，多个开口被分隔开与非导电板中的阳极之间的距离相对应的开口，以及形成为垂直于条纹的条纹的栅极 阳极在非导电板上具有对应于多个开口的多个发射器开口。 非导电板使用间隔件从前基板支撑和分离。 后基板组件与前基板组件结合，使得阴极上的碳纳米管突出通过发射器开口。