SENSING CHIP PACKAGE AND A MANUFACTURING METHOD THEREOF
    43.
    发明申请
    SENSING CHIP PACKAGE AND A MANUFACTURING METHOD THEREOF 有权
    感应芯片包装及其制造方法

    公开(公告)号:US20170040372A1

    公开(公告)日:2017-02-09

    申请号:US15226327

    申请日:2016-08-02

    Applicant: XINTEC INC.

    Abstract: This present invention provides a method of manufacturing a chip scale sensing chip package, comprising the steps of: providing a sensing device wafer having a first top surface and a first bottom surface opposite to each other, whereby the sensing device wafer comprises a plurality of chip areas, and each of the chip areas comprising a sensing device and a plurality of conductive pads adjacent to the sensing chip nearby the first top surface; providing a cap wafer having a second top surface and a second bottom surface opposite to each other, and bonding the second surface of the cap wafer to the first top surface of the sensing device wafer by sandwiching a first adhesive layer therebetween; providing a temporary carrier substrate, and bonding the temporary carrier substrate to the second top surface of the cap wafer by sandwiching a second adhesive layer therebetween; forming a wiring layer connecting to each of the conductive pads on the first bottom surface of the sensing device wafer; providing a first protective layer on the wiring layer; removing the temporary carrier substrate and the second adhesive layer; forming a second protective layer on the second top surface; removing the first protective layer; scribing the chip areas to generate a plurality of individual chip scale sensing chip package; and removing the second protective layer.

    Abstract translation: 本发明提供了一种制造芯片级感测芯片封装的方法,包括以下步骤:提供具有彼此相对的第一顶表面和第一底表面的感测装置晶片,由此感测装置晶片包括多个芯片 区域,并且每个芯片区域包括感测装置和与第一顶表面附近的感测芯片相邻的多个导电焊盘; 提供具有彼此相对的第二顶表面和第二底表面的盖晶片,并且通过在其间夹住第一粘合剂层将盖晶片的第二表面粘合到感测装置晶片的第一顶表面; 提供临时载体基板,并且通过在其间夹着第二粘合剂层将临时载体基板结合到盖晶片的第二顶表面; 形成连接到感测装置晶片的第一底表面上的每个导电焊盘的布线层; 在所述布线层上提供第一保护层; 去除所述临时载体基板和所述第二粘合剂层; 在所述第二顶表面上形成第二保护层; 去除第一保护层; 划片芯片区域以产生多个单独的芯片级感测芯片封装; 并移除第二保护层。

    CHIP PACKAGE AND METHOD THEREOF
    45.
    发明申请
    CHIP PACKAGE AND METHOD THEREOF 有权
    芯片包装及其方法

    公开(公告)号:US20160039662A1

    公开(公告)日:2016-02-11

    申请号:US14747507

    申请日:2015-06-23

    Applicant: XINTEC INC.

    Abstract: A chip package includes a semiconductor chip, an interposer, a polymer adhesive supporting layer, a redistribution layer and a packaging layer. The semiconductor chip has a sensor device and a conductive pad electrically connected to the sensing device, and the interposer is disposed on the semiconductor chip. The interposer has a trench and a through hole, which the trench exposes a portion of the sensing device, and the through hole exposes the conductive pad. The polymer adhesive supporting layer is interposed between the semiconductor chip and the interposer, and the redistribution layer is disposed on the interposer and in the through hole to be electrically connected to the conductive pad. The packaging layer covers the interposer and the redistribution layer, which the packaging layer has an opening exposing the trench.

    Abstract translation: 芯片封装包括半导体芯片,插入件,聚合物粘合剂支撑层,再分布层和包装层。 半导体芯片具有传感器装置和与感测装置电连接的导电焊盘,并且插入器设置在半导体芯片上。 插入器具有沟槽和通孔,沟槽暴露感测装置的一部分,并且通孔暴露导电垫。 聚合物粘合剂支撑层插入在半导体芯片和插入件之间,并且再分配层设置在插入件上和通孔中以与导电焊盘电连接。 包装层覆盖插入件和再分配层,其中封装层具有露出沟槽的开口。

    MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
    46.
    发明申请
    MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE 有权
    半导体结构的制造方法

    公开(公告)号:US20150340403A1

    公开(公告)日:2015-11-26

    申请号:US14703796

    申请日:2015-05-04

    Applicant: XINTEC INC.

    Abstract: A manufacturing method of a semiconductor structure includes the following steps. A temporary bonding layer is used to adhere a carrier to a first surface of a wafer. A second surface of the wafer is adhered to an ultraviolet tape on a frame, and the temporary bonding layer and the carrier are removed. A protection tape is adhered to the first surface of the wafer. An ultraviolet light is used to irradiate the ultraviolet tape. A dicing tape is adhered to the protection tape and the frame, and the ultraviolet tape is removed. A first cutter is used to dice the wafer from the second surface of the wafer, such that plural chips and plural gaps between the chips are formed. A second cutter with a width smaller than the width of the first cutter is used to cut the protection tape along the gaps.

    Abstract translation: 半导体结构的制造方法包括以下步骤。 临时粘合层用于将载体粘附到晶片的第一表面。 将晶片的第二表面粘附到框架上的紫外线带上,并且移除临时粘合层和载体。 保护带粘附到晶片的第一表面。 使用紫外线照射紫外线带。 切割胶带粘附到保护带和框架上,并且除去紫外线带。 使用第一切割器从晶片的第二表面切割晶片,从而形成芯片之间的多个芯片和多个间隙。 使用宽度小于第一切割器的宽度的第二切割器沿着间隙切割保护带。

Patent Agency Ranking