Multi-direction design for bump pad structures
    2.
    发明授权
    Multi-direction design for bump pad structures 有权
    凸块结构的多方向设计

    公开(公告)号:US08546941B2

    公开(公告)日:2013-10-01

    申请号:US12700004

    申请日:2010-02-04

    IPC分类号: H01L23/48

    摘要: An integrated circuit structure includes a semiconductor chip having a first region and a second region; a dielectric layer formed on the first region and the second region of the semiconductor chip; a first elongated under-bump metallization (UBM) connector formed in the dielectric layer and on the first region of the semiconductor chip and having a first longer axis extending in a first direction; and a second elongated UBM connector formed in the dielectric layer on the second region of the semiconductor chip and having a second longer axis extending in a second direction. The first direction is different from the second direction.

    摘要翻译: 集成电路结构包括具有第一区域和第二区域的半导体芯片; 形成在半导体芯片的第一区域和第二区域上的电介质层; 形成在所述电介质层中且在所述半导体芯片的所述第一区域上并且具有沿第一方向延伸的第一长轴的第一细长凹凸金属化(UBM)连接器; 以及形成在所述半导体芯片的所述第二区域上的所述电介质层中并具有在第二方向上延伸的第二长轴的第二细长UBM连接器。 第一个方向与第二个方向不同。

    Multi-Direction Design for Bump Pad Structures
    4.
    发明申请
    Multi-Direction Design for Bump Pad Structures 有权
    凸块结构的多方向设计

    公开(公告)号:US20110186988A1

    公开(公告)日:2011-08-04

    申请号:US12700004

    申请日:2010-02-04

    IPC分类号: H01L23/485 H01L23/498

    摘要: An integrated circuit structure includes a semiconductor chip having a first region and a second region; a dielectric layer formed on the first region and the second region of the semiconductor chip; a first elongated under-bump metallization (UBM) connector formed in the dielectric layer and on the first region of the semiconductor chip and having a first longer axis extending in a first direction; and a second elongated UBM connector formed in the dielectric layer on the second region of the semiconductor chip and having a second longer axis extending in a second direction. The first direction is different from the second direction.

    摘要翻译: 集成电路结构包括具有第一区域和第二区域的半导体芯片; 形成在半导体芯片的第一区域和第二区域上的电介质层; 形成在所述电介质层中且在所述半导体芯片的所述第一区域上并且具有沿第一方向延伸的第一长轴的第一细长凹凸金属化(UBM)连接器; 以及第二细长UBM连接器,其形成在所述半导体芯片的所述第二区域上的所述电介质层中,并且具有沿第二方向延伸的第二长轴。 第一个方向与第二个方向不同。

    Method of forming through silicon via with dummy structure
    9.
    发明授权
    Method of forming through silicon via with dummy structure 有权
    通过具有虚拟结构的硅通孔形成方法

    公开(公告)号:US08202800B2

    公开(公告)日:2012-06-19

    申请号:US13112347

    申请日:2011-05-20

    IPC分类号: H01L21/44

    摘要: A method of forming a through silicon via (TSV) structure includes forming an interconnect pad over a substrate. An under layer is formed over the interconnect pad. A vertical conductive post is formed at least partially through the substrate. At least one dummy structure is formed at least partially through the under layer. A top pad is formed over the dummy structure and the vertical conductive post. The top pad covers a wider area than a cross section of the vertical conductive post. The interconnect pad is electrically connected to the top pad. The dummy structure connects the top pad and the under layer thereby fastening the top pad and the interconnect pad.

    摘要翻译: 形成贯穿硅通孔(TSV)结构的方法包括在衬底上形成互连焊盘。 在互连焊盘上形成下层。 至少部分地穿过衬底形成垂直导电柱。 至少部分地通过底层形成至少一个虚拟结构。 顶部衬垫形成在虚拟结构和垂直导电柱上。 顶部焊盘覆盖比垂直导电柱的横截面更宽的区域。 互连焊盘电连接到顶部焊盘。 虚拟结构连接顶部焊盘和下层,从而紧固顶部焊盘和互连焊盘。