Semiconductor chip with protective scribe structure
    6.
    发明授权
    Semiconductor chip with protective scribe structure 有权
    具有保护划片结构的半导体芯片

    公开(公告)号:US08293581B2

    公开(公告)日:2012-10-23

    申请号:US12388064

    申请日:2009-02-18

    申请人: Michael Z. Su Lei Fu

    发明人: Michael Z. Su Lei Fu

    IPC分类号: H01L21/00 H01L23/544

    摘要: Apparatus and methods pertaining to die scribe structures are disclosed. In one aspect, a method of manufacturing is provided that includes fabricating an active region of a semiconductor die so that the active region has at least one corner. A scribe structure is fabricated around the active region so that the scribe structure includes at least one fillet.

    摘要翻译: 公开了与模切结构相关的装置和方法。 一方面,提供一种制造方法,其包括制造半导体管芯的有源区,使得有源区具有至少一个拐角。 围绕活动区域制造划线结构,使得划线结构包括至少一个圆角。